CN214442035U - Target ring piece correcting device - Google Patents
Target ring piece correcting device Download PDFInfo
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- CN214442035U CN214442035U CN202120118052.4U CN202120118052U CN214442035U CN 214442035 U CN214442035 U CN 214442035U CN 202120118052 U CN202120118052 U CN 202120118052U CN 214442035 U CN214442035 U CN 214442035U
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Abstract
The utility model provides a target ring piece correcting device, which comprises a correcting base, a correcting clamp and a pressing assembly, wherein the correcting clamp is vertically arranged on the correcting base; the target ring piece to be corrected is fixed on one side surface of the correction clamp through a first fixing assembly, the central axes of the target ring piece and the correction clamp are overlapped, and a bulge is arranged on the outer wall of the target ring piece; the pressing assembly is located on the outer side of the target ring piece and is in contact with the protrusions on the target ring piece, and one end of the pressing assembly is connected with the correcting clamp. The utility model can quickly correct different positions in the deformed target ring piece through the structural design of the correcting device, especially the arrangement of the fixed component, thereby avoiding the problems of difficult installation and abnormal use during recycling, facilitating the recycling of the target ring piece and having good correcting effect; the device has a simple structure, is convenient to assemble, is suitable for correcting different types of target ring pieces, and can effectively reduce the preparation cost of semiconductor products.
Description
Technical Field
The utility model belongs to the technical field of the semiconductor, a target ring piece correcting unit is related to.
Background
In the production of semiconductor chips, ring members are commonly used in target sputtering, in which the ring members also participate in sputtering. After the ring piece is installed on a sputtering machine, a magnetic field is generated around the ring piece through the current electrifying action, particles sputtered from the target material can be uniformly attached to the wafer through the magnetic field, and when the ring piece is installed on the machine, other areas are not suitable to be in contact with the machine when the opening position is electrified, otherwise, electric leakage is easy to occur.
In the use process of the target ring, due to the fact that the temperature of a cavity is high, the ring is prone to deformation, subsequent installation is difficult, abnormal conduction of the deformed ring is prone to occurring due to the fact that the deformed ring touches a metal fitting of equipment, and the equipment cannot normally run, therefore, the deformed ring needs to be corrected and repaired, and recycling is facilitated.
CN 110849248A discloses a ring angle detection tool, which comprises a detection sleeve with an inner ring surface; the ring angle detection device is characterized in that a plurality of axial grooves are radially arranged on the inner ring surface, the axial grooves are matched with the lugs arranged on the ring to be detected, the axial grooves are used for detecting the lug angles on the ring to be detected, the lugs of the ring to be detected can be directly placed into the axial grooves, the ring angle detection can be realized by one person, the detection device is simple in structure and easy to process, but the device mainly detects the matching of the lug angles on the ring without involving the correction and repair of the deformed ring, and the device and the ring are in different application directions.
CN 108396297a discloses a ring of a sputtering machine, which includes a ring body, the ring body has a first end and a second end forming a ring port, wherein the first end is provided with a first conductive protrusion, one end of the first conductive protrusion connected with the first end is a first inner end, and the circumferential size of the tail end of the first conductive protrusion is smaller than the circumferential size of the first inner end; a second conductive bulge is arranged on the second end part, one end of the second conductive bulge, which is connected with the second end part, is a second inner end, and the circumferential size of the tail end of the second conductive bulge is smaller than that of the second inner end; the distance between the tail end of the conductive protrusion and a machine table is increased, so that the probability that the conductive protrusion contacts the machine table is reduced, but the repair of the deformed ring is not involved, and the conductive protrusion and the machine table belong to different improvement modes and directions.
In summary, for the target ring piece deformed in the using process, a proper correction device needs to be selected to repair the ring piece, so that the target ring piece is convenient to recycle, and the product cost is reduced.
SUMMERY OF THE UTILITY MODEL
Problem to prior art existence, the utility model aims to provide a target ring correcting unit, through correcting unit's structural design, can carry out the quick correction to the deformation position of difference in the target ring to can the effective control degree of rectifying, the target ring of being convenient for recycles, relative reduction in production cost.
To achieve the purpose, the utility model adopts the following technical proposal:
the utility model provides a target ring piece correcting device, which comprises a correcting base, a correcting clamp and a pressing assembly, wherein the correcting clamp is vertically arranged on the correcting base; the target ring piece to be corrected is fixed on one side surface of the correction clamp through a first fixing assembly, the central axes of the target ring piece and the correction clamp are overlapped, and a bulge is arranged on the outer wall of the target ring piece; the pressing assembly is located on the outer side of the target ring piece and is in contact with the protrusions on the target ring piece, and one end of the pressing assembly is connected with the correcting clamp.
In the utility model, the correcting unit of target ring spare is mainly designed for the structure of target ring spare, in order to facilitate the correction of target ring spare, need vertically place the ring spare, therefore in the design of correcting unit, the major structure is the correction anchor clamps, through the setting of first fixed subassembly with the target ring spare vertically fixed, still can rotate, carry out pressurization correction through the subassembly of exerting pressure to the deformation region of ring spare, and the protruding existence on the target ring spare has both helped the subassembly of exerting pressure to the correction of target ring spare, also can avoid rectifying excessive problem; by adopting the device, the deformed ring piece can be quickly corrected and repaired, the problems of difficult installation and abnormal use caused by recycling are avoided, the target ring piece can be reused for many times, and the preparation cost of semiconductor products is reduced.
Following conduct the utility model discloses preferred technical scheme, nevertheless do not conduct the utility model provides a technical scheme's restriction, through following technical scheme, can reach and realize better the utility model discloses a technical purpose and beneficial effect.
In a preferred embodiment of the present invention, the longitudinal section of the correction jig has a segmental shape, and the segmental shape has a central angle of 270 to 320 degrees, for example, 270 degrees, 280 degrees, 290 degrees, 300 degrees, 310 degrees, or 320 degrees, but the present invention is not limited to the above-mentioned numerical values, and other numerical values not listed in the numerical value range are also applicable.
As the utility model discloses preferred technical scheme, the circle that rectifies anchor clamps lacks shape cross-section part and sets up the boss, and the sunk part phase-match that sets up on the correction base will rectify anchor clamps and the relative position of correction base is fixed.
The utility model discloses in, the fixed needs of proofreading and correct anchor clamps use the correction base as the basis, and consequently the bottom surface design of proofreading and correct anchor clamps is the plane shape, convenient and proofreading and correct the contact of base, the part of proofreading and correct anchor clamps bottom surface still can set up the boss, makes it can form the joint with the correction base, plays the fixed action, perhaps directly adopts modes such as welded fastening, threaded connection, avoids proofreading and correct the unstable problem of anchor clamps.
As a preferred technical solution of the present invention, the first fixing member is composed of a flat surface and two longitudinal branches; the two longitudinal branches of the first fixing assembly are respectively positioned on the inner side and the outer side of the target ring piece, one end of each longitudinal branch is connected with the correction clamp, the other end of each longitudinal branch is fixedly connected with the flat plate surface, and the longitudinal branches are perpendicular to the correction clamp and the flat plate surface.
The utility model discloses in, first fixed subassembly is based on the thinner structure of target ring thickness, adopts two vertical branches to be located the inside and outside structure of target ring respectively and gets off the rigidity of target ring, rectifies the position that is connected with two vertical branch contacts on the anchor clamps and is equipped with the recess, plays the fixed action, avoids the problem that first fixed subassembly drops easily.
As a preferred embodiment of the present invention, the number of the first fixing assemblies is at least 4, for example, 4, 5, 6 or 7, and 1 first fixing assembly is respectively disposed near two sides of the port of the target ring.
To normal closed ring, generally 3 fixed subassemblies evenly set up and just can play the fixed action, and the utility model provides a be equipped with the port on the target ring spare, but also need rectify, for avoiding causing great deformation, the port both sides all need set up fixed subassembly and fix to one of them is as the whole one of evenly arranging the component of establishing, consequently need set up 4 at least.
As a preferred technical solution of the present invention, the protrusions of the target ring are annular hollow, the number of the protrusions is at least 4, for example, 4, 5, 6, or 7, and the like, and 1 protrusion is respectively disposed near each of the two sides of the port of the target ring.
In a similar way, the utility model discloses in, bellied mode of setting is similar with first fixed subassembly on the target ring spare, and the subassembly of exerting pressure is rectified through acting on the arch, therefore the arch also need evenly arrange, and the port both sides all need set up 1.
As the utility model discloses preferred technical scheme, the link of the subassembly of exerting pressure and correction anchor clamps comprises the cylindrical pillar that sets up on the correction anchor clamps and the hole that sets up on the subassembly of exerting pressure, the cylindrical pillar is located the outside of target ring spare, the subassembly cover of exerting pressure is located on the cylindrical pillar to the cylindrical pillar is the rotation of axle.
The utility model discloses in, for the convenience the subassembly of exerting pressure to rectify, need fix its one end, nevertheless do not influence the rotation of the subassembly of exerting pressure, consequently set up cylindrical pillar in the outside of the surperficial target ring piece of correction anchor clamps, set up the hole on the subassembly of exerting pressure.
As the utility model discloses preferred technical scheme, still install the buffering subassembly in the arch of target ring spare, when exerting pressure the subassembly and cushion subassembly direct contact, rotatory target ring spare is exerted pressure the correction to the arch of the different positions of target ring spare respectively.
In the utility model, in order to protect the bulge on the target ring piece and avoid the damage caused by overlarge stress, the buffer component is arranged on the bulge and is matched with the annular hollow structure, and the contact surface of the buffer component and the pressure application component can be arranged into an arc shape to play a buffer role; after the target ring piece is fixed on the correcting clamp, the target ring piece cannot move in the vertical direction but can rotate, so that different positions of the target ring piece can be corrected conveniently, other large deformation cannot be caused, and the operation is convenient.
As the utility model discloses preferred technical scheme, correcting unit still includes the fixed subassembly of second, the fixed subassembly of second is including setting up two cylindrical archs on correcting the anchor clamps, and two cylindrical archs are located the same diametric (al) direction of target ring spare, are located the inboard and the outside of target ring spare respectively to contact with the inner wall and the outer wall of target ring spare.
The utility model discloses in, the effect that sets up the fixed subassembly of second lies in can further fixing the ring piece in the alignment process, can not cause the other position of ring piece to take place to warp when proofreading.
As the preferred technical scheme of the utility model, correcting unit still includes the correction template, be equipped with the circular slot on the correction template, the size of circular slot is the same with the size of the target ring spare that does not warp.
The utility model discloses in, the back is rectified to the target ring spare, and the correction effect often is difficult to direct accurate observation, for making clear of its correction effect, sets up the correction template in addition, wherein is equipped with the circular slot, and the size of circular slot is the same with the size of the target ring spare that does not warp to whether the accurate target ring spare of judging after rectifying reaches the requirement of normal use.
Compared with the prior art, the utility model discloses following beneficial effect has:
(1) the utility model has the advantages that through the structural design of the correcting device, especially the arrangement of the fixing component on the correcting clamp, different positions in the deformed target ring piece can be quickly corrected, the problems of difficult installation and abnormal use caused by recycling are avoided, the target ring piece is convenient to recycle, the correcting effect is good, and the roundness of the corrected target ring piece is reduced to be less than 0.2 mm;
(2) device simple structure, the equipment is convenient, is suitable for the correction of different kinds of target ring spare, can effectively reduce the cost of semiconductor product preparation.
Drawings
Fig. 1 is a schematic structural diagram of a target ring piece correcting device provided in embodiment 1 of the present invention;
the device comprises a base 1, a correcting clamp 2, a target ring 3, a bulge 31, a first fixing assembly 4, a pressing assembly 5, a cylindrical support 6, a buffering assembly 7 and a second fixing assembly 8.
Detailed Description
To better explain the technical solution of the present invention, it is convenient to understand the technical solution of the present invention, and the following is further detailed description of the present invention, but the following embodiments are only simple examples of the present invention, and do not represent or limit the protection scope of the present invention, and the protection scope of the present invention is subject to the claims.
The utility model provides a target ring piece correcting device, which comprises a correcting base 1, a correcting clamp 2 and a pressing assembly 5, wherein the correcting clamp 2 is vertically arranged on the correcting base 1; the target ring piece 3 to be corrected is fixed on one side surface of the correction clamp 2 through a first fixing assembly 4, the central axes of the target ring piece 3 and the correction clamp 2 are overlapped, and a bulge 31 is arranged on the outer wall of the target ring piece 3; the pressing assembly 5 is located on the outer side of the target ring piece 3 and is in contact with the protrusion 31 on the target ring piece 3, and one end of the pressing assembly 5 is connected with the correction clamp 2.
The following are typical but non-limiting examples of the present invention:
example 1:
the embodiment provides a target ring piece correcting device, a structural schematic diagram of the correcting device is shown in fig. 1, and the correcting device comprises a correcting base 1, a correcting clamp 2 and a pressing assembly 5, wherein the correcting clamp 2 is vertically placed on the correcting base 1; the target ring piece 3 to be corrected is fixed on one side surface of the correction clamp 2 through a first fixing assembly 4, the central axes of the target ring piece 3 and the correction clamp 2 are overlapped, and a bulge 31 is arranged on the outer wall of the target ring piece 3; the pressing assembly 5 is located on the outer side of the target ring piece 3 and is in contact with the protrusion 31 on the target ring piece 3, and one end of the pressing assembly 5 is connected with the correction clamp 2.
The longitudinal section of the correction clamp 2 is in a segmental shape, and the central angle of the segmental shape is 300 degrees.
The circle segment-shaped section part of the correction clamp 2 is provided with a boss which is matched with a concave part arranged on the correction base 1, and the relative position of the correction clamp 2 and the correction base 1 is fixed in a threaded connection mode.
The first fixing assembly 4 is composed of a flat plate surface and two longitudinal branches, the two longitudinal branches of the first fixing assembly 4 are respectively located on the inner side and the outer side of the target ring member 3, one end of each longitudinal branch is connected with the correction clamp 2, the other end of each longitudinal branch is fixedly connected with the flat plate surface, and the longitudinal branches are perpendicular to the correction clamp 2 and the flat plate surface.
The number of the first fixing assemblies 4 is 5, and 1 first fixing assembly 4 is respectively arranged on two sides of the port of the target ring 3.
The bulges 31 of the target ring piece 3 are annular hollow, the number of the bulges 31 is 5, and 1 bulge 31 is respectively arranged on two sides of the port of the target ring piece 3.
The connecting end of the pressing assembly 5 and the correcting clamp 2 is composed of a cylindrical support 6 arranged on the correcting clamp 2 and a hole arranged on the pressing assembly 5, the cylindrical support 6 is located on the outer side of the target ring 3, and the pressing assembly 5 is sleeved on the cylindrical support 6 and rotates by taking the cylindrical support 6 as an axis.
The bump 31 of the target ring piece 3 is also provided with a buffer assembly 7, the pressing assembly 5 is directly contacted with the buffer assembly 7 when pressing, the target ring piece 3 is rotated, and the bumps 31 at different positions of the target ring piece 3 are respectively pressed and corrected.
The correcting device further comprises a second fixing assembly 8, the second fixing assembly 8 comprises two cylindrical protrusions arranged on the correcting clamp 2, and the two cylindrical protrusions are located on the same diameter direction of the target ring piece 3, located on the inner side and the outer side of the target ring piece 3 respectively, and are in contact with the inner wall and the outer wall of the target ring piece 3.
The correcting device further comprises a correcting template, wherein a circular groove is formed in the correcting template, and the size of the circular groove is the same as that of the undeformed target ring piece 3.
Example 2:
the embodiment provides a target ring piece correcting device, which comprises a correcting base 1, a correcting clamp 2 and a pressing assembly 5, wherein the correcting clamp 2 is vertically placed on the correcting base 1; the target ring piece 3 to be corrected is fixed on one side surface of the correction clamp 2 through a first fixing assembly 4, the central axes of the target ring piece 3 and the correction clamp 2 are overlapped, and a bulge 31 is arranged on the outer wall of the target ring piece 3; the pressing assembly 5 is located on the outer side of the target ring piece 3 and is in contact with the protrusion 31 on the target ring piece 3, and one end of the pressing assembly 5 is connected with the correction clamp 2.
The longitudinal section of the correction clamp 2 is in a segmental shape, and the central angle of the segmental shape is 270 degrees.
The circle segment-shaped section part of the correction clamp 2 is provided with a boss which is matched with a concave part arranged on the correction base 1, and the relative positions of the correction clamp 2 and the correction base 1 are fixed in a clamping mode.
The first fixing assembly 4 is composed of a flat plate surface and two longitudinal branches, the two longitudinal branches of the first fixing assembly 4 are respectively located on the inner side and the outer side of the target ring member 3, one end of each longitudinal branch is connected with the correction clamp 2, the other end of each longitudinal branch is fixedly connected with the flat plate surface, and the longitudinal branches are perpendicular to the correction clamp 2 and the flat plate surface.
The number of the first fixing assemblies 4 is 7, and 1 first fixing assembly 4 is respectively arranged on two sides of the port of the target ring 3.
The protrusions 31 of the target ring piece 3 are annular hollow, the number of the protrusions 31 is 6, and 1 protrusion 31 is arranged on each of two sides of the end opening of the target ring piece 3.
The connecting end of the pressing assembly 5 and the correcting clamp 2 is composed of a cylindrical support 6 arranged on the correcting clamp 2 and a hole arranged on the pressing assembly 5, the cylindrical support 6 is located on the outer side of the target ring 3, and the pressing assembly 5 is sleeved on the cylindrical support 6 and rotates by taking the cylindrical support 6 as an axis.
The bump 31 of the target ring piece 3 is also provided with a buffer assembly 7, the pressing assembly 5 is directly contacted with the buffer assembly 7 when pressing, the target ring piece 3 is rotated, and the bumps 31 at different positions of the target ring piece 3 are respectively pressed and corrected.
The correcting device further comprises a correcting template, wherein a circular groove is formed in the correcting template, and the size of the circular groove is the same as that of the undeformed target ring piece 3.
Example 3:
the embodiment provides a target ring piece correcting device, which comprises a correcting base 1, a correcting clamp 2 and a pressing assembly 5, wherein the correcting clamp 2 is vertically placed on the correcting base 1; the target ring piece 3 to be corrected is fixed on one side surface of the correction clamp 2 through a first fixing assembly 4, the central axes of the target ring piece 3 and the correction clamp 2 are overlapped, and a bulge 31 is arranged on the outer wall of the target ring piece 3; the pressing assembly 5 is located on the outer side of the target ring piece 3 and is in contact with the protrusion 31 on the target ring piece 3, and one end of the pressing assembly 5 is connected with the correction clamp 2.
The longitudinal section of the correction clamp 2 is in a segmental shape, and the central angle of the segmental shape is 320 degrees.
The circle segment-shaped section part of the correction clamp 2 is provided with a boss which is matched with a concave part arranged on the correction base 1, and the relative positions of the correction clamp 2 and the correction base 1 are fixed in a welding mode.
The first fixing assembly 4 is composed of a flat plate surface and two longitudinal branches, the two longitudinal branches of the first fixing assembly 4 are respectively located on the inner side and the outer side of the target ring member 3, one end of each longitudinal branch is connected with the correction clamp 2, the other end of each longitudinal branch is fixedly connected with the flat plate surface, and the longitudinal branches are perpendicular to the correction clamp 2 and the flat plate surface.
The number of the first fixing assemblies 4 is 4, and 1 first fixing assembly 4 is respectively arranged on two sides of the port of the target ring 3.
The protrusions 31 of the target ring piece 3 are annular hollow, the number of the protrusions 31 is 4, and 1 protrusion 31 is arranged on each of two sides of the end opening of the target ring piece 3.
The connecting end of the pressing assembly 5 and the correcting clamp 2 is composed of a cylindrical support 6 arranged on the correcting clamp 2 and a hole arranged on the pressing assembly 5, the cylindrical support 6 is located on the outer side of the target ring 3, and the pressing assembly 5 is sleeved on the cylindrical support 6 and rotates by taking the cylindrical support 6 as an axis.
The bump 31 of the target ring piece 3 is also provided with a buffer assembly 7, the pressing assembly 5 is directly contacted with the buffer assembly 7 when pressing, the target ring piece 3 is rotated, and the bumps 31 at different positions of the target ring piece 3 are respectively pressed and corrected.
The correcting device further comprises a second fixing assembly 8, the second fixing assembly 8 comprises two cylindrical protrusions arranged on the correcting clamp 2, and the two cylindrical protrusions are located on the same diameter direction of the target ring piece 3, located on the inner side and the outer side of the target ring piece 3 respectively, and are in contact with the inner wall and the outer wall of the target ring piece 3.
The correcting device further comprises a correcting template, wherein a circular groove is formed in the correcting template, and the size of the circular groove is the same as that of the undeformed target ring piece 3.
The correction of the deformed target ring piece by using the correction device in the embodiment specifically includes:
after the structure of the correcting device is assembled, the target ring piece 3 is placed at the corresponding position of the correcting clamp 2, the deformation position on the target ring piece 3 is rotated to the pressing assembly 5, the pressing assembly 5 presses down the protrusion 31 at the position for correction, the target ring piece 3 is basically restored to the round state through multiple operations, then the target ring piece is placed in the correcting template, whether the target ring piece is restored to the initial state is checked according to the matching degree with the round groove, if the requirement is not met, the correcting clamp 2 is used for correcting again until the roundness of the corrected target ring piece 3 is reduced to be below 0.2mm, and the target ring piece can be smoothly installed on sputtering equipment for normal use.
It can be seen from the above embodiments that, the utility model discloses a structural design of correcting device, especially the setting of the fixed subassembly on the correction anchor clamps, can carry out quick correction to different positions in the target ring piece that warp, cause the problem of installation difficulty and use anomaly when avoiding recycling, be convenient for recycling of target ring piece, it is effectual to rectify, the target ring piece circularity after the correction reduces to below 0.2 mm; the device has a simple structure, is convenient to assemble, is suitable for correcting different types of target ring pieces, and can effectively reduce the preparation cost of semiconductor products.
The applicant states that the present invention is described in the above embodiments, but the present invention is not limited to the above detailed device, i.e. the present invention must not be implemented by relying on the above detailed device. It should be clear to those skilled in the art that any improvement of the present invention, to the addition of the equivalent replacement and auxiliary devices of the present invention, the selection of the specific mode, etc., all fall within the scope of protection and disclosure of the present invention.
Claims (10)
1. The target ring piece correcting device is characterized by comprising a correcting base, a correcting clamp and a pressing assembly, wherein the correcting clamp is vertically placed on the correcting base; the target ring piece to be corrected is fixed on one side surface of the correction clamp through a first fixing assembly, the central axes of the target ring piece and the correction clamp are overlapped, and a bulge is arranged on the outer wall of the target ring piece; the pressing assembly is located on the outer side of the target ring piece and is in contact with the protrusions on the target ring piece, and one end of the pressing assembly is connected with the correcting clamp.
2. The target ring correcting device according to claim 1, wherein the longitudinal section of the correcting fixture is a segment, and the central angle of the segment is 270-320 degrees.
3. The target ring correcting device according to claim 2, wherein the segment-shaped cross section of the correcting fixture is provided with a boss which is matched with a recess provided on the correcting base to fix the relative positions of the correcting fixture and the correcting base.
4. The target ring corrector of claim 1, wherein said first holding member is formed by a plate surface and two longitudinal branches; the two longitudinal branches of the first fixing assembly are respectively positioned on the inner side and the outer side of the target ring piece, one end of each longitudinal branch is connected with the correction clamp, the other end of each longitudinal branch is fixedly connected with the flat plate surface, and the longitudinal branches are perpendicular to the correction clamp and the flat plate surface.
5. The target ring correcting device according to claim 1, wherein the number of the first fixing assemblies is at least 4, and 1 first fixing assembly is respectively disposed on two sides of the port of the target ring.
6. The target ring correcting device according to claim 1, wherein the protrusions of the target ring are annular hollow, the number of the protrusions is at least 4, and two sides of the port of the target ring are respectively provided with 1 protrusion.
7. The target ring correcting device according to claim 6, wherein the connecting end of the pressing assembly and the correcting fixture is composed of a cylindrical pillar disposed on the correcting fixture and a hole disposed on the pressing assembly, the cylindrical pillar is located on the outer side of the target ring, and the pressing assembly is sleeved on the cylindrical pillar and rotates around the cylindrical pillar.
8. The target ring correcting device according to claim 7, wherein the bulge of the target ring is further provided with a buffer assembly, and the pressing assembly directly contacts the buffer assembly when the pressing assembly presses the target ring for correction.
9. The target ring correcting device according to claim 1, further comprising a second fixing assembly, wherein the second fixing assembly comprises two cylindrical protrusions arranged on the correcting fixture, and the two cylindrical protrusions are located on the same diameter direction of the target ring, located on the inner side and the outer side of the target ring, and in contact with the inner wall and the outer wall of the target ring.
10. The target ring correcting device according to claim 1, further comprising a correcting template, wherein a circular groove is formed in the correcting template, and the size of the circular groove is the same as that of the undeformed target ring.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120118052.4U CN214442035U (en) | 2021-01-15 | 2021-01-15 | Target ring piece correcting device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120118052.4U CN214442035U (en) | 2021-01-15 | 2021-01-15 | Target ring piece correcting device |
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| CN214442035U true CN214442035U (en) | 2021-10-22 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113927512A (en) * | 2021-11-09 | 2022-01-14 | 宁波江丰电子材料股份有限公司 | Semiconductor focusing ring piece machining clamp and manufacturing method thereof |
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2021
- 2021-01-15 CN CN202120118052.4U patent/CN214442035U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113927512A (en) * | 2021-11-09 | 2022-01-14 | 宁波江丰电子材料股份有限公司 | Semiconductor focusing ring piece machining clamp and manufacturing method thereof |
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