CN211491197U

CN211491197U - Fluorescent screen fixing clamp applied to MBE system

Info

Publication number: CN211491197U
Application number: CN201922369968.2U
Authority: CN
Inventors: 马栋梁; 陈意桥
Original assignee: Suzhou Kunyuan Photoelectric Co ltd
Current assignee: Suzhou Kunyuan Photoelectric Co ltd
Priority date: 2019-12-25
Filing date: 2019-12-25
Publication date: 2020-09-15
Anticipated expiration: 2029-12-25

Abstract

The utility model provides a fluorescent screen fixing clamp applied to an MBE system, aiming at the problems that in the prior art, when a RHEED screen is fixed in the diffraction process, the screen can not be replaced, a frame with one type corresponds to a screen with one type, the cost is increased, and simultaneously, the charge accumulation is easily caused, the fluorescent screen fixing clamp comprises a ring-shaped clamp main body, a supporting device, a pressing device and a fastening device are arranged on the clamp main body, the supporting device is arranged at the inner side of the ring of the clamp main body, the pressing device is arranged below the supporting device, an elastic contact piece with electric conductivity is arranged at one side of the supporting device facing the pressing device, the pressing device is detachably and fixedly connected with the clamp main body, the fluorescent screen is clamped through the pressing device and the elastic contact piece, the fluorescent screen fixing clamp applied to the MBE system is adopted, the fixing force of the screen is increased through the elastic, the conductive performance is improved, the same clamp main body can be repeatedly used, and the cost is saved.

Description

Fluorescent screen fixing clamp applied to MBE system

Technical Field

The utility model relates to a fluorescent screen mounting fixture for MBE system.

Background

The high-energy electron diffraction technology is widely applied to the industrial production process at present, and especially in the MBE production process, the reflection type high-energy electron diffraction technology provides a very important analysis means for researching crystal epitaxial growth, accurately determining the surface crystallization state, surface oxidation and reduction processes and the like. In the diffraction process, a fluorescent screen needs to be fixed, at present, as shown in fig. 3, the fluorescent screen is clamped and fixed by a first clamp 1 in the existing fluorescent screen fixing mode, the first clamp 1 is an annular fixing frame made by a stamping process, an annular boss is arranged in an annular inner cavity of the first clamp, the fluorescent screen 20 is placed on the boss in the annular inner cavity of the first clamp, a second clamp 2 is a circular ring with a cross section in a right-angle bending type, a right-angle edge on one side is used for pressing the upper surface of the fluorescent screen, and a right-angle edge on the other side is welded and fixed with the inner wall of the first clamp 1, so that the fluorescent screen 20 is pressed on the first clamp 1, and then the first clamp 1 is fixed on an observation window flange. The fixing device with the structure can not replace the fluorescent screen because the fluorescent screen and the frame are welded and fixed, and only the fluorescent screen and the frame can be discarded together when the fluorescent screen is required to be replaced, thereby causing resource waste. In addition, since the fluorescent screens with different sizes correspond to the stamping frames with different sizes, a plurality of sets of different stamping dies need to be manufactured at the same time, the production cost is increased, and a welding machine is needed for welding the fixing clamp II 2, so that the field operation is inconvenient. When the frame was fixed on the observation window flange, adopt the shell fragment to fix, because the shell fragment elasticity degree is limited relatively, appear the shell fragment centre gripping dynamics easily and be not enough or inhomogeneous problem, the frame is not abundant enough with the shell fragment contact, leads to screen and earth contact impedance to be on the high side easily, and the electron is difficult to the conduction and causes the electric charge to pile up.

SUMMERY OF THE UTILITY MODEL

The utility model aims at among the prior art, when the fixed RHEED screen of diffraction in-process, the screen welds integratively with the frame, can't replace the RHEED screen, and in addition, the frame of a model can only correspond the screen of a fixed model, increases manufacturing cost, and simultaneously, when fixing the frame on the observation window, the contact impedance of screen and ground is on the high side, causes the accumulational problem of electric charge easily, provides a fluorescent screen mounting fixture who is applied to the MBE system.

The utility model aims at realizing through the following technical scheme:

a fluorescent screen fixing clamp applied to an MBE system comprises an annular clamp body, wherein a supporting device used for supporting a fluorescent screen, a pressing device used for pressing the fluorescent screen and a fastening device used for fixing the clamp body are arranged on the clamp body;

the supporting device comprises an annular flange and an elastic contact piece, the flange is arranged on the inner wall of the clamp body, the elastic contact piece is fixedly arranged on the end face of one side, facing the pressing device, of the flange, the elastic contact piece is an elastic gasket, and the width of the elastic gasket is matched with that of the flange;

the elastic gasket comprises a metal elastic contact surface and a metal connecting sheet, the elastic contact surface is arranged above the connecting sheet, one end of the elastic contact surface and one end of the connecting sheet are fixedly connected into a whole, the elastic contact surface is arc-shaped and protrudes upwards, and the connecting sheet is fixedly connected with the flange;

the pressing device comprises a first threaded hole and a first set screw, the first threaded hole is formed in the inner wall of the clamp body along the circumference of the clamp body, the center line of the threaded hole is arranged in the same direction as the radial direction of the clamp body, one end of the first set screw is fixedly connected with the clamp body through the first threaded hole, and the other end of the first set screw extends into the inner cavity of the clamp body to be used for pressing the fluorescent screen;

the lower end face of the clamp main body is provided with an annular positioning groove, the positioning groove divides the lower end of the clamp main body into an outer ring and an inner ring, and the first threaded hole is formed in the inner ring located on the inner side of the positioning groove;

the positioning groove is characterized by further comprising a fastening device, the fastening device comprises a second threaded hole and a second set screw, the second threaded hole corresponds to the first threaded hole in position, the second threaded hole is formed in the outer ring outside the positioning groove, the diameter of the second threaded hole is larger than that of the first threaded hole, the first threaded hole and the second threaded hole are through holes, and the set screw can enter the inner side of the outer ring from one side of the outer ring.

By adopting the fluorescent screen fixing clamp applied to the MBE system, as the elastic contact piece with the electric conductivity is arranged on the supporting device, the screen is pressed and fixed by the pressing device and the elastic contact piece, the fixing force between the screen and the clamp is increased by the elastic contact piece, the stability of the screen is enhanced, the contact performance between the elastic contact piece and the screen is improved, the contact impedance is reduced, and the electric conductivity is improved at the same time, so that the charge accumulation can not be caused or is rarely caused; the pressing device is detachably connected with the clamp main body, when the screen needs to be replaced, the screen can be replaced after the pressing device is removed, and the same clamp main body can be repeatedly used; and because the flange and the elastic gasket in the supporting device have certain widths, and the extending length of the set screw in the pressing device can also be different according to different screen diameters, the same set of fixing clamp can adapt to fluorescent screens with different diameters, and the production cost is saved.

Drawings

FIG. 1 is a schematic front view, cross-sectional view, of a fluorescent screen holding jig of the present invention applied to an MBE system;

FIG. 2 is a perspective view of the elastic pad of the present invention;

fig. 3 is a front cross-sectional view of a prior art fixing jig for fixing a phosphor screen.

Description of the reference numerals

1. A first clamp; 2. a second clamp; 3. a spring plate; 10. a clamp body; 11. a first threaded hole; 12. a first set screw; 13. a second threaded hole; 14. a second set screw; 15. positioning a groove; 16. a flange; 20. a fluorescent screen; 30. an elastic pad; 31. an elastic contact surface; 32. connecting sheets; 33. positioning holes; 40. an observation window flange; 41. an observation window; 42. a projecting ring; 43-inner ring; 44-outer ring.

Detailed Description

The invention will be further described with reference to specific embodiments:

as shown in fig. 1, the present invention provides a screen fixing jig applied to an MBE system, which includes a jig main body 10 and a supporting device, a pressing device and a fastening device provided on the jig main body 10. The clamp body 10 is annular, the supporting device is arranged at the upper end of the annular inner cavity, the compressing device is correspondingly arranged below the supporting device, the fluorescent screen 20 is fixed between the supporting device and the compressing device, and the clamp body 10 is fastened on the observation window flange 40 through the fastening device.

The supporting device comprises a flange 16 and an elastic contact piece, wherein the flange 16 is annular and is fixedly arranged at the upper end of the inner wall of the clamp main body 10 and is coaxial with the clamp main body 10, and the flange 16 and the clamp main body can also be integrally arranged. The elastic contact piece is made of metal with good electric conductivity, and can be made of metal springs, V-shaped metal elastic sheets and the like. When the metal spring is adopted, the upper end face of the spring is fixedly connected with the lower end face of the flange, and the spring is deformed in a stretching mode in the vertical direction; when the V-shaped metal elastic sheet is adopted, the V-shaped metal elastic sheet is transversely arranged, one side face of the V-shaped metal elastic sheet is fixedly connected with the lower end face of the flange, and the other side face of the V-shaped metal elastic sheet faces the pressing device. The utility model discloses in, elastic contact is elastic gasket 30, as shown in fig. 2, elastic gasket 30 includes elastic contact surface 31 and connection piece 32, connection piece 32 is the planar sheetmetal, elastic contact surface 31 is convex sheetmetal, elastic contact surface 31 sets up the top at connection piece 32, its arc surface makes progress the uplift, the two width is the best the same, elastic contact surface 31's one end and connection piece 32's one end fixed connection or integrative setting, elastic contact surface 31's the other end is the free end, the chord length that the circular arc corresponds is less than connection piece 32's length on elastic contact surface 31. When the arc surface of the elastic contact surface 31 is deformed by pressure, the free end can freely stretch and contract. The connecting piece 32 is provided with a positioning hole 33, the connecting piece 32 is fixedly connected to the lower end surface of the flange 16 by bolts through the positioning hole 33, the length of the connecting piece 32 is preferably the same as the width of the flange 16, the elastic contact surface 31 faces the pressing device, and the free end of the elastic contact surface 31 faces the center direction of the clamp body. The resilient pads 30 may be continuously distributed over the lower end surface of the flange 16 or may be divided into several segments, preferably four segments, which are evenly distributed along the circumferential direction of the flange 16. The flange 16 can also be arranged in sections inside the ring of the clamp body, the elastic contact piece being arranged on the flange 16.

The pressing device is detachably connected with the clamp body 10 and comprises a first threaded hole 11 and a first set screw 12, the first threaded hole 11 is arranged on the inner wall of the clamp body 10 along the circumferential direction of the clamp body 10, the hole center line of the first threaded hole is arranged in the radial direction of the clamp body, the first threaded hole 11 is preferably arranged corresponding to the position of each elastic gasket 30, namely, a first threaded hole is arranged below each elastic gasket, the distance between the highest point of the first threaded hole 11 in the vertical direction and the highest point of the arc surface of each elastic contact surface 31 is smaller than the thickness of the fluorescent screen 20, the first set screw 12 is arranged in the first threaded hole 11, and one end of the first set screw 12 extends out of the inner cavity of the clamp body and is used for pressing the fluorescent screen 20. Of course, the positions of the elastic contact piece and the first threaded hole do not correspond.

The lower end face of the clamp body 10 is provided with a positioning groove 15, an opening of the positioning groove 15 is formed in the lower end face of the clamp body, the position and the opening width of the positioning groove are matched with those of a protruding ring 42 on the observation window flange 40, and the clamp body 10 is fixed on the observation window flange 40 through the matching of the positioning groove 15 and the protruding ring 42 and a fastening device, so that the clamp body is positioned. The width of the positioning groove 15 is slightly larger than the thickness of the protruding ring 42 to facilitate the mounting and dismounting of the clamp body 10, and the depth of the positioning groove 15 may be the same as the height of the protruding ring 42. From this, the lower extreme of anchor clamps main part 10 is divided into two inside and outside rings to constant head tank 15, closing device sets up on the inner ring 43 that is located constant head tank 15 inboard, fastener sets up on the outer loop 44 that is located the constant head tank 15 outside, fastener includes two 13 threaded holes and two 14 fastening screws, two 13 threaded holes radially set up on the outer loop 44 of anchor clamps main part 10 along the anchor clamps main part, the diameter of two 13 threaded holes is greater than the diameter of one 11 threaded holes, the position one-to-one of two 13 threaded holes 11 and threaded holes, the two is perforating hole and coaxial. When the fluorescent screen 20 is installed, the clamp body 10 is firstly turned upside down, the supporting device is positioned at the lower end of the clamp body 10, one side plane of the fluorescent screen 20 which is coated is placed on the supporting device, the edge part of the side plane is contacted with the elastic contact surface 31, then the set screw I12 passes through the threaded hole II 13 from the outer side of the clamp body 10 to enter the threaded hole I11, and the set screw I12 is screwed into the threaded hole I11 by a tool until the tail end of the set screw I12 is pressed against the circumferential side surface of the fluorescent screen 20. The set screw one 12 is preferably a socket head set screw so that the set screw can be fully screwed into the threaded hole one 11. And then slightly pressing the fluorescent screen 20 downwards to enable the elastic contact surface 31 to generate elastic deformation until a certain amount of clearance is reserved between the threaded hole I11 and the fluorescent screen 20, and then continuously screwing the set screws I12 one by one to prevent the set screws I12 from scratching the plane of the fluorescent screen 20. When the end of the first fastening screw 12 is screwed out of the threaded hole 11 to a proper length below the fluorescent screen 20, the fluorescent screen 20 is loosened, the fluorescent screen 20 is pressed and fixed under the elastic action of the elastic contact surface 31 and the limiting action of the first fastening screw 12, and the pressing mode not only improves the stability of the fluorescent screen 20, but also increases the contact area between the fluorescent screen 20 and the elastic gasket 30, and because the elastic gasket 30 has good electric conduction performance, electric charges can be smoothly led out by the elastic gasket 30, and the fluorescent screen is prevented from being damaged by the accumulated electric charges. After the fluorescent screen 20 is fixed, the clamp body 10 is turned over and fixed on the observation window flange 40, when the fluorescent screen is fixed, the convex ring 42 is firstly sleeved in the positioning groove 15, the second set screw 14 is screwed into the second threaded hole 13 from the outer side of the positioning clamp, and the tail end of the second set screw 14 is tightly pressed on the outer surface of the convex ring 42, so that the clamp body 10 is fixed. Preferably, the outer surface of the projecting ring is provided with an anti-slip rib.

When the fluorescent screen needs to be replaced, the clamp body 10 is detached, the clamp body 10 is inverted, the fluorescent screen is slightly pressed downwards, the first set screw is taken out from the second threaded hole, and then the fluorescent screen is replaced. The positions at which the edges of the screens of different diameters are pressed against the flange 16 are different, preferably depending on the screen diameter, while the length or mounting position of the resilient pad 30 is changed to ensure that the screen is pressed by the highest point of the arc surface on the resilient contact surface. The first set screw 12 may be unscrewed to a length determined according to the diameter of the screen 20 to ensure that the first set screw 12 and the resilient gasket 30 may clamp the screen.

The utility model discloses the mounting fixture specially adapted of structure fixes RHEED fluorescent screen, can also be used to sheltering from the fixed of piece on the coating machine observation window, perhaps also can be used to fixed optical equipment on reflection lens etc..

Claims

1. A fluorescent screen fixing clamp applied to an MBE system comprises a ring-shaped clamp body (10), and is characterized in that a supporting device for supporting the fluorescent screen, a pressing device for pressing the fluorescent screen and a fastening device for fixing the clamp body are arranged on the clamp body (10), the supporting device is arranged on the inner side of the ring of the clamp body, the pressing device is arranged below the supporting device, an elastic contact piece with electric conductivity is arranged on one side of the supporting device facing the pressing device, the distance between the contact surfaces of the pressing device and the elastic contact piece is matched with the thickness of the fluorescent screen (20), the pressing device is detachably and fixedly connected with the clamp body (10), and the fluorescent screen (20) is clamped through the pressing device and the elastic contact piece.

2. A screen holding jig applied to MBE system as claimed in claim 1, wherein the supporting means comprises an annular flange (16) and an elastic contact member, the flange (16) is provided on an inner wall of the jig body (10), the elastic contact member is fixedly provided on an end face of the flange (16) facing the pressing means, the elastic contact member is an elastic spacer, and a width of the elastic spacer (30) is adapted to a width of the flange (16).

3. A screen fixing jig applied to an MBE system according to claim 2, wherein the elastic gasket (30) comprises a metal elastic contact surface (31) and a metal connecting piece (32), the elastic contact surface (31) is disposed above the connecting piece (32), one end of the elastic contact surface (31) is integrally fixed to one end of the connecting piece (32), the elastic contact surface (31) has a circular arc shape, the circular arc is upwardly protruded, and the connecting piece (32) is fixedly connected to the flange (16).

4. The screen fixing jig applied to the MBE system as claimed in claim 1, wherein the pressing means comprises a first threaded hole (11) and a first set screw (12), the first threaded hole (11) is provided on the inner wall of the jig body (10) along the circumference of the jig body, the hole center line of the first threaded hole is provided in the same direction as the radial direction of the jig body, one end of the first set screw (12) is fixedly connected to the jig body (10) through the first threaded hole (11), and the other end protrudes into the inner cavity of the jig body for pressing the screen (20).

5. A screen holding jig for use in MBE system according to claim 4, characterized in that the lower end surface of the jig main body (10) is provided with a ring-shaped positioning groove (15), the positioning groove (15) divides the lower end of the jig main body into an outer ring and an inner ring, and the first screw hole (11) is provided on the inner ring inside the positioning groove (15).

6. A screen fixing jig applied to an MBE system according to claim 5, further comprising a fastening device, wherein the fastening device comprises a second threaded hole (13) and a second set screw (14), the second threaded hole (13) corresponds to the first threaded hole (11), the second threaded hole (13) is arranged on the outer ring outside the positioning groove (15), the diameter of the second threaded hole (13) is larger than that of the first threaded hole (11), the first threaded hole (11) and the second threaded hole are both through holes, and the set screw can enter the inner side of the outer ring from the same side of the outer ring.