CN214411762U - Grating external cavity space beam combination-based blue laser - Google Patents
Grating external cavity space beam combination-based blue laser Download PDFInfo
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- CN214411762U CN214411762U CN202120521701.5U CN202120521701U CN214411762U CN 214411762 U CN214411762 U CN 214411762U CN 202120521701 U CN202120521701 U CN 202120521701U CN 214411762 U CN214411762 U CN 214411762U
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Abstract
The utility model belongs to the field of blue light semiconductor lasers, and discloses a grating external cavity space beam combination-based blue light laser, which comprises a 2-path semiconductor laser array consisting of a plurality of blue light laser diodes (1); for any one blue laser diode (1), the blue laser also comprises a fast axis collimating mirror (2), a grating (3), a plane reflecting mirror (4) and a step mirror (5) which are sequentially arranged along a light path, and can combine the blue lasers in the same path of semiconductor laser array into a path of combined laser; in addition, the blue laser also comprises a cylindrical mirror (6), a polarization beam combining prism (7) and a focusing mirror (8) which are sequentially arranged along the light path, and the cylindrical mirror, the polarization beam combining prism and the focusing mirror are used for generating secondary beam combination to obtain the blue light beam-combined focusing laser of the target. Utilize the utility model discloses, can obtain that frequency and wavelength are stable, the line width performance is outstanding, the high blue laser of single optical power has better practical meaning.
Description
Technical Field
The utility model belongs to blue light semiconductor laser field, especially line width compression, space wherein close and restraint technical branch, more specifically relates to a blue light laser based on beam is closed in grating exocoel space.
Background
There are many standards for the classification of semiconductor lasers. There are various categories such as near infrared laser, middle and far infrared laser, visible light laser, ultraviolet laser, etc. according to the wavelength. Visible light semiconductor lasers are one of the important classes. The laser mainly refers to a semiconductor laser with the output light wavelength within the visible light range (400-700 nm). Wherein the blue light semiconductor laser is a semiconductor laser with the output wavelength ranging from 400nm to 500 nm.
There are three main methods for realizing blue semiconductor laser. One is a laser diode directly emitting blue light, one is a blue light source frequency-doubled by an LD, and the other is a blue laser obtained by non-linear optical means by LD pumping. Early argon ion lasers have also been used to produce blue light. The blue semiconductor laser is generally made of GaN semiconductor material, like the blue LED. GaN is a direct band gap semiconductor, belongs to III-V nitride materials, and also comprises InN, A1N and alloy materials 1nGaN and A1GaN thereof, the band gap energy range of the materials is 0.6-6.2eV, and the band gap energy of the materials can be regulated and controlled by controlling the contents of In, Ga and Al In the materials. Meanwhile, a GaN semiconductor crystallization layer is laminated on the GaN base plate, and blue laser can be directly obtained. Therefore, most of the current blue semiconductor lasers are GaN-based semiconductor lasers.
In recent years, with the rapid development of various semiconductor pump lasers, semiconductor laser manufacturing techniques have been rapidly developed due to their low price, long lifetime, and the like. In addition, the blue light semiconductor laser has high stability, high electro-optical efficiency and larger spectral width than an all-solid-state blue light laser, and reduces speckles, so that the high-power optical fiber coupling blue light semiconductor laser for large-screen laser display is researched. The high-power blue laser is widely applied to the fields of laser processing (such as copper and gold), medical treatment, underwater communication, laser pumping and the like.
However, the semiconductor laser cannot meet the application requirement of the requirement of line width due to the wide spectral line, so the semiconductor laser has the following practical aspects: it is necessary to obtain a semiconductor laser with narrow line width and stable wavelength. The reflective grating is used as a spectral line width compression device, and according to the blue laser under the Littrow layout, the reflective grating is added, so that a grating surface and an output surface of a collimation system form a coupling external cavity, the line width performance of the blue laser is improved to a great extent, and the blue laser with stable frequency and wavelength is obtained.
Meanwhile, on one hand, the loss of the blue light power is large after the line width is compressed by the grating, and on the other hand, the single-tube emission power of the blue light semiconductor laser is small and cannot meet the application of high-power laser, so that a method of combining multiple lasers in a laser array space is adopted, and the method for combining multiple lasers to obtain one high-power blue light laser has practical significance in practice.
SUMMERY OF THE UTILITY MODEL
Aiming at the defects or the improvement requirements in the prior art, the utility model aims to provide a blue laser based on the grating external cavity space beam combination, wherein the grating external cavity space beam combination is adopted, compared with the prior art, the problems of lower power and poorer beam quality of a blue laser diode can be effectively solved; utilize the utility model discloses, can obtain that frequency and wavelength are stable, the line width performance is outstanding, the high blue laser of single optical power has better practical meaning.
In order to achieve the above object, according to the present invention, there is provided a blue laser based on spatial beam combination of grating external cavity, which is characterized by comprising 2-way semiconductor laser array; each path of semiconductor laser array comprises a plurality of blue laser diodes (1), and light outlets of the blue laser diodes (1) are all located on the same straight line; recording the straight line as the straight line where the light outlet is located, and then, the straight lines where the light outlets of the 2 paths of semiconductor laser arrays are located are mutually vertical;
for any blue laser diode (1), the blue laser also comprises a fast axis collimating mirror (2), a grating (3), a plane reflecting mirror (4) and a step mirror (5) which are arranged along the light path in sequence; correspondingly, the blue laser emitted by the blue laser diode (1) in the same semiconductor laser array is used for passing through the fast axis collimating mirror (2), the grating (3), the plane reflecting mirror (4) and the stepped mirror (5) in sequence and combining into a combined beam laser through the stepped mirror (5);
in addition, for the 2 paths of combined beams of laser light corresponding to the 2 paths of semiconductor laser arrays, the blue laser also comprises a cylindrical mirror (6), a polarization beam combining prism (7) and a focusing mirror (8) which are sequentially arranged along the light path; the 2 paths of combined beams of laser light corresponding to the 2 paths of semiconductor laser arrays can respectively pass through a cylindrical mirror (6) and generate secondary combined beams through a polarization beam combining prism (7); the combined laser obtained by secondary beam combination can finally pass through a focusing lens (8) to obtain the blue light combined focused laser of a target.
As a further preferred aspect of the present invention, an optical fiber (9) is further provided behind the focusing mirror (8), and the blue light of the target is combined to focus the laser beam and can be emitted through the optical fiber (9).
As the utility model discloses a further preferred, every way semiconductor laser array includes 3 ~ 5 blue light laser diode (1).
As the utility model discloses a further preferred, the blue light laser that blue light laser diode (1) outgoing that is located same way semiconductor laser array, light path all parallel arrangement each other.
As the utility model discloses a further preferred, to the blue laser that arbitrary one blue laser diode (1) was emergent, set up along its light path plane mirror (4) with ladder mirror (5) are parallel to each other.
Through the utility model discloses above technical scheme who thinks, compare with prior art, can gain following beneficial effect:
(1) the utility model provides a blue light laser array utilizes the grating exocoel to carry out the linewidth compression, has not only solved the relatively poor problem of current blue light laser monochromaticity, has also solved simultaneously and has carried out the great problem of linewidth compression power loss at last after current blue light laser closes the back.
(2) The utility model discloses blue light laser array adopts the ladder to arrange and carries out the space and close and restraint for single tube laser can be very convenient stack in fast axle direction, guaranteed directional accuracy and higher fill factor, greatly improved the power of output blue light.
(3) Moreover, the utility model can utilize a single ladder mirror to preferentially expand the strip light output by the upper level to form a square light spot; and the dead zone of each laser array can be eliminated by utilizing the superposition of output light of a plurality of step mirror squares. Therefore, beam combination is completed, and output power is improved.
(4) The utility model discloses close the beam technique based on the polarization, further increase system brightness, improve output.
(5) Furthermore, the utility model discloses an optical fiber coupling technique for output luminance obtains improving, and the output energy is more concentrated.
To sum up, the utility model discloses in based on the blue laser ware that the beam was closed in grating exocoel space, can make output blue light energy concentrate more, power is higher, and monochromaticity is better. The problems of low power and poor beam quality of the current blue laser diode are solved. In addition, the device is not complex, the technical difficulty is low, large-scale popularization can be realized, and meanwhile, the output of the array can be further stacked to output high-power blue laser with higher power, so that the device is applied to more fields.
Drawings
Fig. 1 is an overall array diagram of the blue laser of the present invention.
Fig. 2 is a single-tube optical path diagram before polarization beam combination of the present invention.
Fig. 3 is the utility model discloses the fast axis collimation picture of blue laser.
Fig. 4 is a diagram of the grating external cavity of the present invention.
Fig. 5 is a ladder mirror diagram of the present invention.
Fig. 6 is a polarization beam combining diagram of the present invention.
Fig. 7 is a diagram of the optical fiber coupling of the present invention.
The meanings of the reference symbols in the figures are as follows: the device comprises a blue light diode (namely, a blue laser diode) 1, a fast axis collimating mirror 2, a grating 3, a plane reflector 4, a step mirror 5, a cylindrical mirror 6, a polarization beam-combining prism 7, a focusing mirror 8 and an optical fiber 9.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. Furthermore, the technical features mentioned in the embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
In with two way semiconductor laser array, the total number of blue light laser diode that semiconductor laser array includes all the way m, the total number n of blue light laser diode that another way semiconductor laser array includes are 5 for example (of course, m and n can be independently selected from 3, 4, 5), based on the utility model discloses, this 5 stepped space array of 2 of accessible is arranged, carries out the space with ten bundles of blue light laser and closes the bundle. Wherein each optical path of the array is as follows: firstly, a blue light diode 1 is collimated by a fast axis collimating mirror 2, then line width compression is carried out by a grating 3, after the line width compression is carried out by a flat mirror 4, the dead zone of each 5X 1 laser array is eliminated by a step mirror 5, spatial beam combination is carried out, after each 5X 1 array is processed, slow axis collimation is carried out by a cylindrical mirror 6, two beams of laser of the 5X 2 array are combined by a polarization beam combining prism 7, and finally the laser is coupled to an optical fiber 9 by a focusing lens 8 to be output.
The following are specific examples:
example 1
As shown in fig. 1 and fig. 2, the whole of the present invention is a 5 x 2 array. Wherein each light path of each 5 x 1 array is arranged in parallel, that is, the light path of each light path is ensured to be the same. The two 5 x 1 arrays of blue diodes are placed at 90 °. Each laser beam of the 5 x 2 blue laser diode array passes through the fast axis alignment part, the grating external cavity part and the step mirror shaping part respectively. The fast axis collimating mirror 2 is vertically arranged, the grating 3 and the fast axis collimating mirror 2 form an angle of 45 degrees, the reflecting mirror 4 (namely, the plane reflecting mirror 4) is parallel to the grating 3 in angle, the step mirror 5 and the reflecting mirror 4 are parallel to each other, and the cylindrical mirror 6 and the step mirror 5 form an angle of 45 degrees and are simultaneously perpendicular to the fast axis collimating mirror. Because the two 5 x 1 array blue light diodes form 90 degrees, two laser beams passing through the cylindrical mirror also form 90 degrees to enter the polarization beam-combining prism 7, then enter the optical fiber 9 through the focusing lens 8, and finally are output.
As shown in fig. 3, the fast axis collimating module is composed of a fast axis collimating mirror 2. The blue laser emitted by the blue diode 1 passes through the fast axis collimating mirror 2, and the divergence angle is reduced, so that the subsequent spatial beam combination is facilitated.
As shown in fig. 4, the grating external cavity module is composed of a grating 3 and a plane mirror 4. The collimated blue laser is diffracted by the grating 3, so that the loss of specific wavelength (especially 450nm) in the cavity of the gain device is effectively reduced, the lasing of other modes in the cavity is inhibited, the output line width becomes narrower, the problem of poor monochromaticity of the current blue laser is solved, and the blue laser is reflected to the next module by the plane reflector 4 after being diffracted by the grating.
As shown in fig. 5, the spatial beam combining module is a stepped mirror, and the module is composed of a stepped mirror 5. The step mirror 5 expands the 5 x 1 laser array and eliminates dead zones, so as to achieve the purpose of beam combination.
As shown in fig. 6, after each 5 × 1 module completes spatial beam combining, slow axis collimation is performed by the cylindrical mirror 6, and then two 5 × 1 modules enter the polarization beam combining prism 7 at a mutually perpendicular angle to perform polarization beam combining, thereby further increasing system brightness and increasing output power. As shown in fig. 7, after polarization beam combining, the blue laser is coupled into a single optical fiber 9 through a focusing mirror 8, so that the output laser energy is more concentrated.
The utility model discloses can make output blue light energy concentrate more, the power is higher, and monochromaticity is better. The problems of low power and poor beam quality of the current blue laser diode are solved. In addition, the device is not complex, the technical difficulty is low, large-scale popularization can be realized, and meanwhile, the output of the array can be further stacked to output high-power blue laser with higher power, so that the device is applied to more fields.
The utility model provides an each subassembly all can adopt the subassembly sold in the market.
It will be understood by those skilled in the art that the foregoing is merely a preferred embodiment of the present invention, and is not intended to limit the invention to the particular forms disclosed, but on the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.
Claims (5)
1. A blue laser based on grating external cavity space beam combination is characterized by comprising a 2-path semiconductor laser array; each path of semiconductor laser array comprises a plurality of blue laser diodes (1), and light outlets of the blue laser diodes (1) are all located on the same straight line; recording the straight line as the straight line where the light outlet is located, and then, the straight lines where the light outlets of the 2 paths of semiconductor laser arrays are located are mutually vertical;
for any blue laser diode (1), the blue laser also comprises a fast axis collimating mirror (2), a grating (3), a plane reflecting mirror (4) and a step mirror (5) which are arranged along the light path in sequence; correspondingly, the blue laser emitted by the blue laser diode (1) in the same semiconductor laser array is used for passing through the fast axis collimating mirror (2), the grating (3), the plane reflecting mirror (4) and the stepped mirror (5) in sequence and combining into a combined beam laser through the stepped mirror (5);
in addition, for the 2 paths of combined beams of laser light corresponding to the 2 paths of semiconductor laser arrays, the blue laser also comprises a cylindrical mirror (6), a polarization beam combining prism (7) and a focusing mirror (8) which are sequentially arranged along the light path; the 2 paths of combined beams of laser light corresponding to the 2 paths of semiconductor laser arrays can respectively pass through a cylindrical mirror (6) and generate secondary combined beams through a polarization beam combining prism (7); the combined laser obtained by secondary beam combination can finally pass through a focusing lens (8) to obtain the blue light combined focused laser of a target.
2. The blue laser according to claim 1, wherein an optical fiber (9) is further disposed behind the focusing mirror (8), and the combined blue light beam of the target can be emitted through the optical fiber (9).
3. The blue laser according to claim 1, wherein each of said semiconductor laser arrays comprises 3 to 5 of said blue laser diodes (1).
4. The blue laser according to claim 1, wherein the blue laser beams emitted from the blue laser diodes (1) in the same semiconductor laser array have optical paths arranged parallel to each other.
5. The blue laser according to claim 1, wherein the plane mirror (4) and the step mirror (5) are disposed parallel to each other along the optical path of the blue laser light emitted from any one of the blue laser diodes (1).
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CN202120521701.5U CN214411762U (en) | 2021-03-12 | 2021-03-12 | Grating external cavity space beam combination-based blue laser |
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