CN214411151U - Wafer feed mechanism that X-ray point material was used - Google Patents
Wafer feed mechanism that X-ray point material was used Download PDFInfo
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- CN214411151U CN214411151U CN202023344973.7U CN202023344973U CN214411151U CN 214411151 U CN214411151 U CN 214411151U CN 202023344973 U CN202023344973 U CN 202023344973U CN 214411151 U CN214411151 U CN 214411151U
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- clamping jaw
- wafer
- ray
- clamping
- guide post
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Abstract
The utility model provides a wafer feed mechanism that X-ray point material was used, includes fixed establishment, V type clamping jaw and elastic clamping mechanism, two at least clamping jaws of V type clamping jaw for being certain angle setting, V type clamping jaw with elastic clamping mechanism connects, last spring, guide post and the stop gear of being provided with of elastic clamping mechanism, elastic clamping mechanism is provided with fixed part and movable part, the solid one end fixed mounting of fixed part is on the board fixed plate, the other end of fixed part pass through spring and guide post with the movable part is connected, through the utility model provides an X-ray point material is used wafer feed mechanism, simple structure, the cost is lower to can accomplish the material loading by the efficient.
Description
Technical Field
The utility model relates to a X-RAY technical field, a wafer feed mechanism that X-RAY point material was used
Background
At the manufacturing link of chip, be a relatively important ring to the detection of wafer, detect (utilize the transmission principle of X light promptly under the prerequisite that does not damage the wafer, pierce through the wafer through X-Ray, thereby realize the detection to the wafer, because wafer itself is fragile, so, to holding the device and having higher requirement, the feed mechanism who detects the wafer through X-Ray equipment among the prior art is mostly complicated structure, the higher equipment of cost, be unfavorable for production.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the purpose is: the wafer feeding mechanism for the X-RAY electric materials is simple in structure and low in cost.
The technical scheme of the utility model is that: a wafer feeding mechanism for X-ray material dispensing comprises a fixing mechanism, V-shaped clamping jaws and an elastic clamping mechanism, wherein the V-shaped clamping jaws are two clamping jaws arranged at a certain angle, the V-shaped clamping jaws are connected with the elastic clamping mechanism, a spring and a guide post are arranged on the elastic clamping mechanism, and a limiting mechanism is further arranged on the elastic clamping mechanism;
furthermore, the elastic clamping mechanism is provided with a fixed part and a movable part, the fixed part is fixedly arranged on the machine table fixing plate, and the fixed part is movably connected with the movable part through a spring and a guide post;
furthermore, the limiting mechanism comprises a first guide shaft and a second guide shaft which are fixedly arranged at two ends of the fixing part, and the first guide shaft and the second guide shaft respectively penetrate through two ends of the movable part and then are fixed on the first limiting block and the second limiting block;
furthermore, the V-shaped clamping jaw comprises a first clamping jaw and a second clamping jaw, and one sides of the first clamping jaw and the second clamping jaw, which are contacted with the material, are provided with certain slopes;
further, the fixing mechanism comprises a pressing plate and a third clamping jaw, and a certain gradient is arranged on one side, which is in contact with the material, of the third clamping jaw;
further, a handle is fixedly arranged on the elastic clamping mechanism;
furthermore, the number of the springs and the number of the guide posts are 3, and the springs are sleeved on the guide posts;
further, the horizontal angle between the first clamping jaw and the second clamping jaw is 60-135 degrees;
furthermore, the positions of the first clamping jaw, the second clamping jaw and the third clamping jaw, which are contacted with the material, are all provided with Teflon materials.
Compared with the prior art, the utility model has the advantages that: the elastic clamping mechanism can prevent the clamping jaw from being in hard contact with the wafer, so that the wafer is prevented from being damaged; the clamping material that can be stable through the setting of 3 clamping jaws sets up to the slope through the one side at the clamping jaw and material contact, can avoid boring for a short time to be sheltered from and can't detect.
Drawings
The invention will be further described with reference to the following drawings and examples:
fig. 1 is a schematic structural view of a wafer feeding mechanism for X-ray material dispensing of the present invention;
fig. 2 is a schematic structural view of a wafer feeding mechanism for X-ray material dispensing of the present invention;
fig. 3 is a schematic diagram of the local amplification of the wafer feeding mechanism for X-ray material dispensing of the present invention.
Wherein: 1. fixing mechanism, 2, V type clamping jaw, 3, elastic clamping mechanism, 4, stop gear, 5, board fixed plate, 3A, fixed part, 3B, movable part, 3.1, spring, 3.2, guide post, 4.1, first guiding axle, 4.2, second guiding axle, 4.3, first stopper, 4.4, second stopper, 6, material, 7, handle.
Detailed Description
The following detailed description is made in conjunction with specific embodiments of the present invention:
the utility model discloses a wafer feed mechanism that X-ray point material was used, including fixed establishment 1 for provide fixed centre gripping, V type clamping jaw 2 and elastic clamping mechanism 3, elastic clamping mechanism is last still to be provided with handle 7, is used for artifical manual movement elastic clamping mechanism 3, be provided with fixed part 3A and movable part 3B on the elastic clamping mechanism 3, fixed part 3A fixed mounting is on board fixed plate 4, fixed part 3A with the three cavity that holds spring 3.1 and guide post 3.2 has all been seted up on the movable part 3B, install respectively in the three cavity and install three spring 3.1, three spring 3.1 overlaps respectively and establishes on three guide post 3.2. The both sides of fixed part 3A and movable part 3B still offer respectively and are used for holding the cavity of first guiding axle 4.1 and second guiding axle 4.2, install first guiding axle 4.1 and second guiding axle 4.2 in the cavity, first guiding axle 4.1 with second guiding axle 4.2 lets movable part 3A and fixed part 3B play relative displacement's function. Two grooves are further formed in two sides of the movable portion 3A, a first limiting block 4.3 and a second limiting block 4.4 are installed in the two grooves respectively, the first limiting block 4.3 is connected with the first guide shaft 4.1, and the second limiting block 4.4 is connected with the second guide shaft 4.2.
When manual moving toward one side handle 7, spring 3.1 begins to compress, movable part 3 drives V type clamping jaw 2 moves toward one side, when with handle 7 moves toward the opposite side, movable part 3A drives V type clamping jaw and is in work as move toward one side that is close to material 7 on first guiding axle 4.1 and the second guiding axle 4.2, work as movable part 3A moves to first stopper 4.3 with stop during the position of second stopper 4.4, because spring 3.1 has certain elastic quantity this moment, can with V type clamping jaw 2 presss from both sides tightly material 7.
The V-shaped clamping jaw 2 is fixed on the movable part 3A through a bolt, the V-shaped clamping jaw 2 comprises a first clamping jaw 2.1 and a second clamping jaw 2.2, the horizontal angle between the first clamping jaw 2.1 and the second clamping jaw 2.2 is 60-135 degrees, corresponding angles can be adjusted according to different material radians, and one sides of the first clamping jaw 2.1 and the second clamping jaw 2.2, which are contacted with materials, are provided with certain gradients. Because the X-RAY detection needs a larger magnification, the side of the clamping jaw contacting with the material needs to be set to be a slope, and the blocking of the edge material during detection is prevented.
Fixing mechanism 1 includes clamp plate 1.1 and third clamping jaw 1.2, one side of third clamping jaw 1.2 is passed through the bolt fastening and is in on the clamp plate 1.1, the opposite side and the material contact of third clamping jaw 1.1, just third clamping jaw 1.1 is equipped with certain slope with material contact one side.
First clamping jaw 2.1, second clamping jaw 2.2 and third clamping jaw 1.2 all set up the teflon material with the position of material contact and can have self-lubricating effect, prevent that the wafer edge from being hindered by the clamp.
The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose of the embodiments is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention, which cannot limit the protection scope of the present invention. It is obvious to a person skilled in the art that the invention is not limited to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention, and that the embodiments are therefore to be considered in all respects as exemplary and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Claims (9)
1. The utility model provides a wafer feed mechanism that X-ray point material was used, its characterized in that, includes fixed establishment, V type clamping jaw and elastic clamping mechanism, two at least clamping jaws of V type clamping jaw for being certain angle setting, V type clamping jaw with elastic clamping mechanism connects, last spring, the guide post of being provided with of elastic clamping mechanism to and stop gear.
2. A wafer feeding mechanism for X-ray spot feeding according to claim 1, wherein: the elastic clamping mechanism is provided with a fixed part and a movable part, one end of the fixed part is fixedly arranged on the machine table fixing plate, and the other end of the fixed part is connected with the movable part through a spring and a guide post.
3. A wafer feeding mechanism for X-ray spot feeding according to claim 2, characterized in that: stop gear is including installing first guiding axle and the second guiding axle at fixed part both ends, first guiding axle with the second guiding axle is worn to establish respectively the both ends of movable part then are fixed respectively on first stopper and second stopper.
4. A wafer feeding mechanism for X-ray spot feeding according to claim 1, wherein: the V-shaped clamping jaw comprises a first clamping jaw and a second clamping jaw, and a certain gradient is arranged on one side, which is in contact with the material, of the first clamping jaw.
5. A wafer feeding mechanism for X-ray spot feeding according to claim 1, wherein: the fixing mechanism comprises a pressing plate and a third clamping jaw, and one side of the third clamping jaw, which is in contact with the material, is provided with a certain gradient.
6. A wafer feeding mechanism for X-ray spot feeding according to claim 1, wherein: and a handle is fixedly arranged on the elastic clamping mechanism.
7. A wafer feeding mechanism for X-ray spot feeding according to claim 1, wherein: the quantity of spring and guide post is 3, just the spring housing is established on the guide post.
8. A wafer feed mechanism for X-ray point material according to claim 4, characterized in that: the horizontal angle between the first clamping jaw and the second clamping jaw is 60-135 degrees.
9. A wafer feed mechanism for X-ray point material according to claim 4, characterized in that: the positions of the first clamping jaw and the second clamping jaw, which are contacted with the material, are all provided with Teflon materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023344973.7U CN214411151U (en) | 2020-12-31 | 2020-12-31 | Wafer feed mechanism that X-ray point material was used |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023344973.7U CN214411151U (en) | 2020-12-31 | 2020-12-31 | Wafer feed mechanism that X-ray point material was used |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214411151U true CN214411151U (en) | 2021-10-15 |
Family
ID=78044144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023344973.7U Active CN214411151U (en) | 2020-12-31 | 2020-12-31 | Wafer feed mechanism that X-ray point material was used |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214411151U (en) |
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2020
- 2020-12-31 CN CN202023344973.7U patent/CN214411151U/en active Active
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