CN214400806U - 一种可简易拆卸清理的单晶热场 - Google Patents
一种可简易拆卸清理的单晶热场 Download PDFInfo
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- CN214400806U CN214400806U CN202023187890.1U CN202023187890U CN214400806U CN 214400806 U CN214400806 U CN 214400806U CN 202023187890 U CN202023187890 U CN 202023187890U CN 214400806 U CN214400806 U CN 214400806U
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- 239000013078 crystal Substances 0.000 title claims abstract description 41
- 238000009434 installation Methods 0.000 claims abstract description 52
- 230000001681 protective effect Effects 0.000 claims abstract description 21
- 238000004321 preservation Methods 0.000 claims abstract description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 16
- 239000010439 graphite Substances 0.000 claims abstract description 16
- 238000010438 heat treatment Methods 0.000 claims abstract description 10
- 238000007789 sealing Methods 0.000 claims description 20
- 239000000178 monomer Substances 0.000 claims description 10
- 238000003466 welding Methods 0.000 claims description 5
- 230000002146 bilateral effect Effects 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 5
- 238000005381 potential energy Methods 0.000 abstract description 8
- 238000002050 diffraction method Methods 0.000 abstract description 2
- 238000009413 insulation Methods 0.000 description 4
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 206010066054 Dysmorphism Diseases 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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CN202023187890.1U CN214400806U (zh) | 2020-12-26 | 2020-12-26 | 一种可简易拆卸清理的单晶热场 |
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Address after: 675000 east side of South Gate of chufengyuan, sunshine Avenue, Lucheng Town, Chuxiong City, Chuxiong Yi Autonomous Prefecture, Yunnan Province Patentee after: Yunnan Yuze Semiconductor Co.,Ltd. Address before: 675000 east side of South Gate of chufengyuan, sunshine Avenue, Lucheng Town, Chuxiong City, Chuxiong Yi Autonomous Prefecture, Yunnan Province Patentee before: Yuze semiconductor (Yunnan) Co.,Ltd. |
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Address after: No. 69 Waizhou Road, Yihai Community, Lucheng Town, Chuxiong City, Chuxiong Yi Autonomous Prefecture, Yunnan Province, 675000 Patentee after: Yunnan Yuze New Energy Co.,Ltd. Country or region after: China Address before: 675000 east side of South Gate of chufengyuan, sunshine Avenue, Lucheng Town, Chuxiong City, Chuxiong Yi Autonomous Prefecture, Yunnan Province Patentee before: Yunnan Yuze Semiconductor Co.,Ltd. Country or region before: China |