CN214391549U - Photoresist removing component for automatic photoresist removing machine for round crystal - Google Patents
Photoresist removing component for automatic photoresist removing machine for round crystal Download PDFInfo
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- CN214391549U CN214391549U CN202022370043.2U CN202022370043U CN214391549U CN 214391549 U CN214391549 U CN 214391549U CN 202022370043 U CN202022370043 U CN 202022370043U CN 214391549 U CN214391549 U CN 214391549U
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Abstract
The utility model relates to the technical field of installation protection, in particular to a photoresist removing component for an automatic photoresist removing machine for a wafer, which comprises an installation mechanism and an installation component; the installation mechanism outer wall on be connected with the installation component that is used for installing the inside machined part of degumming machine, the installation component pass through bolt spare and fix on the outer wall of installation mechanism, the utility model discloses a set up the installation mechanism of a degumming component, through the built-up mounting mode of installation mechanism and installation component, will degumming component fixed mounting on the installation component, guaranteed the stability of degumming component at installation component externally mounted, and the mounting means variety through the installation component for the degumming component can adopt multiple mounting means to fix on the installation component, thereby has improved the flexibility of degumming component installation on the installation component, and the stability of installation.
Description
Technical Field
The utility model relates to an installation protection technical field specifically is a brilliant automatic degumming machine of coming of circle is with component of gluing.
Background
The photoresist machine usually adopts inductively coupled high density plasma (ICP), can rapidly remove residual photoresist (photoresist) on a wafer, achieves clean wafer surface, and has the advantages of high etching rate, no electrode pollution, low ion energy, no damage to a substrate, and the like, however, further installation protection processing is often performed in the photoresist machine after photoresist removal is completed, so that installation protection of novel colloid is realized, and multiple processing steps of the photoresist machine are realized;
a wafer is a silicon chip used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because it has a circular shape. Wafers are carriers used in the production of integrated circuits, and in general, wafers are referred to as single crystal silicon wafers. The monocrystalline silicon wafer is drawn and refined by common silica sand, a monocrystalline silicon rod is prepared by a series of measures of dissolution, purification and distillation, and the monocrystalline silicon rod becomes a wafer after being polished and sliced.
The traditional degumming machine is internally used for degumming the internally mounted circular wafer by arranging the degumming component, the degumming component is usually required to be fixedly mounted in the processing process, the traditional mounting mode is used for mounting the degumming component in the degumming machine through a bolt, and the mounting mode cannot be used for guaranteeing the stability of the degumming component in the mounting process of the degumming machine and has certain potential safety hazard.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a fixed strengthening mechanism that uses of components of photoresist that removes of machine is automatic to brilliant circle to solve the problem that proposes in the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a photoresist removing component for an automatic photoresist removing machine for a wafer comprises an installation mechanism and an installation component; the outer wall of the mounting mechanism is connected with a mounting component for mounting internal workpieces of the degumming machine, the mounting component is fixed on the outer wall of the mounting mechanism through a bolt piece, the mounting mechanism comprises mounting groove plates, fixing rods and reinforcing rods, the outside of the mounting mechanism is formed by combining and connecting two groups of mounting groove plates, one group of the mounting groove plates are connected with mounting pieces on the outer wall, the other group of the mounting groove plates are connected with mounting components on the outer wall, the fixing rods are fixedly connected inside the mounting groove plates and are fixedly combined on the inner walls of the mounting groove plates, the outer sides of the fixing rods are connected with connecting rods, the connecting rods penetrate through the inner walls of the mounting groove plates to be connected with the reinforcing rods, the upper end and the lower end of the outer wall of the mounting groove plates are provided with mounting plates, and the sleeves are fixedly connected on the inner sides of the mounting plates, and the spring part is sleeved in the sleeve, and one end of the spring part is fixedly connected with the end part of the reinforcing rod.
Preferably, the mounting member comprises an L-shaped fixing frame plate and a screw, the screw is fixedly connected to the back of the L-shaped fixing frame plate, the screw fixing plate is arranged on the outer wall of the mounting groove plate, a U-shaped groove is formed in the upper end of the L-shaped fixing frame plate, a bolt hole is formed in the bottom of the L-shaped fixing frame plate, and the bolt hole is formed in the cross section perpendicular to the mounting groove plate.
Preferably, the temples of the installation groove plates are provided with heat dissipation holes, the two groups of butted installation groove plates are in combined sealing butt joint, and the heat dissipation holes are uniformly distributed on the inner wall and the outer wall of the installation groove plates on the inner side of the fixing rod.
Preferably, the reinforcing rod is fixed inside the sleeve through spring pieces at the upper end and the lower end, the side end of the spring piece is fixedly sleeved inside the mounting groove inside the sleeve, and the bottom of the sleeve is fixedly welded on the inner side surface of the mounting plate.
Preferably, the reinforcing rods are fixedly connected with the outer parts of the fixing rods through the connecting rods penetrating through the inner wall and the outer wall of the mounting groove plate, a plurality of groups of connecting rods are connected between the fixing rods and the reinforcing rods, and the reinforcing rods are arranged on the outer walls of the two sides of the mounting groove plate and are fixed through sleeves arranged on the two sides.
Compared with the prior art, the beneficial effects of the utility model are that:
1. through setting up the installation mechanism of a component that strips, through the combination mounting mode of installation mechanism and installation component, will strip the component fixed mounting on the installation component, guaranteed the stability of the component that strips at installation component external mounting, and the mounting means variety through the installation component for the component that strips can adopt multiple mounting means to fix on the installation component, thereby has improved the flexibility of the component that strips installation on the installation component, and the stability of installation.
2. Through the dead lever and the stiffener that set up, make the inside reinforcing mechanism who forms whole violently drawing of mounting groove board, spring part through lower extreme on the stiffener makes the stiffener can utilize the elastic force absorption external force of spring part when the mounting groove board takes place to rock, reduce the possibility that causes deformation, improved the mounting groove board simultaneously and made stability at the installation, the stiffener through both sides is connected with the connecting rod simultaneously, make dead lever and stiffener form whole bearing member to the mounting groove board, the stability of mounting groove board at the degumming machine internally mounted has been guaranteed, make the degumming member when installing on installation mechanism through the mounting member, can improve the stability of the installation of degumming member in the degumming machine inside.
Drawings
FIG. 1 is an exploded view of the assembly and connection structure of the mounting mechanism and the mounting member of the present invention;
FIG. 2 is a schematic view of the connection structure inside the installation mechanism of the present invention;
FIG. 3 is a schematic view of the connection structure between the components outside the installation component of the present invention;
FIG. 4 is an enlarged schematic view of the structure of FIG. 2;
fig. 5 is an enlarged schematic view of a portion a in fig. 2 according to the present invention.
In the figure: 10. an installation mechanism; 11. a mounting member; 12. installing a groove plate; 13. heat dissipation holes; 14. fixing the rod; 15. a reinforcing bar; 16. a connecting rod; 151. a spring member; 152. a sleeve; 153. mounting a plate;
20. a mounting member; 21. an L-shaped fixed frame plate; 22. a U-shaped groove; 23. a screw; 24. and (4) bolt holes.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Examples
Referring to fig. 1-5, there are shown: a photoresist removing component for an automatic photoresist removing machine for a wafer comprises a mounting mechanism 10 and a mounting component 20; the outer wall of the installation mechanism 10 is connected with an installation component 20 used for installing internal workpieces of the degumming machine, the installation component 20 is fixed on the outer wall of the installation mechanism 10 through a bolt piece, the installation mechanism 10 comprises an installation groove plate 12, a fixing rod 14 and a reinforcing rod 15, the outside of the installation mechanism 10 is formed by combining and connecting two groups of installation groove plates 12, one group of installation part 11 is connected on the outer wall of the installation groove plate 12, the other group of installation part 20 is connected on the outer wall of the installation groove plate 12, the fixing rod 14 is fixedly connected in the installation groove plate 12, the fixing rod 14 is fixed on the inner wall of the installation groove plate 12 in a combining way, the outside of the fixing rod 14 is connected with a connecting rod 16, the connecting rod 16 passes through the inner wall of the installation groove plate 12 and is connected with the reinforcing rod 15, the upper end and the lower end of the outer wall of the installation groove plate 12 are provided with an installation plate 153, the inner side of the mounting plate 153 is fixedly connected with a sleeve 152, the sleeve 152 is sleeved with a spring 151, one end of the spring 151 is fixedly connected with the end part of the reinforcing rod 15, the mounting member 20 comprises an L-shaped fixing frame plate 21 and a screw 23, the screw 23 is fixedly connected with the back of the L-shaped fixing frame plate 21, the screw 23 is fixed on the outer wall of the mounting groove plate 12, the upper end of the L-shaped fixing frame plate 21 is provided with a U-shaped groove 22, the bottom of the L-shaped fixing frame plate 21 is provided with a bolt hole 24, and the bolt hole 24 is arranged on the cross section vertical to the mounting groove plate 12; the photoresist removing component is fixedly arranged on the installation component 20 through the combined installation mode of the installation mechanism 10 and the installation component 20, so that the stability of the installation of the photoresist removing component outside the installation component 20 is ensured, and the photoresist removing component can be fixed on the installation component 20 through various installation modes through the diversity of the installation modes of the installation component 20, so that the flexibility of the installation of the photoresist removing component on the installation component 20 and the installation stability are improved;
the temples of the installation groove plates 12 are provided with heat dissipation holes 13, the two groups of installation groove plates 12 which are butted are combined and sealed, the heat dissipation holes 13 are uniformly distributed on the inner and outer walls of the installation groove plates 12 at the inner side of the fixed rod 14, the reinforcing rod 15 is fixed inside the sleeve 152 through the spring piece 151 at the upper end and the lower end, the side end of the spring piece 151 is fixedly sleeved inside the installation groove inside the sleeve 152, the bottom of the sleeve 152 is fixedly welded on the inner side surface of the installation plate 153, the reinforcing rod 15 is fixedly connected with the outer part of the fixed rod 14 through the connecting rod 16 penetrating through the inner and outer walls of the installation groove plates 12, a plurality of groups of connecting rods 16 are connected between the fixed rod 14 and the reinforcing rod 15, the reinforcing rods 15 are arranged on the outer walls at the two sides of the installation groove plates 12 and are fixed through the sleeves 152 arranged at the two sides, and the fixed rod 14 and the reinforcing rod 15 are arranged, make the inside reinforcing mechanism who forms whole horizontal drawing of installation frid 12, spring part 151 through upper and lower end of stiffener 15 makes stiffener 15 can utilize spring part 151's elastic force to absorb external force when installation frid 12 takes place to rock, reduce the possibility that causes deformation, improved installation frid 12 simultaneously and made stability at the installation, stiffener 15 through both sides is connected with connecting rod 16 simultaneously, make dead lever 14 and stiffener 15 form whole bearing component to installation frid 12, the stability of installation frid 12 at the internally mounted of degumming machine has been guaranteed, make the component of degumming when installing on installation mechanism 10 through installation component 20, can improve the stability of the component of degumming at the inside installation of degumming machine.
The above description is for further details of the present invention, and it is not assumed that the embodiments of the present invention are limited to these descriptions, and it is obvious to those skilled in the art that the present invention can be implemented by a plurality of simple deductions or replacements without departing from the concept of the present invention, and all should be considered as belonging to the protection scope defined by the claims submitted by the present invention.
Claims (5)
1. A photoresist removing component for an automatic photoresist removing machine for a round crystal wafer comprises a mounting mechanism (10) and a mounting component (20);
the method is characterized in that:
the outer wall of the mounting mechanism (10) is connected with a mounting component (20) for mounting internal workpieces of the degumming machine, and the mounting component (20) is fixed on the outer wall of the mounting mechanism (10) through a bolt;
the installation mechanism (10) comprises installation groove plates (12), fixing rods (14) and reinforcing rods (15), the outside of the installation mechanism (10) is formed by combining and connecting two sets of installation groove plates (12), the outer wall of one set of installation groove plates (12) is connected with an installation part (11), the outer wall of the other set of installation groove plates (12) is connected with an installation component (20), the fixing rods (14) are fixedly connected inside the installation groove plates (12), the fixing rods (14) are combined and fixed on the inner wall of the installation groove plates (12), the outer sides of the fixing rods (14) are connected with connecting rods (16), the connecting rods (16) penetrate through the inner wall of the installation groove plates (12) to be connected with the reinforcing rods (15), and the upper end and the lower end of the outer wall of the installation groove plates (12) are provided with installation plates (153), the inboard fixedly connected with sleeve (152) of mounting panel (153), just sleeve (152) inside cup joint spring part (151), just one end of spring part (151) with the tip fixed connection of stiffener (15).
2. The photoresist removing member according to claim 1, wherein: the mounting member (20) comprises an L-shaped fixing frame plate (21) and a screw (23), the screw (23) is fixedly connected to the back of the L-shaped fixing frame plate (21), the screw (23) is fixed on the outer wall of the mounting groove plate (12), a U-shaped groove (22) is formed in the upper end of the L-shaped fixing frame plate (21), a bolt hole (24) is formed in the bottom of the L-shaped fixing frame plate (21), and the bolt hole (24) is formed in the cross section of the vertical mounting groove plate (12).
3. The photoresist removing member according to claim 1, wherein: the temples of the installation groove plates (12) are provided with heat dissipation holes (13), the two groups of butted installation groove plates (12) are in combined sealing butt joint, and the heat dissipation holes (13) are uniformly distributed on the inner wall and the outer wall of the installation groove plates (12) on the inner side of the fixing rod (14).
4. The photoresist removing member according to claim 1, wherein: the reinforcing rod (15) is fixed in the sleeve (152) through the spring part (151) at the upper end and the lower end, the side end of the spring part (151) is fixedly sleeved in the mounting groove in the sleeve (152), and the bottom of the sleeve (152) is fixedly welded on the inner side surface of the mounting plate (153).
5. The photoresist removing member according to claim 4, wherein: stiffener (15) through the outside fixed connection who runs through connecting rod (16) and dead lever (14) of installation frid (12) inside and outside wall, and be connected with multiunit connecting rod (16) between dead lever (14) and stiffener (15), stiffener (15) set up on the both sides outer wall of installation frid (12), and fixed through sleeve (152) that both sides set up.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022370043.2U CN214391549U (en) | 2020-10-22 | 2020-10-22 | Photoresist removing component for automatic photoresist removing machine for round crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022370043.2U CN214391549U (en) | 2020-10-22 | 2020-10-22 | Photoresist removing component for automatic photoresist removing machine for round crystal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214391549U true CN214391549U (en) | 2021-10-15 |
Family
ID=78018941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022370043.2U Active CN214391549U (en) | 2020-10-22 | 2020-10-22 | Photoresist removing component for automatic photoresist removing machine for round crystal |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214391549U (en) |
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2020
- 2020-10-22 CN CN202022370043.2U patent/CN214391549U/en active Active
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