CN214350302U

CN214350302U - Carbon dioxide laser optimized film cutting optical system

Info

Publication number: CN214350302U
Application number: CN202022327176.1U
Authority: CN
Inventors: 朱建发; 梁飞龙
Original assignee: Shenzhen Jiezhizao Technology Co ltd
Current assignee: Shenzhen Jiezhizao Technology Co ltd
Priority date: 2020-10-19
Filing date: 2020-10-19
Publication date: 2021-10-08
Anticipated expiration: 2030-10-19

Abstract

An optical system for optimizing die cutting by carbon dioxide laser comprises a carbon dioxide laser, a control center and a cutting head, and further comprises a beam expander, an acousto-optic modulator, an adjustable diaphragm and a reflector, wherein the beam expander, the acousto-optic modulator and the adjustable diaphragm are sequentially arranged along a horizontal light emitting path of the carbon dioxide laser, the light path is directly emitted to the reflector arranged at an angle of 45 degrees to the horizontal direction, and the horizontal light path is reflected into a vertical light path to enter the cutting head; the control center is connected with and controls the carbon dioxide laser through a switch, and the control center is connected with and controls the frequency setting of the acousto-optic modulator through signals. The utility model provides a based on carbon dioxide laser equipment worker of washing hair has found one set of technological effect of having optimized, can realize that narrow pulse width, little edge melting, little fuel effect go, efficient optical system. And the cost is low compared with a picosecond ultraviolet laser, and the method is more suitable for large-batch industrial mass production.

Description

Carbon dioxide laser optimized film cutting optical system

[ technical field ] A method for producing a semiconductor device

The utility model relates to a carbon dioxide laser cutting film class material technical field especially relates to the optical system who optimizes carbon dioxide laser cutting.

[ background of the invention ]

At present, a plurality of optical films are applied to the fields of vehicle-mounted screens, display screens, touch screens and the like, and the market demand is very large. Currently, the equipment for processing and cutting optical films made of different materials is generally laser cutting equipment, and among the laser cutting equipment commonly used in the industry, laser equipment with carbon dioxide as an excitation medium is also the best, because the laser with carbon dioxide as the excitation medium can generate laser with a wavelength of 9.3-10.6 μm, and the absorption rate of a plurality of organic materials to the light beam in the wavelength range is high; therefore, the carbon dioxide laser device application cutting head has the characteristic of random irregular cutting, so that the carbon dioxide laser device is widely applied to the fields of vehicle-mounted screens, display screens, touch screens and the like which need optical films as the display screens.

However, with the requirements of appearance of display, vehicle-mounted equipment, wearing equipment and the like and the optimization of process, the laser film cutting process effect is gradually improved, and when the heat effect of the film cutting is required to be below 100 μm or even 50 μm, the traditional carbon dioxide laser processing method cannot meet the process requirements due to the reasons of large pulse width, poor light spot appearance and the like. The picosecond ultraviolet laser is applied to the market, but the cost is high, and the efficiency is only 1/3 of the carbon dioxide laser due to the relatively low power, so that the possibility of mass industrial production is not provided.

[ summary of the invention ]

The utility model provides a based on carbon dioxide laser equipment basis, establish one set of its technological effect of optimizing to above problem, can realize narrow pulse width, little melting edge, little thermal effect district, efficient optical system.

The utility model relates to an optical system of carbon dioxide laser optimization cross cutting, this optical system include carbon dioxide laser instrument, control maincenter and cutting head, its characterized in that, this optical system still includes beam expanding lens, acousto-optic modulator, adjustable diaphragm and speculum, sets gradually beam expanding lens, acousto-optic modulator and adjustable diaphragm along the horizontal light-emitting light path of carbon dioxide laser instrument, and the light path directly arrives on setting up the speculum with level 45 °, reflects horizontal light path for perpendicular light path gets into the cutting head; the control center is connected with and controls the carbon dioxide laser through a switch, and the control center is connected with and controls the frequency setting of the acousto-optic modulator through signals.

The cutting head comprises two parts, namely a front focusing mirror F50 and a rear nozzle, wherein the front end is a light incident part, and the rear end is a light emergent part.

The focusing lens of the cutting head compresses the light beam to be within 0.1mm, and the nozzle is internally filled with compressed air or nitrogen, so that dust is cooled and removed to play a role in protecting a light path.

The carbon dioxide laser is a 9.3 μm wavelength model Ti60 carbon dioxide laser.

The acousto-optic modulator is an I-M041-xC11x-P5-GH77 acousto-optic modulator which can transmit light beams with the diameter larger than 6mm and the wavelength range of 9.3 mu M and 9.6 mu M, and the pulse width of the light beams of the acousto-optic modulator is adjusted to be 100ns @60 KHz.

The beam expander is BE-9.3-D20: 71-4x expands the beam to 10 mm.

The adjustable diaphragm is a diaphragm which reduces the peripheral low energy density part of the carbon dioxide laser beam and cannot cause the hot melting or the metamorphism of the film material due to the peripheral low energy density beam.

The control center is an industrial computer or an intelligent control center MCU.

The utility model provides a based on carbon dioxide laser equipment worker of washing hair has found one set of technological effect of having optimized, can realize that narrow pulse width, little edge melting, little fuel effect go, efficient optical system. And the cost is low compared with a picosecond ultraviolet laser, and the method is more suitable for large-batch industrial mass production.

[ description of the drawings ]

Fig. 1 is a schematic structural diagram of a carbon dioxide laser optimized die-cutting optical system of the present invention;

wherein: 1. a carbon dioxide laser; 2. a beam expander; 3. an acousto-optic modulator; 4. an adjustable diaphragm; 5. a mirror; 6. a cutting head; 61. a nozzle; 7. a control hub.

[ detailed description ] embodiments

The present invention will be described in detail with reference to the accompanying drawings and examples. Examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Referring to fig. 1, an optical system for optimizing die cutting by carbon dioxide laser is shown, which includes a carbon dioxide laser 1, a control center 7 and a cutting head 6, and is characterized in that the optical system further includes a beam expander 2, an acousto-optic modulator 3, an adjustable diaphragm 4 and a reflector 5, the beam expander 2, the acousto-optic modulator 3 and the adjustable diaphragm 4 are sequentially arranged along a horizontal light-emitting path of the carbon dioxide laser 1, the light path is directly to the reflector arranged at an angle of 45 degrees to the horizontal direction, and the horizontal light path is reflected as a vertical light path to enter the cutting head; wherein the control center 7 is connected with and controls the carbon dioxide laser 1 through a switch, and the control center 7 is connected with and controls the frequency setting of the acousto-optic modulator 3 through a signal.

The cutting head 6 includes two parts, a front focusing mirror F50 and a rear nozzle 61, the front end of which is a light incident part and the rear end of which is a light exiting part.

The focusing lens of the cutting head 6 compresses the light beam to be within 0.1mm, and the nozzle 61 is internally filled with compressed air or nitrogen for cooling and removing dust so as to play a role in protecting a light path.

The carbon dioxide laser 1 is a 9.3 μm wavelength model Ti60 carbon dioxide laser.

The acousto-optic modulator 3 is an acousto-optic modulator which can transmit I-M041-xC11x-P5-GH77 with the beam diameter larger than 6mm and the wavelength range of 9.3 μ M and 9.6 μ M, and the acousto-optic modulator 3 adjusts the pulse width of the beam to 100ns @60 KHz.

The beam expander 2 is BE-9.3-D20: 71-4x expands the beam to 10 mm.

The adjustable diaphragm 4 is a diaphragm which reduces the peripheral low energy density part of the carbon dioxide laser beam and does not cause the heat fusion or the deterioration of the film material due to the peripheral low energy density beam.

The above description is only for the preferred embodiment of the present invention, and the present invention is not limited to the above description, and although the present invention is disclosed in the preferred embodiment, it is not limited to the above description, and any person skilled in the art can make modifications or changes equivalent to the above disclosed technical content without departing from the technical scope of the present invention.

Claims

1. An optical system for optimizing die cutting by carbon dioxide laser comprises a carbon dioxide laser, a control center and a cutting head, and is characterized by further comprising a beam expander, an acousto-optic modulator, an adjustable diaphragm and a reflector, wherein the beam expander, the acousto-optic modulator and the adjustable diaphragm are sequentially arranged along a horizontal light-emitting light path of the carbon dioxide laser, the light path is directly projected to the reflector arranged at an angle of 45 degrees to the horizontal direction, and the horizontal light path is reflected into a vertical light path to enter the cutting head; the control center is connected with and controls the carbon dioxide laser through a switch, and the control center is connected with and controls the frequency setting of the acousto-optic modulator through signals.

2. The optical system for carbon dioxide laser optimized die cutting as claimed in claim 1, wherein the cutting head comprises two parts, a front focusing lens F50 and a rear nozzle, wherein the front end is a light incident part and the rear end is a light emergent part.

3. The optical system for die cutting optimized by carbon dioxide laser as claimed in claim 1, wherein the focusing lens of the cutting head compresses the light beam to within 0.1mm, and the nozzle is filled with compressed air or nitrogen gas for cooling and removing dust to protect the light path.

4. The optical system for carbon dioxide laser optimized die cutting as claimed in claim 1, wherein the carbon dioxide laser is a 9.3 μm model Ti60 carbon dioxide laser.

5. The optical system for carbon dioxide laser optimized die cutting as claimed in claim 1, wherein the acousto-optic modulator is an acousto-optic modulator with a beam diameter larger than 6mm and a wavelength range of 9.3 μm and 9.6 μm, and the acousto-optic modulator adjusts the pulse width of the beam to 100ns @60 KHz.

6. The optical system for carbon dioxide laser optimized die cutting as claimed in claim 1, wherein the beam expander expands the beam to 10 mm.

7. The optical system for optimizing die cutting by carbon dioxide laser as claimed in claim 1, wherein the adjustable diaphragm is a diaphragm for reducing the peripheral low energy density portion of the carbon dioxide laser beam without causing thermal melting or deterioration of the film material due to the peripheral low energy density portion.