CN214319617U

CN214319617U - Waste gas treatment device for all-hydrogen cover type annealing furnace

Info

Publication number: CN214319617U
Application number: CN202023129842.7U
Authority: CN
Inventors: 李铮辉; 朱素琴; 张平; 臧震; 范西子
Original assignee: Jingjiang Jiashide Furnace Co ltd
Current assignee: Jiangsu Jiashide Industrial Furnace Co ltd
Priority date: 2020-12-23
Filing date: 2020-12-23
Publication date: 2021-10-01
Anticipated expiration: 2030-12-23

Abstract

The utility model relates to the technical field of waste gas treatment devices, in particular to a waste gas treatment device for a full-hydrogen cover type annealing furnace. Through limit structure, can conveniently install blast pipe and casing fixedly, the utility model discloses easy to assemble simplifies the installation procedure for the installation required time reduces, increases constructor work efficiency, and is equally convenient when dismantling. Through sealed the pad, can be sealed with the junction between blast pipe and the casing for the inside waste gas of casing can not follow and is connected out and emit, avoids waste gas to reveal the internal environment who pollutes the production factory building in following the casing, makes the production factory building environment improve, and protection production personnel's is healthy. Waste gas is cooled through the cooling liquid, partial particulate matters and harmful gas are absorbed through the cooling liquid, the waste gas is preliminarily filtered through the first filter screen, the harmful gas in the waste gas is absorbed through the activated carbon, and the waste gas is filtered again through the second filter screen.

Description

Waste gas treatment device for all-hydrogen cover type annealing furnace

Technical Field

The utility model relates to the technical field of waste gas treatment devices, in particular to a waste gas treatment device for a full-hydrogen cover type annealing furnace.

Background

An annealing furnace is a process used in semiconductor device manufacturing that includes heating a plurality of semiconductor wafers to affect their electrical properties. The heat treatment is designed for different effects. The wafer may be heated to activate the dopants, convert the thin film into a thin film or convert the thin film into a wafer substrate interface, densify the deposited thin film, change the state of the grown thin film, repair implanted damage, move dopants or transfer dopants from one thin film to another or from the thin film into the wafer substrate. The annealing furnace may be integrated into other furnace processing steps, such as oxidation, or may be self-processing. The annealing furnace is completed by an apparatus specifically designed for heating semiconductor wafers. The annealing furnace is an energy-saving periodic operation furnace, has a super energy-saving structure and adopts a fiber structure.

Annealing stove can produce waste gas at the during operation, contains harmful gas and particulate matter in the waste gas, can use exhaust treatment device to come to handle waste gas generally, but the inconvenient and blast pipe installation of current exhaust treatment device to the condition that waste gas was revealed can appear in the junction, waste gas leakage can make the environment of production factory building receive the pollution, harm producers' is healthy, it is not good to handle waste gas effect also current exhaust treatment device.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an exhaust treatment device for full hydrogen bell-type annealing furnace to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: a waste gas treatment device for an all-hydrogen cover type annealing furnace comprises a shell and an exhaust pipe, wherein a first filter cavity is arranged on the left side in the shell, cooling liquid is arranged in the first filter cavity, a sealing gasket is arranged at the upper end of the first filter cavity, a limiting structure is arranged in the upper end of the left side of the shell, a second filter chamber is arranged in the middle of the interior of the shell, activated carbon is arranged in the second filter chamber, a third filter chamber is arranged on the right side of the interior of the prime number shell, adsorption cotton is arranged in the third filter chamber, an air outlet is arranged in the upper end of the right side of the shell, a first clapboard is arranged on the left side of the interior of the shell, a first filter screen is arranged at the upper end of the first clapboard, the inside right side of casing is provided with the second baffle, and second baffle lower extreme is provided with the second filter screen, casing left side lower extreme is provided with the liquid outlet, and casing left side upper end is provided with the inlet.

Preferably, a first partition plate is arranged between the first filter chamber and the second filter chamber, the bottom of the first partition plate is fixedly connected with the shell, the liquid level of the cooling liquid is lower than that of the first partition plate, the upper end of the shell is fixedly connected with the inner wall of the upper end of the first filter screen, and the lower end of the first filter screen is fixedly connected with the upper end of the first partition plate.

Preferably, the limiting structure comprises a movable cavity, a spring, a moving plate, a limiting block, a connecting rod, a transmission rod and a pulling block, wherein the movable cavity is located inside the upper end of the shell, the spring is arranged inside the movable cavity, the outer side of the spring is fixedly connected with the shell, the inner side of the spring is fixedly connected with the moving plate, the middle of the inner side of the moving plate is fixedly connected with the limiting block, the inner bottom of the limiting block is arranged to be an inclined plane, the outer side of the moving plate is fixedly connected with the connecting rod, the upper end of the connecting rod is fixedly connected with the transmission rod, the upper end of the transmission rod penetrates through the shell and extends to the outer side, and the upper end of the transmission rod is fixedly connected with the pulling block.

Preferably, a second partition plate is arranged between the second filter chamber and the third filter chamber, the upper end of the second partition plate is fixedly connected with the shell, the upper end of the second filter screen is fixedly connected with the lower end of the second partition plate, the lower end of the second filter screen is fixedly connected with the inner wall of the lower end of the shell, the filter holes of the second filter screen are smaller than the filter holes of the first filter screen, and the bottom of the air outlet is communicated with the third filter chamber.

Preferably, the exhaust pipe runs through the casing and extends to the inside of first filter chamber, cup joints sealed pad with the casing junction in the middle of the exhaust pipe, inside exhaust pipe bottom submergence coolant, corresponds limit structure in the middle of the exhaust pipe and is provided with the restriction groove.

Compared with the prior art, the beneficial effects of the utility model are that:

1. through limit structure, can conveniently install blast pipe and casing fixedly, the utility model discloses easy to assemble simplifies the installation procedure for the installation required time reduces, increases constructor work efficiency, and is equally convenient when dismantling.

2. Through sealed the pad, can be sealed with the junction between blast pipe and the casing for the inside waste gas of casing can not follow and is connected out and emit, avoids waste gas to reveal the internal environment who pollutes the production factory building in following the casing, makes the production factory building environment improve, and protection production personnel's is healthy.

3. Waste gas is cooled through the cooling liquid, partial particulate matters and harmful gas are absorbed through the cooling liquid, waste gas is preliminarily filtered through the first filter screen, the harmful gas in the waste gas is absorbed through the activated carbon, the waste gas is filtered again through the second filter screen, and finally, the particulate matters in the waste gas are adsorbed through the adsorption cotton, so that the waste gas is treated, and the waste gas reaches the health standard of emission.

Drawings

FIG. 1 is a cross-sectional view of the present invention;

fig. 2 is a schematic diagram of the limiting structure of the present invention.

Fig. 3 is a perspective view of the present invention.

In the figure: the device comprises a shell 1, a first filter cavity 2, a cooling liquid 3, a sealing gasket 4, a limiting structure 5, a second filter cavity 6, activated carbon 7, a third filter cavity 8, adsorption cotton 9, an air outlet 10, a first partition plate 11, a first filter screen 12, a second partition plate 13, a second filter screen 14, an liquid outlet 15, a liquid inlet 16, an exhaust pipe 17, a movable cavity 51, a spring 52, a moving plate 53, a limiting block 54, a connecting rod 55, a transmission rod 56 and a pulling block 57.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1 to 2, the present invention provides a technical solution: a waste gas treatment device for an all-hydrogen cover type annealing furnace comprises a shell 1 and an exhaust pipe 17, wherein a first filter cavity 2 is arranged on the left side inside the shell 1, a cooling liquid 3 is arranged inside the first filter cavity 2, a sealing gasket 4 is arranged at the upper end of the first filter cavity 2, a limiting structure 5 is arranged inside the upper end of the left side of the shell 1, a second filter cavity 6 is arranged in the middle inside the shell 1, activated carbon 7 is arranged inside the second filter cavity 6, a third filter cavity 8 is arranged on the right side inside the prime number shell 1, adsorption cotton 9 is arranged inside the third filter cavity 8, a gas outlet 10 is arranged inside the upper end of the right side of the shell 1, a first partition plate 11 is arranged on the left side inside the shell 1, a first filter screen 12 is arranged at the upper end of the first partition plate 11, a second partition plate 13 is arranged on the right side inside the shell 1, a second filter screen 14 is arranged at the lower end of the second partition plate 13, and a liquid outlet 15 is arranged at the lower end of the left side of the shell 1, the upper end of the left side of the shell 1 is provided with a liquid inlet 16.

Set up first baffle 11 between first filter chamber 2 and the second filter chamber 6, first baffle 11 bottom

fixed connection casing

1, 3 liquid level of coolant liquid are less than first baffle 11, first filter screen 12 upper end fixed connection casing 1 upper end inner wall, first filter screen 12 lower extreme fixed connection first baffle 11 upper end, coolant liquid 3 can cool off waste gas and adsorb partial particulate matter and harmful gas.

The limiting structure 5 comprises a movable cavity 51, a spring 52, a moving plate 53, a limiting block 54, a connecting rod 55, a transmission rod 56 and a pulling block 57, wherein the movable cavity 51 is positioned inside the upper end of the shell 1, the spring 52 is arranged inside the movable cavity 51, the outer side of the spring 52 is fixedly connected with the shell 1, the inner side of the spring 52 is fixedly connected with the moving plate 53, the limiting block 54 is fixedly connected with the middle of the inner side of the moving plate 53, the inner bottom of the limiting block 54 is arranged to be an inclined plane, the outer side of the moving plate 53 is fixedly connected with the connecting rod 55, the upper end of the outer side of the connecting rod 55 is fixedly connected with the transmission rod 56, the upper end of the transmission rod 56 penetrates through the shell 1 and extends to the outer side, the upper end of the transmission rod 56 is fixedly connected with the pulling block 57, and the limiting structure facilitates the installation of the exhaust pipe 17 into the shell 1.

A second partition plate 13 is arranged between the second filtering cavity 6 and the third filtering cavity 8, the upper end of the second partition plate 13 is fixedly connected with the shell 1, the upper end of a second filtering net 14 is fixedly connected with the lower end of the second partition plate 13, the lower end of the second filtering net 14 is fixedly connected with the inner wall of the lower end of the shell 1, the filtering hole of the second filtering net 14 is smaller than the filtering hole of the first filtering net 12, the bottom of the air outlet hole 10 is communicated with the third filtering cavity 8, and the second filtering net 14 can be aligned.

Inside exhaust pipe 17 runs through casing 1 and extends to first filter chamber 2, and sealed 4 that cup joints with casing 1 junction in the middle of the exhaust pipe 17, inside exhaust pipe 17 bottom submergence coolant liquid 3, exhaust pipe 17 corresponds limit structure 5 in the middle of and is provided with the restriction groove, and sealed 4 can seal the junction of exhaust pipe 17 and casing 1.

The working principle is as follows:

when the exhaust pipe 17 is installed, firstly, the exhaust pipe 17 is aligned with the opening at the upper left side of the shell 1, the exhaust pipe 17 is pushed into the opening of the shell 1, the limit block 54 is pushed outwards by the exhaust pipe 17, the limit block 54 enters the movable cavity 51, after the exhaust pipe 17 is pushed downwards to a required position, the limit groove comes to the inner side of the limit block 54, the spring 52 pushes the moving plate 53 to move inwards, the moving plate 53 pushes the limit block 54 to move inwards, the limit block 54 enters the limit groove, the installation is completed, when the exhaust pipe is disassembled, the pull block 57 is pulled outwards to the bottom, the limit block 54 is pulled outwards, the limit block 54 leaves the limit groove, and the exhaust pipe 17 can be taken out.

During the use, blast pipe 17 is discharged waste gas into coolant liquid 3 in, coolant liquid 3 at first reduces the temperature of waste gas, and absorb partial particulate matter in the waste gas with harmful gas, carry out prefilter through first filter screen 12 with waste gas, absorb the harmful gas in the waste gas through active carbon 7, filter waste gas once more through second filter screen 14, adsorb the particulate matter in the waste gas through adsorbing cotton 9 at last, accomplish the processing to waste gas, finally discharge waste gas from venthole 10.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides an exhaust treatment device for full hydrogen bell-type annealing furnace, includes casing (1) and blast pipe (17), its characterized in that: the device is characterized in that a first filter chamber (2) is arranged on the left side in the shell (1), a cooling liquid (3) is arranged in the first filter chamber (2), a sealing gasket (4) is arranged at the upper end of the first filter chamber (2), a limiting structure (5) is arranged in the upper end of the left side of the shell (1), a second filter chamber (6) is arranged in the middle of the inner part of the shell (1), activated carbon (7) is arranged in the second filter chamber (6), a third filter chamber (8) is arranged on the right side in the prime number shell (1), adsorption cotton (9) is arranged in the third filter chamber (8), an air outlet (10) is arranged in the upper end of the right side of the shell (1), a first partition plate (11) is arranged on the left side in the shell (1), a first filter screen (12) is arranged on the upper end of the first partition plate (11), a second partition plate (13) is arranged on the right side in the shell (1), a second filter screen (14) is arranged at the lower end of the second partition board (13), a liquid outlet (15) is arranged at the lower end of the left side of the shell (1), and a liquid inlet (16) is arranged at the upper end of the left side of the shell (1).

2. The exhaust gas treatment device for the all-hydrogen hood-type annealing furnace according to claim 1, characterized in that: set up first baffle (11) between first filter chamber (2) and second filter chamber (6), first baffle (11) bottom fixed connection casing (1), coolant liquid (3) liquid level is less than first baffle (11), first filter screen (12) upper end fixed connection casing (1) upper end inner wall, first filter screen (12) lower extreme fixed connection first baffle (11) upper end.

3. The exhaust gas treatment device for the all-hydrogen hood-type annealing furnace according to claim 1, characterized in that: the limiting structure (5) comprises a movable cavity (51), a spring (52), a moving plate (53), a limiting block (54), a connecting rod (55), a transmission rod (56) and a pulling block (57), the movable cavity (51) is located inside the upper end of the shell (1), the spring (52) is arranged inside the movable cavity (51), the outer side of the spring (52) is fixedly connected with the shell (1), the inner side of the spring (52) is fixedly connected with the moving plate (53), the limiting block (54) is fixedly connected to the middle of the inner side of the moving plate (53), the inner side bottom of the limiting block (54) is arranged to be an inclined plane, the outer side of the moving plate (53) is fixedly connected with the connecting rod (55), the outer side upper end of the connecting rod (55) is fixedly connected with the transmission rod (56), the upper end of the transmission rod (56) penetrates through the shell (1) and extends to the outer side, and the upper end of the transmission rod (56) is fixedly connected with the pulling block (57).

4. The exhaust gas treatment device for the all-hydrogen hood-type annealing furnace according to claim 1, characterized in that: set up second baffle (13) in the middle of second filter chamber (6) and third filter chamber (8), second baffle (13) upper end fixed connection casing (1), second filter screen (14) upper end fixed connection second baffle (13) lower extreme, second filter screen (14) lower extreme fixed connection casing (1) lower extreme inner wall, the filtration pore of crossing of second filter screen (14) is less than the filtration pore of crossing of first filter screen (12), venthole (10) bottom intercommunication third filter chamber (8).

5. The exhaust gas treatment device for the all-hydrogen hood-type annealing furnace according to claim 1, characterized in that: inside exhaust pipe (17) run through casing (1) and extend to first filter chamber (2), sealed pad (4) are cup jointed with casing (1) junction in the middle of exhaust pipe (17), inside exhaust pipe (17) bottom submergence coolant liquid (3), correspond restriction structure (5) in the middle of exhaust pipe (17) and be provided with the restriction groove.