CN213507291U - Energy-saving annealing furnace - Google Patents

Abstract

The utility model relates to an energy-conserving annealing stove, including annealing stove body, be provided with the blast pipe on the annealing stove body, the blast pipe is kept away from annealing stove body one end and has been set firmly the deposit room, blast pipe intercommunication deposit room and annealing stove body, be provided with the back flow between deposit room and the annealing stove body, all install the power spare on blast pipe and the back flow. This application has through carrying the steam in the annealing stove to the storage chamber and preserve, when the annealing stove needs reuse, will deposit indoor steam and send back the annealing stove, makes the interior initial temperature of annealing stove be higher than the normal atmospheric temperature, reduces the effect of the required time energy saving of annealing stove heating.

Description

Energy-saving annealing furnace

Technical Field

The application relates to the field of heat treatment equipment, in particular to an energy-saving annealing furnace.

Background

An annealing furnace is a process used in semiconductor device manufacturing that includes heating a plurality of semiconductor wafers to affect their electrical properties. The heat treatment is designed for different effects. The wafer may be heated to activate the dopants, convert the thin film into a thin film or convert the thin film into a wafer substrate interface, densify the deposited thin film, change the state of the grown thin film, repair implanted damage, move dopants or transfer dopants from one thin film to another or from the thin film into the wafer substrate.

In view of the above-described related art, the inventors consider that the annealing furnace consumes a large amount of energy when used.

SUMMERY OF THE UTILITY MODEL

In order to reduce the energy consumption when the annealing stove uses, this application provides an energy-conserving annealing stove.

The application provides an energy-conserving annealing stove adopts following technical scheme:

the utility model provides an energy-conserving annealing stove, includes annealing stove body, be provided with the blast pipe on the annealing stove body, the blast pipe is kept away from annealing stove body one end and has been set firmly the deposit room, blast pipe intercommunication deposit room and annealing stove body, be provided with the back flow between deposit room and the annealing stove body, all install the power spare on blast pipe and the back flow.

Through adopting above-mentioned technical scheme, through carrying the steam in the annealing stove to the storage chamber and preserving, when the annealing stove needs reuse, send back the annealing stove with the steam in the storage chamber, make the interior primary temperature of annealing stove be higher than the normal atmospheric temperature, reduce the required time energy saving of annealing stove heating.

Optionally, the storage chamber is provided with an exhaust gas discharge pipe.

Through adopting above-mentioned technical scheme, the exhaust vent can be with the gas outgoing who does not use in the deposit room.

Optionally, a filtering component is mounted on the exhaust pipe, and the filtering component filters gas exhausted from the annealing furnace body.

Through adopting above-mentioned technical scheme, filtering component can filter the annealing stove combustion gas, reduces poisonous and harmful gas and flows back to the annealing stove, reduces the probability that operating personnel inhaled poisonous and harmful gas.

Optionally, the filter assembly comprises a filter box and a filter element, the filter box is arranged on the exhaust pipe, the filter element is detachably inserted into the filter box, and the filter element covers and separates the whole exhaust pipe.

Through adopting above-mentioned technical scheme, the filter core is used for adsorbing poisonous and harmful gas, and follow-up filter effect after guaranteeing the long-term use of filter core through renew cartridge.

Optionally, an air overflow pipe is arranged at the top of the storage chamber, and a pressure valve is mounted on the air overflow pipe.

Through adopting above-mentioned technical scheme, gas overflow pipe cooperation pressure valve can be when deposit indoor gaseous excess pressure is great, with partial gas outgoing.

Optionally, a gas collecting hood is arranged on the outer side hood of the gas overflow pipe, an air outlet pipe is fixedly arranged on one side of the gas collecting hood, which is far away from the gas overflow pipe, the air outlet pipe is fixedly arranged on the tail gas discharge pipe, and the air outlet pipe is communicated with the tail gas discharge pipe and the gas collecting hood.

Through adopting above-mentioned technical scheme, gas collecting channel and outlet duct can collect the exhaust gas of gas overflow pipe, reduce the influence of the gas that gas overflow pipe overflowed to the environment.

Optionally, the storage chamber is provided with a cleaning opening, and the cleaning opening is hinged with a closed door.

Through adopting above-mentioned technical scheme, wash open-ended setting and can make things convenient for the operator to open the deposit room, carry out regular washing to the deposit room.

Optionally, the storage compartment and the outer side of the closure door are both covered with a layer of insulation.

Through adopting above-mentioned technical scheme, the setting up of insulating layer can reduce the scattering and disappearing of heat in the deposit room.

In summary, the present application includes at least one of the following beneficial technical effects:

the hot air in the annealing furnace is conveyed to the storage chamber for storage, and when the annealing furnace needs to be used again, the hot air in the storage chamber is conveyed back to the annealing furnace, so that the initial temperature in the annealing furnace is higher than the normal temperature, the time required by heating the annealing furnace is reduced, and energy is saved;

the filtering component can filter gas discharged by the annealing furnace, so that toxic and harmful gas is prevented from flowing back to the annealing furnace, and the probability of the toxic and harmful gas sucked by an operator is reduced;

the gas overflow pipe is matched with the pressure valve, so that part of gas can be discharged when the excessive pressure of the gas in the storage chamber is larger;

the gas collecting hood and the gas outlet pipe can collect gas discharged by the gas overflow pipe, so that the influence of the gas overflowing from the gas overflow pipe on the environment is reduced;

the arrangement of the cleaning opening can facilitate an operator to open the storage chamber, and the storage chamber is cleaned regularly.

Drawings

Fig. 1 is a schematic view of the overall structure of the present embodiment.

Description of reference numerals: 1. an annealing furnace body; 2. an exhaust pipe; 3. a storage chamber; 4. a return pipe; 5. a power member; 6. a tail gas discharge pipe; 7. a filter assembly; 71. a filter box; 72. a filter element; 8. an air overflow pipe; 9. a pressure valve; 10. a gas-collecting hood; 11. an air outlet pipe; 12. cleaning the opening; 13. a closing door; 14. an insulating layer.

Detailed Description

The present application is described in further detail below with reference to fig. 1.

The embodiment of the application discloses an energy-saving annealing furnace, refer to fig. 1, which comprises an annealing furnace body 1, wherein the annealing furnace body 1 is a rectangular furnace body, the annealing furnace body is placed on the ground, an opening is formed in one side of the annealing furnace body, an openable sealing door is arranged at the opening, a heating device is arranged in the annealing furnace body 1, an exhaust pipe 2 is arranged on the annealing furnace body 1, a storage chamber 3 is fixedly arranged at one end, away from the annealing furnace body 1, of the exhaust pipe 2, the exhaust pipe 2 is communicated with the storage chamber 3 and the annealing furnace body 1, a return pipe 4 is arranged between the storage chamber 3 and the annealing furnace body 1, power parts 5 are respectively arranged on the exhaust pipe 2 and the return pipe 4, the power parts 5 are air pumps, the power parts 5 on the exhaust pipe 2 drive the air in the annealing furnace body 1; through carrying the steam in the annealing stove to preserve in the deposit chamber 3, when annealing stove body 1 needs reuse, will deposit the steam in the chamber 3 and send back annealing stove body 1, make the interior initial temperature of annealing stove body 1 be higher than the normal atmospheric temperature, thereby reduce annealing stove body 1 and heat the required time and realize the effect of energy saving.

Referring to fig. 1, a tail gas discharge pipe 6 is arranged on the storage chamber 3, the tail gas discharge pipe 6 can discharge unused gas in the storage chamber 3, and the tail gas is discharged through a pipeline connected with a tail gas absorption treatment, so that the discharge of toxic and harmful gas in an annealing process is reduced; the storage chamber 3 is provided with a cleaning opening 12, a closed door 13 is hinged at the cleaning opening 12, the closed door 13 opens or closes the cleaning opening 12 through rotation, the closed door 13 and the storage chamber 3 are arranged in a sealing manner when the closed door 13 is closed, other leakage in the storage chamber 3 is reduced, and the arrangement of the cleaning opening 12 can facilitate an operator to open the storage chamber 3 and clean the storage chamber 3 regularly; the outside of deposit room 3 and closing door 13 all is stamped one deck insulating layer 14, and the asbestos is chooseed for use to the insulating layer 14, and the asbestos is thermal-insulated effectual and easily acquire with low costs, and the setting up of insulating layer 14 can reduce the thermal scattering and disappearing in the deposit room 3, guarantees the heat of gaseous in the deposit room 3, makes the gas temperature who flows back to in the annealing stove body 1 higher to further the energy saving.

Referring to fig. 1, a filtering component 7 is mounted on the exhaust pipe 2, and the filtering component 7 can filter gas exhausted from the annealing furnace body 1, absorb part of toxic and harmful gas, reduce the amount of toxic and harmful gas in the preheating furnace, and reduce the influence of the toxic and harmful gas on operators when the preheating furnace is used; the filter assembly 7 includes the installation setting with the filter cartridge 71 on the blast pipe 2 with can dismantle insert the filter core 72 of establishing on filter cartridge 71, filter core 72 is pegged graft and is set up with filter cartridge 71 when going up sealed the setting with the filter cartridge 71 junction, thereby guarantee to reduce toxic gas's leakage, whole blast pipe 2 is separated in the cover of filter core 72, filter core 72 chooses the filter core 72 that activated carbon made for use, filter core 72 is used for adsorbing toxic harmful gas, and its filter effect can worsen gradually after filter core 72 uses for a long time, detachable filter core 72 can be changed through dismantling, thereby guarantee the filter effect of filter core 72.

Referring to fig. 1, an air overflow pipe 8 is arranged at the top of a storage chamber 3, a pressure valve 9 is installed on the air overflow pipe 8, when a large amount of gas in an annealing furnace body 1 is discharged into the storage chamber 3, the temperature of the gas in the storage chamber 3 is increased, the pressure is increased, the storage chamber 3 is easily broken when the pressure is too high, and when the pressure is too high, the air overflow pipe 8 is matched with the pressure valve 9, so that a part of gas can be discharged when the pressure of the gas in the storage chamber 3 is too high, the air pressure in the storage chamber 3 is ensured, and the probability of dangerous accidents is reduced; cover in the 8 outside of excessive trachea is equipped with gas collecting channel 10, gas collecting channel 10 deviates from 8 one sides of excessive trachea and has set firmly outlet duct 11, outlet duct 11 keeps away from 10 one sides of gas collecting channel and sets firmly on tail gas discharge pipe 6, 11 intercommunication tail gas discharge pipes of outlet duct and gas collecting channel 10, 8 combustion gas of excessive trachea only filters through filtering component 7, inside still can have some poisonous and harmful gas, random emission can lead to operating personnel to inhale poisonous and harmful gas, can influence operational environment simultaneously, gas collecting channel 10 and outlet duct 11 can be collected 8 combustion gas of excessive trachea, reduce the influence of the gas that excessive trachea 8 spills over to the environment.

The implementation principle of the embodiment of the application is as follows: the annealing furnace comprises an annealing furnace body 1, a storage chamber 3, a backflow pipe 4, a workpiece, a storage chamber 3, a storage chamber, a workpiece and a storage chamber, wherein the workpiece is placed in the annealing furnace body 1 for annealing treatment, hot air in the annealing furnace body 1 is conveyed into the storage chamber 3 through the backflow pipe 2 after the annealing treatment is finished, and the hot air in the storage chamber 3 flows back into the annealing furnace body 1 through the backflow pipe 4 when the annealing furnace body 1 is required to be used subsequently, so that the initial temperature in the annealing furnace body; when the annealing furnace body 1 is not used any more in a short time, the gas in the annealing furnace body 1 is discharged into the storage chamber 3, and then the gas is discharged into tail gas treatment equipment for treatment through the tail gas discharge pipe 6, and is discharged into the atmosphere after treatment; when the pressure of the gas in the storage chamber 3 is high, the pressure valve 9 is automatically opened by the gas to release the pressure, and the pressure in the storage chamber 3 is ensured after part of the gas is discharged.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims (8)

1. The utility model provides an energy-conserving annealing stove, includes annealing stove body (1), be provided with blast pipe (2) on annealing stove body (1), its characterized in that: blast pipe (2) are kept away from annealing stove body (1) one end and have been set firmly deposit room (3), and blast pipe (2) intercommunication deposit room (3) and annealing stove body (1), be provided with back flow (4) between deposit room (3) and the annealing stove body (1), all install power spare (5) on blast pipe (2) and back flow (4).

2. The energy-saving annealing furnace according to claim 1, characterized in that: and a tail gas discharge pipe (6) is arranged on the storage chamber (3).

3. An energy-saving annealing furnace according to claim 2, characterized in that: the exhaust pipe (2) is provided with a filtering component (7), and the filtering component (7) filters gas exhausted from the annealing furnace body (1).

4. An energy-saving annealing furnace according to claim 3, characterized in that: the filter assembly comprises a filter box (71) and a filter element (72), the filter box (71) is arranged on the exhaust pipe (2), the filter element (72) is detachably inserted on the filter box (71), and the filter element (72) covers and separates the whole exhaust pipe (2).

5. An energy-saving annealing furnace according to claim 4, characterized in that: an air overflow pipe (8) is arranged at the top of the storage chamber (3), and a pressure valve (9) is arranged on the air overflow pipe (8).

6. An energy-saving annealing furnace according to claim 5, characterized in that: the outer side of the gas overflow pipe (8) is covered with a gas collecting hood (10), one side of the gas collecting hood (10) far away from the gas overflow pipe (8) is fixedly provided with a gas outlet pipe (11), one side of the gas outlet pipe (11) far away from the gas collecting hood (10) is fixedly arranged on the tail gas discharge pipe (6), and the gas outlet pipe (11) is communicated with the tail gas discharge pipe (6) and the gas collecting hood (10).

7. The energy-saving annealing furnace according to claim 1, characterized in that: the storage chamber (3) is provided with a cleaning opening (12), and a closed door (13) is hinged to the cleaning opening (12).

8. The energy-saving annealing furnace according to claim 1, characterized in that: the storage chamber (3) and the outer side of the closed door (13) are covered with a layer of heat insulation layer (14).

Images