CN214310237U - Scanning electron microscope sample stage - Google Patents
Scanning electron microscope sample stage Download PDFInfo
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- CN214310237U CN214310237U CN202120468360.XU CN202120468360U CN214310237U CN 214310237 U CN214310237 U CN 214310237U CN 202120468360 U CN202120468360 U CN 202120468360U CN 214310237 U CN214310237 U CN 214310237U
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Abstract
The utility model provides a scanning electron microscope sample stage, which comprises a stage body and a sample carrying net, wherein the upper end surface of the stage body is provided with a containing cavity extending towards the interior of the stage body; the sample carrying net is detachably arranged in the accommodating cavity; the sample carries and has preset interval with holding the bottom surface in chamber between, and sample carries the net and is used for bearing the sample turbid liquid after the dispersion to can make sample powder or granule even adhesion on sample carries the net after drying, prevent that sample powder or granule from taking place the heavy cementation and thereby guarantee SEM-EDS's testing result in dispersant evaporation to dryness in-process.
Description
Technical Field
The utility model relates to a scientific research equipment field particularly, relates to a scanning electron microscope sample platform.
Background
Scanning electron microscopy-energy dispersive spectroscopy (SEM-EDS) has been widely used in microscopic studies and material identification in the fields of life, physics, chemistry, materials, and earth science as a high-resolution, high-precision large-scale precision instrument capable of synchronously representing the apparent characteristics and element distribution of a substance.
In practical application, the quality of scanning and transmission electron microscope atlas is different greatly due to the quality of sample preparation. For powder and more viscous particle samples (e.g., soil samples), there are generally two methods of sample preparation: firstly, a powder or particle sample is directly scattered on a conductive adhesive for SEM-EDS analysis; secondly, dispersing sample particles or powder by using a liquid dispersing agent, then dropwise adding the dispersing liquid on a sample table, drying by an oven, spraying a conductive layer on a sample on the sample table, and then carrying out SEM-EDS analysis.
Among the above methods, the first method directly sprinkles the powder or particle sample on the conductive adhesive, often causes the accumulation of the sample at a part of the position due to the great operation difficulty, and is difficult to realize the uniform distribution of the sample on the conductive adhesive. The second method is to drop the dispersed sample onto the sample stage, and although the sample accumulation caused by manual operation in the first method is greatly eliminated, the existing sample stage is an open plane stage body, and the sample powder or particles are subjected to heavy cementation during the evaporation of the dispersing agent, so that the detection result of SEM-EDS is influenced. In addition, because the sample platform is of an open structure, the dried sample is very easy to be polluted.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a scanning electron microscope sample platform to thereby solve at least scanning electron microscope sample platform among the prior art and in the dispersant evaporation to dryness in-process sample powder or granule can take place the problem that heavily cementation influences SEM-EDS testing result.
In order to achieve the above object, the utility model provides a scanning electron microscope sample platform, include: the upper end surface of the table body is provided with an accommodating cavity extending towards the inside of the table body; the sample carrying net is detachably arranged in the accommodating cavity; wherein, the sample carries and has predetermineeing the interval with holding between the bottom surface of chamber, and the sample carries the net and is used for bearing the sample turbid liquid after the dispersion.
Furthermore, the platform body and the accommodating cavity are both cylindrical structures, and the sample carrying net is a circular structure; wherein, the diameter of sample carrier net and the diameter of holding the chamber and match.
Furthermore, a liquid discharge hole extending along the radial direction of the table body is formed in the side wall of the bottom of the accommodating cavity; the liquid discharge hole is used for discharging sample suspension liquid leaked from the sample carrying net.
Further, the aperture of the liquid discharge hole is smaller than one third of the height of the accommodating cavity.
Further, the scanning electron microscope sample stage still includes: the baffle plates are arranged on the side wall of the accommodating cavity at intervals along the circumferential direction of the accommodating cavity; wherein the plurality of baffles are used for supporting the sample carrying net.
Further, the length of the baffle along the radial direction of the containing cavity is less than one fifth of the diameter of the sample carrying net.
Further, the distance between the bottom surface of the baffle and the bottom surface of the accommodating cavity is larger than half of the height of the accommodating cavity.
Further, the scanning electron microscope sample stage still includes: the rubber plug is of a circular structure and is matched with the upper port of the containing cavity in shape; wherein, the plug is used for setting up in the last port that holds the chamber in order to hold the chamber and seal.
Further, the table body is made of aluminum or silicon, and the sample carrying net is a carbon film copper net or a gold film nickel net.
Further, the scanning electron microscope sample stage still includes: the connecting frame is arranged below the table body, and the table body is fixedly connected to the detection part of the scanning electron microscope through the connecting frame.
The scanning electron microscope sample stage applying the technical scheme of the utility model comprises a stage body and a sample carrying net, wherein the upper end surface of the stage body is provided with a containing cavity extending towards the interior of the stage body; the sample carrying net is detachably arranged in the accommodating cavity; the sample carries and has preset interval with holding the bottom surface in chamber between, and sample carries the net and is used for bearing the sample turbid liquid after the dispersion to can make sample powder or granule even adhesion on sample carries the net after drying, prevent that sample powder or granule from taking place the heavy cementation and thereby guarantee SEM-EDS's testing result in dispersant evaporation to dryness in-process.
Drawings
The accompanying drawings, which form a part of the present application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:
fig. 1 is a schematic cross-sectional structure diagram of an alternative scanning electron microscope sample stage according to an embodiment of the present invention;
fig. 2 is a schematic top view of an alternative scanning electron microscope sample stage according to an embodiment of the present invention; and
fig. 3 is a schematic side view of an alternative scanning electron microscope sample stage according to an embodiment of the present invention.
Wherein the figures include the following reference numerals:
10. a table body; 11. an accommodating chamber; 12. a drain hole; 20. carrying out sample net carrying; 30. a baffle plate; 40. a rubber plug; 50. and a connecting frame.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
According to the embodiment of the present invention, as shown in fig. 1 and 2, the scanning electron microscope sample stage includes a stage body 10 and a sample grid 20, wherein an accommodating cavity extending towards the inside of the stage body 10 is formed on the upper end surface of the stage body 10; the sample net 20 is detachably arranged in the accommodating cavity; the sample carrying net 20 and the bottom surface of the containing cavity are spaced at a preset distance, and the sample carrying net 20 is used for carrying a sample suspension dispersed by a dispersing liquid, so that sample powder or particles can be uniformly adhered to the sample carrying net 20 after drying, and the sample powder or particles are prevented from being heavily bonded in the process of drying the dispersing agent to dryness, thereby ensuring the detection result of SEM-EDS.
During specific implementation, the scanning electron microscope sample stage further comprises a connecting frame 50, the connecting frame 50 is arranged below the stage body 10, and the stage body 10 is fixedly connected to the detection position of the scanning electron microscope through the connecting frame 50. The table body 10 and the accommodating cavity 11 are both cylindrical structures, and the sample carrying net 20 is a circular structure; the diameter of the sample carrying net 20 is matched with the diameter of the accommodating cavity 11, and in practical application, the diameter of the sample carrying net 20 is slightly smaller than the diameter of the accommodating cavity 11, so that the sample carrying net 20 can be smoothly put into the accommodating cavity 11 or taken out of the accommodating cavity 11, and an overlarge gap is not left between the sample carrying net 20 and the side wall of the accommodating cavity 11. Further, the table body 10 is made of aluminum or silicon, the sample carrying net 20 is a carbon film copper net or a gold film nickel net, and the aperture of the meshes of the sample carrying net 20 can be selected according to experiment requirements and the size of dispersed soil particles. In practical application, the table body 10 and the accommodating cavity 11 can be designed to be square according to requirements, and other structures can be changed correspondingly.
In the process of dropping sample turbid liquid to sample carrier net 20, part of sample turbid liquid leaks to the holding cavity 11 below through the mesh of sample carrier net 20, in order to discharge the sample turbid liquid that leaks in time, avoid holding cavity 11 bottom and remain too much sample turbid liquid influence stoving, furthermore, as shown in fig. 3, set up the outage 12 along the radial extension of stage 10 on the lateral wall of holding cavity 11 bottom, the aperture of outage 12 is less than and holds the one third of cavity 11 height, the lower edge of outage 12 and the bottom surface parallel and level that holds cavity 11, outage 12 is used for discharging the sample turbid liquid that sample carrier net 20 leaks down, thereby avoid holding cavity 11 bottom and remain too much sample turbid liquid, effectively shorten the stoving time.
Furthermore, the scanning electron microscope sample stage further comprises a plurality of baffles 30, wherein the baffles 30 are arranged on the side wall of the accommodating cavity 11 at intervals along the circumferential direction of the accommodating cavity 11; the sample-carrying net 20 is supported at a certain height in the accommodation chamber 11 by a plurality of baffles 30. Baffle 30 is less than one fifth of sample year net 20 diameter along holding the radial length in chamber 11, on the basis of guaranteeing to bear sample year net 20, avoids baffle 30 overlength to carry the local of net 20 with the sample to shelter from, influences the testing result.
Further, the distance between the bottom surface of the baffle 30 and the bottom surface of the accommodating cavity 11 is greater than half of the height of the accommodating cavity 11, so that the bottom surface of the baffle 30 is higher than the upper edge of the liquid discharge hole 12, and further, a sufficient space is provided between the sample carrying net 20 and the bottom surface of the accommodating cavity 11, and sample turbid liquid leaking from the sample carrying net 20 can be timely and smoothly discharged through the liquid discharge hole 12.
After the whole sample table is moved into an oven for drying, because the upper port of the accommodating cavity 11 is of an open structure, sample particles left on the sample carrying net 20 are extremely easy to be polluted, and the detection result is further influenced. Further, the scanning electron microscope sample stage also comprises a rubber plug 40, wherein the rubber plug 40 is of a circular structure and is matched with the shape of the upper port of the accommodating cavity 11; after the sample is dried, the rubber plug 40 is plugged into the upper port of the accommodating cavity 11, so that the accommodating cavity 11 is closed, and therefore, the sample particles are prevented from being polluted by external dust or impurities falling on the sample particles. Further, when the rubber plug 40 closes the containing cavity 11, the edge of the rubber plug 40 is tightly attached to the upper port of the containing cavity 11, so as to seal the containing cavity 11; the lower end of the rubber plug 40 is spaced from the sample carrying net 20 by a preset distance, so that the rubber plug 40 is prevented from rubbing off sample particles on the sample carrying net 20, and the sample particles are prevented from being uneven.
When in specific use, the detailed steps are as follows:
step 1: drying collected soil samples in the shade, grinding and sieving, wherein the sieve mesh is preferably 10 meshes;
step 2: weighing the sieved soil sample, mixing the soil sample into a dispersing agent according to a certain liquid-soil ratio, and shaking by hand, wherein the dispersing agent is preferably distilled water or ultrapure water, the liquid-soil ratio is 50-200, and the shaking by hand is used for fully and uniformly contacting the water and the soil sample for about 3-5 minutes;
and step 3: and carrying out ultrasonic dispersion on the suspension obtained in the last step, and then standing for a short time. Wherein, the ultrasonic dispersion can be carried out for 3-5 times, each time is 3-6 seconds, and the suspension is preferably slightly turbid when the suspension is kept still for about 5 minutes; in particular, this step is not necessary for studies concerning soils of different size fractions.
And 4, step 4: installing a sample carrying net 20 in the accommodating cavity 11 of the table body 10, wherein the material of the sample carrying net 20 is preferably a carbon film copper net, and if the energy spectrum needs to detect carbon elements, a gold film nickel net is selected;
and 5: and (3) sucking a small amount of upper suspension from the suspension in the step (2) or (3) by using a rubber head dropper, dropwise adding the upper suspension into a sample carrying net (20) (the diameter of the sample carrying net is 1 cm, and only 2-3 drops are dropwise added), and allowing part of the dispersing agent to pass through the sample carrying net (20) and leak into the containing cavity (11) below and flow out through a liquid discharge hole (12).
Step 6: moving the whole sample table into an oven, drying at 60-75 ℃, blowing off soil particles or powder which are not firmly adhered on the sample carrying net 20 by using an ear washing ball, and then covering a rubber plug 40;
and 7: as the sample carrying net 20 is provided with the conductive carbon or gold supporting film, the sample stage can be directly arranged on the SEM-EDS instrument for detection, and the sample carrying net 20 is taken out for direct TEM-EDS analysis.
The utility model provides a scanning electron microscope sample platform compares in current sample platform, and the advantage is as follows:
1. after the soil sample is dispersed and dried, the sample table can be directly arranged on an SEM-EDS instrument for detection without splashing a conductive layer, and the sample carrying net 20 can also be independently taken out to be directly used for TEM-EDS detection and analysis.
2. The sample carrying net 20 can not only effectively prevent the heavy cementation of dispersed soil particles, but also realize the separation of soil particles with different particle sizes, thereby meeting different research requirements;
3. the sample grid 20 can be made of different materials according to the needs of the sample, a gold film nickel grid can be selected for the research concerning carbon elements, and a carbon film copper grid can be selected for the rest researches.
4. The liquid discharge hole 12 at the bottom of the accommodating cavity 11 of the table body 10 can enable part of the dispersing agent to flow out, and the drying time of the sample is shortened;
5. the rubber plug 40 on the containing cavity 11 of the table body 10 can effectively reduce the risk of contamination of the prepared electron microscope sample.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A scanning electron microscope sample stage is characterized by comprising:
the table comprises a table body (10), wherein the upper end surface of the table body (10) is provided with an accommodating cavity (11) extending towards the inside of the table body;
a sample carrier net (20) detachably provided in the accommodating chamber (11);
the sample carrying net (20) is arranged on the bottom surface of the containing cavity (11) and is used for carrying a sample suspension liquid after dispersion of the dispersion liquid, and a preset distance is reserved between the sample carrying net (20) and the bottom surface of the containing cavity (11).
2. The scanning electron microscope sample stage according to claim 1, wherein the stage body (10) and the accommodating cavity (11) are both cylindrical structures, and the sample grid (20) is a circular structure;
wherein the diameter of the sample carrier net (20) is matched with the diameter of the containing cavity (11).
3. The scanning electron microscope sample stage according to claim 2, wherein a liquid discharge hole (12) extending along the radial direction of the stage body (10) is formed in the side wall of the bottom of the accommodating cavity (11);
wherein the liquid discharge hole (12) is used for discharging the sample suspension leaked from the sample carrying net (20).
4. Scanning electron microscope sample stage according to claim 3, characterized in that the aperture of the drain hole (12) is less than one third of the height of the receiving chamber (11).
5. The sem sample stage of claim 2, further comprising:
the number of the baffles (30) is multiple, and the baffles (30) are arranged on the side wall of the accommodating cavity (11) at intervals along the circumferential direction of the accommodating cavity (11);
wherein a plurality of said baffles (30) are used to support said sample carrier web (20).
6. Scanning electron microscope sample stage according to claim 5, characterized in that the length of the baffle (30) in the radial direction of the receiving chamber (11) is less than one fifth of the diameter of the sample carrier web (20).
7. Scanning electron microscope sample stage according to claim 5, characterized in that the distance between the bottom surface of the baffle (30) and the bottom surface of the receiving chamber (11) is greater than half the height of the receiving chamber (11).
8. The sem sample stage of claim 2, further comprising:
the rubber plug (40), the rubber plug (40) is of a circular structure and is matched with the shape of the upper port of the containing cavity (11);
wherein, the rubber plug (40) is used for being arranged at the upper port of the containing cavity (11) to seal the containing cavity (11).
9. Scanning electron microscope sample stage according to claim 1, characterized in that the stage body (10) is made of aluminum or silicon, and the sample-carrying net (20) is a carbon film copper net or a gold film nickel net.
10. The sem sample stage of claim 1, further comprising:
the connecting frame (50) is arranged below the table body (10), and the table body (10) is fixedly connected to the detection part of the scanning electron microscope through the connecting frame (50).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120468360.XU CN214310237U (en) | 2021-03-04 | 2021-03-04 | Scanning electron microscope sample stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120468360.XU CN214310237U (en) | 2021-03-04 | 2021-03-04 | Scanning electron microscope sample stage |
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| Publication Number | Publication Date |
|---|---|
| CN214310237U true CN214310237U (en) | 2021-09-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202120468360.XU Expired - Fee Related CN214310237U (en) | 2021-03-04 | 2021-03-04 | Scanning electron microscope sample stage |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023087474A1 (en) * | 2021-11-19 | 2023-05-25 | 深圳晶泰科技有限公司 | Preparation device and method for powder sample |
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2021
- 2021-03-04 CN CN202120468360.XU patent/CN214310237U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023087474A1 (en) * | 2021-11-19 | 2023-05-25 | 深圳晶泰科技有限公司 | Preparation device and method for powder sample |
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Granted publication date: 20210928 |