CN214277002U - Novel sticking film machine cull detect device - Google Patents

Novel sticking film machine cull detect device Download PDF

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Publication number
CN214277002U
CN214277002U CN202022542752.4U CN202022542752U CN214277002U CN 214277002 U CN214277002 U CN 214277002U CN 202022542752 U CN202022542752 U CN 202022542752U CN 214277002 U CN214277002 U CN 214277002U
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CN
China
Prior art keywords
roller bearing
sticky tape
cull
film machine
sticking film
Prior art date
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Active
Application number
CN202022542752.4U
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Chinese (zh)
Inventor
梅雪军
叶金浪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitech Semiconductor Wuxi Co Ltd
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Hitech Semiconductor Wuxi Co Ltd
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Priority to CN202022542752.4U priority Critical patent/CN214277002U/en
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Abstract

The utility model provides a novel sticking film machine cull detection device, including sticky tape, baffle, first roller bearing, sensor, the head end of sticky tape passes between baffle and the first roller bearing, the sensor sets up two sides about the head end of sticky tape, the sticky tape passes through third roller bearing, glass stick in proper order, the protection film of sticky tape is peeled off to the glass stick, and the protection film rear is equipped with and compresses tightly the roller bearing, be equipped with the wafer under compressing tightly the roller bearing, the third roller bearing is close to sticky tape department and is equipped with the tensiometer, and the excessive gluey problem of discovery that can be timely provides early warning signal for equipment, and pause equipment that can be quick reminds personnel to handle unusual position, reduces piling up of cull, and it is bad to reduce the quality. The equipment damage time caused by poor quality is saved, the labor cost for processing quality accidents is saved, the cost is saved, and the yield is improved.

Description

Novel sticking film machine cull detect device
Technical Field
The utility model mainly relates to the field of semiconductor equipment, especially, relate to a novel sticking film machine cull detect device
Background
The existing film sticking machine can only carry out normal film sticking operation, has no residual glue detection device and cannot carry out early warning on residual glue left on equipment; all inspections require manual spot cleaning: time and labor are consumed; the incomplete glue of leaving over can lead to the sticking film of sticking film machine unusual, directly leads to the product quality unusual, and the product yield step-down, company's income reduces. If not discovered in time, a large number of continuous failures will occur, causing huge losses to the company. The existing equipment does not consider the situation that the adhesive tape overflows in the middle of the roller and the roller due to extrusion in the mechanical design process, so that the quality problem caused by the overflow of the adhesive tape is not considered, the defect of the length of the roller is caused in the mechanical design process, and the situation that the adhesive tape is extruded and the adhesive tape overflows due to overlong of the roller is not considered.
SUMMERY OF THE UTILITY MODEL
To the above-mentioned defect of prior art, the utility model provides a novel sticking film machine cull detection device, including sticky tape 3, baffle 1, first roller bearing 2, sensor 4, the head end of sticky tape 3 passes between baffle 1 and the first roller bearing 2, sensor 4 sets up two sides about the head end of sticky tape 3, sticky tape 3 passes through third roller bearing 6, glass stick 7 in proper order, glass stick 7 peels off the protection film of sticky tape 3, and the protection film rear is equipped with and compresses tightly roller bearing 8, be equipped with the wafer under compressing tightly roller bearing 8, third roller bearing 6 is close to sticky tape 3 department and is equipped with tensiometer 5.
Preferably, the number of the third rollers 6 is 2, and the 2 third rollers 6 are tangent to attach the adhesive tape 3 between the 2 third rollers 6.
Preferably, the number of the pressing rollers 8 is 1.
Preferably, the wafer is placed and fixed above the platform 9.
The utility model has the advantages that:
the excessive gluey problem of discovery that can be timely, timely provide early warning signal for equipment, pause equipment that can be quick reminds personnel to handle unusual position, reduces piling up of cull, and it is bad to reduce the quality. The equipment damage time caused by poor quality is saved, the labor cost for processing quality accidents is saved, the cost is saved, and the yield is improved.
Drawings
FIG. 1 is a block diagram of the present invention;
Detailed Description
In order to make the technical solutions of the present invention better understood and make the above features, objects, and advantages of the present invention more comprehensible, the present invention is further described with reference to the following examples. The examples are intended to illustrate the invention only and are not intended to limit the scope of the invention.
As shown in fig. 1.
The utility model provides a novel sticking film machine cull detection device, includes sticky tape 3, baffle 1, first roller bearing 2, sensor 4, baffle 1 and first roller bearing 2 are passed to the head end of sticky tape 3 between, sensor 4 sets up two sides about the head end of sticky tape 3, sticky tape 3 passes through third roller bearing 6, glass stick 7 in proper order, glass stick 7 peels off the protection film of sticky tape 3, and the protection film rear is equipped with and compresses tightly roller bearing 8, it is equipped with the wafer to compress tightly under the roller bearing 8, third roller bearing 6 is close to sticky tape 3 department and is equipped with tensiometer 5.
In this embodiment, preferably, there are 2 third rollers 6, and 2 third rollers 6 are tangent to attach the tape 3 between the 2 third rollers 6.
In this embodiment, preferably, there are 1 pressing roller 8.
In this embodiment, the wafer is preferably placed on the platform 9 and fixed.
The working principle is as follows: the sensor 4 senses that the residual glue is generated between the baffle 1 and the first rolling shaft 2, the sensor 4 amplifies signals through the amplifier and provides signals for equipment, and the equipment detects abnormality, stops automatic operation of the equipment and prompts the abnormality of the equipment. Sticky tape 3 passes through baffle 1 and first roller bearing 2, increases sensor 4 and comes the incomplete glue that the response spilled over, and sticky tape 3 passes through tensiometer 5, again through third roller bearing 6, carries out the separation of sticky tape and membrane under the effect of peel rod 7, and under the effect that compresses tightly roller bearing 8, sticky tape 3 can be posted on the wafer above platform 9.
The above-described embodiments are merely illustrative of the principles and utilities of the present patent application and are not intended to limit the present patent application. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of this patent application. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical concepts disclosed in the present application shall be covered by the claims of this patent application.

Claims (4)

1. The utility model provides a novel sticking film machine cull detection device, a serial communication port, including sticky tape (3), baffle (1), first roller bearing (2), sensor (4), the head end of sticky tape (3) is passed between baffle (1) and first roller bearing (2), sensor (4) set up two sides about the head end of sticky tape (3), sticky tape (3) are in proper order through third roller bearing (6), glass stick (7) are peeled off the protection film of sticky tape (3), and the protection film rear is equipped with and compresses tightly roller bearing (8), it is equipped with the wafer to compress tightly under roller bearing (8), third roller bearing (6) are close to sticky tape (3) department and are equipped with tensiometer (5).
2. The novel sticking film machine cull detection device of claim 1, characterized in that: the number of the third rollers (6) is 2, and the 2 third rollers (6) are tangent to attach the adhesive tape (3) between the 2 third rollers (6).
3. The novel sticking film machine cull detection device of claim 2, characterized in that: the number of the pressing rolling shafts (8) is 1.
4. The novel sticking film machine cull detection device of claim 3, characterized in that: the wafer is placed and fixed above the platform (9).
CN202022542752.4U 2020-11-06 2020-11-06 Novel sticking film machine cull detect device Active CN214277002U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022542752.4U CN214277002U (en) 2020-11-06 2020-11-06 Novel sticking film machine cull detect device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022542752.4U CN214277002U (en) 2020-11-06 2020-11-06 Novel sticking film machine cull detect device

Publications (1)

Publication Number Publication Date
CN214277002U true CN214277002U (en) 2021-09-24

Family

ID=77773615

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022542752.4U Active CN214277002U (en) 2020-11-06 2020-11-06 Novel sticking film machine cull detect device

Country Status (1)

Country Link
CN (1) CN214277002U (en)

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