CN214270678U - Full-automatic quartz capsule fire polishing equipment - Google Patents
Full-automatic quartz capsule fire polishing equipment Download PDFInfo
- Publication number
- CN214270678U CN214270678U CN202022177846.6U CN202022177846U CN214270678U CN 214270678 U CN214270678 U CN 214270678U CN 202022177846 U CN202022177846 U CN 202022177846U CN 214270678 U CN214270678 U CN 214270678U
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- CN
- China
- Prior art keywords
- full
- fire polishing
- integrated control
- lifting cylinder
- polishing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000010453 quartz Substances 0.000 title claims abstract description 60
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 60
- 238000005498 polishing Methods 0.000 title claims abstract description 35
- 239000002775 capsule Substances 0.000 title abstract description 26
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910002804 graphite Inorganic materials 0.000 claims description 9
- 239000010439 graphite Substances 0.000 claims description 9
- 230000000694 effects Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007524 flame polishing Methods 0.000 description 3
- 238000003672 processing method Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202022177846.6U CN214270678U (en) | 2020-09-29 | 2020-09-29 | Full-automatic quartz capsule fire polishing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202022177846.6U CN214270678U (en) | 2020-09-29 | 2020-09-29 | Full-automatic quartz capsule fire polishing equipment |
Publications (1)
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CN214270678U true CN214270678U (en) | 2021-09-24 |
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CN202022177846.6U Active CN214270678U (en) | 2020-09-29 | 2020-09-29 | Full-automatic quartz capsule fire polishing equipment |
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CN (1) | CN214270678U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115070590A (en) * | 2022-07-12 | 2022-09-20 | 上海强华实业股份有限公司 | Polishing method of quartz cavity |
-
2020
- 2020-09-29 CN CN202022177846.6U patent/CN214270678U/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115070590A (en) * | 2022-07-12 | 2022-09-20 | 上海强华实业股份有限公司 | Polishing method of quartz cavity |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20230829 Address after: No. 89, Shendong Fourth Road, Shenfu Demonstration Zone, Fushun City, Liaoning Province, 113000 Patentee after: Liaoning Tuobang Hongji Semiconductor Materials Co.,Ltd. Address before: Group 4, BeiLiGuan village, Yuhong Township, Yuhong District, Shenyang City, Liaoning Province Patentee before: Wu Jingli |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: No. 89 Shendong Fourth Road, Shenfu Demonstration Zone, Shenyang City, Liaoning Province, 110000 Patentee after: Liaoning Tuobang Hongji Semiconductor Materials Co.,Ltd. Country or region after: China Address before: No. 89, Shendong Fourth Road, Shenfu Demonstration Zone, Fushun City, Liaoning Province, 113000 Patentee before: Liaoning Tuobang Hongji Semiconductor Materials Co.,Ltd. Country or region before: China |