CN214263045U - Blowing, sucking and dust removing device of sampling machine - Google Patents
Blowing, sucking and dust removing device of sampling machine Download PDFInfo
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- CN214263045U CN214263045U CN202023157767.5U CN202023157767U CN214263045U CN 214263045 U CN214263045 U CN 214263045U CN 202023157767 U CN202023157767 U CN 202023157767U CN 214263045 U CN214263045 U CN 214263045U
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Abstract
The utility model belongs to the technical field of the accumulational improvement of system appearance system broken unit internal plant surface dust, concretely relates to system model machine pressure-vaccum dust collector, it includes: a dust removal box; the upper swirl nozzles are arranged at the upper part in the dust removal box, and are communicated with a first air pipe and an air pump; the middle part of the dust removing box is provided with a plurality of middle cyclone nozzles, and each middle cyclone nozzle is communicated with a second air pipe which is communicated with an air pump; a plurality of lower cyclone nozzles arranged at the lower part in the dust removal box, wherein each lower cyclone nozzle is communicated with a third air pipe which is communicated with an air pump; a plurality of dust collectors arranged at the bottom in the dust removing box. After the blowing, sucking and dust removing device of the sampling machine is operated and started, negative pressure is generated inside the dust removing box, so that internal raised dust does not leak outwards. And then, by the blowing of the upper swirl nozzle, the middle swirl nozzle and the lower swirl nozzle, spiral air flow is formed, and the surface and dead corners of the complex structure of the equipment can be cleaned in all directions without dead corners.
Description
Technical Field
The utility model belongs to the technical field of the accumulational improvement of system appearance system crushing unit internal plant surface dust, concretely relates to system model machine pressure-vaccum dust collector.
Background
The existing full-automatic sample preparation and sample preparation dust treatment mode is as follows: the granule dust that the whole system appearance in-process of full-automatic sampling machine produced passes through the gap loss to the outside, piles up equipment, components and parts surface gradually, conceals and be difficult for the clearance, causes great potential safety hazard, and the clearance mode is mainly by artifical untimely clearance. The dust collector of the existing full-automatic sample preparation equipment only carries out simple air draft dust removal, and has the defects that: 1. the air draft dust removing device cannot meet the dust removing requirement of a large space; 2. the dust removal effect is only in the area within 30CM of the dust removal device dust suction port, and dust in the far area is settled on the surface of equipment; 3. the dust removal device cannot clean dust on the surface of the equipment; 4. the number of the empty coal sample bottles is small, and manual frequent distribution is needed.
CN 103521009A-a kind of system sample room dust collector. The system appearance room dust collector reforms transform is connected with a plurality of system appearance devices, including dust removal host computer and a plurality of dust removal pipeline, the dust removal host computer passes through the dust removal pipeline and is connected with each system appearance device respectively. The flexible dust removal arm can ensure that the dust removal range is not limited to the interior of the sample preparation device, and has the dust removal effect on the external space; and avoid the burden that large granule material got into the dust removal host computer and add heavy dust removal host computer through the filter screen. However, the sample preparation work is usually performed in a granular state or in a dusty state, and the sample preparation work inevitably generates a large amount of dust, and a dust removing device needs to be provided in a sample preparation chamber to ensure the normal operation of the equipment and protect the operator. The existing dust removal device only removes dust inside the sample preparation device, and dust diffused to the outside of the sample preparation device is useless, but the device adopts the existing common dust removal technology, is corresponding, and is mainly suitable for dust floating in the air, and has general removal effect on the surfaces of accumulated equipment and components and parts, which are hidden and difficult to clean. As paid out in the specification, the sample preparation chamber dust removal device is connected with a plurality of sample preparation devices and comprises a dust removal host machine and a plurality of dust removal pipelines, wherein the dust removal host machine is respectively connected with the sample preparation devices through the dust removal pipelines. The sample preparation chamber dust removal device is further designed in that the dust removal pipeline is a flexible dust collection arm. The sample preparation chamber dust removal device is further designed in that the flexible dust removal arm is connected with the sample preparation device through a filter screen. The flexible dust removal arm can ensure that the dust removal range is not limited to the interior of the sample preparation device, and the dust removal effect is also realized on the external space; and avoid the burden that large granule material got into the dust removal host computer and add heavy dust removal host computer through the filter screen.
SUMMERY OF THE UTILITY MODEL
For solving the defects of the prior art, the utility model provides a dust removal device for blowing and sucking of a sampling machine. The utility model provides a sampling machine pressure-vaccum dust collector can effectual reduction intensity of labour, reduce staff occupational health emergence probability, guarantee the dead angle clean up to can avoid the dust to pile up and produce spontaneous combustion phenomenon etc..
The utility model provides a technical scheme as follows:
a blowing, sucking and dust removing device of a sampling machine comprises:
a dust removal box;
the upper part swirl nozzles are arranged at the upper part in the dust removal box, and each upper part swirl nozzle is communicated with a first air pipe which penetrates through the dust removal box, extends out of the dust removal box and is communicated with an air pump;
the middle swirl nozzles are arranged in the middle of the dust removing box, and are communicated with a second air pipe which penetrates through the dust removing box, extends out of the dust removing box and is communicated with an air pump;
the lower part swirl nozzles are arranged at the lower part in the dust removal box, and each lower part swirl nozzle is communicated with a third air pipe which penetrates through the dust removal box, extends out of the dust removal box and is communicated with an air pump;
the dust collector is arranged at the bottom in the dust removal box, and an outlet of each dust collector is communicated with the outside of the dust removal box.
Based on the sampling machine pressure-vaccum dust collector that above-mentioned technical scheme provided, after the operation starts, the dust removal incasement portion produces the negative pressure, makes inside raise dust outwards not leak. And then, by the blowing of the upper swirl nozzle, the middle swirl nozzle and the lower swirl nozzle, spiral air flow is formed, and the surface and dead corners of the complex structure of the equipment can be cleaned in all directions without dead corners.
Specifically, each of the upper swirl nozzles is fixed to a vertical displacement mechanism.
Based on the technical scheme, the lifting of the upper swirl nozzle can be realized, so that the height of the upper swirl nozzle can be adjusted to adapt to different conditions.
Specifically, each of the middle swirl nozzles is fixed on a vertical displacement mechanism.
Based on the technical scheme, the lifting of the middle swirl nozzle can be realized, so that the height of the swirl nozzle can be adjusted to adapt to different conditions.
Specifically, each of the lower swirl nozzles is fixed to a vertical displacement mechanism.
Based on the technical scheme, the lifting of the lower swirl nozzle can be realized, so that the height of the lower swirl nozzle can be adjusted to adapt to different conditions.
Specifically, the vertical displacement mechanism includes:
the inner surface of one end wall of the sliding box is provided with a vertical rack, and the outer surface of the side wall is in sliding connection with the inner side wall of the dust removal box;
the motor is arranged beside the sliding box, the motor is horizontally arranged, a rotating shaft of the motor penetrates through the side wall of the sliding box and extends into the sliding box, a driving gear is arranged on the rotating shaft, the driving gear is meshed with the rack, and an electric wire of the motor penetrates through the dust removal box and extends out of the dust removal box;
and the base is fixed on the sliding box, and the upper swirl nozzle, the middle swirl nozzle or the lower swirl nozzle is fixed on the base.
Based on above-mentioned technical scheme, can realize motor drive, drive each whirl nozzle and reciprocate. And moreover, the dustproof function is realized on the gear and the rack part.
Specifically, two sides of the sliding box are respectively and vertically provided with a limiting sliding groove, each limiting sliding groove is fixed on the inner wall of the dust removal box, two corresponding limiting sliding strips are respectively and vertically arranged on two sides of the sliding box, and each limiting sliding strip extends into the corresponding limiting sliding groove and is in sliding connection with the limiting sliding groove.
Based on above-mentioned technical scheme, can lead spacingly to the removal of slip case, avoid taking place wrong removal.
Specifically, the rotating shaft and the middle part of the limiting sliding groove are equal in height, and the length of the limiting sliding groove is larger than twice the height of the sliding box.
Based on above-mentioned technical scheme, be convenient for realize that the sliding box shifts up to the highest point and moves down to the lowest point.
Specifically, a wire hole is formed in the top wall of the dust removal box, a rubber cover is fixed to the wire hole, a through hole is formed in the rubber cover, and each of the first air pipes, the second air pipes, the third air pipes and the electric wires penetrates through the wire hole and the through hole and extends out of the dust removal box.
Based on above-mentioned technical scheme, be convenient for the pipeline to insert the dust removal incasement.
Specifically, the rubber covers are sealed with the first air pipes, the second air pipes, the third air pipes and the electric wires through sealing glue.
Based on the technical scheme, the sealing function can be added at the wire hole.
Specifically, the electric wire of each motor is electrically connected with a forward and reverse rotation switch, and each forward and reverse rotation switch is arranged outside the dust removal box.
Based on the technical scheme, each swirl nozzle can be conveniently operated to move up and down.
Specifically, each upper swirl nozzle is arranged around the circumferential direction of the dust removal box.
Based on above-mentioned technical scheme, can increase the dust removal effect of upper region each direction.
Specifically, each middle swirl nozzle is arranged around the circumference of the dust removal box.
Based on above-mentioned technical scheme, can increase the dust removal effect of regional each direction in middle part.
Specifically, each lower swirl nozzle is arranged around the circumferential direction of the dust removal box.
Based on above-mentioned technical scheme, can increase the dust removal effect of lower part region each direction.
Specifically, each dust collector is arranged around the circumference of the dust collection box.
Based on above-mentioned technical scheme, can increase the dust exhaust effect of regional each side in bottom.
Specifically, the upper swirl nozzle is arranged obliquely downwards.
Based on above-mentioned technical scheme, be convenient for effectually can be all-round, do not have the dead angle to clean clearance equipment complex construction surface through forming the spiral air current.
Specifically, the middle swirl nozzle is obliquely arranged downwards.
Based on above-mentioned technical scheme, be convenient for effectually can be all-round, do not have the dead angle to clean clearance equipment complex construction surface through forming the spiral air current.
Specifically, the lower swirl nozzle is arranged obliquely downwards.
Based on above-mentioned technical scheme, be convenient for effectually can be all-round, do not have the dead angle to clean clearance equipment complex construction surface through forming the spiral air current.
Furthermore, the system can be provided with a controller which is respectively and electrically connected with each air pump. The controller controls the air pump of the upper swirl nozzle, the air pump of the middle swirl nozzle and the air pump of the lower swirl nozzle to be opened in sequence. The upper swirl nozzle sweeps firstly. The upper swirl nozzle forms spiral airflow in a rotating manner, so that the surface of the complex structure of the equipment can be cleaned in all directions without dead angles. And the upper cyclone nozzle stops after blowing for a fixed time, the air pump of the middle cyclone nozzle is started, and the middle layer area of the equipment stops after cleaning for a certain time. The air pump of the lower swirl nozzle is started, the lower layer area of the equipment is cleaned for a certain time and then stopped, and all the three layers are blown. And then circulating until the internal space and the surface dust of the equipment are cleaned.
Specifically, each air pump can be provided with a corresponding manual switch, and the air pump of the upper swirl nozzle, the air pump of the middle swirl nozzle and the air pump of the lower swirl nozzle are sequentially switched on in a manual operation mode, so as to perform circulation.
The utility model has the advantages that:
1. the blowing, sucking and dust removing device of the sampling machine provided by the utility model realizes dust removal of automatic equipment and reduces labor intensity;
2. the blowing, sucking and dust removing device of the sampling machine can reduce the contact of dust and operators and reduce the occupational health occurrence probability of the operators;
3. the utility model provides a sampling machine pressure-vaccum dust collector can clear up the inside dust of equipment comprehensively, guarantees the dead angle clean up.
4. The utility model provides a sampling machine pressure-vaccum dust collector can avoid the dust to pile up and produce the spontaneous combustion phenomenon.
Drawings
Fig. 1 is a schematic view of the whole structure of the blowing, sucking and dust removing device of the sampling machine provided by the utility model.
Fig. 2 is a partial side view of the vertical displacement mechanism of the blowing, sucking and dust removing device of the sampling machine provided by the utility model.
Fig. 3 is a partial front view of the vertical displacement mechanism of the blowing, sucking and dust removing device of the sampling machine provided by the utility model.
In fig. 1, 2 and 3, the structures represented by the reference numerals are listed as follows:
1. dust collector, 2, pile up the dust, 3, upper portion whirl nozzle, 4, middle part whirl nozzle, 5, lower part whirl nozzle, 6, dust removal case, 7, slip case, 8, rack, 9, motor, 10, drive gear, 11, seat platform, 12, spacing spout, 13, spacing draw runner, 14, line hole, 15, rubber lid.
Detailed Description
The following description is made for the purpose of illustrating the principles and features of the present invention, and is not intended to limit the scope of the invention.
It will be understood that when an element or component is referred to as being "connected," "positioned" or "coupled" to another element or component, it can be directly on the other element or component or intervening elements or components may also be present. The terms "left", "right", "upper", "lower" and the like as used herein are for illustrative purposes only.
In one embodiment, as shown in fig. 1, the blowing, sucking and dust removing device of the sampling machine comprises: a dust removal box 6; the upper part swirl nozzles 3 are arranged at the upper part in the dust removing box 6, each upper part swirl nozzle 3 is communicated with a first air pipe, and the first air pipe penetrates through the dust removing box 6, extends out of the dust removing box 6 and is communicated with an air pump; the middle cyclone nozzles 4 are arranged in the middle of the dust removing box 6, each middle cyclone nozzle 4 is communicated with a second air pipe, and the second air pipes penetrate through the dust removing box 6, extend out of the dust removing box 6 and are communicated with an air pump; the lower part swirl nozzles 5 are arranged at the inner lower part of the dust removing box 6, each lower part swirl nozzle 5 is communicated with a third air pipe, and the third air pipe penetrates through the dust removing box 6, extends out of the dust removing box 6 and is communicated with an air pump; the dust collector comprises a plurality of dust collectors 1 arranged at the bottom in a dust removal box 6, and outlets of the dust collectors 1 are communicated with the outside of the dust removal box 6. According to the blowing, sucking and dust removing device for the sampling machine, after the blowing, sucking and dust removing device is operated and started, negative pressure is generated inside the dust removing box, and internal raised dust is enabled to be free of leakage. And then, by the blowing of the upper swirl nozzle, the middle swirl nozzle and the lower swirl nozzle, spiral air flow is formed, and the surface and dead corners of the complex structure of the equipment can be cleaned in all directions without dead corners.
In one embodiment, each of the upper swozzles 3 is fixed to a vertical displacement mechanism. Based on the technical scheme, the lifting of the upper swirl nozzle can be realized, so that the height of the upper swirl nozzle can be adjusted to adapt to different conditions.
In one embodiment, each of the intermediate swozzles 4 is fixed to a vertical displacement mechanism. Based on the technical scheme, the lifting of the middle swirl nozzle can be realized, so that the height of the swirl nozzle can be adjusted to adapt to different conditions.
In one embodiment, each of the lower swozzles 5 is fixed to a vertical displacement mechanism. Based on the technical scheme, the lifting of the lower swirl nozzle can be realized, so that the height of the lower swirl nozzle can be adjusted to adapt to different conditions.
In one embodiment, as shown in fig. 2 and 3, the vertical displacement mechanism includes: the inner surface of one side wall of the sliding box 7 is provided with a vertical rack 8, and the outer surface of the side wall is connected with the inner side wall of the dust removal box 6 in a sliding manner; the motor 9 is arranged beside the sliding box 7, the motor 9 is horizontally arranged, a rotating shaft of the motor 9 penetrates through the side wall of the sliding box 7 and extends into the sliding box, a driving gear 10 is arranged on the rotating shaft, the driving gear 10 is meshed with the rack 8, and an electric wire of the motor 9 penetrates through the dust removal box 6 and extends out of the dust removal box 6; and a base 11 fixed on the sliding box 7, wherein the upper swirl nozzle 3, the middle swirl nozzle 4 or the lower swirl nozzle is fixed on the base 11. Based on this technical scheme, can realize motor drive, drive each whirl nozzle and reciprocate. And moreover, the dustproof function is realized on the gear and the rack part.
In one embodiment, two sides of the sliding box 7 are respectively and vertically provided with a limiting sliding groove 12, each limiting sliding groove 12 is fixed on the inner wall of the dust removing box 6, two corresponding limiting sliding strips 13 are respectively and vertically arranged on two sides of the sliding box 7, and each limiting sliding strip 13 extends into the corresponding limiting sliding groove 12 and is in sliding connection with the limiting sliding strip. Based on this technical scheme, can lead spacingly to the removal of slip case, avoid taking place wrong removal.
In one embodiment, the rotation shaft is at the same height as the middle of the limiting chute 12, and the length of the limiting chute 12 is greater than twice the height of the sliding box 7. Based on this technical scheme, be convenient for realize that the slide box shifts up to the highest point and moves down to the lowest point.
In one embodiment, a wire hole 14 is formed in the top wall of the dust removing box 6, a rubber cover 15 is fixed on the wire hole 14, the rubber cover 15 is provided with a through hole, and each first air pipe, each second air pipe, each third air pipe and each electric wire pass through the wire hole 14 and the through hole and extend out of the dust removing box 6. Based on this technical scheme, be convenient for the pipeline to insert to the dust removal incasement.
In one embodiment, the rubber cover 15 is sealed with the first air pipes, the second air pipes, the third air pipes and the electric wires by sealing glue. Based on the technical scheme, the sealing function can be added at the wire hole.
In one embodiment, the electric wire of each motor 9 is electrically connected with a forward and reverse rotation switch, and each forward and reverse rotation switch is arranged outside the dust removing box 6. Based on the technical scheme, the swirl nozzles can be conveniently operated to move up and down.
In one embodiment, each of the upper swozzles 3 is arranged around the circumference of the dust box 6. Based on this technical scheme, can increase the dust removal effect of upper region each direction.
In one embodiment, each of the intermediate swozzles 4 is disposed around the circumference of the dust box 6.
Based on this technical scheme, can increase the dust removal effect of regional each direction in middle part.
In one embodiment, each of the lower swozzles 5 is arranged around the circumference of the dust box 6.
Based on this technical scheme, can increase the dust removal effect of lower part region each direction.
In one embodiment, each of the suction cleaners 1 is arranged around the circumference of the dust box 6.
Based on this technical scheme, can increase the dust exhaust effect of regional each direction in bottom.
In one embodiment, the upper swozzle 3 is disposed diagonally downward.
Based on this technical scheme, be convenient for effectually can be all-round, do not have the dead angle to clean clearance equipment complex construction surface through forming the spiral air current.
In one embodiment, the central swozzle 4 is disposed diagonally downward.
Based on this technical scheme, be convenient for effectually can be all-round, do not have the dead angle to clean clearance equipment complex construction surface through forming the spiral air current.
In one embodiment, the lower swozzle 5 is disposed diagonally downward.
Based on this technical scheme, be convenient for effectually can be all-round, do not have the dead angle to clean clearance equipment complex construction surface through forming the spiral air current.
In one embodiment, the system may be provided with a controller electrically connected to each air pump. The controller controls the air pump of the upper swirl nozzle, the air pump of the middle swirl nozzle and the air pump of the lower swirl nozzle to be opened in sequence. The upper swirl nozzle sweeps firstly. The upper swirl nozzle forms spiral airflow in a rotating manner, so that the surface of the complex structure of the equipment can be cleaned in all directions without dead angles. And the upper cyclone nozzle stops after blowing for a fixed time, the air pump of the middle cyclone nozzle is started, and the middle layer area of the equipment stops after cleaning for a certain time. The air pump of the lower swirl nozzle is started, the lower layer area of the equipment is cleaned for a certain time and then stopped, and all the three layers are blown. And then circulating until the internal space and the surface dust of the equipment are cleaned.
In one embodiment, each air pump may also be provided with a corresponding manual switch, and the air pump of the upper swirl nozzle, the air pump of the middle swirl nozzle and the air pump of the lower swirl nozzle are sequentially turned on and then circulated in a manual operation mode. Based on the technical scheme, manual operation can be conveniently carried out.
The working principle of the utility model is as follows:
after the operation starts, the dust collector is opened, air draft removes dust, and the inside negative pressure that produces of equipment makes the inside raise dust of equipment outwards not have the leakage, carries out the dust absorption to dust in the effective range simultaneously. After a certain time, the upper layer swirl nozzle 3 is operated or controlled to start purging. The swirl nozzle rotates to form spiral airflow, and the spiral airflow contains airflow acting forces in two directions: one circumferential tangential force and one radial thrust. The centrifugal force generated by the tangential speed makes the dust be pushed by the nozzle in the vertical direction; the other is the centripetal force generated by the radial velocity of the rotating airflow, so that the dust is pushed to the far end by the radial force. Therefore, the air flow can clean and clean the surface of the complex structure of the equipment in all directions without dead angles, and gradually push the accumulated dust 2 to the dust suction device according to the requirement. The upper layer swirl nozzle 3 stops after blowing for a fixed time; operating or controlling the start of the middle-layer swirl nozzle 4, and stopping after the middle-layer area of the equipment is cleaned for a certain time; and operating or controlling the lower layer swirl nozzle 5 to start, cleaning the lower layer area of the equipment for a certain time and then stopping, and blowing all the three layers. And then operating or controlling the swirl nozzle to continuously and circularly purge according to the pulse interval of the upper layer, the middle layer and the lower layer until the internal space and the surface dust of the equipment are cleaned.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way; the utility model can be smoothly implemented by the ordinary technicians in the industry according to the drawings and the above description; however, those skilled in the art should understand that changes, modifications and variations made by the above-described technology can be made without departing from the scope of the present invention, and all such changes, modifications and variations are equivalent embodiments of the present invention; meanwhile, any changes, modifications, evolutions, etc. of the above embodiments, which are equivalent to the actual techniques of the present invention, still belong to the protection scope of the technical solution of the present invention.
Claims (10)
1. The utility model provides a model machine pressure-vaccum dust collector which characterized in that includes:
a dust removal box (6);
the upper part swirl nozzles (3) are arranged at the inner upper part of the dust removing box (6), each upper part swirl nozzle (3) is communicated with a first air pipe, and the first air pipe penetrates through the dust removing box (6), extends out of the dust removing box (6) and is communicated with an air pump;
the middle cyclone nozzles (4) are arranged in the middle of the interior of the dust removing box (6), each middle cyclone nozzle (4) is communicated with a second air pipe, and the second air pipes penetrate through the dust removing box (6), extend out of the dust removing box (6) and are communicated with an air pump;
the lower part swirl nozzles (5) are arranged at the inner lower part of the dust removing box (6), each lower part swirl nozzle (5) is communicated with a third air pipe, and the third air pipe penetrates through the dust removing box (6), extends out of the dust removing box (6) and is communicated with an air pump;
the dust collector comprises a plurality of dust collectors (1) arranged at the bottom in a dust collection box (6), and outlets of the dust collectors (1) are communicated with the outside of the dust collection box (6).
2. The blowing, sucking and dedusting device of the sampling machine according to claim 1, characterized in that:
each upper swirl nozzle (3) is respectively fixed on a vertical displacement mechanism;
each middle swirl nozzle (4) is respectively fixed on a vertical displacement mechanism;
and each lower swirl nozzle (5) is respectively fixed on a vertical displacement mechanism.
3. The sampling machine blowing, sucking and dedusting device according to claim 2, wherein the vertical displacement mechanism comprises:
the inner surface of one side wall of the sliding box (7) is provided with a vertical rack (8), and the outer surface of the side wall is in sliding connection with the inner side wall of the dust removal box (6);
the motor (9) is arranged beside the sliding box (7), the motor (9) is horizontally arranged, a rotating shaft of the motor penetrates through the end wall of the sliding box (7) and extends into the sliding box, a driving gear (10) is arranged on the rotating shaft, the driving gear (10) is meshed with the rack (8), and an electric wire of the motor (9) penetrates through the dust removal box (6) and extends out of the dust removal box (6);
and a base (11) fixed on the other side wall of the sliding box (7), wherein the upper swirl nozzle (3), the middle swirl nozzle (4) or the lower swirl nozzle (5) is fixed on the base (11).
4. The blowing, sucking and dedusting device of the sampling machine according to claim 3, characterized in that: two sides of the sliding box (7) are respectively and vertically provided with a limiting sliding groove (12), each limiting sliding groove (12) is fixed on the inner wall of the dust removing box (6), two sides of the sliding box (7) are respectively and correspondingly and vertically provided with a limiting sliding strip (13), and each limiting sliding strip (13) extends into the corresponding limiting sliding groove (12) and is in sliding connection with the limiting sliding groove.
5. The blowing, sucking and dedusting device of the sampling machine as claimed in claim 4, characterized in that: the rotating shaft is equal to the middle of the limiting sliding groove (12) in height, and the length of the limiting sliding groove (12) is larger than the height of the sliding box (7) by two times.
6. The blowing, sucking and dedusting device of the sampling machine according to claim 3, characterized in that: the dust removal box is characterized in that a wire hole (14) is formed in the top wall of the dust removal box (6), a rubber cover (15) is fixed to the wire hole (14), through holes are formed in the rubber cover (15), and the first air pipes, the second air pipes, the third air pipes and the electric wires penetrate through the wire hole (14) and the through holes and extend out of the dust removal box (6).
7. The blowing, sucking and dedusting device of the sampling machine as claimed in claim 6, characterized in that: the rubber cover (15) and the first air pipes, the second air pipes, the third air pipes and the electric wires are sealed through sealing glue.
8. The blowing, sucking and dedusting device of the sampling machine according to claim 3, characterized in that: and the electric wires of each motor (9) are respectively and electrically connected with a forward and reverse rotation switch, and each forward and reverse rotation switch is arranged outside the dust removal box (6).
9. The blowing, sucking and dedusting device of the sampling machine according to any one of claims 1 to 8, characterized in that: each upper swirl nozzle (3) is arranged around the circumference of the dust removal box (6); each middle swirl nozzle (4) is arranged around the circumference of the dust removal box (6); each lower swirl nozzle (5) is arranged around the circumference of the dust removal box (6); the dust collectors (1) are arranged around the circumferential direction of the dust removing box (6).
10. The blowing, sucking and dedusting device of the sampling machine according to any one of claims 1 to 8, characterized in that:
the upper swirl nozzle (3) is obliquely arranged downwards;
the middle swirl nozzle (4) is obliquely arranged downwards;
the lower swirl nozzle (5) is obliquely arranged downwards.
Priority Applications (1)
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CN202023157767.5U CN214263045U (en) | 2020-12-24 | 2020-12-24 | Blowing, sucking and dust removing device of sampling machine |
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CN202023157767.5U CN214263045U (en) | 2020-12-24 | 2020-12-24 | Blowing, sucking and dust removing device of sampling machine |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN115228862A (en) * | 2022-08-04 | 2022-10-25 | 长鑫存储技术有限公司 | Transfer chamber, cleaning method thereof and semiconductor processing equipment |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN115228862A (en) * | 2022-08-04 | 2022-10-25 | 长鑫存储技术有限公司 | Transfer chamber, cleaning method thereof and semiconductor processing equipment |
CN115228862B (en) * | 2022-08-04 | 2023-10-17 | 长鑫存储技术有限公司 | Transmission chamber, cleaning method thereof and semiconductor processing equipment |
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