CN214256911U - Hollow cathode electron emission device - Google Patents
Hollow cathode electron emission device Download PDFInfo
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- CN214256911U CN214256911U CN202120025874.8U CN202120025874U CN214256911U CN 214256911 U CN214256911 U CN 214256911U CN 202120025874 U CN202120025874 U CN 202120025874U CN 214256911 U CN214256911 U CN 214256911U
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- bracket
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- electrode
- hollow cathode
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Abstract
The utility model discloses a hollow cathode electron emission device, which comprises a cathode body and a bracket arranged below the cathode body; the bracket comprises a mounting bracket, an upper bracket and a lower bracket which are arranged in the mounting bracket; a ceramic air duct is arranged between the upper bracket and the lower bracket, and a first ferrule connector and a second ferrule connector are respectively arranged at two ends of the ceramic air duct; the ceramic air guide pipe is provided with an air pipe and is connected with the cathode body through the air pipe; two groups of electrode mounting holes are formed in the upper support, an emitting electrode is arranged on the cathode body, and the emitting electrode is positioned in the electrode mounting holes; the upper bracket is provided with a tantalum tube electrode fixedly connected with the upper bracket; through setting up the mounting bracket, set up upper bracket and lower carriage in the mounting bracket, with hollow cathode device electrode and gas circuit mechanism subassembly integrated installation in upper bracket and lower carriage inside, can effectually avoid the pollution of structure to be convenient for daily cleanness and maintenance are handled.
Description
Technical Field
The utility model relates to an optical coating technical field, concretely relates to hollow cathode electron emission device.
Background
The hollow cathode is a common physical discharge phenomenon, and electron emission generally utilizes the bombardment of inert gas ions on a discharge material to generate heat so as to realize electron emission. The traditional grid-free ion source and the grid ion source use a hollow cathode to replace a hot filament, and can solve the problems of short service life of the hot filament, substrate pollution and the like.
However, the electrodes and the gas circuit mechanism of the hollow cathode device widely used in the market are exposed and leaked outside, and the hollow cathode device is easily polluted in actual use, so that the problems of difficult cleaning, easy short circuit and the like are caused.
SUMMERY OF THE UTILITY MODEL
An object of the present invention is to provide a hollow cathode electron emission device to solve the above problems.
The utility model realizes the above purpose by the following technical proposal, a hollow cathode electron emission device, which comprises a cathode body and a bracket arranged below the cathode body;
the bracket comprises a mounting bracket, an upper bracket and a lower bracket which are arranged in the mounting bracket;
a ceramic air duct is arranged between the upper bracket and the lower bracket, a first ferrule connector and a second ferrule connector are respectively arranged at two ends of the ceramic air duct, the first ferrule connector is fixedly connected with the upper bracket, and the second ferrule connector is fixedly connected with the lower bracket;
the ceramic air guide pipe is provided with an air pipe and is connected with the cathode body through the air pipe;
two groups of electrode mounting holes are formed in the upper support, an emitting electrode is arranged on the cathode body, and the emitting electrode is positioned in the electrode mounting holes;
and the upper bracket is provided with a tantalum tube electrode fixedly connected with the upper bracket.
Preferably, the upper bracket and the lower bracket are respectively provided with a screw hole, and the upper bracket and the lower bracket are detachably connected with the mounting rack through screws.
Preferably, the cathode body is fixedly arranged on the upper support, the upper support is fixedly connected with the lower support, and the lower support is fixedly connected with the mounting frame.
Preferably, the upper bracket is provided with a first ferrule mounting hole, the lower bracket is provided with a second ferrule mounting hole, and the first ferrule connector and the second ferrule connector are respectively mounted in the first ferrule mounting hole and the second ferrule mounting hole.
Preferably, the cathode body, the first ferrule connector, the ceramic gas guide tube and the second ferrule connector are arranged on the gas tube in series.
Preferably, the lower support is provided with a tantalum tube electrode lead hole and a transmitting electrode lead hole.
Preferably, a lower support fixing hole is formed in one side of the mounting frame, and a mounting frame mounting hole is formed in the bottom of the mounting frame.
Preferably, the air pipe is a stainless steel air pipe.
The utility model has the advantages that:
the utility model discloses a set up the mounting bracket, set up upper bracket and lower carriage in the mounting bracket, the upper bracket is used for fixed cathode body, and the lower carriage is used for fixed upper bracket, and the mounting bracket is used for fixed lower carriage, and fix through the screw respectively between mounting bracket, upper bracket, the lower carriage, through installing hollow cathode device electrode and gas circuit mechanism subassembly integration inside upper bracket and lower carriage, can effectually avoid the pollution of structure, can pull out upper bracket and lower carriage through not hard up screw, be convenient for daily clean and maintenance processing.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is a schematic view of the structure of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1-2, the hollow cathode electron emission device of the present embodiment includes a cathode body 1 and a support disposed below the cathode body 1; the bracket comprises a mounting bracket 4, an upper bracket 2 and a lower bracket 3 which are arranged in the mounting bracket 4; a ceramic air duct 11 is arranged between the upper bracket 2 and the lower bracket 3, a first ferrule connector 6 and a second ferrule connector 12 are respectively arranged at two ends of the ceramic air duct 11, the first ferrule connector 6 is fixedly connected with the upper bracket 2, and the second ferrule connector 12 is fixedly connected with the lower bracket 3; an air pipe 5 is arranged on the ceramic air guide pipe 11, and the ceramic air guide pipe 11 is connected with the cathode body 1 through the air pipe 5; two groups of electrode mounting holes 15 are formed in the upper support 2, an emitting electrode 9 is arranged on the cathode body 1, and the emitting electrode 9 is located in the electrode mounting holes 15; the upper bracket 2 is provided with a tantalum tube electrode 7 fixedly connected with the upper bracket.
The upper support 2 and the lower support 3 are respectively provided with a screw hole, and the upper support 2 and the lower support 3 are detachably connected with the mounting rack 4 through screws; the cathode body 1 is fixedly arranged on the upper support 2, the upper support 2 is fixedly connected with the lower support 3, and the lower support 3 is fixedly connected with the mounting rack 4; a first ferrule mounting hole 16 is formed in the upper support 2, a second ferrule mounting hole 17 is formed in the lower support 3, and the first ferrule connector 6 and the second ferrule connector 12 are respectively mounted in the first ferrule mounting hole 16 and the second ferrule mounting hole 17; the cathode body 1, the first ferrule connector 6, the ceramic gas guide tube 11 and the second ferrule connector 12 are arranged on the gas tube 5 in series; the lower support 3 is provided with a tantalum tube electrode lead hole 8 and a transmitting electrode lead hole 10; a lower support fixing hole 14 is formed in one side of the mounting frame 4, and a mounting frame mounting hole 13 is formed in the bottom of the mounting frame 4; the air pipe 5 is a stainless steel air pipe.
Hollow cathode electron emission device in this embodiment sets up upper bracket and lower carriage through setting up the mounting bracket in the mounting bracket, and the upper bracket is used for fixed cathode body, and the lower carriage is used for fixed upper bracket, and the mounting bracket is used for fixed lower carriage, and fix through the screw respectively between mounting bracket, upper bracket, the lower carriage, through with hollow cathode device electrode and gas circuit mechanism subassembly integrated installation inside upper bracket and lower carriage, can effectually avoid the pollution of structure, can pull out upper bracket and lower carriage through not hard up screw, be convenient for daily cleanness and maintenance processing.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (8)
1. A hollow cathode electron emission device is characterized by comprising a cathode body and a bracket arranged below the cathode body;
the bracket comprises a mounting bracket, an upper bracket and a lower bracket which are arranged in the mounting bracket;
a ceramic air duct is arranged between the upper bracket and the lower bracket, a first ferrule connector and a second ferrule connector are respectively arranged at two ends of the ceramic air duct, the first ferrule connector is fixedly connected with the upper bracket, and the second ferrule connector is fixedly connected with the lower bracket;
the ceramic air guide pipe is provided with an air pipe and is connected with the cathode body through the air pipe;
two groups of electrode mounting holes are formed in the upper support, an emitting electrode is arranged on the cathode body, and the emitting electrode is positioned in the electrode mounting holes;
and the upper bracket is provided with a tantalum tube electrode fixedly connected with the upper bracket.
2. A hollow cathode electron-emitting device according to claim 1, wherein: the upper support and the lower support are respectively provided with a screw hole, and the upper support and the lower support are detachably connected with the mounting rack through screws.
3. A hollow cathode electron-emitting device according to claim 1, wherein: the cathode body is fixedly arranged on the upper support, the upper support is fixedly connected with the lower support, and the lower support is fixedly connected with the mounting frame.
4. A hollow cathode electron-emitting device according to claim 1, wherein: the upper support is provided with a first cutting sleeve mounting hole, the lower support is provided with a second cutting sleeve mounting hole, and the first cutting sleeve joint and the second cutting sleeve joint are respectively arranged in the first cutting sleeve mounting hole and the second cutting sleeve mounting hole.
5. A hollow cathode electron-emitting device according to claim 1, wherein: the cathode body, the first clamping sleeve connector, the ceramic air duct and the second clamping sleeve connector are arranged on the air pipe in series.
6. A hollow cathode electron-emitting device according to claim 1, wherein: and the lower support is provided with a tantalum tube electrode lead hole and a transmitting electrode lead hole.
7. A hollow cathode electron-emitting device according to claim 1, wherein: one side of the mounting frame is provided with a lower support fixing hole, and the bottom of the mounting frame is provided with a mounting frame mounting hole.
8. A hollow cathode electron-emitting device according to claim 1, wherein: the air pipe is a stainless steel air pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120025874.8U CN214256911U (en) | 2021-01-06 | 2021-01-06 | Hollow cathode electron emission device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120025874.8U CN214256911U (en) | 2021-01-06 | 2021-01-06 | Hollow cathode electron emission device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214256911U true CN214256911U (en) | 2021-09-21 |
Family
ID=77724411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120025874.8U Active CN214256911U (en) | 2021-01-06 | 2021-01-06 | Hollow cathode electron emission device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214256911U (en) |
-
2021
- 2021-01-06 CN CN202120025874.8U patent/CN214256911U/en active Active
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