CN212725221U - Hollow cathode neutralizer and ion source device - Google Patents

Abstract

The present application relates to a hollow cathode neutralizer and ion source device, the hollow cathode neutralizer comprising: a cathode tube, a rear end portion and a front end portion; the rear end part comprises a rear fixed seat and a barrel body of which one end is connected with the rear fixed seat; the cathode tube is arranged in the cylinder and is arranged in the rear fixed seat through an installation component; the front end part comprises a front fixing seat, an end cover and a maintaining piece, the front fixing seat is sleeved on the other end of the cylinder, and the pipe orifice of the cathode is aligned with the round hole on the maintaining piece; the rear fixing seat is internally provided with a ventilation pipeline connected with the cathode tube, and the rear fixing seat is fixedly connected with the front fixing seat through a positioning sheet. The hollow cathode neutralizer and the ion source device are convenient to align the pipe orifice of the cathode with the round hole on the maintaining sheet during installation, so that the installation requirement is reduced, and the installation process is simplified.

Description

Hollow cathode neutralizer and ion source device

Technical Field

The application relates to the technical field of ion sources, in particular to a hollow cathode neutralizer and an ion source device.

Background

The ion source is an applied scientific technology which has wide application, multiple types, multiple related sciences, strong technological property and rapid development. The ion source needs to use a cathode neutralizer, the cathode neutralizer generates a large amount of free electrons through the surface of high-temperature metal, and then forms electron beam current under the action of an electric field, so that the function of assisting ionization and neutralizing ion charges is achieved in the working process of the ion source.

The existing hollow cathode neutralizer is shown in figure 1, and figure 1 is a schematic structural diagram of the existing hollow cathode neutralizer, which comprises a cathode body 1, a hollow cathode tube 2 arranged in the cathode body 1, wherein the hollow cathode tube 2 is arranged in the cathode body 1 through a connecting piece 9, one end of the cathode body 1 is provided with a front cover 3, the other end of the cathode body is correspondingly provided with a rear cover 4, a maintaining electrode 5 is arranged in the front cover 3, an inert gas conveying pipeline 6 used for being communicated with the hollow cathode tube 2 is arranged at the position of the rear cover 5, and ceramic spacers 7 made of ceramic materials are sleeved on the hollow cathode tube 2 and the inert gas conveying pipeline 6. When the hollow cathode neutralizer is installed, the circular hole in the middle of the maintaining electrode 5 and the pipe orifice of the hollow cathode tube 2 are required to be fully aligned, the installation requirement is high, and the operation is difficult.

SUMMERY OF THE UTILITY MODEL

The present application aims to solve one of the above technical drawbacks, particularly the drawbacks of high installation requirements and difficult operation, and provides a hollow cathode neutralizer and an ion source device.

The application provides a hollow cathode neutralizer for an ion source device, comprising: a cathode tube, a rear end portion and a front end portion;

the rear end part comprises a rear fixed seat and a barrel body of which one end is connected with the rear fixed seat; the cathode tube is arranged in the cylinder and is arranged in the rear fixed seat through an installation component;

the front end part comprises a front fixing seat, an end cover and a maintaining piece, the front fixing seat is sleeved on the other end of the cylinder, and the pipe orifice of the cathode is aligned with the round hole on the maintaining piece; the rear fixing seat is internally provided with a ventilation pipeline connected with the cathode tube, and the rear fixing seat is fixedly connected with the front fixing seat through a positioning sheet.

In one embodiment, the rear fixing seat and the front fixing seat are respectively provided with a screw base, and the positioning plate is fixed on the screw base through screws.

In one embodiment, the screw sleeve is provided with a ceramic support column which is positioned at two sides of the positioning sheet and used for heat insulation.

In one embodiment, the number of the positioning pieces is three, and the positioning pieces are respectively arranged at two sides and the top of the rear end part and the front end part.

In one embodiment, the hollow cathode neutralizer further comprises a mounting bracket, wherein the mounting bracket is fixedly connected with the lower part of the front fixed seat through a screw; the positioning sheet is in a long strip shape.

In one embodiment, the hollow cathode neutralizer further comprises a mounting bracket connected to the positioning pieces disposed at both sides of the rear end part and the front end part; wherein the positioning pieces provided on both sides of the rear end portion and the front end portion are shaped like panels.

In one embodiment, a gas isolator is also connected in series on the vent pipe, and the gas isolator is detachably connected to the vent pipe.

In one embodiment, the vent conduit is further secured to the mounting bracket by a spacer member.

In one embodiment, the air duct is arranged inside the rear fixing seat in a right-angled shape.

The application also provides an ion source device, which comprises the hollow cathode neutralizer.

The hollow cathode neutralizer and the ion source device have the advantages that a combined structure of the rear end part and the front end part is designed; the rear fixing seat of the rear end part is fixedly connected with the front fixing seat of the front end part through the positioning sheet, and the pipe orifice of the cathode is conveniently aligned with the round hole on the maintaining sheet during installation, so that the installation requirement is reduced, and the installation process is simplified.

Furthermore, the locating plate is fixed on the screw base through screws, and ceramic support columns are sleeved on two sides of the locating plate through the screws for heat insulation, so that the situation that the shell of the hollow cathode neutralizer is burnt to damage the connecting line due to high temperature is avoided.

Furthermore, the mounting bracket of the hollow cathode neutralizer is connected with the positioning sheets at the two sides of the rear end part and the front end part, thereby simplifying the structure of the device, saving the cost and being convenient for production and installation.

Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.

Drawings

The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic view of a hollow cathode neutralizer according to the prior art;

FIGS. 2-6 are schematic illustrations of the hollow cathode neutralizer of the present application;

fig. 7 is a schematic view showing the alignment of the cathode tube and the holding sheet.

Detailed Description

Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.

As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, or operations, but do not preclude the presence or addition of one or more other features, integers, steps, operations, or groups thereof.

The application provides a hollow cathode neutralizer for an ion source device, and referring to fig. 2-6, fig. 2-6 are structural schematic diagrams of the hollow cathode neutralizer. As shown in fig. 2, most of the structures mainly include: a cathode tube 10, a rear end portion 20, and a front end portion 30; wherein, the rear end portion 20 comprises a rear fixing seat 210 and a cylinder 220 with one end connected with the rear fixing seat 210; the cathode tube 10 is arranged in the cylinder 220 and is arranged in the rear fixed seat 210 through the mounting assembly 201; the front end part 30 comprises a front fixed seat 310, an end cover 320 and a maintaining sheet 301, the front fixed seat 310 is sleeved on the other end of the cylinder 220, and the pipe orifice of the cathode tube 10 is aligned with the round hole on the maintaining sheet 301; the rear fixing seat 210 is internally provided with a ventilation pipeline 40 connected with the cathode tube 10, wherein the ventilation pipeline 40 can be arranged in the rear fixing seat 210 in a right-angle shape; the rear fixing seat 210 is fixedly connected with the front fixing seat 310 through the positioning plate 50.

The hollow cathode neutralizer and ion source device of the application designs a combined structure of a rear end part 20 and a front end part 30; the rear fixing seat 210 of the rear end portion 20 is fixedly connected with the front fixing of the front end portion 30 through the positioning piece 50, as shown in fig. 7, fig. 7 is an alignment schematic diagram of the cathode tube and the maintaining piece, and when the cathode tube is installed, the tube opening 101 of the cathode tube 10 is conveniently aligned with the round hole on the maintaining piece 301, so that the installation requirement is reduced, and the installation process is simplified.

Referring to fig. 2-6, the rear fixing seat 210 and the front fixing seat 310 are respectively provided with a screw base 501, and the positioning plate 50 is fixed on the screw base 501 through a screw 502; as shown in fig. 2-4, three screw bases 501 are used, wherein two screw bases are provided on the front fixing base 310, one screw base is provided on the rear fixing base, and three screw bases 501 are provided, and accordingly, three positions for fixing screws 502 are correspondingly provided on the positioning sheet; of course, the number of the screw bases 501 can be adjusted according to the requirement, for example, as shown in fig. 5 to 6, four screw bases are provided, and two screw bases are respectively provided on the rear fixing base 210 and the front fixing base 310. Further, as shown in fig. 4, a ceramic support column 503 is sleeved on the screw 502, and is located on both sides of the positioning plate 50 for heat insulation. Because the screw 502 is used as a wiring position, the wiring position is prevented from being burnt out due to high temperature of the hollow cathode neutralizer shell through heat insulation treatment.

Referring to fig. 2 to 6, the number of the positioning pieces 50 may be three, and the positioning pieces are respectively provided at both sides and at the top of the rear end portion 20 and the front end portion 30, and the shape thereof may be designed as desired. Further, the hollow cathode neutralizer may further include a mounting bracket 70, wherein in one embodiment, as shown in fig. 5-6, the spacers 50 are configured in the shape of an elongated bar, and three spacers 50 secure the rear end portion 20 and the front end portion 30; the mounting bracket 70 is fixedly connected with the lower part of the front fixing seat 310 through screws; a mounting bracket 70 is mounted to the lower portion of the hollow cathode neutralizer. In another embodiment, as shown in fig. 2 to 4, the positioning pieces 50 on both sides of the rear end portion 20 and the front end portion 30 are shaped like a panel, and the mounting bracket 70 is connected to the positioning pieces 50 provided on both sides of the rear end portion 20 and the front end portion 30; since the mounting bracket 70 can be directly coupled to the positioning pieces 50 at both sides of the rear end portion 20 and the front end portion 30, the apparatus structure can be simplified, the cost can be saved, and the production and installation can be facilitated.

Further, as shown in fig. 2 to 6, a gas separator 60 is connected in series to the vent pipe 40 of the hollow cathode neutralizer, the gas separator 60 is detachably connected to the vent pipe 40, and the vent pipe 40 is fixed to the mounting bracket 70 through a spacer 401; by adopting the technical scheme, the gas isolator 60 can be conveniently mounted and dismounted.

The present application also provides an ion source apparatus that employs the hollow cathode neutralizer of any of the embodiments described above. The ion source device of the application, through the hollow cathode neutralizer of the above embodiment, is convenient for aligning the pipe orifice 101 of the cathode tube 10 with the round hole on the maintaining sheet 301 during installation, thereby reducing the installation requirement and simplifying the installation process.

It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, several modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.

Claims (10)

1. A hollow cathode neutralizer for an ion source apparatus, comprising: a cathode tube, a rear end portion and a front end portion;

the rear end part comprises a rear fixed seat and a barrel body of which one end is connected with the rear fixed seat; the cathode tube is arranged in the cylinder and is arranged in the rear fixed seat through an installation component;

the front end part comprises a front fixing seat, an end cover and a maintaining piece, the front fixing seat is sleeved on the other end of the barrel, and the pipe orifice of the cathode tube is aligned with the round hole on the maintaining piece; the rear fixing seat is internally provided with a ventilation pipeline connected with the cathode tube, and the rear fixing seat is fixedly connected with the front fixing seat through a positioning sheet.

2. The hollow cathode neutralizer according to claim 1, wherein screw bases are respectively provided on the rear fixing base and the front fixing base, and the positioning plate is fixed on the screw bases by screws.

3. The hollow cathode neutralizer according to claim 2, wherein the screw sleeve has ceramic support posts on both sides of the spacer for thermal insulation.

4. The hollow cathode neutralizer according to claim 1, wherein the number of the positioning pieces is three, provided at both sides and at the top of the rear end portion and the front end portion, respectively.

5. The hollow cathode neutralizer according to claim 4, further comprising a mounting bracket fixedly connected to a lower portion of the front fixing base by a screw; the positioning sheet is in a long strip shape.

6. The hollow cathode neutralizer according to claim 4, further comprising a mounting bracket attached to positioning tabs provided on both sides of the rear end portion and the front end portion; wherein the positioning pieces provided on both sides of the rear end portion and the front end portion are shaped like panels.

7. The hollow cathode neutralizer according to claim 5 or 6, wherein a gas separator is further connected in series to the vent pipe, and the gas separator is detachably connected to the vent pipe.

8. The hollow cathode neutralizer according to claim 7, wherein the vent conduit is further secured to the mounting bracket by a spacer member.

9. The hollow cathode neutralizer according to claim 1, wherein the vent pipe is disposed inside the rear holder in a right-angled shape.

10. An ion source apparatus comprising a hollow cathode neutralizer according to any of claims 1 to 9.

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