CN1619759A - Static electricity preventing device using flexible x-ray and method for making its flexible x-ray tubes - Google Patents
Static electricity preventing device using flexible x-ray and method for making its flexible x-ray tubes Download PDFInfo
- Publication number
- CN1619759A CN1619759A CN 200310116297 CN200310116297A CN1619759A CN 1619759 A CN1619759 A CN 1619759A CN 200310116297 CN200310116297 CN 200310116297 CN 200310116297 A CN200310116297 A CN 200310116297A CN 1619759 A CN1619759 A CN 1619759A
- Authority
- CN
- China
- Prior art keywords
- tube
- grenz
- ray
- grenz ray
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003068 static effect Effects 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims abstract description 17
- 230000005611 electricity Effects 0.000 title abstract 4
- 229910052790 beryllium Inorganic materials 0.000 claims abstract description 19
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims abstract description 19
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 16
- 239000010937 tungsten Substances 0.000 claims abstract description 16
- 238000005219 brazing Methods 0.000 claims abstract description 12
- 239000011248 coating agent Substances 0.000 claims abstract description 10
- 238000000576 coating method Methods 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 9
- 239000002184 metal Substances 0.000 claims abstract description 9
- 239000010405 anode material Substances 0.000 claims abstract description 7
- 239000000919 ceramic Substances 0.000 claims abstract description 7
- 230000003472 neutralizing effect Effects 0.000 claims abstract description 3
- 239000007789 gas Substances 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- 238000007747 plating Methods 0.000 claims description 8
- 238000005507 spraying Methods 0.000 claims description 7
- 229910052571 earthenware Inorganic materials 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 6
- 230000005855 radiation Effects 0.000 claims description 6
- 239000000428 dust Substances 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910000754 Wrought iron Inorganic materials 0.000 claims description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000007872 degassing Methods 0.000 claims description 3
- 238000007786 electrostatic charging Methods 0.000 claims description 3
- 230000005669 field effect Effects 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 230000006698 induction Effects 0.000 claims 1
- 238000007650 screen-printing Methods 0.000 claims 1
- 230000001953 sensory effect Effects 0.000 claims 1
- 238000003079 width control Methods 0.000 claims 1
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 239000000843 powder Substances 0.000 abstract description 2
- 239000007921 spray Substances 0.000 abstract description 2
- 238000009713 electroplating Methods 0.000 abstract 1
- 230000001012 protector Effects 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 19
- 238000005516 engineering process Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910015320 MoMn Inorganic materials 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 229910000986 non-evaporable getter Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Images
Landscapes
- Elimination Of Static Electricity (AREA)
Abstract
This invention refers to a method for making a device for neutralizing surface static electricity on liquid crystal and semiconductor chip using positive /negative ion generated by x-ray radiating air and soft x-ray tube thereof. Said invention contains head part for anti-static electricity of directly ionizing gas molecular, protector for protecting operator, power source control part for controlling filament current and target voltage used for controlling ion generation and soft x-ray tube for generating high energy x-ray. Said soft x-ray tube is made by firstly producing ceramic tube metal spray film, then coating anode material on beryllium window board, electroplating tungsten on beryllium window, finally making high vacuum brazing. Said invention can neutralize static electricity in combustible powder.
Description
Technical field
The present invention relates to antistatic technique, in particular, relate to a kind of manufacture method of utilizing the anti-static device and the grenz tube thereof of grenz ray.
Background technology
In manufacturing engineerings such as liquid crystal (LCD), plasma (PDP) and semiconductor, because the fine dust that static causes absorption and because static discharge causes lattice damage, cause the rate of finished products of product to reduce, thereby become the main cause that influences output and cause the rising of manufacturing cost.
In above-mentioned manufacturing industry, as the antistatic countermeasure, main at present ion grid or the ion blower that generates ion according to corona discharge that use, but the ion that these devices produce need be used fan convection current air, in this process, jet phenomenon according to high-voltage discharge, produce on the end of sparking electrode and adhere to a lot (tens thousand of/cubic feet) metal microparticle, because the forced convertion of fan, thereby come off and attached to causing bad around liquid crystal (LCD), plasma (PDP) and the semiconductor lattice.
And the ozone gas that takes place during high-voltage discharge reaches about 4 ~ 10ppm, and this not only promotes adhering to of dust, and can make the balance of the negative ions that generates take place at any time to change, thereby has the inconvenience that needs constantly to adjust ionic equilibrium.Therefore the antistatic technique that dust does not need the convection current air yet need not take place.
Fig. 1 is that the corona discharge type anti-static device of conventional art is the typical principle schematic of applied voltage formula anti-static device.As shown in the figure, applying high voltage on sparking electrode, according to corona discharge, the gas ionization around the sparking electrode generates negative ions, the negative ions of generation can in and the static of electrostatic charging surface.
On the other hand, at growing ultraprecise series electron industrial technology and bio-science field, in order to form peace and quiet or to be almost aseptic clean room, need be with the air cleaning technology as its basis.The pollution that brings owing to Electrostatic Absorption at these clean rooms becomes most important reason.Especially very lagre scale integrated circuit (VLSIC) (ULSI), in the manufacturing of plasma (PDP) and tft liquid crystal (TFT-LCD), dielectric oxide film (SiO
2) or glass surface be high insulator, so be easy to take place electrostatic charging.The static that takes place in process so not only significantly reduces the reliability of product, and becomes the immediate cause that product yield reduces.The pollution of a little also can bring very big baneful influence to semi-conductive characteristic.Therefore need new anti-antistatic technology.
The conventional art in this field has United States Patent (USP) No. 5949849.This patent is relevant x ray generator and the content of utilizing its anti-static device.Anti-static device according to this patent possesses the protection box; the X-ray tube and the supply unit of grenz ray take place; X-ray tube possesses vacuum tube, negative electrode, output window, output window support portion, flanged pipe, anode (target) in addition, and inner constituent element of these X-ray tubes and protection box are mutually with heat and electrical connection.
Another conventional art in this field has Japan Patent No. 2951477.This patent is the content of relevant antistatic technique, want the charged object of antistatic to aim on the position of X-radiation, the built-in anode (target) of giving certain voltage and electric current, assembling simultaneously has the X-ray tube of beryllium window, from above-mentioned beryllium window radiation wavelength be more than 2 dusts to the X ray ionization of the 20 following scopes elemental gas in should the zone, with in and the static of charged object.
But the X ray wavelength that these conventional arts took place is very long, and the thermal characteristics of X-ray generator is not outstanding.
Summary of the invention
At the above-mentioned defective of prior art, the present invention will provide as the anti-static device of the grenz ray of the certain wavelength that is fit to eliminate storage static on vierics plate and the wafer surface in the clean room of liquid crystal (LCD), plasma (PDP) and semiconducter engineering (1.2 dusts are above to below 1.5) and the manufacture method of grenz tube thereof.
The technical solution adopted for the present invention to solve the technical problems is: using the ion generation pipe of beryllium film plating tungsten window material is that the grenz tube generation is high-octane, wavelength is between the grenz ray of 1.2 dust to 1.5 dusts, the static of the antistatic target object that is used for neutralizing and weaken.The manufacture method of described grenz tube is as follows: at first generate earthenware metal spraying film; The non-electrolytic nickel of plating on described metal spraying film; Tungsten filament had mercy on rod iron extract back LaBaO coating again out; On the beryllium window board, be coated with anode material again; Utilize the FVAS plater on the beryllium window, to electroplate tungsten; Use special-purpose vacuum furnace to carry out the high vacuum brazing; Near the last getter that inner cathode, inserts with Zr-Ni-V-Fe material formation, and the degassing and activate under 450 ℃ of conditions.
The anti-static device of grenz ray comprises antistatic head, protection portion, power control part composition.The antistatic head uses grenz tube direct ion oxidizing gases molecule, and can be at non-active gas (as N
2, use in Ar); Protection portion surrounds above-mentioned head, the soft x-ray radiation that the protection operator is not revealed by above-mentioned head; Power control part is connected by cable with the antistatic head, and power control part provides the ionogenic target voltage of filament voltage and control grenz tube for antistatic head grenz tube.
In the present invention, near the ambient gas the ionization charged object and generate ion or electronics come in and the static of antistatic body surface.
Grenz ray protection portion is that the steel plate of 1mm constitutes with thickness, has comprised the coupled switch that whether move for the above-mentioned power control part of security control and the door of the above-mentioned coupled switch of ON/OFF, and above-mentioned head does not generate grenz ray under above-mentioned the state of opening.
Power control part uses pulse width modulator to control target voltage and heater current, makes field-effect transistors (FET) constitute half-bridge circuit, and switching frequency is 30KHz, and heater current and target voltage use one group of pulse width modulator and half-bridge circuit to control respectively.
Power control part comprises the anode voltage generating unit, and the anode voltage generating unit makes target voltage constant in 9.5KV after by the tube voltage sensor feedback, by making heater current remain on 150uA after heater current transducer and the tube current sensor feedback.Because the feedback effect of tube current transducer is arranged, the long-time generating capacity of back grenz ray that uses can not change yet.
The anode voltage generating unit of power control part is by producing high-tension transformer, respond to the high-tension tube voltage transducer that described high voltage transformer produces, add doubler rectifier by the high pressure with the constant voltage action behind the aforementioned tube Voltage Feedback voltage, produce the transformer of heater current, respond to the heater current transducer of the heater current of described heater current transformer generation, fixing ceramic grenz tube and the parts composition that high voltage is imported by insulated electric conductor.
In order to suppress the heating temp of grenz tube, above-mentioned grenz tube uses earthenware.
The maximum of above-mentioned anti-static device effectively is provided with distance for 2000mm, near the ambient gas the ionization charged object and generate the static of corrective surface behind ion or the electronics.
The high-octane light of radiation (wavelength is between 1.2 dusts ~ 1.5 dusts) and direct ion oxidizing gases molecule, but in non-active gas also antistatic.Utilize near the ambient gas the ionization charged object and generate ion or the neutralize surface electrostatic of anti-charged object of electronics.
The anode of grenz ray (target) voltage is 9.5KV, and heater current is 150uA.
The grenz tube manufacture method of anti-static device is as follows: at first to obtain earthenware metal spraying film, specifically be on pottery with behind the method for printing screen spraying MoMn paste, in hydrogen atmosphere, cool off again after two hours with 1350 ℃ of heating; After the cooling, in order to promote wettability, carry out the electrolytic nickel metalized on the surface during for brazing; According to the diameter of the amount of electrons that will generate decision tungsten filament, twine at certain thickness rod iron to extract out behind the filament of a fixing turn and use the LaBaO coating after the nickel plating; Then, be coated with anode material on the beryllium window board, the scolder that this step will make the copper by 73% silver and 27% constitute is only being wanted the marginal position of brazing, and can not flow into the anode surface of coating, thereby lowers efficiency; Utilize FVAS (Filtered Vacuum Arc Source) plater on the beryllium window, to electroplate tungsten behind the above-mentioned anode material of coating; Use special-purpose vacuum furnace to carry out the high vacuum brazing, use molybdenum heating installation to make temperature reach 900 ℃, for vacuum degree reaches 4 * 10
-7Torr utilizes turbine pump (Turbo molecular Pump) and rotary pump (Rotary Pump) exhaust; After being ready to all parts, under the vacuum degree situation in holding tube, the impression scolder becomes one in case surpass the fusing point all material, brazing in conjunction with the time want the vacuum exhaust in the holding tube to carry out smoothly, can keep high vacuum state in the pipe that makes like this.
And in order to prolong the life-span of pipe, near the non-evaporable getter that constitutes with the Zr-Ni-V-Fe material inner cathode, getter insert the back degassing and activate in 450 ℃.
Adopt the spot welding mode to connect on the titanium cylinder outer wall that is fixed on negative electrode when getter pastes filament, the getter of activate can be adsorbed on the gas in the space in the pipe of sealing, can keep vacuum degree for a long time thus, and increase the service life.
The characteristics of grenz ray anti-static device are the ions that can generate high concentration as constituted above, so unusual antistatic in Duan time, and the voltage of residual static is very low, also antistatic in the non-active gas of atmospheric pressure state.
The anti-static device that utilizes grenz ray is near the ambient gas the ionization charged object and generate the static on ion rear defence charged object surface.Need traditional corona discharge type anti-static device of fan different with transmission, but use grenz ray also antistatic in the gas of windless condition for ion.
The anti-static device (perhaps light radiation formula anti-static device) that utilizes grenz ray according to the present invention be near the ambient gas the ionization charged object and generate ion after the static of the charged body surface of neutralization.The grenz ray anti-static device is in non-active gas or comprise in the atmosphere of oxygen (in the air) effectively antistatic thus.
As above said anti-static device neutralization of the present invention, mitigation antistatic target object comprise flammable powder, coating, LCD, PDP and semiconductor.
Soft x-ray radiation anti-static device of the present invention thus and corona discharge type anti-static device relatively have following advantage:
1) N
2But, also antistatic in the non-active gas such as Ar.
2) the lower tape electric potential almost remain to ± 5V in.
3) can eliminate static in the short time (about 1 second).
4) the gas dependence in the no surrounding air.
5) do not use fan, so do not send out dirt.
6) no electromagnetism noise.
7) non-maintaining.
The present invention is the grenz ray formula anti-static device that adopts earthenware, because use the ceramic ray tube of integrated the two poles of the earth and X ray window, can suppress heating temp.Relatively volume is little with the glass tubular type X-ray tube of measuring ray with generation, and grenz ray luminous efficiency height, also can drive with the small power supply device.
Description of drawings
The invention will be further described below in conjunction with drawings and Examples, in the accompanying drawing:
Fig. 1 is the antistatic principle schematic of traditional applied voltage formula anti-static device;
Fig. 2 is a routine structure chart that constitutes according to grenz ray anti-static device of the present invention;
Fig. 3 is a routine structure chart that constitutes according to power control part of the present invention;
Fig. 4 is the internal structure figure that is useful in grenz tube of the present invention;
Fig. 5 is the ion generating principle figure that is useful in grenz ray generating means of the present invention.
Embodiment
Below in conjunction with Fig. 2 to Fig. 5 the specific embodiment of the present invention is described:
Fig. 2 is the example block diagram of grenz ray anti-static device of the present invention; the example of anti-static device 1000 comprises; be used for producing the head 100 of grenz ray; surround above-mentioned head and prevent that above-mentioned head from leaking out the grenz ray protection portion 200 of grenz ray and making above-mentioned head produce the grenz ray of appropriate amount; and control ionogenic control signal and for above-mentioned head provide control voltage power control part 300 constitute, head 100 links to each other with power control part 300 by AC high voltage control cable 10 with protection portion 200.
The above-mentioned grenz ray protection portion 200 usefulness thickness that prevent to spill grenz ray are that the steel plate of 1mm constitutes; also comprise for security set and control the interlock switch 220 that whether above-mentioned power control part 300 move and the door 210 of the above-mentioned interlock switch 220 of ON/OFF, grenz ray does not take place in door 210 above-mentioned head 100 under the state of opening.Above-mentioned head 100 uses grenz tube to produce grenz ray, and above-mentioned power control part 300 provides the control power supply for above-mentioned grenz tube.
Fig. 3 is a routine structure chart that constitutes according to power control part according to the present invention 300, as shown in the figure, provides control grenz tube 150 filament voltages (direct current+3V) and the ionogenic target voltage (9.5kV) of grenz tube.Following detailed description according to the action and the effect of power control part 300 of the present invention.
Use pulse width modulator 310 (as LT3526) control target voltage and heater current in the present invention, make field-effect transistors (as IRFP640) constitute half-bridge circuit 320, switching frequency is 30KHz.Heater current and target voltage use one group of pulse width modulator 310 and half-bridge circuit 320 to control respectively.
In the present invention, produce high-tension transformer 340 and high pressure add doubler rectifier 350 by tube voltage transducer 370 feedbacks after, keep constant voltage (9.5kV) output.On the other hand, the transformer 360 that produces heater current keeps the 150uA constant current by tube current transducer 380 feedbacks.Adopt constant current but not the benefit of constant voltage is, if adopt the constant voltage mode, when filament attenuates, the temperature of tungsten filament 157 can rise, and causes the broken string of filament at the initial stage of energising.The present invention adopts current constant mode, can be so that the long-time generating capacity of back grenz ray that uses can not change yet.
The anode voltage generating unit adds doubler rectifier 350 by producing high-tension transformer 340 and high pressure, generate the transformer 360 of the generation heater current of heater current, heater current detecting means 330, the tube voltage transducer 370 of sensing tube voltage, the tube current transducer 380 of sensing tube current, reference comparator 390 and fixing ceramic grenz tube also constitute high voltage by the part that insulated electric conductor imports.The transformer 360 that produces high-tension transformer 340 and generation heater current all is to be high-tension transformer, needs the power capacity about 7W in this example.At this 153 are positive plates.
Grenz tube 150 is by the tungsten filament 157 that produces electronics and adopt the beryllium window board 151 of beryllium film plating tungsten, and is used for the high voltage generating unit of accelerated electron and forms.Impact beryllium window 151 after the electronics that tungsten filament 157 produces is quickened by the high voltage generating unit and produce grenz ray.
Below in conjunction with Fig. 4 X-ray tube manufacturing process is described.
With the silk screen print method Mo Mn paste that sprays paint, wettability is promoted in and 1350 ℃ of heating cooling and obtain the metal treatment film after two hours in hydrogen atmosphere during for brazing, also need nickel plating on the face of metal spraying on ceramic post jamb 155.
Diameter according to the amount of electrons decision tungsten filament 157 that will produce uses the filament of diameter as 0.125mm in example of the present invention, extract and be coated with LaBaO again out behind volume 12 circles on the rod iron of 1mm.
Be coated with anode material on beryllium window board 151, the scolder that this step will make the copper by 73% silver and 27% constitute is only being wanted the marginal position of brazing, and can not flow into the anode surface of coating, thereby lowers efficiency; Utilize FVAS (Filtered VacuumArc Source) plater on the beryllium window, to electroplate tungsten behind the above-mentioned anode material of coating; Use special-purpose vacuum furnace to carry out the high vacuum brazing, use molybdenum heating installation to make temperature reach 900 ℃, for vacuum degree reaches 4 * 10
-7Torr utilizes turbine pump (Turbo molecular Pump) and rotary pump (Rotary Pump) exhaust; After being ready to all parts, under the vacuum degree situation in holding tube, the impression scolder becomes one in case surpass the fusing point all material, brazing in conjunction with the time want the vacuum exhaust in the holding tube to carry out smoothly, can keep high vacuum state in the pipe that makes like this.
And in order to prolong the life-span of pipe, near inner cathode, insert getter 156, getter 156 is the non-easy evaporated materials that constitute with Zr-Ni-V-Fe, adopts the spot welding mode to connect on the titanium cylinder outer wall that is fixed on negative electrode when getter pastes filament, and in the temperature more than 450 ℃ by activate.Getter can be adsorbed on the gas in the space in the pipe of sealing, can keep vacuum degree for a long time thus, and increase the service life.
At this 153 are positive plates, and 152,154 and 158 is scolders, the 159th, and the ceramic pins head.160 is plane graphs of 159, and 161 is plane graphs of 155.
Fig. 5 is the design drawing that is useful in the ion generating principle of grenz ray generating means 400 of the present invention.The 410th, stable atom/molecule state, the 420th, the state of faint X ray and the conflict of stable atom/molecule, the 430th, stable atom/molecule is rendered as the state of cation, the 440th, the state of diagram electronics and stable atom/molecule combination, the 450th, the atom/molecule of diagram and electronics combination is rendered as the state of anion.
The target voltage that grenz ray takes place in the present invention is 9.5kV, and heater current is 150uA.
Claims (11)
1, utilizes the anti-static device of grenz ray, it is characterized in that by ionization charged object surrounding air, reach the effect of corrective surface static, comprise and use the grenz tube of beryllium film plating tungsten material as window, produce high-octane, wavelength grenz ray, the antistatic head of the static of the antistatic target object that is used for neutralizing and weaken between 1.2 dust to 1.5 dusts; Surround described antistatic head, be used to protect the operator not to be subjected to the protection portion of the soft x-ray radiation of described antistatic head leakage; Link to each other, generate the power control part that pipe provides filament voltage and target voltage for described grenz ray by cable with described antistatic head and described protection portion.
2, the anti-static device that utilizes grenz ray according to claim 1 is characterized in that, it is that the steel plate of 1mm constitutes that described protection portion adopts thickness, also comprises the coupled switch that whether the control power control part moves and the door of the described coupled switch of ON/OFF; Described door is under open mode, and described antistatic head can not produce grenz ray.
3, the anti-static device that utilizes grenz ray according to claim 2, it is characterized in that, described power control part comprises the anode voltage generating unit, the anode voltage generating unit is used the pulse width control method control target voltage and the heater current of pulse width modulator, making field-effect transistors (FET) formation and switching frequency is the half-bridge circuit of 30KHz, and target voltage and heater current all need be provided with a described pulse width modulator and a described half-bridge circuit respectively.
4, the anti-static device that utilizes grenz ray according to claim 3, it is characterized in that, the target voltage that the anode voltage generating unit of described power control part is kept by the effect of tube voltage sensor feedback is constant 9.5KV, and described power control part is constant 150uA by the electric current of the filament that heater current transducer and the effect of tube current sensory feedback are kept.
5, the anti-static device that utilizes grenz ray according to claim 4, it is characterized in that, including of the anode voltage generating unit of described power control part: produce high-tension transformer, respond to the high-tension tube voltage transducer that described transformer produces, the high pressure that produces constant voltage by described tube voltage sensor feedback effect adds doubler rectifier, produce the transformer of heater current, the tube current transducer of induction heater current, and the part of fixing ceramic grenz tube and high voltage being imported with insulated electric conductor.
6, the anti-static device that utilizes grenz ray according to claim 1 is characterized in that, the grenz ray vacuum tube is for suppressing the earthenware of heating temp.
7, the anti-static device that utilizes grenz ray according to claim 1 is characterized in that, the maximum of described grenz ray anti-static device effectively is provided with distance and is 2000mm.
8, the anti-static device that utilizes grenz ray according to claim 7 is characterized in that, the gas around the described grenz ray anti-static device ionization electrostatic charging object, the static of the charged body surface that neutralizes, but in non-active gas also antistatic.
According to the described anti-static device that utilizes grenz ray of any one claim of claim 1-8, it is characterized in that 9, target voltage is constant 9.5KV, the electric current of described filament is constant 150uA.
10, a kind of manufacture method of grenz tube is characterized in that:
1) the metal spraying film of generation earthenware is specially and uses silk screen printing Mo Mn paste on pottery, and heating is two hours in 1350 ℃ hydrogen atmosphere, then cooling;
2) the non-electrolytic nickel of plating on described metal spraying film;
3) tungsten filament is had mercy on rod iron and to extract back LaBaO coating again out;
4) be coated with anode material on the beryllium window board; The scolder that this step will make the copper by 73% silver and 27% constitute is only being wanted the marginal position of brazing, and can not flow into the anode surface of coating, thereby lowers efficiency.
5) utilize FVAS (Filtered Vacuum Arc Source) plater on the beryllium window board, to be coated with tungsten;
6) use special-purpose vacuum furnace to carry out the high vacuum brazing, use molybdenum heating installation to make temperature reach 900 ℃, for vacuum degree reaches 4 * 10
-7Holder (Torr) utilizes turbine pump (Turbo molecular Pump) and rotary pump (Rotary Pump) exhaust;
7) near inner cathode, insert the getter that constitutes with the Zr-Ni-V-Fe material, and the degassing and activate under 450 ℃ of conditions.
11, the manufacture method of grenz tube according to claim 10, it is characterized in that, described getter is fixed on the titanium cylinder outer wall of negative electrode with the spot welding mode, is used for adsorbing the gas in the space in the pipe of sealing, and long-time vacuum degree also prolongs tube lifetime in the holding tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200310116297XA CN1316545C (en) | 2003-11-17 | 2003-11-17 | Static electricity preventing device using flexible x-ray and method for making its flexible x-ray tubes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200310116297XA CN1316545C (en) | 2003-11-17 | 2003-11-17 | Static electricity preventing device using flexible x-ray and method for making its flexible x-ray tubes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1619759A true CN1619759A (en) | 2005-05-25 |
| CN1316545C CN1316545C (en) | 2007-05-16 |
Family
ID=34760634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200310116297XA Expired - Fee Related CN1316545C (en) | 2003-11-17 | 2003-11-17 | Static electricity preventing device using flexible x-ray and method for making its flexible x-ray tubes |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1316545C (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7660097B2 (en) * | 2003-08-14 | 2010-02-09 | Sunje Hitek Co., Ltd. | Device for removing electrostatic charges on an object using soft X-ray |
| CN101916699A (en) * | 2010-08-19 | 2010-12-15 | 四川虹欧显示器件有限公司 | Electrostatic prevention method and system for PDP module assembly line |
| CN101404852B (en) * | 2008-11-14 | 2011-04-20 | 上海安平静电科技有限公司 | Method and device for electrostatic elimination by optical ion |
| CN102693888A (en) * | 2011-03-24 | 2012-09-26 | 方钢群 | Preparation method of ceramic soft X ray tube |
| CN101554098B (en) * | 2006-08-23 | 2013-01-30 | 近藤工业株式会社 | Soft X-ray shielding sheet used in soft X-ray electrostatic removal device and its manufacturing method |
| CN102956419A (en) * | 2012-11-27 | 2013-03-06 | 公安部第一研究所 | Soft X-ray tube and manufacturing method thereof and photoion electrostatic eliminator with ray tube |
| CN105814974A (en) * | 2013-10-15 | 2016-07-27 | 禅才高科技股份有限公司 | Soft X-ray anti-static apparatus for vacuum chamber |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3839528B2 (en) * | 1996-09-27 | 2006-11-01 | 浜松ホトニクス株式会社 | X-ray generator |
| JP2001523384A (en) * | 1997-05-05 | 2001-11-20 | ナノダイナミクス、インコーポレーテッド | X-ray tube and microelectronics alignment process |
| KR100330190B1 (en) * | 1999-07-12 | 2002-03-28 | 조순문 | Apparatus for eliminating static electricity using soft x-ray |
-
2003
- 2003-11-17 CN CNB200310116297XA patent/CN1316545C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7660097B2 (en) * | 2003-08-14 | 2010-02-09 | Sunje Hitek Co., Ltd. | Device for removing electrostatic charges on an object using soft X-ray |
| CN101554098B (en) * | 2006-08-23 | 2013-01-30 | 近藤工业株式会社 | Soft X-ray shielding sheet used in soft X-ray electrostatic removal device and its manufacturing method |
| CN101404852B (en) * | 2008-11-14 | 2011-04-20 | 上海安平静电科技有限公司 | Method and device for electrostatic elimination by optical ion |
| CN101916699A (en) * | 2010-08-19 | 2010-12-15 | 四川虹欧显示器件有限公司 | Electrostatic prevention method and system for PDP module assembly line |
| CN102693888A (en) * | 2011-03-24 | 2012-09-26 | 方钢群 | Preparation method of ceramic soft X ray tube |
| CN102956419A (en) * | 2012-11-27 | 2013-03-06 | 公安部第一研究所 | Soft X-ray tube and manufacturing method thereof and photoion electrostatic eliminator with ray tube |
| CN105814974A (en) * | 2013-10-15 | 2016-07-27 | 禅才高科技股份有限公司 | Soft X-ray anti-static apparatus for vacuum chamber |
| CN105814974B (en) * | 2013-10-15 | 2018-08-10 | 禅才高科技股份有限公司 | Vacuum chamber soft X-ray irradiation static eliminating apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1316545C (en) | 2007-05-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100512129B1 (en) | A device for removing electrostatic charges on an object using soft X-ray | |
| CN1228999C (en) | Apparatus for generating low temperature plasma at atmospheric pressure | |
| US20040256975A1 (en) | Electrode and associated devices and methods | |
| US7710707B2 (en) | Flexible soft X-ray ionizer | |
| CN1900364A (en) | Method for removal of copper oxide film from substrate processing surface | |
| CN1619759A (en) | Static electricity preventing device using flexible x-ray and method for making its flexible x-ray tubes | |
| EP0825807A2 (en) | Operating apparatus for discharge lamp | |
| CN1551322A (en) | Electrode assembly for the removal of surface oxides by electron attachment | |
| JP5238376B2 (en) | Electron tube | |
| CN101404852B (en) | Method and device for electrostatic elimination by optical ion | |
| JP4839475B2 (en) | X-ray irradiation ionizer | |
| CN1797697A (en) | Dielectric barrier discharge lamp and ultraviolet radiation apparatus | |
| JP2006260948A (en) | Ionizer equipped with x-ray generator | |
| CN201323698Y (en) | Device using light ions for eliminating static electricity | |
| JP2012142171A (en) | Field emission type x-ray generator | |
| Rigit et al. | Degradation of a dielectric barrier discharge plasma actuator | |
| WO2024063362A1 (en) | Electrodeless excimer lamp | |
| JP4528926B2 (en) | Field emission type device driving apparatus and driving method thereof | |
| JP3416982B2 (en) | Ozone generator | |
| KR101361793B1 (en) | Photo ionizer | |
| KR200359919Y1 (en) | Photoionizer by using Soft X-ray with metal case of radiant structure for air cooling | |
| CN209199872U (en) | A kind of high energy plasma electric discharge Cleaning luminaire | |
| CN110767524B (en) | Self-suction type X-ray generating device and application thereof | |
| WO2024112091A1 (en) | Electron beam-based extreme ultraviolet light source device | |
| KR20170037012A (en) | A small sized X-ray head having inorganic insulator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070516 Termination date: 20111117 |