CN102693888A - Preparation method of ceramic soft X ray tube - Google Patents
Preparation method of ceramic soft X ray tube Download PDFInfo
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- CN102693888A CN102693888A CN2011100713518A CN201110071351A CN102693888A CN 102693888 A CN102693888 A CN 102693888A CN 2011100713518 A CN2011100713518 A CN 2011100713518A CN 201110071351 A CN201110071351 A CN 201110071351A CN 102693888 A CN102693888 A CN 102693888A
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Abstract
The present invention relates to the field of nondestructive testing X ray imaging, and provides a preparation method of a ceramic soft X ray tube. The ceramic soft X ray tube is composed of a ceramic tube, an anode kovar ring, a side window, a cathode shielding tube, a cathode filament, a cathodic shielding cylinder lead column and a cathode filament lead column. Especially, 90%-95% alumina containing ceramic is subjected to hot die casting to make the ceramic tube, in a hydrogen brazing furnace, the ceramic tube is subjected to Mo-Mn method metalization, and then nickel plating and nickel burning protection are carried out on a metalized ceramic surface. By using a low expansion alloy 4J33, the anode kovar ring is welded on an end face of a metalized ceramic pipe. The cathode filament is made through adopting tungsten filament winding and burning hydrogen typing, and spot welding of tantalum and niobium sheets outside of a cathode heat shielder is carried out to make a support. Titanium sheets are employed to be a material of the side window. In a vacuum high frequency furnace, a two-vortex-sheet type mechanical pump and a turbine molecular pump are employed to carry out high vacuum exhaustion, the titanium sheets are welded on the anode kovar ring by using AgCu solder, and sealing is carried out. The present invention provides the preparation method of the ceramic soft X ray tube.
Description
(1) technical field: the preparation method who the present invention relates to Non-Destructive Testing x-ray imaging system, particularly a kind of ceramic grenz tube.
(2) background technology: the grenz tube that is applied in the Non-Destructive Testing x-ray imaging system in the present same industry at home mostly adopts the glass grenz tube; Problems such as that the glass grenz tube exists is frangible, processing sealing-in difficulty, rate of finished products are low cause that the grenz tube production cost is high, useful life is short.
(3) summary of the invention: the object of the invention just provides a kind of preparation method of ceramic grenz tube.
The inventive method comprises the steps:
1. ceramics injection is cast type and make earthenware; Coated with metal coating on the earthenware shell is put into hydrogen brazing furnace and is heated to 1350-1550 ℃ again, is incubated 30-60 minute, and natural cooling makes ceramic surface have metalline then; Carry out nickel plating on the metallized ceramic surface again,, be incubated 10-20 minute, then natural cooling in 950-1050 ℃ of burning nickel.
2. anode can be cut down ring, in hydrogen brazing furnace, adopt low-expansion alloy 4J33 to be welded on the metallized earthenware end face.
3. cathode filament adopts the coiling of 0.02-0.05 tungsten filament, is incubated 10-20 minute down at 1150-1250 ℃, the annealing in hydrogen atmosphere typing, and spot welding tantalum niobium skin is done support outside the negative electrode heat shielding.
4. adopt 0.01mm-0.02mm titanium skin as the end window material, in the vacuum coreless induction furnace, adopt two rotary vane mechanical pumps and turbomolecular pump high vacuum exhaustion, adopt the AgCu scolder that the titanium skin is welded on anode and can cut down on the ring, carry out sealing-in; Promptly make ceramic grenz tube.
Described earthenware adopts and contains the making of 90%-95% aluminium oxide ceramics.
Described earthenware adopts Mo-Mn method metalized.
Described sealing-in vacuum degree reaches 1 * 10
-5Pa-1 * 10
-6Pa.
The present invention has following characteristics:
1. adopt ceramic cartridge to replace the glass shell, solve the problem that the glass grenz tube is frangible, useful life is short that adopts.
2. adopt the Mo-Mn method to the earthenware metalized and carry out nickel plating, burn nickel, nickel coating has improved the flowability of scolder, helps AgCu wets metal layer and stops metal layer to be corroded by brazing alloy, with the protection metal layer.
3. adopt the titanium skin as the end window material.
(4) description of drawings:
Fig. 1 is a general structure sketch map of the present invention;
Among the figure: 1, end window 2, anode can cut down ring 3, ceramic cartridge 4, cathode filament
5, cathode screen tube 6, heater lead post 7, shielding cylinder stem
(5) embodiment:
1. adopt and contain 95% aluminium oxide ceramics hot die-casting molding making earthenware; Coated with metal coating on the earthenware shell is put into hydrogen brazing furnace and is heated to 1550 ℃ again, is incubated 45 minutes, and natural cooling makes ceramic surface have metalline then; Carry out nickel plating on the metallized ceramic surface again,, be incubated 15 minutes, then natural cooling in 1050 ℃ of burning nickel.
2. anode can be cut down ring, in hydrogen brazing furnace, adopt low-expansion alloy 4J33 to be welded on the metallized earthenware end face.
3. cathode filament adopts 0.02 tungsten filament coiling, is incubated 15 minutes down at 1200 ℃, the annealing in hydrogen atmosphere typing, and spot welding tantalum niobium skin is done support outside the negative electrode heat shielding.
4. adopt 0.01mm titanium skin as the end window material, in the vacuum coreless induction furnace, adopt two rotary vane mechanical pumps and turbomolecular pump high vacuum exhaustion, adopt the AgCu28 scolder that the titanium skin is welded on anode and can cut down on the ring, carry out sealing-in; Promptly make ceramic grenz tube.
Claims (4)
1. the preparation method of a ceramic grenz tube is characterized in that may further comprise the steps:
(1) ceramics injection is cast type and make earthenware; Coated with metal coating on the earthenware shell is put into hydrogen brazing furnace and is heated to 1350-1550 ℃ again, is incubated 30-60 minute, and natural cooling makes ceramic surface have metalline then; Carry out nickel plating on the metallized ceramic surface again,, be incubated 10-20 minute, then natural cooling in 950-1050 ℃ of burning nickel.
(2) anode can be cut down ring, in hydrogen brazing furnace, adopt low-expansion alloy 4J33 to be welded on the metallized earthenware end face.
(3) cathode filament adopts the coiling of 0.02-0.05 tungsten filament, is incubated 10-20 minute down at 1150-1250 ℃, the annealing in hydrogen atmosphere typing, and spot welding tantalum niobium skin is done support outside the negative electrode heat shielding.
(4) adopt 0.01mm-0.02mm titanium skin as the end window material, in the vacuum coreless induction furnace, adopt two rotary vane mechanical pumps and turbomolecular pump high vacuum exhaustion, adopt the AgCu scolder that the titanium skin is welded on anode and can cut down on the ring, carry out sealing-in; Promptly make ceramic grenz tube.
2. earthenware according to claim 1 adopts and contains the making of 90%-95% aluminium oxide ceramics.
3. earthenware according to claim 1 adopts Mo-Mn method metalized.
4. sealing-in vacuum degree according to claim 1 reaches 1 * 10
-5Pa-1 * 10
-6Pa.
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CN2011100713518A CN102693888A (en) | 2011-03-24 | 2011-03-24 | Preparation method of ceramic soft X ray tube |
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CN2011100713518A CN102693888A (en) | 2011-03-24 | 2011-03-24 | Preparation method of ceramic soft X ray tube |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103794431A (en) * | 2014-01-17 | 2014-05-14 | 杭州凯龙医疗器械有限公司 | X-ray tube lamp filament shaping device and shaping method |
CN104889519A (en) * | 2015-04-24 | 2015-09-09 | 黄石上方检测设备有限公司 | Highly-efficient, energy-saving and environmentally-friendly manufacturing method of metal ceramic X ray tube |
CN106583924A (en) * | 2016-12-23 | 2017-04-26 | 苏州大学 | Laser sealing method of glass and kovar alloy and sealing body |
CN108218463A (en) * | 2018-02-01 | 2018-06-29 | 深圳市宏钢机械设备有限公司 | A kind of AlN ceramic and the method for oxygen-free copper sealing-in |
CN108851461A (en) * | 2017-05-10 | 2018-11-23 | 戴森技术有限公司 | heater |
CN112786418A (en) * | 2021-01-29 | 2021-05-11 | 成都宏明电子股份有限公司 | Efficient vibration-resistant ion source filament assembly and manufacturing method thereof |
CN113000963A (en) * | 2021-03-29 | 2021-06-22 | 杭州凯龙医疗器械有限公司 | Welding method for titanium window of CT tube |
CN113471039A (en) * | 2021-07-23 | 2021-10-01 | 昆山医源医疗技术有限公司 | Anode support |
CN113543448A (en) * | 2021-07-16 | 2021-10-22 | 西安冠能中子探测技术有限公司 | High-yield self-targeting D-D neutron tube and manufacturing method thereof |
US11589661B2 (en) | 2017-01-12 | 2023-02-28 | Dyson Technology Limited | Hand held appliance |
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Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103794431B (en) * | 2014-01-17 | 2016-04-13 | 杭州凯龙医疗器械有限公司 | A kind of X-ray tube filament shaping device and method for shaping thereof |
CN103794431A (en) * | 2014-01-17 | 2014-05-14 | 杭州凯龙医疗器械有限公司 | X-ray tube lamp filament shaping device and shaping method |
CN104889519A (en) * | 2015-04-24 | 2015-09-09 | 黄石上方检测设备有限公司 | Highly-efficient, energy-saving and environmentally-friendly manufacturing method of metal ceramic X ray tube |
CN106583924A (en) * | 2016-12-23 | 2017-04-26 | 苏州大学 | Laser sealing method of glass and kovar alloy and sealing body |
CN106583924B (en) * | 2016-12-23 | 2018-06-29 | 苏州大学 | A kind of glass and the laser method for sealing of kovar alloy and sealing-in body |
US11589661B2 (en) | 2017-01-12 | 2023-02-28 | Dyson Technology Limited | Hand held appliance |
US11712098B2 (en) | 2017-01-12 | 2023-08-01 | Dyson Technology Limited | Hand held appliance |
CN108851461A (en) * | 2017-05-10 | 2018-11-23 | 戴森技术有限公司 | heater |
CN108218463A (en) * | 2018-02-01 | 2018-06-29 | 深圳市宏钢机械设备有限公司 | A kind of AlN ceramic and the method for oxygen-free copper sealing-in |
CN112786418A (en) * | 2021-01-29 | 2021-05-11 | 成都宏明电子股份有限公司 | Efficient vibration-resistant ion source filament assembly and manufacturing method thereof |
CN113000963A (en) * | 2021-03-29 | 2021-06-22 | 杭州凯龙医疗器械有限公司 | Welding method for titanium window of CT tube |
CN113000963B (en) * | 2021-03-29 | 2022-07-22 | 杭州凯龙医疗器械有限公司 | Welding method for titanium window of CT tube |
CN113543448A (en) * | 2021-07-16 | 2021-10-22 | 西安冠能中子探测技术有限公司 | High-yield self-targeting D-D neutron tube and manufacturing method thereof |
CN113471039A (en) * | 2021-07-23 | 2021-10-01 | 昆山医源医疗技术有限公司 | Anode support |
CN113471039B (en) * | 2021-07-23 | 2024-10-25 | 昆山医源医疗技术有限公司 | Anode bracket |
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Application publication date: 20120926 |