CN214226868U

CN214226868U - Wafer detection and assembly equipment

Info

Publication number: CN214226868U
Application number: CN202120377578.4U
Authority: CN
Inventors: 郑东来; 孔维深
Original assignee: Nantong Jiachong Electronic Technology Co ltd
Current assignee: Nantong Jiachong Electronic Technology Co ltd
Priority date: 2021-02-19
Filing date: 2021-02-19
Publication date: 2021-09-17
Anticipated expiration: 2031-02-19

Abstract

The utility model discloses a wafer detects rigging equipment, including mounting bracket, U template and base, the intermediate position department on the inside top of base is provided with the sliding seat, and the fixed point pole sliding connection of sliding seat has the rotation seat, and rotates the intermediate position department of the inside bottom of seat and install servo motor, and the top of base installs the U template, the mounting bracket is installed on the top of U template, pneumatic telescopic handle's output extends to the mounting bracket inside and installs the sliding plate, and the intermediate position department of sliding plate bottom installs the protective housing, the inside sliding connection of protective housing has test probe, the buffer box is installed to angles such as protective housing sliding plate bottom all around, the inside vertical probe that extends to the fixed slot outside that is provided with of fixed slot. The utility model discloses a set up the protective housing, utilize the protective housing to cover test probe completely, avoid dust or external force to the adverse effect that test probe caused, improve its life.

Description

Wafer detection and assembly equipment

Technical Field

The utility model relates to a wafer production facility technical field specifically is a wafer detects rigging equipment.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor circuit, and at present, the amount of usage demand is huge in the advanced technology, and after the wafer is produced, the wafer needs to be inspected and transferred to ensure the quality of the wafer, but the existing wafer inspection and assembly equipment has many problems or defects:

first, traditional wafer detects rigging equipment, does not protect probe structure during the use, and the long-term outside that exposes of test probe easily glues dust or receives external force to influence.

Secondly, traditional wafer detects rigging equipment does not have mounting structure during the use, and the probe is longer thinner, easily takes place to damage, and the tradition is changed comparatively loaded down with trivial details.

Third, the conventional wafer inspection assembly equipment has no fixing structure when in use, and cannot well fix the wafer on the inspection table.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a wafer detects rigging equipment to solve the inconvenient protection that proposes in the above-mentioned background art, inconvenient installation and inconvenient fixed problem.

In order to achieve the above object, the utility model provides a following technical scheme: a wafer detection assembly device comprises a mounting frame, a U-shaped plate and a base, and further comprises a mounting structure which is convenient for reducing the disassembly difficulty, a fixing mechanism which improves the mounting stability of a wafer and a protection structure which avoids the damage of the device;

a sliding seat is arranged in the middle of the top end inside the base, a fixed point rod of the sliding seat is connected with a rotating seat in a sliding mode, electric sliding rails are arranged at one ends inside the rotating seat and the sliding seat respectively, a servo motor is arranged in the middle of the bottom end inside the rotating seat, a vacuum turntable extending to the top end outside the rotating seat is arranged at the output end of the servo motor through a rotating shaft, and fixing mechanisms are arranged on two sides inside the vacuum turntable;

the device comprises a base, a PLC (programmable logic controller) and a U-shaped plate, wherein the PLC is installed in the middle of one side of the base, the U-shaped plate is installed at the top end of the base, a mounting frame is installed at the top end of the U-shaped plate, a pneumatic telescopic rod is installed in the middle of the top end of the mounting frame, the output end of the pneumatic telescopic rod extends into the mounting frame and is provided with a sliding plate, a protective box is installed in the middle of the bottom end of the sliding plate, a detection probe is connected to the interior of the protective box in a sliding mode, and a protective structure is arranged in the protective box at the top end of the detection probe;

the buffer box is installed to protection box sliding plate bottom all around equidistance, and the below of buffer box is provided with the fixed slot, the inside vertical probe that extends to the fixed slot outside that is provided with of fixed slot, and the mounting structure setting is inside the fixed slot on probe top.

Preferably, protective structure includes the spacing groove, the both sides on the inside top of test probe are seted up to the spacing groove, and one side of spacing inslot portion installs spacing spring, sliding connection has the stopper that extends to the test probe outside on one side of spacing spring, and the inside both sides upper end of protective housing and lower extreme seted up with stopper matched with spacing hole.

Preferably, the mounting structure includes pull rod, preformed groove, installation piece, installation spring and mounting hole, the lower extreme at the inside both sides of fixed slot is seted up in the preformed groove, and fixed slot one side of preformed groove one side transversely is provided with the pull rod, pull rod one side extends to the fixed slot inside and installs the installation piece, and the preformed groove inside winding on pull rod surface has the installation spring, the inside top both sides of probe have been seted up with installation piece matched with mounting hole.

Preferably, the shape of the reserve groove is an inverted convex shape, and the length of the inside of the reserve groove is equal to the length of the mounting block.

Preferably, fixed establishment includes negative-pressure air fan, filter screen, rose box, clamp plate, fixed spring and recess, the rose box is installed in the inside both sides of vacuum carousel, and the upper end of rose box one side is passed through pipe and vacuum carousel top intercommunication, the recess is installed to the top and the bottom of the inside both sides of rose box, and the both sides of the inside one end of recess install fixed spring, the inside sliding connection of recess of fixed spring one end has the clamp plate, and the inside vertical filter screen that is provided with of rose box of clamp plate one end, negative-pressure air fan is installed to the both sides of vacuum carousel, and negative-pressure air fan's output passes through pipe and the inside opposite side intercommunication of rose box.

Preferably, the top end inside the rotating seat is annularly provided with an auxiliary sliding groove, and two sides of the bottom end of the vacuum turntable are provided with auxiliary sliding blocks matched with the auxiliary sliding groove.

Preferably, buffer spring is installed on the inside top of baffle-box, and buffer spring bottom sliding connection has the buffering frame that extends to the baffle-box outside, be welding integral structure between the top of buffering frame bottom and fixed slot.

Compared with the prior art, the beneficial effects of the utility model are that:

(1) by arranging the protective box, the limiting holes and the limiting blocks, when the device is not used for a long time, the limiting blocks can be pressed to slide until the limiting blocks are completely separated from the limiting holes, then the detection probes are upwards pushed, so that the detection probes slide in the protective box and completely enter the protective box, at the moment, the limiting blocks are movably clamped into the limiting holes in the upper ends of the two sides of the protective box under the action of the elastic force of the limiting springs, the limiting and fixing of the detection probes are further realized, the detection probes are completely covered by the protective box and are protected, the adverse effect of dust or external force on the detection probes is avoided, and the service life of the detection probes is prolonged;

(2) by arranging the mounting structure, the buffer frame and the fixing groove, the mounting block is moved to be completely separated from the inside of the mounting hole by pulling the pull rod, and then the probe is pulled downwards to be separated from the fixing groove, so that the probe can be quickly dismounted, the difficulty of dismounting and mounting by workers is reduced, the mounting and dismounting efficiency is improved, and the subsequent detection operation can be smoothly carried out;

(3) through being provided with fixed establishment, through starting negative-pressure air fan, make the inside negative pressure that produces of rose box, and then make the vacuum chuck on vacuum carousel top produce suction and firmly hold the wafer, avoid among the testing process, the detection error that the wafer aversion led to the fact, it can avoid carelessly inhaling impurity etc. to set up the filter screen simultaneously, avoid the damage of impurity to equipment part, and can regularly stir the filter screen, make the filter screen other end break away from the recess completely, be convenient for take out the filter screen and wash, avoid it to be blockked up by impurity, guarantee vacuum suction, avoid blockking up and reduce suction, and then lead to the unexpected aversion of wafer.

Drawings

Fig. 1 is a schematic front view of a cross-sectional structure of the present invention;

fig. 2 is a schematic top view of the present invention;

FIG. 3 is a schematic view of the enlarged structure of the local part of the detection probe of the present invention after being stored;

fig. 4 is an enlarged schematic structural view of the mounting structure of the present invention;

fig. 5 is an enlarged schematic structural view of the fixing structure of the present invention.

In the figure: 1. a mounting frame; 2. a pneumatic telescopic rod; 3. a protective box; 4. a sliding plate; 5. a mounting structure; 501. a pull rod; 502. reserving a groove; 503. mounting blocks; 504. installing a spring; 505. mounting holes; 6. a U-shaped plate; 7. a fixing mechanism; 701. a negative pressure fan; 702. filtering with a screen; 703. a filter box; 704. pressing a plate; 705. fixing the spring; 706. a groove; 8. a vacuum turntable; 9. a base; 10. a rotating seat; 11. an auxiliary chute; 12. a servo motor; 13. a sliding seat; 14. an electric slide rail; 15. an auxiliary slide block; 16. a PLC controller; 17. detecting a probe; 18. a probe; 19. a buffer spring; 20. a buffer tank; 21. a buffer frame; 22. a limiting hole; 23. a limiting spring; 24. a limiting block; 25. a limiting groove; 26. and fixing the grooves.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Example 1: referring to fig. 1-5, a wafer detecting and assembling device includes a mounting frame 1, a U-shaped plate 6, a base 9, a mounting structure 5 for reducing the difficulty of disassembly, a fixing mechanism 7 for improving the stability of wafer mounting, and a protection structure for preventing the device from being damaged;

a sliding seat 13 is arranged in the middle of the top end inside the base 9, a fixed point rod of the sliding seat 13 is connected with a rotating seat 10 in a sliding manner, electric sliding rails 14 are respectively arranged at one ends inside the rotating seat 10 and the sliding seat 13, the model of each electric sliding rail 14 can be AMB60-S47, a servo motor 12 is arranged in the middle of the bottom end inside the rotating seat 10, the model of each servo motor 12 can be F-3420-1, a vacuum turntable 8 extending to the top end outside the rotating seat 10 is arranged at the output end of each servo motor 12 through a rotating shaft, and fixing mechanisms 7 are arranged on two sides inside the vacuum turntable 8;

a PLC (programmable logic controller) 16 is installed in the middle of one side of a base 9, a U-shaped plate 6 is installed at the top end of the base 9, an installation frame 1 is installed at the top end of the U-shaped plate 6, a pneumatic telescopic rod 2 is installed in the middle of the top end of the installation frame 1, the type of the pneumatic telescopic rod 2 can be TGA-30, the output end of the pneumatic telescopic rod 2 extends into the installation frame 1 and is provided with a sliding plate 4, a protective box 3 is installed in the middle of the bottom end of the sliding plate 4, a detection probe 17 is connected to the interior of the protective box 3 in a sliding mode, and a protective structure is arranged inside the protective box;

buffer boxes 20 are arranged at the bottom ends of the sliding plates 4 around the protective box 3 at equal angles, fixing grooves 26 are formed below the buffer boxes 20, probes 18 extending to the outside of the fixing grooves 26 are vertically arranged inside the fixing grooves 26, and the mounting structures 5 are arranged inside the fixing grooves 26 at the top ends of the probes 18;

referring to fig. 1-5, a wafer detecting and assembling device further comprises a protection structure, the protection structure comprises a limiting groove 25, the limiting groove 25 is arranged on two sides of the top end inside the detecting probe 17, a limiting spring 23 is arranged on one side inside the limiting groove 25, a limiting block 24 extending to the outside of the detecting probe 17 is connected to one side of the limiting spring 23 in a sliding manner, and limiting holes 22 matched with the limiting block 24 are arranged at the upper end and the lower end of two sides inside the protection box 3;

an auxiliary sliding groove 11 is annularly formed in the top end of the interior of the rotating seat 10, and auxiliary sliding blocks 15 matched with the auxiliary sliding groove 11 are installed on two sides of the bottom end of the vacuum turntable 8;

a buffer spring 19 is arranged at the top end inside the buffer box 20, a buffer frame 21 extending to the outside of the buffer box 20 is connected to the bottom end of the buffer spring 19 in a sliding manner, and the bottom end of the buffer frame 21 and the top end of the fixed groove 26 are in a welding integrated structure;

specifically, as shown in fig. 1, fig. 2 and fig. 3, when the device is not used for a long time, the limiting block 24 can be pressed to slide until the limiting block 24 is completely separated from the limiting hole 22, and then the detecting probe 17 is pushed upwards, so that the detecting probe 17 slides in the protecting box 3 and completely enters the protecting box 3, at this time, under the elastic force of the limiting spring 23, the limiting block 24 is moved to be clamped into the limiting hole 22 at the upper end of the two sides of the protecting box 3, so as to realize the limiting fixation of the detecting probe 17, the detecting probe 17 is completely covered by the protecting box 3 to be protected, so as to avoid the adverse effect of dust or external force on the detecting probe 17, and the sliding of the auxiliary slide block 15 in the auxiliary chute 11 is utilized to ensure the rotating stability of the vacuum turntable 8, and when the pressure is carelessly too high, the buffer frame 21 can slide to compress the buffer spring 19, so as to utilize the elastic force of the buffer spring 19 to buffer, avoiding the damage of the crystal grains.

Example 2: the mounting structure 5 comprises a pull rod 501, a reserved groove 502, a mounting block 503, a mounting spring 504 and mounting holes 505, wherein the reserved groove 502 is formed in the lower ends of the two sides of the inside of the fixing groove 26, the pull rod 501 is transversely arranged on one side of the fixing groove 26 on one side of the reserved groove 502, one side of the pull rod 501 extends into the inside of the fixing groove 26 and is provided with the mounting block 503, the mounting spring 504 is wound in the reserved groove 502 on the surface of the pull rod 501, and the mounting holes 505 matched with the mounting block 503 are formed in the two sides of the top end of the inside of the probe 18;

the shape of the preformed groove 502 is inverted convex, and the length inside the preformed groove 502 is equal to the length of the mounting block 503;

specifically, as shown in fig. 1 and 4, by pulling the pull rod 501, the mounting block 503 is moved to the inside of the mounting hole 505, and then the probe 18 is pulled downwards to be separated from the fixing groove 26, so that the probe 18 is quickly detached, the difficulty of detaching and mounting by workers is reduced, the efficiency of detaching and mounting is improved, the reserved groove 502 with a large length is provided, and the mounting block 503 is placed when the probe is detached conveniently.

Example 3: the fixing mechanism 7 comprises a negative pressure fan 701, a filter screen 702, a filter box 703, a pressing plate 704, a fixing spring 705 and grooves 706, the filter box 703 is installed on two sides inside the vacuum turntable 8, the upper end of one side of the filter box 703 is communicated with the top end of the vacuum turntable 8 through a guide pipe, the grooves 706 are installed on the top end and the bottom end of two sides inside the filter box 703, the fixing spring 705 is installed on two sides of one end inside the groove 706, the pressing plate 704 is connected inside the groove 706 at one end of the fixing spring 705 in a sliding mode, the filter screen 702 is vertically arranged inside the filter box 703 at one end of the pressing plate 704, the negative pressure fan 701 is installed on two sides of the vacuum turntable 8, the model of the negative pressure fan 701 can be HTF-I-3, and the output end;

specifically, as shown in fig. 1, fig. 2 and fig. 5, by starting the negative pressure fan 701, negative pressure is generated inside the filter box 703, so that the vacuum chuck on the top end of the vacuum turntable 8 generates suction to firmly suck the wafer, and detection errors caused by wafer displacement during detection are avoided, and meanwhile, the filter screen 702 is arranged to avoid careless impurity suction and the like, so that the damage of impurities to the equipment parts is avoided, and the filter screen 702 can be periodically shifted, so that the other end of the filter screen 702 is completely separated from the groove 706, the filter screen 702 is conveniently taken out and cleaned, and the filter screen is prevented from being blocked by impurities.

The output end of the PLC 16 is electrically connected with the input ends of the pneumatic telescopic rod 2, the negative pressure fan 701, the servo motor 12 and the electric slide rail 14 through conducting wires.

The working principle is as follows: when the device is used, firstly, a power supply is externally connected, then, a wafer is placed at the top end of the vacuum turntable 8, then, the negative pressure fan 701 is started, negative pressure is generated inside the filter box 703, further, a vacuum sucker at the top end of the vacuum turntable 8 generates suction to firmly suck the wafer, detection errors caused by wafer displacement in the detection process are avoided, meanwhile, the filter screen 702 is arranged to avoid accidental impurity suction, and the filter screen 702 can be periodically shifted, so that the fixed spring 705 slides inside the groove 706 to compress the fixed spring 705 until the other end of the filter screen 702 is completely separated from the groove 706, the filter screen 702 is conveniently taken out and cleaned, and the blockage of the filter screen 702 by impurities is avoided;

then starting the pneumatic telescopic rod 2 to drive the sliding plate 4 to descend, detecting crystal grains on the wafer by using the probe 18, judging the electrical characteristics of the crystal grains, and when the pressure is carelessly too high, enabling the buffer frame 21 to slide in the buffer box 20 to compress the buffer spring 19, further buffering by using the elasticity of the buffer spring 19, avoiding the damage of the crystal grains, simultaneously detecting the surface of the wafer by using the detection probe 17, observing whether the surface is qualified, and simultaneously enabling the sliding seat 13 or the rotating seat 10 to move through the work of the electric slide rail 14, and driving the vacuum turntable 8 to rotate through the servo motor 12, further realizing the multidirectional detection of the wafer, improving the detection efficiency, and simultaneously displaying the detection result in real time through the PLC 16;

when the detection is finished and the device is not used for a long time, the limiting block 24 can be pressed, the limiting block 24 slides in the limiting groove 25 to compress the limiting spring 23 to be completely separated from the limiting hole 22, then the detection probe 17 is pushed upwards, the detection probe 17 slides in the protective box 3 and completely enters the protective box 3, at the moment, under the elastic force action of the limiting spring 23, the limiting block 24 moves to be clamped into the limiting holes 22 at the upper ends of the two sides of the protective box 3, the limiting and fixing of the detection probe 17 are realized, and the detection probe 17 is completely covered by the protective box 3 to be protected;

meanwhile, when the probe 18 is damaged or the probe 18 with other specifications needs to be replaced, the pull rod 501 can be pulled, the mounting block 503 moves to compress the mounting spring 504 to be completely separated from the inside of the mounting hole 505, and then the probe 18 is pulled downwards to be separated from the fixing groove 26, so that the probe 18 can be rapidly detached, and the working efficiency is improved.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a wafer detects rigging equipment, includes mounting bracket (1), U template (6) and base (9), its characterized in that: the wafer mounting device further comprises a mounting structure (5) which is convenient for reducing the dismounting difficulty, a fixing mechanism (7) which improves the wafer mounting stability and a protection structure which avoids equipment damage;

a sliding seat (13) is arranged in the middle of the top end inside the base (9), a fixed point rod of the sliding seat (13) is connected with a rotating seat (10) in a sliding mode, electric sliding rails (14) are arranged at one ends inside the rotating seat (10) and the sliding seat (13) respectively, a servo motor (12) is installed in the middle of the bottom end inside the rotating seat (10), a vacuum turntable (8) extending to the top end outside the rotating seat (10) is installed at the output end of the servo motor (12) through a rotating shaft, and fixing mechanisms (7) are arranged on two sides inside the vacuum turntable (8);

the protection device is characterized in that a PLC (programmable logic controller) (16) is installed in the middle of one side of the base (9), a U-shaped plate (6) is installed at the top end of the base (9), a mounting frame (1) is installed at the top end of the U-shaped plate (6), a pneumatic telescopic rod (2) is installed in the middle of the top end of the mounting frame (1), the output end of the pneumatic telescopic rod (2) extends into the mounting frame (1) and is provided with a sliding plate (4), a protection box (3) is installed in the middle of the bottom end of the sliding plate (4), a detection probe (17) is connected to the interior of the protection box (3) in a sliding mode, and a protection structure is arranged in the protection box (3) at the top end of the detection probe (17);

buffer boxes (20) are installed at equal angles at the bottom ends of sliding plates (4) on the periphery of the protective box (3), fixing grooves (26) are formed in the lower portions of the buffer boxes (20), probes (18) extending to the outside of the fixing grooves (26) are vertically arranged in the fixing grooves (26), and installation structures (5) are arranged in the fixing grooves (26) on the top ends of the probes (18).

2. The wafer inspection assembly apparatus of claim 1, wherein: protective structure includes spacing groove (25), the both sides on the inside top of test probe (17) are seted up in spacing groove (25), and one side of spacing groove (25) inside installs spacing spring (23), sliding connection has stopper (24) that extend to test probe (17) outside one side of spacing spring (23), and guard box (3) inside both sides upper end and lower extreme seted up with stopper (24) matched with spacing hole (22).

3. The wafer inspection assembly apparatus of claim 1, wherein: mounting structure (5) are including pull rod (501), preformed groove (502), installation piece (503), installation spring (504) and mounting hole (505), the lower extreme in fixed slot (26) inside both sides is seted up in preformed groove (502), and fixed slot (26) one side of preformed groove (502) one side transversely is provided with pull rod (501), pull rod (501) one side extends to fixed slot (26) inside and installs installation piece (503), and the inside winding of preformed groove (502) on pull rod (501) surface has installation spring (504), mounting hole (505) with installation piece (503) matched with have been seted up to probe (18) inside top both sides.

4. The wafer inspection assembly apparatus of claim 3, wherein: the shape of the reserve groove (502) is inverted convex, and the length of the inside of the reserve groove (502) is equal to the length of the mounting block (503).

5. The wafer inspection assembly apparatus of claim 1, wherein: the fixing mechanism (7) comprises a negative pressure fan (701), a filter screen (702), a filter box (703), a pressure plate (704), a fixing spring (705) and a groove (706), the filter box (703) is arranged on two sides inside the vacuum turntable (8), the upper end of one side of the filter box (703) is communicated with the top end of the vacuum turntable (8) through a conduit, the top end and the bottom end of the two sides in the filter box (703) are provided with grooves (706), and both sides of one end inside the groove (706) are provided with a fixed spring (705), the inside of the groove (706) at one end of the fixed spring (705) is connected with a pressure plate (704) in a sliding way, a filter screen (702) is vertically arranged in the filter box (703) at one end of the pressure plate (704), negative pressure fans (701) are arranged on two sides of the vacuum turntable (8), and the output end of the negative pressure fan (701) is communicated with the other side in the filter box (703) through a conduit.

6. The wafer inspection assembly apparatus of claim 1, wherein: an auxiliary sliding groove (11) is formed in the top end of the interior of the rotating seat (10) in an annular mode, and auxiliary sliding blocks (15) matched with the auxiliary sliding groove (11) are installed on two sides of the bottom end of the vacuum rotating disc (8).

7. The wafer inspection assembly apparatus of claim 1, wherein: buffer spring (19) are installed on the inside top of baffle-box (20), and buffer spring (19) bottom sliding connection has buffer frame (21) that extends to baffle-box (20) outside, be welding integrated structure between the top of buffer frame (21) bottom and fixed slot (26).