CN214149358U - Precision drive slide table for inspection equipment - Google Patents
Precision drive slide table for inspection equipment Download PDFInfo
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- CN214149358U CN214149358U CN202023113049.8U CN202023113049U CN214149358U CN 214149358 U CN214149358 U CN 214149358U CN 202023113049 U CN202023113049 U CN 202023113049U CN 214149358 U CN214149358 U CN 214149358U
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Abstract
The utility model discloses a precision driving sliding table for inspection equipment, which comprises a lower sliding table; an upper sliding table; an XY axis movement adjusting assembly for moving the upper sliding table back and forth is arranged between the lower sliding table and the upper sliding table; the inclination angle adjusting assembly is in linkage movement with the XY axis movement adjusting assembly and is used for adjusting the upper sliding table, and the inclination angle adjusting assembly is respectively connected with the lower sliding table and the upper sliding table; the utility model aims at making the slip table move on the plane through simple operation and inclination alone or carry out the precision adjustment simultaneously to realize the real time control position, reduce the size and provide the precision drive slip table of being applied to the check out test set and using.
Description
Technical Field
The utility model relates to a slip table technical field about check out test set especially relates to a precision drive slip table for check out test set.
Background
In general, a precision drive slide table is a device which is applied to a lead frame, a semiconductor circuit, and the like, and which finely adjusts an inclination angle or a movement position of an optical instrument, an electronic/electric device, and various mechanical devices to control a position. In particular, high integration of semiconductors and smaller equipment, and lead frames, circuits, and parts are also becoming smaller, and microscopes that require high magnification inspection of inspected objects are widely used.
Meanwhile, the high magnification of the microscope leads to the fact that the visual field range of one-time examination is narrower and narrower, the examined object needs to be focused in the microscope and move freely, in addition, the examined object is very thin or has fine grains which are easy to damage, the examined object is placed on a carrying turnover tray, the tray is placed on a precision driving sliding table, and then the knob is operated to enable the examined object to move to the required precise position. Thus, the precision driving sliding table can reduce the position deviation caused by mechanical friction, can perform fine position movement, and can perform precise position control without being influenced by the welcome periphery.
In general, a precision drive slide table is composed of a lower slide table body, an upper slide table body and a micrometer for making the lower slide table body perform linear motion on the upper slide table body, and in order to prevent the contact surface of the slide table from being worn, a cross guide rail is provided for prolonging the service life so as to realize precise position movement through rolling action of balls when the slide table slides and moves in the cross direction, thereby avoiding differential wear of the slide table body.
In addition, the mobile communication terminal equipment performance inspection unit and the mobile communication terminal equipment are stably combined when in contact and the inspection tool is automatically developed and manufactured according to the prior art, the inspection tool comprises a limiting device which is inclined according to a certain angle at the upper middle part, a first exposed component which is protruded at the front part of the limiting device but has an open accommodating space at the upper part, and a first body consisting of a first flat surface formed by a polygonal shape, a second exposed part for blocking the first exposed part above the first body and closing the first exposed part containing space, a cover part capable of mounting the terminal receiving groove is formed on the longitudinal direction of the first body for extending and forming on the second exposed part at the back of the first body, and a second body arranged on a second flat surface combined with the first flat surface of the second exposed portion.
However, according to the inspection tool developed by the current technology, it is difficult to change the angle above the body on which the terminal device is mounted at will, because it is difficult to move or rotate the body at multiple angles, it is not applicable to the inspection of various terminal devices and the structural features of the inspection device cannot provide the problem of the angle above the body which needs to be exchanged.
In addition, according to the prior art inspection tool, a plurality of technical structures are added for adjusting various angles, so that the size of the sliding table is remarkably increased, and the space is problematic when the inspection equipment is installed.
SUMMERY OF THE UTILITY MODEL
In view of the above, the present invention is directed to a precision drive slide table for an inspection apparatus.
The utility model adopts the technical scheme as follows:
a precision drive slide for an inspection apparatus, comprising
A lower sliding table;
an upper sliding table;
an XY axis movement adjusting assembly for moving the upper sliding table back and forth is arranged between the lower sliding table and the upper sliding table; and
the inclination angle adjusting assembly is in linkage movement with the XY axis movement adjusting assembly and is used for adjusting the upper sliding table, and the inclination angle adjusting assembly is respectively connected with the lower sliding table and the upper sliding table;
the XY axis movement adjusting component comprises
An X-axis adjusting component moving back and forth along the X axis;
a Y-axis adjusting component moving back and forth along the Y axis; the X-axis adjusting assembly and the Y-axis adjusting assembly are connected with the X-axis adjusting assembly and the Y-axis adjusting assembly respectively;
the tilt angle adjusting assembly comprises
The X-axis inclination angle adjusting assembly takes a central point X axis of the upper sliding table as a reference and rotates up and down along two side surfaces of the X axis of the upper sliding table in the Z-axis direction;
and the Y-axis inclination angle adjusting assembly takes the central point Y axis of the upper sliding table as a reference and rotates up and down along two side surfaces of the Y axis of the upper sliding table in the Z-axis direction.
Further, the lower sliding table is a supporting plate fixed on the ground, four corners of the supporting plate are respectively provided with supporting tables, each supporting table is separated from each other, and a combining hole with a determined size is respectively formed in the edge positions of two sides of the X axis passing through the central point of the lower sliding table.
Further, the upper sliding table is a tray of the inspected object,
the first combination assembly is arranged at the lower part of the upper sliding table;
the first combination component is provided with a first through hole inserted into the X-axis grinding rod, and the first through hole is parallel to the upper sliding table;
a first ball support is mounted at the lower end of the first combination component.
Furthermore, the X-axis adjusting assembly comprises an X-axis micrometer arranged along the X-axis direction of the upper sliding table and at the lower part of the upper sliding table,
an X-axis grinding rod arranged at the rear end of the X-axis micrometer,
the rear end of the X-axis grinding rod is provided with a cross unit, the rear end of the cross unit is provided with an X-axis copper rod, and the rear end of the X-axis copper rod is provided with an X-axis spring;
the first auxiliary bracket assembly is connected with the X-axis micrometer and used for supporting the X-axis micrometer.
Furthermore, the Y-axis adjusting assembly comprises a Y-axis micrometer arranged along the Y-axis direction of the upper sliding table and at the lower part of the upper sliding table,
a Y-axis grinding rod arranged at the rear end of the Y-axis micrometer,
the rear end of the Y-axis grinding rod is provided with a cross unit, the rear end of the cross unit is provided with a Y-axis copper rod, the rear end of the Y-axis copper rod is provided with a Y-axis spring,
the second auxiliary bracket component is connected with the Y-axis micrometer and is used for supporting the Y-axis micrometer,
the second auxiliary bracket component is fixed on the second combination component,
the second combination component is provided with a second through hole inserted into the Y-axis grinding rod, the second through hole is parallel to the Y-axis adjusting component,
and the upper end of the second combination component is provided with a second ball support.
Further, the crossing unit serves as a joint end of the X-axis grinding rod and the X-axis copper rod; or the like, or, alternatively,
the cross unit serves as a joint end of the Y-axis grinding rod and the Y-axis copper rod.
Further, the X-axis inclination angle adjusting assembly is composed of an X-axis adjusting assembly and a lower sliding table and is used for adjusting the inclination angle of the upper sliding table on the Z axis according to the X-axis reference.
Further, the X-axis inclination angle adjusting assembly comprises
A first driving gear is arranged on the first driving gear,
a first ball disposed at a lower center position of the first driving gear,
a first ball bearing support for supporting a rotational flow of the first ball bearing, the first ball bearing support being disposed at a lower portion of the first coupling assembly,
a first screw rod is arranged at the center above the first driving gear; the first screw rod is fixed in a first female screw which is fixed in the sliding table below.
Further, the Y-axis inclination angle adjusting assembly is composed of a Y-axis adjusting assembly and an upper sliding table and is used for adjusting the inclination angle of the upper sliding table on the Z axis based on the Y axis.
Further, the Y-axis inclination angle adjusting assembly comprises
A second drive gear;
a second ball disposed at the center above the second driving gear,
a second ball bearing support for supporting a rotational flow of the second ball bearing, the second ball bearing support being fixed above a second coupling member;
and a second screw rod is arranged at the center above the second driving gear, the second screw rod is fixed in a second female screw, and the second female screw is fixed in the upper sliding table.
The utility model aims at making the slip table move on the plane through simple operation and inclination alone or carry out the precision adjustment simultaneously to realize the real time control position, reduce the size and provide the precision drive slip table of being applied to the check out test set and using.
Drawings
Fig. 1 is a perspective view of an internal structure of a precision drive slide table for an inspection apparatus according to an embodiment of the present invention.
FIG. 2 is an external view of FIG. 1;
FIG. 3 is a cross-sectional view of the assembly of the upper and lower ramps of FIG. 1 as cut away;
FIG. 4 is a cross-sectional view of the assembly of FIG. 1 cut
FIG. 5 is an AA cross-sectional view of FIG. 1;
FIG. 6 is a BB sectional view of FIG. 1;
FIG. 7 is a diagram showing the forward and backward movement state of the X-axis of the upper slide table in the precision drive slide table of the inspection apparatus of the present invention;
fig. 8 is a diagram showing the state that the rotation center of the upper sliding table in the precision driving sliding table of the inspection equipment has inclined upward and downward on the Y axis as a reference.
The specific implementation mode is as follows:
next, the application case of the present invention will be described in more detail with reference to drawings. The utility model discloses a can increase diversified form, specific case presents in the drawing and describes in detail herein. However, this is not intended to limit the present invention to the particular forms disclosed, but rather, it is to be understood that the invention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the present invention.
Referring to fig. 1-8, a precision drive slide for an inspection apparatus according to the present embodiment includes a lower slide 100, an upper slide 200, an XY axis movement adjustment assembly 300, and a tilt adjustment assembly 400.
An XY-axis movement adjusting assembly 300 for moving the upper sliding table 200 back and forth is arranged between the lower sliding table 100 and the upper sliding table 200; and
an inclination angle adjusting assembly 400 which moves in linkage with the XY axis movement adjusting assembly 300 and is used for adjusting the upper sliding table 200, wherein the inclination angle adjusting assembly 400 is connected with the lower sliding table 100 and the upper sliding table 200 respectively;
the XY-axis movement adjusting assembly 300 comprises
An X-axis adjustment assembly 310 that moves back and forth along the X-axis;
a Y-axis adjustment assembly 320 that moves back and forth along the Y-axis; and a cross unit 330 connected to the X-axis adjusting unit 310 and the Y-axis adjusting unit 320 for moving the X-axis or the Y-axis back and forth;
the tilt angle adjusting assembly 400 comprises
An X-axis inclination angle adjusting assembly 400a which takes the central point X axis of the upper sliding table 200 as a reference and rotates up and down along two side surfaces of the X axis of the upper sliding table 200 in the Z-axis direction;
and a Y-axis inclination angle adjusting assembly 400b which takes the central point Y axis of the upper sliding table 200 as a reference and rotates up and down along two side surfaces of the Y axis of the upper sliding table 200 in the Z-axis direction.
The lower sliding table 100 is a support plate fixed on the ground, four corners of the support plate are respectively provided with support tables 110, each of the support tables 110 is separated from each other, and coupling holes of a predetermined size are respectively formed in both side edge positions of an X axis passing through a central point of the lower sliding table 100. Each support platform is separated from each other, so that the distance that the cross unit and the upper sliding table 200 move back and forth on the X axis simultaneously is ensured when the X-axis adjusting assembly 310 works, and the spatial distance that the cross unit and the upper sliding table move back and forth on the Y axis simultaneously is also ensured when the Y-axis adjusting assembly 320 works.
The upper slide 200 is a tray for an inspected article,
a first coupling assembly 210 disposed at a lower portion of the upper slide 200;
the first combination component 210 is provided with a first through hole inserted into the X-axis grinding rod 312, and the first through hole is parallel to the upper sliding table;
a first ball bearing bracket 412 is mounted to the lower end of the first coupling member 210.
The X-axis adjusting assembly 310 includes an X-axis micrometer 311 disposed along the X-axis direction of the upper slide 200 and at the lower portion of the upper slide 200,
an X-axis grinding rod 312 provided at the rear end of the X-axis micrometer 311,
the rear end of the X-axis grinding rod 312 is provided with a cross unit 330, the rear end of the cross unit 330 is provided with an X-axis copper rod 313, and the rear end of the X-axis copper rod 313 is provided with an X-axis spring S1;
the first auxiliary support assembly 316 is connected to the X-axis micrometer 311, and the first auxiliary support assembly 316 is configured to support the X-axis micrometer 311.
The Y-axis adjusting assembly 320 includes a Y-axis micrometer 321 disposed along the Y-axis direction of the upper slide 200 and at the lower portion of the upper slide 200,
a Y-axis grinding rod 322 arranged at the rear end of the Y-axis micrometer 321,
the rear end of the Y-axis grinding rod 322 is provided with a cross unit 330, the rear end of the cross unit 330 is provided with a Y-axis copper rod 323, the rear end of the Y-axis copper rod 323 is provided with a Y-axis spring S2,
a second auxiliary support assembly 326 connected to the Y-axis micrometer 321, wherein the second auxiliary support assembly 326 is used for supporting the Y-axis micrometer 321,
the second auxiliary bracket assembly 326 is fixed to the second coupling assembly 324,
the second coupling member 324 is provided with a second through hole into which the Y-axis grinding bar 322 is inserted, the second through hole being parallel to the Y-axis adjusting member 320,
the upper end of the second coupling assembly 324 is mounted with a second ball support 422.
The cross unit 330 serves as a joint end of the X-axis grinding rod 312 and the X-axis copper rod 313; or the like, or, alternatively,
the crossing unit 330 serves as a coupling end of the Y-axis grinding bar 322 and the Y-axis copper bar 323.
The X-axis inclination angle adjustment assembly 400a is composed of an X-axis adjustment assembly 310 and a lower slide table 100, and is used for adjusting the inclination angle of the upper slide table 200 in the Z-axis direction with an X-axis reference.
The X-axis inclination angle adjustment assembly 400a comprises
The first drive gear 410 is driven by a first motor,
a first ball 411 provided at a lower center position of the first driving gear 410,
a first ball holder 412 for supporting a rotational flow of the first ball 411, the first ball holder 412 being disposed at a lower portion of the first coupling assembly 210,
a first screw 413 is arranged at the center above the first driving gear 410; the first screw 413 is fixed in the first female screw 414, and the first female screw 414 is fixed in the lower sliding table 100.
The Y-axis tilt angle adjusting assembly 400b is composed of a Y-axis adjusting assembly 320 and the upper sliding table 200, and is used for adjusting the tilt angle of the upper sliding table 200 on the Z-axis based on the Y-axis.
The Y-axis tilt angle adjustment assembly 400b includes
A second drive gear 420;
a second ball 421 disposed at the upper center of the second driving gear 420,
a second ball support 422 for supporting a rotational flow of the second ball 421, the second ball support 422 being fixed above the second coupling member 324;
a second screw 423 is disposed at the center above the second driving gear 420, the second screw 423 is fixed in a second female screw 424, and the second female screw 424 is fixed in the upper sliding table 200.
In the above, the first coupling assembly 210 and the upper sliding table 200 are fixed in an integrated or separate manner. The through hole of the first coupling block 210 into which the X-axis grinding rod 312 is inserted is parallel to the upper slide table, and a first ball holder 412 is mounted at the lower end of the first coupling block 210 to form a fixed coupling ball.
As the X-axis micrometer 311 is adjusted, the cross unit 330 advances in a linked manner as the X-axis grinding lever 312 advances, and the X-axis spring S1 is compressed, so that the upper slide table 200 advances on the X-axis. The upper slide table 200 is set back by the resilient force of the compressed X-axis spring S1.
When the Y-axis grinding lever 322 can advance as the Y-axis micrometer 321 is adjusted, the cross unit 330 performs the interlocking movement, at which time the Y-axis spring S2 is compressed, so that the upper slide table 200 advances on the Y-axis. The upper slide table 200 can complete the retreat under the elasticity of the compressed Y-axis spring S2.
The cross unit 330 is a regular 6-sided body formed by a cross-shaped hole, the cross unit 330 is arranged at the rear end of the X-axis grinding rod 312 and the front end of the X-axis copper rod 313 in the X-axis direction, and the cross unit 330 is arranged at the rear end of the Y-axis grinding rod 322 and the front end of the Y-axis copper rod 323 in the Y-axis direction, and is clamped and combined with the upper sliding table 200.
The upper slide table 200 can move back and forth on the XY-axis plane, and more specifically, the cross unit 330 moves toward the X-axis with the forward movement of the X-axis polishing rod 312, and then the X-axis copper rod 313 retreats with the restoring force of the X-axis spring S1. So that the upper slide 200 moves back and forth along the X-axis plane.
The upper sliding table 200 moves toward the Y axis along with the forward movement of the Y-axis grinding rod 322, and then the Y-axis copper rod moves backward due to the restoring force of the Y-axis spring S2, so that the upper sliding table 200 moves forward and backward along the Y-axis plane.
Although the cross unit 330 is exemplified by a regular hexagonal body formed by a cross hole in the present invention, the cross unit is not limited to this, and may have any shape as long as it has four surfaces corresponding to each other.
The first female screw 414 screwed with the first lead screw 413 is relatively rotated, and the vertical coupling distance is adjusted. The utility model discloses in, X axle angle of inclination adjustment subassembly 400a is provided with two, when adjusting, first lead screw 413 on one of them X axle angle of inclination adjustment subassembly 400a is followed first female screw and is screwed out, and the X axle adjustment subassembly 310 rebound of being connected with top slip table 200, and first female screw 414 is screwed up to first lead screw 413 on another X axle angle of inclination adjustment subassembly 400a inside simultaneously, makes X axle adjustment subassembly 310 can remove downwards. This achieves the purpose that the upper slide table 200 rotates up and down in the Z-axis direction along both side surfaces of the X-axis of the upper slide table 200 with the center point X-axis as a reference.
The second screw 423 relatively rotates the second female screw 424 to be screw-coupled to adjust the vertical coupling distance. At this time, the rotation directions of the 2Y-axis inclination angle adjustment assemblies 400b are adjusted to different directions, one of the second screw rods 423 is loosened from the second female screw 424 to move the upper slide table 200 upward, and the other second screw rod 423 is tightened on the second female screw 424 to move the upper slide table 200 downward. And a Y-axis inclination angle adjusting assembly 400b which makes the center point Y axis of the upper sliding table 200 as a reference and rotates up and down in the Z-axis direction along two side surfaces of the Y axis of the upper sliding table 200.
Next, with reference to fig. 7 and 8,
for fine adjustment of the distance of the X-axis forward and backward movement, the X-axis micrometer moves forward and backward to make the X-axis grinding rod 312 drive the cross unit 330 to link, so that the X-axis copper rod 313 compresses the X-axis spring S1 and the upper sliding table 200 moves forward and backward on the X-axis. At this time, the first ball 411 of the X-axis tilting angle adjustment assembly 400a moves back and forth on the first ball holder of the X-axis adjustment assembly, and thus does not interfere with the back and forth movement of the upper slide 200 in the X-axis direction.
For fine adjustment operation of the Y-axis forward and backward movement distance, the Y-axis micrometer moves forward and backward to make the Y-axis grinding rod drive the cross unit 330 to link, so that the Y-axis copper rod can compress the Y-axis spring S2, and the upper sliding table 200 moves forward and backward on the Y-axis. At this time, the second ball 421 of the Y-axis inclination angle adjustment unit 400b moves back and forth on the second ball support 422 of the Y-axis inclination angle adjustment unit, and does not interfere with the linear movement of the upper slide table 200 in the Y-axis direction.
Although the utility model discloses in the middle of the explanation has been referred to the implementation case, but corresponding field practitioner can be in the within range record that does not surpass the subordinate patent application the utility model discloses an it is right in use and the field scope the utility model discloses carry out multiple modification and change.
Claims (10)
1. A precision drive slide for an inspection apparatus, comprising
A lower slide table (100);
an upper slide table (200);
an XY-axis movement adjusting assembly (300) used for moving the upper sliding table (200) back and forth is arranged between the lower sliding table (100) and the upper sliding table (200); and
the inclination angle adjusting assembly (400) moves in linkage with the XY axis movement adjusting assembly (300) and is used for adjusting the upper sliding table (200), and the inclination angle adjusting assembly (400) is respectively connected with the lower sliding table (100) and the upper sliding table (200);
the XY-axis movement adjusting assembly (300) comprises
An X-axis adjustment assembly (310) that moves back and forth along the X-axis;
a Y-axis adjustment assembly (320) that moves back and forth along the Y-axis; and a cross unit (330) connected with the X-axis adjusting assembly (310) and the Y-axis adjusting assembly (320) and used for the X-axis or Y-axis to move back and forth;
the tilt angle adjustment assembly (400) comprises
An X-axis inclination angle adjusting assembly (400a) which takes the central point X axis of the upper sliding table (200) as a reference and rotates up and down along two side surfaces of the X axis of the upper sliding table (200) in the Z-axis direction;
and the Y-axis inclination angle adjusting assembly (400b) takes the central point Y axis of the upper sliding table (200) as a reference and rotates up and down along two side surfaces of the Y axis of the upper sliding table (200) in the Z-axis direction.
2. The precision driven slide table for an inspection apparatus according to claim 1, wherein said lower slide table (100) is a support plate fixed on the floor, four corners of the support plate are respectively provided with support tables (110), each of said support tables (110) is separated from each other, and coupling holes of a predetermined size are respectively formed in both side edge positions of an X-axis passing through a central point of the lower slide table (100).
3. The precision drive slide for inspection equipment according to claim 1, wherein the upper slide (200) is a tray of inspected articles,
a first combination component (210) arranged at the lower part of the upper sliding table (200);
the first combination component (210) is provided with a first through hole inserted into the X-axis grinding rod (312), and the first through hole is parallel to the upper sliding table;
a first ball support (412) is mounted to a lower end of the first coupling member (210).
4. The precision drive slide for an inspection apparatus according to claim 1, wherein the X-axis adjustment assembly (310) includes an X-axis micrometer (311) provided along an X-axis direction of the upper slide (200) and at a lower portion of the upper slide (200),
an X-axis grinding rod (312) arranged at the rear end of the X-axis micrometer (311),
the rear end of the X-axis grinding rod (312) is provided with a cross unit (330), the rear end of the cross unit (330) is provided with an X-axis copper rod (313), and the rear end of the X-axis copper rod (313) is provided with an X-axis spring (S1);
the first auxiliary support assembly (316) is connected with the X-axis micrometer (311), and the first auxiliary support assembly (316) is used for supporting the X-axis micrometer (311).
5. The precision drive slide for an inspection apparatus according to claim 1, wherein the Y-axis adjustment assembly (320) includes a Y-axis micrometer (321) provided along a Y-axis direction of the upper slide (200) and at a lower portion of the upper slide (200),
a Y-axis grinding rod (322) arranged at the rear end of the Y-axis micrometer (321),
the rear end of the Y-axis grinding rod (322) is provided with a cross unit (330), the rear end of the cross unit (330) is provided with a Y-axis copper rod (323), the rear end of the Y-axis copper rod (323) is provided with a Y-axis spring (S2),
a second auxiliary support assembly (326) connected with the Y-axis micrometer (321), the second auxiliary support assembly (326) is used for supporting the Y-axis micrometer (321),
the second auxiliary support assembly (326) is fixed on the second combination assembly (324),
the second combination component (324) is provided with a second through hole inserted into the Y-axis grinding rod (322), the second through hole is parallel to the Y-axis adjusting component (320),
the upper end of the second coupling assembly (324) is mounted with a second ball support (422).
6. The precision drive slide table for an inspection apparatus according to claim 1, wherein the cross unit (330) serves as a joint end of an X-axis grinding rod (312) and an X-axis copper rod (313); or the like, or, alternatively,
the crossing unit (330) serves as a coupling end of the Y-axis grinding rod (322) and the Y-axis copper rod (323).
7. The precision drive slide table for an inspection apparatus according to claim 1, wherein the X-axis inclination angle adjusting assembly (400a) is constituted by an X-axis adjusting assembly (310) and a lower slide table (100) for adjusting the inclination angle of an upper slide table (200) in the Z-axis with an X-axis reference.
8. The precision drive slide for an inspection apparatus of claim 1 or 7, wherein the X-axis tilt angle adjustment assembly (400a) comprises
A first drive gear (410) for driving the first gear,
a first ball (411) provided at a lower center position of the first drive gear (410),
a first ball bearing support (412) for supporting a rotational flow of the first ball (411), the first ball bearing support (412) being disposed at a lower portion of the first coupling assembly (210),
a first screw rod (413) is arranged at the center above the first driving gear (410); the first screw rod (413) is fixed in the first female screw (414), and the first female screw (414) is fixed in the lower sliding table (100).
9. The precision drive slide table for an inspection apparatus according to claim 1, wherein the Y-axis inclination angle adjusting unit (400b) is constituted by a Y-axis adjusting unit (320) and an upper slide table (200) for adjusting the inclination angle of the upper slide table (200) in the Z-axis with a Y-axis reference.
10. The precision drive slide for an inspection apparatus of claim 1 or 9, wherein said Y-axis inclination angle adjustment assembly (400b) comprises
A second drive gear (420);
a second ball 421 disposed at the upper center of the second driving gear 420,
a second ball support (422) for supporting a rotational flow of the second ball (421), the second ball support (422) being fixed above the second coupling member (324);
the center of the upper portion of the second driving gear (420) is provided with a second screw rod (423), the second screw rod (423) is fixed in a second female screw (424), and the second female screw (424) is fixed in the upper sliding table (200).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023113049.8U CN214149358U (en) | 2020-12-22 | 2020-12-22 | Precision drive slide table for inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023113049.8U CN214149358U (en) | 2020-12-22 | 2020-12-22 | Precision drive slide table for inspection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214149358U true CN214149358U (en) | 2021-09-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023113049.8U Active CN214149358U (en) | 2020-12-22 | 2020-12-22 | Precision drive slide table for inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214149358U (en) |
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- 2020-12-22 CN CN202023113049.8U patent/CN214149358U/en active Active
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