CN214146687U - High-low concentration waste liquid discharge device - Google Patents
High-low concentration waste liquid discharge device Download PDFInfo
- Publication number
- CN214146687U CN214146687U CN202023107766.XU CN202023107766U CN214146687U CN 214146687 U CN214146687 U CN 214146687U CN 202023107766 U CN202023107766 U CN 202023107766U CN 214146687 U CN214146687 U CN 214146687U
- Authority
- CN
- China
- Prior art keywords
- shell
- air inlet
- waste liquid
- push rod
- concentration waste
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 91
- 239000002699 waste material Substances 0.000 title claims abstract description 41
- 238000007789 sealing Methods 0.000 claims description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Images
Abstract
The utility model discloses a high-low concentration waste liquid discharge device, which comprises a first side shell, a second side shell and a central shell; the central shell is provided with a liquid inlet, a first liquid outlet and a second liquid outlet, a three-way switching structure is arranged in the central shell, the liquid inlet is communicated with the first liquid outlet through the three-way switching structure to form a low-concentration waste liquid discharge channel, and the liquid inlet is communicated with the second liquid outlet through the three-way switching structure to form a high-concentration waste liquid discharge channel; the first side shell is provided with a first air inlet, the second side shell is provided with a second air inlet, and the first air inlet and the second air inlet are respectively connected with an air inlet pipeline. The utility model discloses according to the difference of waste liquid concentration, through the operation of air control tee bend switching structure, make the waste liquid discharge from the discharge passage of different concentrations, be convenient for carry out subsequent processing to the waste liquid of different concentrations.
Description
Technical Field
The utility model belongs to the technical field of waste water recovery handles, especially, relate to a high low concentration waste liquid discharging equipment.
Background
In a semiconductor manufacturing process, a large amount of waste liquid is generated, for example, in an etching process, a semiconductor needs to be acid-washed to remove impurities, oxide films, and the like on the surface, thereby generating a large amount of acid-containing waste liquid, and in a chemical mechanical polishing process, a large amount of waste liquid containing polishing slurry, polishing particles, and ammonia is also generated.
The treatment processes, equipments, and reagents used for treating the waste liquids with different concentrations are different, and the mixed treatment increases the treatment cost of the waste liquids, so that it is necessary to separately discharge the waste liquids with different concentrations to facilitate the separate treatment of the waste liquids with different concentrations.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the main technical problem who solves provides a high low concentration waste liquid discharging equipment, according to the difference of waste liquid concentration, through the operation of air control tee bend switching structure, makes the waste liquid discharge from the discharge passage of different concentrations, is convenient for carry out subsequent processing to the waste liquid of different concentrations.
In order to solve the technical problem, the utility model discloses a technical scheme be: a high-low concentration waste liquid discharge device comprises a first side shell, a second side shell and a central shell, wherein the first side shell is connected with the central shell, and the second side shell is connected with the central shell;
the central shell is provided with a liquid inlet, a first liquid outlet and a second liquid outlet, a three-way switching structure is arranged in the central shell, the liquid inlet is communicated with the first liquid outlet through the three-way switching structure to form a low-concentration waste liquid discharge channel, and the liquid inlet is communicated with the second liquid outlet through the three-way switching structure to form a high-concentration waste liquid discharge channel;
the first side shell is provided with a first air inlet, the second side shell is provided with a second air inlet, and the first air inlet and the second air inlet are respectively connected with an air inlet pipeline;
and a water resistance value meter is installed on the liquid inlet.
The utility model discloses a solve the further technical scheme that its technical problem adopted and be:
further, the tee bend switching structure includes first push rod, first connection pad, connecting rod, second connection pad and second push rod, first connection pad with the second connection pad respectively with the both ends of connecting rod are connected, the one end of first push rod with first connection pad is connected, the one end of second push rod with the second connection pad is connected, the other end of first push rod with first side casing cup joints, the other end of second push rod with second side casing cup joints.
Furthermore, a first retaining ring for limiting the first connecting disc to move towards the second liquid outlet and a second retaining ring for limiting the second connecting disc to move towards the first liquid outlet are formed in the center shell.
Furthermore, a third retainer ring for limiting the first connecting disc to move towards the first side shell is formed at one end, close to the central shell, of the first side shell; and a fourth retaining ring for limiting the second connecting disc to move towards the second side shell is formed at one end of the second side shell, which is close to the central shell.
Furthermore, a first stop block is installed at one end, far away from the central shell, of the first side shell; and a second stop block is installed at one end, far away from the central shell, of the second side shell.
Furthermore, a first sealing ring is sleeved at one end of the first push rod, which is close to the first air inlet, and the first air inlet is positioned between the first sealing ring and the first stop block; and a second sealing ring is sleeved at one end of the second push rod, which is close to the second air inlet, and the second air inlet is positioned between the second sealing ring and the second stop block.
Furthermore, a first sealing groove is formed in the side wall, opposite to the first check ring, of the first connecting disc, a second sealing groove is formed in the side wall, opposite to the second check ring, of the second connecting disc, and sealing rings are installed in the first sealing groove and the second sealing groove.
The utility model has the advantages that:
the utility model determines the concentration of the fluorinion in the waste liquid according to the water resistance value, and pushes the first push rod to move towards the second liquid outlet by introducing air into the first air inlet, so that the liquid inlet is communicated with the second liquid outlet to discharge the high-concentration waste liquid; or through letting in air in the second inlet port, promote the second push rod and remove to first liquid outlet direction, and then inlet and first liquid outlet intercommunication make low concentration waste liquid discharge.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is one of the schematic sectional structural diagrams of the present invention;
fig. 3 is a second schematic cross-sectional view (without three-way switching structure) of the present invention;
fig. 4 is a schematic structural diagram of the three-way switching structure of the present invention;
the parts in the drawings are marked as follows:
the three-way switching mechanism comprises a first side shell 1, a first air inlet hole 11, a third retainer ring 12, a second side shell 2, a second air inlet hole 21, a fourth retainer ring 22, a central shell 3, a liquid inlet 31, a first liquid outlet 32, a second liquid outlet 33, a first retainer ring 34, a second retainer ring 35, a three-way switching structure 4, a first push rod 41, a first connecting disc 42, a first sealing groove 421, a connecting rod 43, a second connecting disc 44, a second sealing groove 441, a second push rod 45, a first stopper 5, a second stopper 6, a first sealing ring 7 and a second sealing ring 8.
Detailed Description
The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.
Example (b): a high-low concentration waste liquid discharge device, as shown in fig. 1-4, comprising a first side casing 1, a second side casing 2 and a central casing 3, wherein the first side casing is connected with the central casing, and the second side casing is connected with the central casing;
the central shell is provided with a liquid inlet 31, a first liquid outlet 32 and a second liquid outlet 33, the interior of the central shell is provided with a three-way switching structure 4, the liquid inlet is communicated with the first liquid outlet through the three-way switching structure to form a low-concentration waste liquid discharge channel, and the liquid inlet is communicated with the second liquid outlet through the three-way switching structure to form a high-concentration waste liquid discharge channel;
the first side shell is provided with a first air inlet hole 11, the second side shell is provided with a second air inlet hole 21, and the first air inlet hole and the second air inlet hole are respectively connected with an air inlet pipeline;
and a water resistance value meter is installed on the liquid inlet.
The tee bend switching structure includes first push rod 41, first connection pad 42, connecting rod 43, second connection pad 44 and second push rod 45, first connection pad with the second connection pad respectively with the both ends of connecting rod are connected, the one end of first push rod with first connection pad is connected, the one end of second push rod with the second connection pad is connected, the other end of first push rod with first side casing cup joints, the other end of second push rod with second side casing cup joints.
A first retainer ring 34 for limiting the movement of the first connecting disc to the second liquid outlet and a second retainer ring 35 for limiting the movement of the second connecting disc to the first liquid outlet are formed in the center housing.
A third retainer ring 12 for limiting the first connecting disc to move towards the first side shell is formed at one end of the first side shell, which is close to the central shell; and a fourth retainer ring 22 for limiting the movement of the second connecting disc towards the second side shell is formed at one end of the second side shell close to the central shell.
A first stop block 5 is arranged at one end of the first side shell, which is far away from the central shell; and a second stop block 6 is arranged at one end of the second side shell, which is far away from the central shell.
A first sealing ring 7 is sleeved at one end of the first push rod, which is close to the first air inlet, and the first air inlet is positioned between the first sealing ring and the first stop block; and a second sealing ring 8 is sleeved at one end of the second push rod, which is close to the second air inlet, and the second air inlet is positioned between the second sealing ring and the second stop block.
The first connecting disc and the side wall opposite to the first retaining ring are provided with a first sealing groove 421, the second connecting disc and the side wall opposite to the second retaining ring are provided with a second sealing groove 441, and sealing rings are arranged in the first sealing groove and the second sealing groove.
The working principle of the utility model is as follows:
the utility model determines the concentration of the fluorinion in the waste liquid according to the water resistance value, and pushes the first push rod to move towards the second liquid outlet by introducing air into the first air inlet, so that the liquid inlet is communicated with the second liquid outlet to discharge the high-concentration waste liquid; or through letting in air in the second inlet port, promote the second push rod and remove to first liquid outlet direction, and then inlet and first liquid outlet intercommunication make low concentration waste liquid discharge.
The above only is the embodiment of the present invention, not limiting the scope of the present invention, all the equivalent structure changes made in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the same principle as the present invention.
Claims (7)
1. The utility model provides a high low concentration waste liquid discharging equipment which characterized in that: the shell comprises a first side shell (1), a second side shell (2) and a central shell (3), wherein the first side shell is connected with the central shell, and the second side shell is connected with the central shell;
the central shell is provided with a liquid inlet (31), a first liquid outlet (32) and a second liquid outlet (33), a three-way switching structure (4) is arranged inside the central shell, the liquid inlet is communicated with the first liquid outlet through the three-way switching structure to form a low-concentration waste liquid discharge channel, and the liquid inlet is communicated with the second liquid outlet through the three-way switching structure to form a high-concentration waste liquid discharge channel;
the first side shell is provided with a first air inlet (11), the second side shell is provided with a second air inlet (21), and the first air inlet and the second air inlet are respectively connected with an air inlet pipeline;
and a water resistance value meter is installed on the liquid inlet.
2. The high-low concentration waste liquid discharge apparatus according to claim 1, wherein: the tee bend switching structure includes first push rod (41), first connection pad (42), connecting rod (43), second connection pad (44) and second push rod (45), first connection pad with the second connection pad respectively with the both ends of connecting rod are connected, the one end of first push rod with first connection pad is connected, the one end of second push rod with the second connection pad is connected, the other end of first push rod with first side casing cup joints, the other end of second push rod with second side casing cup joints.
3. The high-low concentration waste liquid discharge apparatus according to claim 2, wherein: and a first retaining ring (34) for limiting the first connecting disc to move towards the second liquid outlet and a second retaining ring (35) for limiting the second connecting disc to move towards the first liquid outlet are formed in the center shell.
4. The high-low concentration waste liquid discharge apparatus according to claim 1, wherein: a third retainer ring (12) for limiting the first connecting disc to move towards the first side shell is formed at one end, close to the central shell, of the first side shell; and a fourth retainer ring (22) for limiting the second connecting disc to move towards the second side shell is formed at one end of the second side shell close to the center shell.
5. The high-low concentration waste liquid discharge apparatus according to claim 2, wherein: a first stop block (5) is arranged at one end of the first side shell, which is far away from the central shell; and a second stop block (6) is arranged at one end, far away from the central shell, of the second side shell.
6. The high-low concentration waste liquid discharge apparatus according to claim 5, wherein: one end of the first push rod, which is close to the first air inlet, is sleeved with a first sealing ring (7), and the first air inlet is positioned between the first sealing ring and the first stop block; and a second sealing ring (8) is sleeved at one end of the second push rod, which is close to the second air inlet, and the second air inlet is positioned between the second sealing ring and the second stop block.
7. The high-low concentration waste liquid discharge apparatus according to claim 3, wherein: the side wall of the first connecting disc opposite to the first retaining ring is provided with a first sealing groove (421), the side wall of the second connecting disc opposite to the second retaining ring is provided with a second sealing groove (441), and sealing rings are arranged in the first sealing groove and the second sealing groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023107766.XU CN214146687U (en) | 2020-12-22 | 2020-12-22 | High-low concentration waste liquid discharge device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023107766.XU CN214146687U (en) | 2020-12-22 | 2020-12-22 | High-low concentration waste liquid discharge device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214146687U true CN214146687U (en) | 2021-09-07 |
Family
ID=77528651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023107766.XU Active CN214146687U (en) | 2020-12-22 | 2020-12-22 | High-low concentration waste liquid discharge device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214146687U (en) |
-
2020
- 2020-12-22 CN CN202023107766.XU patent/CN214146687U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN208977600U (en) | A kind of production tooling of high-accuracy shaped valve seat | |
| CN103367197B (en) | Crystal column surface treatment system | |
| CN103189965A (en) | Refining method for alkaline treatment fluid for semiconductor substrate and refining device | |
| CN214146687U (en) | High-low concentration waste liquid discharge device | |
| CN108426758B (en) | Local processing method for wafer | |
| CN101758457B (en) | Method for recovering and recycling chemically mechanical polishing solution | |
| CN203991539U (en) | Eliminate the device that capillary stops up | |
| US20170266701A1 (en) | Cleaning apparatus using liquid mixed with gas | |
| CN102910578B (en) | A kind of method adopting hybrid plasma to realize silicon base chip and PDMS chip bonding | |
| CN110106355A (en) | The method of microemulsion extracting gold based on microreactor | |
| CN103613161B (en) | A kind for the treatment of apparatus of the waste water containing arsenic and chromium | |
| CN205500884U (en) | Countercurrent circuit ozone oxidation experimental apparatus | |
| CN108426978B (en) | Local processing method for wafer | |
| CN209839230U (en) | Novel proportional water mixing valve | |
| CN209917517U (en) | Tail gas treatment device | |
| CN112239243A (en) | Liquid deamination device and liquid deamination method | |
| CN112870981A (en) | Novel efficient oil-water separation net film and preparation method thereof | |
| CN217519309U (en) | Stainless steel valve body | |
| CN206857729U (en) | A kind of flexible injector | |
| CN105819542A (en) | Plasma sewage treatment device and treatment method thereof | |
| CN220860720U (en) | Resin column assembly for experiment | |
| CN210344698U (en) | Drain pipe structure | |
| CN106517450B (en) | Wastewater separation device | |
| CN208433366U (en) | A kind of etching apparatus | |
| WO2024001081A1 (en) | Metal contamination collecting system and metal contamination collecting method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 215300 room 5, 1881, North Shuixiu Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Ruizhiyuan Semiconductor Technology (Suzhou) Co.,Ltd. Address before: 215300 room 5, 1881, North Shuixiu Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Suzhou ruizhiyuan Automation Technology Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |