CN214146687U - High-low concentration waste liquid discharge device - Google Patents

High-low concentration waste liquid discharge device Download PDF

Info

Publication number
CN214146687U
CN214146687U CN202023107766.XU CN202023107766U CN214146687U CN 214146687 U CN214146687 U CN 214146687U CN 202023107766 U CN202023107766 U CN 202023107766U CN 214146687 U CN214146687 U CN 214146687U
Authority
CN
China
Prior art keywords
shell
air inlet
waste liquid
push rod
concentration waste
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202023107766.XU
Other languages
Chinese (zh)
Inventor
陈铁龙
林智颖
陈坤
张振
孙东初
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ruizhiyuan Semiconductor Technology (Suzhou) Co.,Ltd.
Original Assignee
Suzhou Ruizhiyuan Automation Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Ruizhiyuan Automation Technology Co ltd filed Critical Suzhou Ruizhiyuan Automation Technology Co ltd
Priority to CN202023107766.XU priority Critical patent/CN214146687U/en
Application granted granted Critical
Publication of CN214146687U publication Critical patent/CN214146687U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

The utility model discloses a high-low concentration waste liquid discharge device, which comprises a first side shell, a second side shell and a central shell; the central shell is provided with a liquid inlet, a first liquid outlet and a second liquid outlet, a three-way switching structure is arranged in the central shell, the liquid inlet is communicated with the first liquid outlet through the three-way switching structure to form a low-concentration waste liquid discharge channel, and the liquid inlet is communicated with the second liquid outlet through the three-way switching structure to form a high-concentration waste liquid discharge channel; the first side shell is provided with a first air inlet, the second side shell is provided with a second air inlet, and the first air inlet and the second air inlet are respectively connected with an air inlet pipeline. The utility model discloses according to the difference of waste liquid concentration, through the operation of air control tee bend switching structure, make the waste liquid discharge from the discharge passage of different concentrations, be convenient for carry out subsequent processing to the waste liquid of different concentrations.

Description

High-low concentration waste liquid discharge device
Technical Field
The utility model belongs to the technical field of waste water recovery handles, especially, relate to a high low concentration waste liquid discharging equipment.
Background
In a semiconductor manufacturing process, a large amount of waste liquid is generated, for example, in an etching process, a semiconductor needs to be acid-washed to remove impurities, oxide films, and the like on the surface, thereby generating a large amount of acid-containing waste liquid, and in a chemical mechanical polishing process, a large amount of waste liquid containing polishing slurry, polishing particles, and ammonia is also generated.
The treatment processes, equipments, and reagents used for treating the waste liquids with different concentrations are different, and the mixed treatment increases the treatment cost of the waste liquids, so that it is necessary to separately discharge the waste liquids with different concentrations to facilitate the separate treatment of the waste liquids with different concentrations.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the main technical problem who solves provides a high low concentration waste liquid discharging equipment, according to the difference of waste liquid concentration, through the operation of air control tee bend switching structure, makes the waste liquid discharge from the discharge passage of different concentrations, is convenient for carry out subsequent processing to the waste liquid of different concentrations.
In order to solve the technical problem, the utility model discloses a technical scheme be: a high-low concentration waste liquid discharge device comprises a first side shell, a second side shell and a central shell, wherein the first side shell is connected with the central shell, and the second side shell is connected with the central shell;
the central shell is provided with a liquid inlet, a first liquid outlet and a second liquid outlet, a three-way switching structure is arranged in the central shell, the liquid inlet is communicated with the first liquid outlet through the three-way switching structure to form a low-concentration waste liquid discharge channel, and the liquid inlet is communicated with the second liquid outlet through the three-way switching structure to form a high-concentration waste liquid discharge channel;
the first side shell is provided with a first air inlet, the second side shell is provided with a second air inlet, and the first air inlet and the second air inlet are respectively connected with an air inlet pipeline;
and a water resistance value meter is installed on the liquid inlet.
The utility model discloses a solve the further technical scheme that its technical problem adopted and be:
further, the tee bend switching structure includes first push rod, first connection pad, connecting rod, second connection pad and second push rod, first connection pad with the second connection pad respectively with the both ends of connecting rod are connected, the one end of first push rod with first connection pad is connected, the one end of second push rod with the second connection pad is connected, the other end of first push rod with first side casing cup joints, the other end of second push rod with second side casing cup joints.
Furthermore, a first retaining ring for limiting the first connecting disc to move towards the second liquid outlet and a second retaining ring for limiting the second connecting disc to move towards the first liquid outlet are formed in the center shell.
Furthermore, a third retainer ring for limiting the first connecting disc to move towards the first side shell is formed at one end, close to the central shell, of the first side shell; and a fourth retaining ring for limiting the second connecting disc to move towards the second side shell is formed at one end of the second side shell, which is close to the central shell.
Furthermore, a first stop block is installed at one end, far away from the central shell, of the first side shell; and a second stop block is installed at one end, far away from the central shell, of the second side shell.
Furthermore, a first sealing ring is sleeved at one end of the first push rod, which is close to the first air inlet, and the first air inlet is positioned between the first sealing ring and the first stop block; and a second sealing ring is sleeved at one end of the second push rod, which is close to the second air inlet, and the second air inlet is positioned between the second sealing ring and the second stop block.
Furthermore, a first sealing groove is formed in the side wall, opposite to the first check ring, of the first connecting disc, a second sealing groove is formed in the side wall, opposite to the second check ring, of the second connecting disc, and sealing rings are installed in the first sealing groove and the second sealing groove.
The utility model has the advantages that:
the utility model determines the concentration of the fluorinion in the waste liquid according to the water resistance value, and pushes the first push rod to move towards the second liquid outlet by introducing air into the first air inlet, so that the liquid inlet is communicated with the second liquid outlet to discharge the high-concentration waste liquid; or through letting in air in the second inlet port, promote the second push rod and remove to first liquid outlet direction, and then inlet and first liquid outlet intercommunication make low concentration waste liquid discharge.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is one of the schematic sectional structural diagrams of the present invention;
fig. 3 is a second schematic cross-sectional view (without three-way switching structure) of the present invention;
fig. 4 is a schematic structural diagram of the three-way switching structure of the present invention;
the parts in the drawings are marked as follows:
the three-way switching mechanism comprises a first side shell 1, a first air inlet hole 11, a third retainer ring 12, a second side shell 2, a second air inlet hole 21, a fourth retainer ring 22, a central shell 3, a liquid inlet 31, a first liquid outlet 32, a second liquid outlet 33, a first retainer ring 34, a second retainer ring 35, a three-way switching structure 4, a first push rod 41, a first connecting disc 42, a first sealing groove 421, a connecting rod 43, a second connecting disc 44, a second sealing groove 441, a second push rod 45, a first stopper 5, a second stopper 6, a first sealing ring 7 and a second sealing ring 8.
Detailed Description
The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.
Example (b): a high-low concentration waste liquid discharge device, as shown in fig. 1-4, comprising a first side casing 1, a second side casing 2 and a central casing 3, wherein the first side casing is connected with the central casing, and the second side casing is connected with the central casing;
the central shell is provided with a liquid inlet 31, a first liquid outlet 32 and a second liquid outlet 33, the interior of the central shell is provided with a three-way switching structure 4, the liquid inlet is communicated with the first liquid outlet through the three-way switching structure to form a low-concentration waste liquid discharge channel, and the liquid inlet is communicated with the second liquid outlet through the three-way switching structure to form a high-concentration waste liquid discharge channel;
the first side shell is provided with a first air inlet hole 11, the second side shell is provided with a second air inlet hole 21, and the first air inlet hole and the second air inlet hole are respectively connected with an air inlet pipeline;
and a water resistance value meter is installed on the liquid inlet.
The tee bend switching structure includes first push rod 41, first connection pad 42, connecting rod 43, second connection pad 44 and second push rod 45, first connection pad with the second connection pad respectively with the both ends of connecting rod are connected, the one end of first push rod with first connection pad is connected, the one end of second push rod with the second connection pad is connected, the other end of first push rod with first side casing cup joints, the other end of second push rod with second side casing cup joints.
A first retainer ring 34 for limiting the movement of the first connecting disc to the second liquid outlet and a second retainer ring 35 for limiting the movement of the second connecting disc to the first liquid outlet are formed in the center housing.
A third retainer ring 12 for limiting the first connecting disc to move towards the first side shell is formed at one end of the first side shell, which is close to the central shell; and a fourth retainer ring 22 for limiting the movement of the second connecting disc towards the second side shell is formed at one end of the second side shell close to the central shell.
A first stop block 5 is arranged at one end of the first side shell, which is far away from the central shell; and a second stop block 6 is arranged at one end of the second side shell, which is far away from the central shell.
A first sealing ring 7 is sleeved at one end of the first push rod, which is close to the first air inlet, and the first air inlet is positioned between the first sealing ring and the first stop block; and a second sealing ring 8 is sleeved at one end of the second push rod, which is close to the second air inlet, and the second air inlet is positioned between the second sealing ring and the second stop block.
The first connecting disc and the side wall opposite to the first retaining ring are provided with a first sealing groove 421, the second connecting disc and the side wall opposite to the second retaining ring are provided with a second sealing groove 441, and sealing rings are arranged in the first sealing groove and the second sealing groove.
The working principle of the utility model is as follows:
the utility model determines the concentration of the fluorinion in the waste liquid according to the water resistance value, and pushes the first push rod to move towards the second liquid outlet by introducing air into the first air inlet, so that the liquid inlet is communicated with the second liquid outlet to discharge the high-concentration waste liquid; or through letting in air in the second inlet port, promote the second push rod and remove to first liquid outlet direction, and then inlet and first liquid outlet intercommunication make low concentration waste liquid discharge.
The above only is the embodiment of the present invention, not limiting the scope of the present invention, all the equivalent structure changes made in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the same principle as the present invention.

Claims (7)

1. The utility model provides a high low concentration waste liquid discharging equipment which characterized in that: the shell comprises a first side shell (1), a second side shell (2) and a central shell (3), wherein the first side shell is connected with the central shell, and the second side shell is connected with the central shell;
the central shell is provided with a liquid inlet (31), a first liquid outlet (32) and a second liquid outlet (33), a three-way switching structure (4) is arranged inside the central shell, the liquid inlet is communicated with the first liquid outlet through the three-way switching structure to form a low-concentration waste liquid discharge channel, and the liquid inlet is communicated with the second liquid outlet through the three-way switching structure to form a high-concentration waste liquid discharge channel;
the first side shell is provided with a first air inlet (11), the second side shell is provided with a second air inlet (21), and the first air inlet and the second air inlet are respectively connected with an air inlet pipeline;
and a water resistance value meter is installed on the liquid inlet.
2. The high-low concentration waste liquid discharge apparatus according to claim 1, wherein: the tee bend switching structure includes first push rod (41), first connection pad (42), connecting rod (43), second connection pad (44) and second push rod (45), first connection pad with the second connection pad respectively with the both ends of connecting rod are connected, the one end of first push rod with first connection pad is connected, the one end of second push rod with the second connection pad is connected, the other end of first push rod with first side casing cup joints, the other end of second push rod with second side casing cup joints.
3. The high-low concentration waste liquid discharge apparatus according to claim 2, wherein: and a first retaining ring (34) for limiting the first connecting disc to move towards the second liquid outlet and a second retaining ring (35) for limiting the second connecting disc to move towards the first liquid outlet are formed in the center shell.
4. The high-low concentration waste liquid discharge apparatus according to claim 1, wherein: a third retainer ring (12) for limiting the first connecting disc to move towards the first side shell is formed at one end, close to the central shell, of the first side shell; and a fourth retainer ring (22) for limiting the second connecting disc to move towards the second side shell is formed at one end of the second side shell close to the center shell.
5. The high-low concentration waste liquid discharge apparatus according to claim 2, wherein: a first stop block (5) is arranged at one end of the first side shell, which is far away from the central shell; and a second stop block (6) is arranged at one end, far away from the central shell, of the second side shell.
6. The high-low concentration waste liquid discharge apparatus according to claim 5, wherein: one end of the first push rod, which is close to the first air inlet, is sleeved with a first sealing ring (7), and the first air inlet is positioned between the first sealing ring and the first stop block; and a second sealing ring (8) is sleeved at one end of the second push rod, which is close to the second air inlet, and the second air inlet is positioned between the second sealing ring and the second stop block.
7. The high-low concentration waste liquid discharge apparatus according to claim 3, wherein: the side wall of the first connecting disc opposite to the first retaining ring is provided with a first sealing groove (421), the side wall of the second connecting disc opposite to the second retaining ring is provided with a second sealing groove (441), and sealing rings are arranged in the first sealing groove and the second sealing groove.
CN202023107766.XU 2020-12-22 2020-12-22 High-low concentration waste liquid discharge device Active CN214146687U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202023107766.XU CN214146687U (en) 2020-12-22 2020-12-22 High-low concentration waste liquid discharge device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202023107766.XU CN214146687U (en) 2020-12-22 2020-12-22 High-low concentration waste liquid discharge device

Publications (1)

Publication Number Publication Date
CN214146687U true CN214146687U (en) 2021-09-07

Family

ID=77528651

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202023107766.XU Active CN214146687U (en) 2020-12-22 2020-12-22 High-low concentration waste liquid discharge device

Country Status (1)

Country Link
CN (1) CN214146687U (en)

Similar Documents

Publication Publication Date Title
CN208977600U (en) A kind of production tooling of high-accuracy shaped valve seat
CN103367197B (en) Crystal column surface treatment system
CN103189965A (en) Refining method for alkaline treatment fluid for semiconductor substrate and refining device
CN214146687U (en) High-low concentration waste liquid discharge device
CN108426758B (en) Local processing method for wafer
CN101758457B (en) Method for recovering and recycling chemically mechanical polishing solution
CN203991539U (en) Eliminate the device that capillary stops up
US20170266701A1 (en) Cleaning apparatus using liquid mixed with gas
CN102910578B (en) A kind of method adopting hybrid plasma to realize silicon base chip and PDMS chip bonding
CN110106355A (en) The method of microemulsion extracting gold based on microreactor
CN103613161B (en) A kind for the treatment of apparatus of the waste water containing arsenic and chromium
CN205500884U (en) Countercurrent circuit ozone oxidation experimental apparatus
CN108426978B (en) Local processing method for wafer
CN209839230U (en) Novel proportional water mixing valve
CN209917517U (en) Tail gas treatment device
CN112239243A (en) Liquid deamination device and liquid deamination method
CN112870981A (en) Novel efficient oil-water separation net film and preparation method thereof
CN217519309U (en) Stainless steel valve body
CN206857729U (en) A kind of flexible injector
CN105819542A (en) Plasma sewage treatment device and treatment method thereof
CN220860720U (en) Resin column assembly for experiment
CN210344698U (en) Drain pipe structure
CN106517450B (en) Wastewater separation device
CN208433366U (en) A kind of etching apparatus
WO2024001081A1 (en) Metal contamination collecting system and metal contamination collecting method

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CP01 Change in the name or title of a patent holder

Address after: 215300 room 5, 1881, North Shuixiu Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province

Patentee after: Ruizhiyuan Semiconductor Technology (Suzhou) Co.,Ltd.

Address before: 215300 room 5, 1881, North Shuixiu Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province

Patentee before: Suzhou ruizhiyuan Automation Technology Co.,Ltd.

CP01 Change in the name or title of a patent holder