CN214115773U

CN214115773U - Crystal pulling furnace

Info

Publication number: CN214115773U
Application number: CN202023046389.3U
Authority: CN
Inventors: 毛勤虎; 沈福哲; 金珍根; 车贤湖
Original assignee: Xian Eswin Silicon Wafer Technology Co Ltd; Xian Eswin Material Technology Co Ltd
Current assignee: Xian Eswin Silicon Wafer Technology Co Ltd; Xian Eswin Material Technology Co Ltd
Priority date: 2020-12-17
Filing date: 2020-12-17
Publication date: 2021-09-03
Anticipated expiration: 2030-12-17

Abstract

The utility model provides a crystal pulling furnace, include: the furnace body is internally limited with a cavity, the top of the furnace body is provided with a crystal pulling opening communicated with the cavity, and the bottom wall of the furnace body is provided with an outlet communicated with the cavity; the base is arranged in the cavity; the crucible is arranged on the base; the exhaust structure comprises an exhaust pipe and a movable piece, and the exhaust pipe is arranged in the outlet; the movable piece is arranged in the exhaust pipe, the movable piece is stopped against the inner side wall of the exhaust pipe, and at least part of the movable piece can move along the inner side wall of the exhaust pipe. The utility model discloses an in the embodiment, the deposit on the inside wall of blast pipe can be cleared up in the activity of the inside wall of at least part edge blast pipe through the moving part, has solved the difficult problem of clearing up of blast pipe inner wall deposit for tail gas normally discharges, avoids influencing the atmospheric pressure in the crystal pulling stove, is favorable to the stable growth of crystal.

Description

Crystal pulling furnace

Technical Field

The utility model relates to a crystal pulling furnace technical field, concretely relates to crystal pulling furnace.

Background

Inert gas is required to be filled into the crystal pulling furnace in the crystal pulling process, firstly, the pressure in the furnace is kept constant, and a stable growth space is provided for crystals; and secondly, a large amount of silicon oxide gas and impurities generated in the crystal growth process are taken away, and the phenomenon that the substances are deposited on the surface of the thermal field component in a large amount to influence the normal use of the thermal field component is avoided. The exhaust system of the crystal pulling furnace ensures the normal discharge of tail gas and impurities, when the tail gas passes through the exhaust pipe, the reaction deposition phenomenon can occur, the exhaust pipe is easy to be blocked, the normal discharge of the tail gas is influenced, the air pressure in the crystal pulling furnace is also influenced, and the stable growth of crystals is not facilitated.

SUMMERY OF THE UTILITY MODEL

In view of this, the utility model provides a crystal pulling furnace for solve the difficult clearance of blast pipe inner wall deposit in the crystal pulling furnace, influence the problem of tail gas outgoing and furnace internal pressure.

The embodiment of the utility model provides a crystal pulling furnace, include:

the furnace body is internally limited with a cavity, the top of the furnace body is provided with a crystal pulling opening communicated with the cavity, and the bottom wall of the furnace body is provided with an outlet communicated with the cavity;

a base disposed within the chamber;

the crucible is arranged on the base;

the exhaust structure comprises an exhaust pipe and a movable piece, and the exhaust pipe is arranged in the outlet; the movable piece is arranged in the exhaust pipe, the movable piece is stopped against the inner side wall of the exhaust pipe, and at least part of the movable piece can move along the inner side wall of the exhaust pipe.

Wherein the movable member is a spring, at least a part of which is movable in an axial direction of the exhaust pipe along an inner side wall of the exhaust pipe.

Wherein a portion of the spring is connected to an inner sidewall of the exhaust pipe.

Wherein, the surface of the spring is provided with bristles or protrusions.

The spring is provided with a driving plate, an orthographic projection of the driving plate on a first plane is located in an orthographic projection of the spring on the first plane, and the first plane is perpendicular to the axial direction of the exhaust pipe.

Wherein, be equipped with a plurality of said drive plates on the spring, a plurality of said drive plates set up along the circumferential direction of spring at intervals.

Wherein the drive plate is provided at an upper end of the spring, the drive plate extending inwardly in a radial direction of the spring.

Wherein the spring is rotatable about an axial direction of the exhaust pipe.

The bottom of the furnace body is provided with a plurality of outlets, and each outlet is provided with one exhaust structure.

Wherein, a plurality of the outlets are distributed at intervals along the circumferential direction of the furnace body.

The furnace body is characterized in that branch pipes and a collecting pipe are respectively arranged outside the furnace body, the exhaust pipe in each exhaust structure is respectively communicated with one end of the corresponding branch pipe, and the other end of each branch pipe is respectively communicated with the collecting pipe.

Wherein, a heater is arranged on the outer side of the crucible, and a heat insulating material is arranged between the heater and the inner wall of the furnace body; and/or

And the outer side wall of the base is provided with a heat insulating material.

In order to solve the technical problem, the utility model discloses a following technical scheme:

according to the utility model discloses crystal pulling furnace, include: the furnace body is internally limited with a cavity, the top of the furnace body is provided with a crystal pulling opening communicated with the cavity, and the bottom wall of the furnace body is provided with an outlet communicated with the cavity; a base disposed within the chamber; the crucible is arranged on the base; the exhaust structure comprises an exhaust pipe and a movable piece, and the exhaust pipe is arranged in the outlet; the movable piece is arranged in the exhaust pipe, the movable piece is stopped against the inner side wall of the exhaust pipe, and at least part of the movable piece can move along the inner side wall of the exhaust pipe. In the embodiment of the utility model, the movable part is arranged in the exhaust pipe, and the movable part is only supported against the inner side wall of the exhaust pipe, at least part of the movable part can move along the inner side wall of the exhaust pipe, and the sediment on the inner side wall of the exhaust pipe can be cleaned through the movement of at least part of the movable part along the inner side wall of the exhaust pipe, so that the problem that the sediment on the inner side wall of the exhaust pipe is not easy to clean is solved, the exhaust pipe is prevented from being blocked, the tail gas is normally discharged, the air flow inside and outside the furnace is ensured to be smooth, the pressure in the furnace is stable, the influence on the air pressure in the crystal pulling furnace is avoided, and the stable growth of crystals is facilitated; meanwhile, the backflow of tail gas can be avoided, floaters in the tail gas are prevented from floating on the surface of the silicon solution, impurities are prevented from entering the solution, and the yield of the whole crystal bar is improved.

Drawings

FIG. 1 is a schematic view of a crystal pulling furnace according to an embodiment of the present invention;

FIG. 2 is another schematic view of the crystal pulling furnace according to the embodiment of the present invention;

FIG. 3 is a partial sectional view of a crystal pulling furnace according to an embodiment of the present invention;

FIG. 4 is another partial cross sectional view of the crystal pulling furnace in accordance with an embodiment of the present invention;

FIG. 5 is a schematic view of the venting structure;

fig. 6 is another schematic view of the vent structure.

Reference numerals

A furnace body 10; a chamber 11;

a base 20;

a crucible 30;

an exhaust pipe 40;

a movable member 50; a drive plate 51;

a branch pipe 60; a manifold 61; a heater 62; and an insulating material 63.

Detailed Description

In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined below to clearly and completely describe the technical solution of the embodiments of the present invention. It is to be understood that the embodiments described are only some of the embodiments of the present invention, and not all of them. All other embodiments, which can be derived from the description of the embodiments of the present invention by a person skilled in the art, are within the scope of the present invention.

A crystal pulling furnace according to an embodiment of the present invention is described in detail below.

As shown in fig. 1 to 6, the crystal pulling furnace according to the embodiment of the present invention comprises a furnace body 10, a pedestal 20, a crucible 30 and an exhaust structure, wherein a chamber 11 is defined in the furnace body 10, the furnace body 10 may be in a column shape, the chamber 11 may be in a column shape, the axes of the furnace body 10 and the chamber 11 may be collinear, a crystal pulling opening communicated with the chamber 11 is provided at the top of the furnace body 10, an outlet communicated with the chamber 11 is provided at the bottom wall of the furnace body 10, the outlet may have one or more outlets, the pedestal 20 is provided in the chamber 11, and the crucible 30 is provided on the pedestal 20; the exhaust structure comprises an exhaust pipe 40 and a movable piece 50, the exhaust pipe 40 can be made of graphite, the exhaust pipe 40 is arranged in an outlet, the axes of the exhaust pipe 40 and the outlet are collinear, and gas in the chamber 11 flows out of the furnace body 10 through the exhaust pipe 40; the movable element 50 is disposed in the exhaust pipe 40, and the movable element 50 is stopped against the inner sidewall of the exhaust pipe 40, and at least a portion of the movable element 50 is movable along the inner sidewall of the exhaust pipe 40.

In the embodiment of the utility model, the movable part 50 is arranged in the exhaust pipe 40, and the movable part 50 only supports the inner side wall of the exhaust pipe 40, at least part of the movable part 50 can move along the inner side wall of the exhaust pipe 40, the deposit on the inner side wall of the exhaust pipe 40 can be cleaned through the movement of at least part of the movable part 50 along the inner side wall of the exhaust pipe 40, the problem that the deposit on the inner wall of the exhaust pipe 40 is not easy to clean is solved, the exhaust pipe 40 is prevented from being blocked, the tail gas is normally discharged, the air flow inside and outside the furnace is ensured to be smooth, the pressure in the furnace is stable, the influence on the air pressure in the crystal pulling furnace is avoided, and the stable growth of crystals is facilitated; meanwhile, the backflow of tail gas can be avoided, floating objects in the tail gas are prevented from floating on the surface of the silicon solution, impurities are prevented from entering the solution, and the yield of the whole crystal bar is improved; the maintenance and cleaning times of the exhaust pipe can be reduced, the process efficiency is improved, and the service life of spare parts is prolonged.

In some embodiments, as shown in fig. 3 and 4, the movable member 50 is a spring, at least a portion of the spring is movable along an inner sidewall of the exhaust tube 40 in an axial direction of the exhaust tube 40, the gas in the chamber 11 flows from top to bottom and flows out through the exhaust tube 40, the gas can drive the spring to move during the gas flowing out, deposits on the inner sidewall of the exhaust tube 40 can be removed through the movement of the spring, meanwhile, the deposits deposited on the spring can be removed due to the movement of the spring, the exhaust tube 40 is prevented from being blocked, the pressure in the furnace is stable, and the gas pressure in the crystal pulling furnace is prevented from being influenced.

Alternatively, a portion of the spring is connected to the inner sidewall of the exhaust pipe 40, for example, a portion of the spring is welded to the inner sidewall of the exhaust pipe 40, so that the spring can stably move partially under the pushing force of the air flow to remove the deposits on the inner sidewall of the exhaust pipe 40.

In some embodiments, the surface of the spring is provided with bristles or protrusions, so that the bristles or protrusions are effectively utilized to remove deposits on the inner side wall of the exhaust pipe 40 when the spring moves, and the cleaning effect is improved.

In other embodiments, as shown in fig. 6, the spring is provided with a driving plate 51, an orthographic projection of the driving plate 51 on a first plane is located in an orthographic projection of the spring on the first plane, the first plane is perpendicular to the axial direction of the exhaust pipe 40, and the driving plate 51 can improve the pushing force of the gas on the spring to facilitate the movement of the spring.

The spring is provided with a plurality of driving plates 51, and the driving plates 51 are arranged at intervals along the circumferential direction of the spring and can be arranged at intervals uniformly, so that the spring can move stably.

Alternatively, the drive plate 51 is provided at the upper end of the spring, the drive plate 51 extending inwardly in the radial direction of the spring.

In some embodiments, the spring is rotatable about the axis of the exhaust tube 40, facilitating the spring to dislodge deposits on the inner sidewall of the exhaust tube 40, improving cleaning.

Optionally, the bottom of the furnace body 10 is provided with a plurality of outlets, for example, a plurality of outlets are distributed at intervals along the circumference of the furnace body 10, and each outlet is provided with an exhaust structure.

Alternatively, as shown in fig. 2, the furnace body 10 is provided with branch pipes 60 and a collecting pipe 61 on the outside, the exhaust pipes 40 in each exhaust structure are respectively communicated with one end of the corresponding branch pipe 60, the other end of each branch pipe 60 is respectively communicated with the collecting pipe 61, and the collecting pipe 61 can be connected with an external vacuum device, and the gas inside the furnace body 10 can be extracted through the vacuum device.

In some embodiments, as shown in fig. 1 and 2, a heater 62 is disposed outside the crucible 30, and a heat insulating material 63 is disposed between the heater 62 and the inner wall of the furnace body 10 to reduce heat loss; and/or, the outer side wall of the base 20 is provided with a heat insulating material 63 to avoid the damage of the base 20 caused by high temperature.

Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meaning as understood by those of ordinary skill in the art to which the invention belongs. The use of "first," "second," and similar terms in the description herein do not denote any order, quantity, or importance, but rather the terms are used to distinguish one element from another. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships are changed accordingly.

The foregoing is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.

Claims

1. A crystal pulling furnace, comprising:

a base disposed within the chamber;

the crucible is arranged on the base;

2. A crystal puller as set forth in claim 1 wherein the movable member is a spring, at least a portion of the spring being movable along an inner side wall of the exhaust tube in an axial direction of the exhaust tube.

3. A crystal puller as set forth in claim 2 wherein the portion of the spring is connected to an inner side wall of the exhaust tube.

4. A crystal puller as set forth in claim 2 wherein the surface of the spring is provided with bristles or protrusions.

5. A crystal puller as set forth in claim 2 wherein the spring is provided with a drive plate, an orthographic projection of the drive plate on a first plane being within an orthographic projection of the spring on the first plane, the first plane being perpendicular to the axial direction of the exhaust tube.

6. A crystal puller as set forth in claim 5 wherein the spring is provided with a plurality of said drive plates spaced apart along the circumferential direction of the spring.

7. A crystal puller as set forth in claim 5 wherein the drive plate is disposed at an upper end of the spring, the drive plate extending inwardly in a radial direction of the spring.

8. A crystal puller as set forth in claim 5 wherein the spring is rotatable about the axial direction of the exhaust tube.

9. A crystal puller as set forth in claim 1 wherein the furnace body has a plurality of said outlets in a bottom portion thereof, a respective one of said exhaust structures being disposed in each of said outlets.

10. A crystal puller as set forth in claim 9 wherein the plurality of outlets are spaced circumferentially of the body.

11. A crystal pulling furnace as claimed in claim 9, wherein the furnace body is externally provided with branch pipes and a manifold pipe, respectively, the exhaust pipes in each exhaust structure being in communication with one end of the corresponding branch pipe, respectively, and the other end of each branch pipe being in communication with the manifold pipe, respectively.

12. A crystal pulling furnace as set forth in claim 1 wherein a heater is disposed outside the crucible and a thermal insulation material is disposed between the heater and the inner wall of the furnace body; and/or