CN214099597U

CN214099597U - Automatic wafer detection machine

Info

Publication number: CN214099597U
Application number: CN202120228869.7U
Authority: CN
Inventors: 庄义发; 王顺丰; 陈金锋
Original assignee: Guangxi Kelin Semiconductor Co ltd
Current assignee: Guangxi Kelin Semiconductor Co ltd
Priority date: 2021-01-27
Filing date: 2021-01-27
Publication date: 2021-08-31
Anticipated expiration: 2031-01-27

Abstract

The utility model provides a wafer automatic checkout machine, includes the main control unit, workstation and driving motor, is equipped with XYZ material loading platform, equipment rack and a plurality of detection mechanism on the workstation. The equipment rack is provided with an operation panel and a display, and the main control unit is electrically connected with the operation panel, the display and the detection mechanism respectively. The driving motor is respectively electrically connected with the XYZ feeding platform and the detection mechanism. The detection mechanism comprises a cylinder fixing plate, a lifting driving mechanism is fixedly arranged on one side of the cylinder fixing plate, and a needle clamp driving assembly is connected to the lifting driving mechanism. The product mounting assembly is fixed on the upper surface of the workbench and is positioned below the needle clamp driving assembly. The utility model discloses a driving motor drive XYZ material loading platform realizes unloading in the automation, through the product contact on driving motor drive needle card drive assembly downstream and the product installation component, realizes the automated inspection product.

Description

Automatic wafer detection machine

Technical Field

The utility model relates to a wafer detection field, concretely relates to wafer automated inspection machine.

Background

The existing manual FLASH wafer detection machine is operated manually, and the manual FLASH wafer detection machine is composed of a needle clamp fixing seat, a product fixing seat, a detection seat, an L-shaped sheet jig, an adjusting mechanism, a manual rocker arm and other mechanisms. The product is sucked up from the material tray by a vacuum suction pen manually, is placed on the detection seat, is lightly pressed by the suction pen and slides backwards, is pushed into an L-shaped slice jig, is loosened, and is manually pulled by a manual rocker arm. The manual rocker arm is provided with a cam, the cam pushes the product fixing seat to push the product fixing seat to the needle card fixing seat, so that the probe on the needle card presses a product welding spot to start detection. After the detection is finished, the rocker arm is loosened, the product is fixedly lowered to the initial position, the product is taken down from the product fixing seat by using a vacuum suction pen respectively according to the detection result, and then the product is placed into a corresponding classification material tray. The manual FLASH wafer detection machine is used for manually feeding and discharging and manually detecting wafers, and has the advantages of inconvenience in operation, low production efficiency and poor product placement position precision.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to provide a wafer automated inspection machine solves TF storage card wafer detection trade, and unloading detection wafer in the manual work, production efficiency is low, and product locating position precision is poor, poor stability's problem.

An automatic wafer detection machine comprises a main control unit, a workbench and a driving motor, wherein an XYZ feeding platform, an equipment rack and a plurality of detection mechanisms are arranged on the workbench; the main control unit is electrically connected with the operation panel, the display and the detection mechanism respectively, and the driving motor is electrically connected with the XYZ feeding platform and the detection mechanism respectively; the detection mechanism comprises a cylinder fixing plate; the wafer automatic detection machine comprises a workbench, and is characterized in that a lifting driving mechanism is fixedly arranged on one side of a cylinder fixing plate, a needle clamp driving assembly is connected onto the lifting driving mechanism, the wafer automatic detection machine further comprises a product mounting assembly, the product mounting assembly is fixed on the upper surface of the workbench, and the product mounting assembly is located below the needle clamp driving assembly.

Further, the air cylinder fixing plate is arranged on the lower surface of the workbench, and a positioning air cylinder is fixedly arranged on the other side of the air cylinder fixing plate; the positioning cylinder is electrically connected with the driving motor, and a lifting rod is arranged on the positioning cylinder; the lifting rod is provided with a positioning plate, the positioning plate is provided with a positioning sliding block, and the positioning sliding block is movably connected with the product mounting assembly.

Furthermore, the product mounting assembly comprises a positioning push block, a product fixing seat and a bearing plate; the product fixing seat is provided with a mounting hole; the mounting hole penetrates through the product fixing seat, a push rod is movably connected to the inner wall of the mounting hole, one end of the push rod is connected with the positioning push block, and the other end of the push rod is connected with the bearing plate; and the bearing plate is provided with a roller which is movably connected with the positioning slide block.

Further, the positioning slide block is a cone.

Furthermore, a connecting rod and an L-shaped positioning block are fixedly arranged on the product fixing seat; the positioning push block is provided with a positioning groove corresponding to the connecting rod, and the connecting rod is connected with the inner wall of the positioning groove in a sliding mode.

Furthermore, the lifting driving mechanism comprises a rotary cylinder, a pull rod and a linear guide rail; the rotary air cylinder is fixed on the air cylinder fixing plate and is electrically connected with the driving motor, a piston rod is arranged on the rotary air cylinder, and the piston rod is hinged with one end of the pull rod; the linear guide rail is fixed on the cylinder fixing plate, and a guide rail connecting plate which slides up and down is arranged on the linear guide rail; the guide rail connecting plate is provided with a connecting piece; the connecting piece is hinged with the other end of the pull rod; an XYZ displacement platform is arranged on the guide rail connecting plate, and the needle clamp driving assembly is connected with the XYZ displacement platform.

Furthermore, the pin card driving assembly comprises a pin card connecting plate, an angle adjusting mechanism and a pin card installation adjusting mechanism; the needle clamp connecting plate is connected with the XYZ displacement platform; the angle adjusting mechanism is arranged on the upper surface of the needle clamp connecting plate, and the needle clamp installation adjusting mechanism is arranged on the lower surface of the needle clamp connecting plate.

Furthermore, a plurality of needle clamps are arranged on the needle clamp installation and adjustment mechanism, and probes are installed on the needle clamps.

Further, be equipped with slide rail and microscope on the workstation, microscope sliding connection is in on the slide rail, microscope and driving motor electric connection.

The utility model has the advantages that: the utility model has the advantages that the middle positioning cylinder ascends to drive the positioning slide block, the positioning slide block ascends to push the bearing plate at the same time, the bearing plate pushes the positioning push block, and the positioning push block retreats and opens; the product is absorb to XYZ material loading platform, arranges the product in on the product fixing base accurately, and the location cylinder descends, drives the location slider, and the location slider descends and promotes the bearing plate simultaneously, and the bearing plate drives the location ejector pad, and the location ejector pad folds and presss from both sides the product tightly to L type locating piece on, makes the product fixed, and then realizes that the machine goes up unloading automatically, avoids the operation inconvenience of unloading in the manual work, product locating position inaccuracy, production efficiency hang down. The rotary cylinder drives the pull rod, the pull rod drives the guide rail connecting plate, the XYZ displacement platform and the needle clamp driving assembly to move downwards in the guide direction of the linear guide rail, so that a needle clamp probe is in contact with a welding spot of a product and starts automatic detection, automatic detection of a wafer by a machine is realized, and the accuracy and the efficiency of wafer detection are improved. After the detection is finished, the rotating cylinder rotates reversely, the pull rod drives the linear guide rail connecting plate, the XYZ displacement platform and the needle clamp driving assembly to move upwards to the initial height position, automatic reset is achieved, and the XYZ feeding platform sucks a detected product. The utility model discloses an unloading, detection wafer in the machine is automatic, have improved the efficiency and the product locating position accuracy that the wafer detected.

Drawings

Fig. 1 is a perspective view of the automatic wafer inspection machine of the present invention.

Fig. 2 is a perspective view of a detecting mechanism of an automatic wafer detecting machine of the present invention.

Fig. 3 is the utility model discloses a wafer automated inspection machine's detection mechanism's product installation subassembly enlargedly.

The device comprises an XYZ feeding platform, an electron microscope, an operating panel, a display, a detection mechanism, a workbench, a rotary cylinder, a linear guide rail, a guide rail connecting plate, a connecting piece, a pin card connecting plate, an angle adjusting mechanism, a pin card installation adjusting mechanism, a positioning push block, a product fixing seat, a positioning slide block, a positioning cylinder, a rotary cylinder fixing plate, a product, an L-shaped positioning block, a bearing plate, an equipment rack, a positioning plate, a piston rod, a mounting hole, a push rod, a roller, a connecting rod, a positioning groove, a lifting rod, a positioning rod and a positioning block, wherein 1 is an XYZ feeding platform, 2 is an electron microscope, 3 is an operating panel, 4 is a display, 5 is the detection mechanism, 6 is the workbench, 7 is the rotary cylinder, 9 is the linear guide rail, 10 is the guide rail connecting plate, 101 is a connecting piece, 12 is the pin card connecting plate, 13 is the angle adjusting mechanism, 14 is the pin card installation adjusting mechanism, 15 is the positioning push block, 19 is the positioning plate, 25 is the piston rod, 26 is the mounting hole, 27 is the push rod, 28 is the roller, the connecting rod, 29 is the connecting rod, the connecting rod is the connecting rod, and the positioning rod is the lifting rod, the positioning plate, the positioning device is the lifting rod, the lifting rod is arranged on the lifting rod, and the lifting rod, the lifting rod is arranged on the lifting rod, and the lifting rod is arranged on the lifting rod, and the lifting rod is arranged on the lifting rod, and the lifting rod, the lifting rod is arranged on the lifting rod, and the lifting rod is arranged on the lifting rod, and the lifting rod, the lifting device, and the lifting device, the.

Detailed Description

The invention may best be understood by referring to the detailed drawings and the description set forth herein. In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

The utility model provides a wafer automated inspection machine, as shown in fig. 1 and fig. 2, this wafer automated inspection machine, including main control unit (not shown in the figure), workstation 6 and driving motor (not shown in the figure). An XYZ feeding platform 1, an equipment rack 23 and a plurality of detection mechanisms 5 are arranged on the workbench 6, and each wafer automatic detection machine is provided with 8 or more detection mechanisms 5. The equipment rack 23 is provided with an operation panel 3 and a display 4, and the main control unit is electrically connected with the operation panel 3, the display 4 and the detection mechanism 5 respectively. Driving motor respectively with XYZ material loading platform 1 and detection mechanism 5 electric connection, driving motor can drive XYZ material loading platform 1 and absorb product 20 to place product 20 on individual detection mechanism 5. Detection mechanism 5 includes cylinder fixed plate 19, the fixed lift actuating mechanism that is provided with in one side of cylinder fixed plate 19, be connected with the needle card drive assembly on the lift actuating mechanism, wafer automated inspection machine still includes the product installation subassembly, the upper surface at workstation 6 is fixed to the product installation subassembly, the product installation subassembly is located needle card drive assembly below, driving motor can drive needle card drive assembly downstream and the product contact on the product installation subassembly, product 20 on the automated inspection product installation subassembly, detection mechanism 5 exports the testing result to display 4 through the master control unit. XYZ material loading platform 1 can absorb product 20 automatically, realizes that the machine goes up unloading automatically, and easy operation is convenient, and detection mechanism passes through the last needle card drive assembly who connects of lift actuating mechanism, can realize machine automated inspection wafer to automatic re-setting after detecting the completion, easy operation is convenient, production efficiency is high, the product locating place is accurate.

As shown in fig. 2, a cylinder fixing plate 19 is disposed on a lower surface of the table 6, and a positioning cylinder 18 is fixedly disposed on the other side of the cylinder fixing plate 19. The positioning cylinder 18 is electrically connected with the driving motor, the lifting rod 31 is arranged on the positioning cylinder 18, the positioning plate 24 is arranged on the lifting rod 31, the positioning slide block 17 is arranged on the positioning plate 24, and the positioning slide block 17 is movably connected with the product mounting assembly. The driving motor is started, the lifting rod 31 on the positioning air cylinder 18 drives the positioning slide block 17 to move up and down, the position of the product 20 placed when the product installation assembly is loaded at each time can be ensured to be the same, the position of the wafer does not need to be repeatedly adjusted, the loading and unloading of the detection mechanism are simpler and more convenient, and the precision is more accurate.

The structure schematic diagram of the product installation assembly is shown in fig. 3, and the product installation assembly comprises a positioning push block 15, a product fixing seat 16 and a bearing plate 22; the product fixing seat 16 is provided with a mounting hole 26 (not marked in the figure); the mounting hole 26 penetrates through the product fixing seat 16, the inner wall of the mounting hole 26 is movably connected with a push rod 27, one end of the push rod 27 is connected with the positioning push block 15, and the other end of the push rod 27 is connected with the bearing plate 22; the bearing plate 22 is provided with a roller 28, the roller 28 is movably connected with the positioning slide block 17, and the positioning slide block 17 is a cone. When the positioning slide block 17 moves up and down, the push rod 27 can be easily pushed and the positioning push block 15 is driven to move, so that the product 20 on the product mounting assembly can be conveniently placed, taken out and fixed.

Wherein, the product fixing seat 16 is fixedly provided with a connecting rod 29 and an L-shaped positioning block 21; the positioning push block 15 is provided with a positioning groove 30 (not labeled in the figure) corresponding to the connecting rod 29, and the connecting rod 29 is slidably connected with the inner wall of the positioning groove 30. The positioning cylinder 18 ascends to drive the positioning slide block 17 on the positioning plate 24 to ascend, the positioning slide block 17 ascends to simultaneously push the bearing plate 22, and the bearing plate 22 pushes the push rod 27 to enable the positioning push block 15 to retreat and open. The positioning push block 15 retracts and opens, then the XYZ feeding platform 1 sucks the product 20, and the product 20 is placed on the product fixing seat 16. After the product 20 is placed, the positioning cylinder 18 descends to drive the positioning slide block 17, the positioning slide block 17 descends to simultaneously push the bearing plate 22, the bearing plate 22 drives the positioning push block 15 to fold, the product 20 is clamped on the L-shaped positioning block 21, the precision of the product placement position can be guaranteed, and the efficiency and the precision of the detection mechanism 5 for detecting the wafer are improved.

As shown in fig. 2, the lifting drive mechanism includes a rotary cylinder 7, a pull rod 8, and a linear guide 9. The rotary cylinder 7 is fixed on the cylinder fixing plate 19, the rotary cylinder 7 is electrically connected with the driving motor, a piston rod 25 is arranged on the rotary cylinder 7, and the piston rod 25 is hinged with one end of the pull rod 8. The linear guide 9 is fixed on the cylinder fixing plate 19, and the linear guide 9 is provided with a guide connecting plate 10 which slides up and down. The guide rail connecting plate 10 is provided with a connecting piece 101; the connecting piece 101 is hinged with the other end of the pull rod 8; an XYZ displacement platform 11 is arranged on the guide rail connecting plate 10, and the needle card driving assembly is connected with the XYZ displacement platform 11. The driving motor drives the rotary cylinder 7 to rotate forward, the piston rod can enable the pull rod 8 to drive the linear guide rail connecting plate 10, the XYZ displacement platform 11 and the needle clamp driving assembly to move downwards until the needle clamp driving assembly is contacted with a product on the product mounting assembly, and automatic detection is started; after detection is finished, the rotary cylinder 7 rotates reversely, and the piston rod can enable the pull rod 8 to drive the linear guide rail connecting plate 10, the XYZ displacement platform 11 and the needle clamp driving assembly to move upwards to an initial height position. The rotary cylinder 7 enables the lifting driving mechanism to drive the pin card driving assembly to move up and down, the operation is simple, automatic wafer detection by a machine is realized, and the wafer detection efficiency is improved.

The pin card driving assembly comprises a pin card connecting plate 12, an angle adjusting mechanism 13 and a pin card installation adjusting mechanism 14. The needle clamp connecting plate 12 is connected with the XYZ displacement platform 11; the angle adjusting mechanism 13 is arranged on the upper surface of the pin card connecting plate 12, and the pin card mounting adjusting mechanism 14 is arranged on the lower surface of the pin card connecting plate 12. The pincard mounting adjustment mechanism 14 is provided with a plurality of pincards (not shown) on which probes (not shown) are mounted. When the pin card installation adjusting mechanism 14 contacts with a product on the product installation component, the pin card probes contact with welding points on the product 20, detection is started, wafers with poor electrical functions are screened out, and cost waste of defective products in actual production and use is reduced.

The worktable 6 is provided with a slide rail (not shown in the figure) and a microscope 2, the microscope 2 is connected on the slide rail in a sliding way, and the microscope is electrically connected with a driving motor. The driving motor can drive the microscope to observe the positions of all products to be detected and adjust the positions in time, so that the accuracy of wafer detection is improved.

It should be noted that the above-mentioned embodiments are only preferred embodiments of the present invention and the technical principles applied, and any changes, modifications, substitutions, combinations, and simplifications made by those skilled in the art without departing from the spirit and principle of the present invention should be considered as equivalent replacement modes within the scope of the present invention.

Claims

1. An automatic wafer detector comprises a main control unit, a workbench (6) and a driving motor, wherein an XYZ feeding platform (1), an equipment rack (23) and a plurality of detection mechanisms (5) are arranged on the workbench (6); the device comprises an equipment rack (23), a main control unit, an XYZ feeding platform (1), a detection mechanism (5) and a main control unit, wherein the equipment rack (23) is provided with an operation panel (3) and a display (4), the main control unit is respectively and electrically connected with the operation panel (3), the display (4) and the detection mechanism (5), and the driving motor is respectively and electrically connected with the XYZ feeding platform (1) and the detection mechanism (5); the method is characterized in that: the detection mechanism (5) comprises a cylinder fixing plate (19); the wafer automatic detection machine is characterized in that a lifting driving mechanism is fixedly arranged on one side of the air cylinder fixing plate (19), a needle clamp driving assembly is connected onto the lifting driving mechanism, the wafer automatic detection machine further comprises a product mounting assembly, the product mounting assembly is fixed on the upper surface of the workbench (6), and the product mounting assembly is located below the needle clamp driving assembly.

2. The wafer automatic detection machine according to claim 1, characterized in that: the air cylinder fixing plate (19) is arranged on the lower surface of the workbench (6), and a positioning air cylinder (18) is fixedly arranged on the other side of the air cylinder fixing plate (19); the positioning cylinder (18) is electrically connected with the driving motor, and a lifting rod (31) is arranged on the positioning cylinder (18); be provided with locating plate (24) on lifter (31), be provided with location slider (17) on locating plate (24), location slider (17) with product installation component swing joint.

3. The wafer automatic detection machine according to claim 2, characterized in that: the product mounting assembly comprises a positioning push block (15), a product fixing seat (16) and a bearing plate (22); the product fixing seat (16) is provided with a mounting hole (26); the mounting hole (26) penetrates through the product fixing seat (16), a push rod (27) is movably connected to the inner wall of the mounting hole (26), one end of the push rod (27) is connected with the positioning push block (15), and the other end of the push rod (27) is connected with the bearing plate (22); and a roller (28) is installed on the bearing plate (22), and the roller (28) is movably connected with the positioning sliding block (17).

4. The automatic wafer inspection machine according to claim 2 or 3, wherein: the positioning slide block (17) is a cone.

5. The wafer automatic detection machine according to claim 3, characterized in that: a connecting rod (29) and an L-shaped positioning block (21) are fixedly arranged on the product fixing seat (16); the positioning push block (15) is provided with a positioning groove (30) corresponding to the connecting rod (29), and the connecting rod (29) is in sliding connection with the inner wall of the positioning groove (30).

6. The automatic wafer detection machine according to claim 1, wherein the lifting driving mechanism comprises a rotary cylinder (7), a pull rod (8) and a linear guide rail (9); the rotary air cylinder (7) is fixed on the air cylinder fixing plate (19), the rotary air cylinder (7) is electrically connected with the driving motor, a piston rod (25) is arranged on the rotary air cylinder (7), and the piston rod (25) is hinged with one end of the pull rod (8); the linear guide rail (9) is fixed on the cylinder fixing plate (19), and a guide rail connecting plate (10) which slides up and down is arranged on the linear guide rail (9); the guide rail connecting plate (10) is provided with a connecting piece (101); the connecting piece (101) is hinged with the other end of the pull rod (8); an XYZ displacement platform (11) is arranged on the guide rail connecting plate (10), and the needle clamp driving assembly is connected with the XYZ displacement platform (11).

7. The wafer automatic detection machine according to claim 6, characterized in that: the pin card driving assembly comprises a pin card connecting plate (12), an angle adjusting mechanism (13) and a pin card mounting adjusting mechanism (14); the needle clamp connecting plate (12) is connected with the XYZ displacement platform (11); the angle adjusting mechanism (13) is arranged on the upper surface of the needle clamp connecting plate (12), and the needle clamp mounting adjusting mechanism (14) is arranged on the lower surface of the needle clamp connecting plate (12).

8. The wafer automatic detection machine according to claim 7, characterized in that: the needle card installation and adjustment mechanism (14) is provided with a plurality of needle cards, and the needle cards are provided with probes.

9. The wafer automatic detection machine according to claim 1, characterized in that: be equipped with slide rail and microscope (2) on workstation (6), microscope (2) sliding connection be in on the slide rail, microscope (2) and driving motor electric connection.