CN214088657U - Atomic layer deposition apparatus - Google Patents

Abstract

The utility model provides an atomic layer deposition equipment. The atomic layer deposition equipment comprises a cavity, a heating platform, a carrying disc, a hollow part, a bottom suction opening and a spray head assembly, wherein the carrying disc is provided with a convex ring and is positioned on the top surface of the heating platform and used for carrying a substrate. The heating table can be driven by the lifting device to vertically move in the cavity, so that the convex ring of the carrying disc surrounds at least one part of the hollow part, the air suction hole is surrounded by the convex ring, and a small-space reaction area can be formed among the spray head assembly, the hollow part and the carrying disc, so that a precursor can deposit on a substrate in the small-space reaction area.

Description

Atomic layer deposition apparatus

Technical Field

The present invention relates to an atomic layer deposition apparatus, and more particularly to an atomic layer deposition apparatus that forms a small space reaction region by a nozzle assembly, a hollow member and a carrier plate to adjust a flow field of a process fluid.

Background

With the mature development of integrated circuit technology, electronic products are developed toward the trend of light, thin, short, high performance, high reliability and intellectualization. The miniaturization technology of transistors in electronic products is very important, the small-sized transistors can have important influence on the performance of the electronic products, and when the size of the transistors is smaller, the current transmission time can be reduced, the energy consumption can be reduced, and the effects of quick operation and energy saving can be achieved. Currently, in a tiny transistor, a part of the critical thin film layer is almost as thick as a few atoms, and one of the technologies for developing these micro structures is an Atomic Layer Deposition (ALD) process.

Atomic layer deposition processes are techniques for coating a substrate surface with a substance in a single atomic form, layer by layer, wherein the precursor of the reaction is chemisorbed to the material surface of the substrate or a previous layer to produce a thin and uniform film. In the ald process, uniform deposition of thin films is an important basis for transistor scaling, and how to effectively control the uniformity of thin films is an important issue in the development of transistors today.

One problem with current ald process uniformity control is that the flow field of the precursors is not well controlled (e.g., how the precursors of the ald process are pumped out of the chamber without disturbing the uniform deposition behavior). Most current ald equipment designs use large, closed chambers that contain large amounts of precursors during the ald process and ensure that the precursors stay in the chamber and contact the substrate for deposition, wherein the closed chamber design prevents early precursor loss before deposition and reaction are complete. When the deposition and the reaction are finished, the precursor in the cavity is exhausted through the pumping hole at the bottom of the cavity.

However, the large-scale closed chamber requires a large amount of precursor, which makes the process cost too high. Furthermore, if the timing of the precursor discharge is not well controlled, the single pumping device (bottom pumping port) may cause turbulence in the precursor, which may adversely affect the uniformity of the deposition on the substrate.

One method to reduce the process cost is to reduce the volume of the chamber to reduce the amount of the precursor, but this method causes turbulence in the precursor, which may cause the precursor to repeatedly contact the substrate, resulting in a decrease in the uniformity of the deposition on the substrate. Therefore, how to reduce the process cost and control the uniformity of the deposited precursor on the substrate is a problem to be overcome in the atomic layer deposition process.

SUMMERY OF THE UTILITY MODEL

Therefore, in order to overcome the disadvantages of the prior art, embodiments of the present invention provide an atomic layer deposition apparatus, which can deposit a precursor (precursor) on a substrate in a small space reaction region to reduce the amount of the precursor. Furthermore, the hollow members and the raised rings of the carrier plate may direct the precursor and/or purge gas (purge gas) to be slowly pumped away from the hollow members to form a controlled slow flow field for the precursor and/or purge gas to thereby regulate the uniformity of deposition of the precursor on the substrate.

In accordance with at least one of the above objects, an atomic layer deposition apparatus according to an embodiment of the present invention includes a chamber, a heating stage, a carrying plate, at least one hollow member, at least one bottom pumping hole, and a showerhead assembly. The cavity is provided with an accommodating space, and the heating table is arranged in the accommodating space of the cavity and provided with a top surface. The heating table is connected with the lifting device, and the lifting device is used for driving the heating table to vertically displace relative to the cavity. The carrying disc is positioned on the top surface of the heating table and is provided with a disc and a convex ring, wherein the convex ring is connected with the upper surface of the disc, and the base disc is used for carrying the substrate. The hollow part is communicated with the containing space of the cavity in a fluid mode, is higher than the carrying disc and is provided with at least one air suction hole, the lifting device drives the heating table to move, so that the convex ring of the carrying disc surrounds at least one part of the hollow part, and the air suction hole is surrounded by the convex ring. The bottom air suction opening is in fluid communication with the accommodating space of the cavity, is connected with the pump and is used for discharging at least one fluid in the accommodating space. The shower nozzle subassembly fluid intercommunication cavity accommodation space, and be higher than the carrier disc and surrounded by hollow part to be used for providing at least one precursor or a purge gas to the cavity. A small space reaction area is formed among the spray head assembly, the hollow part and the carrying disc, so that the precursor can deposit on the base material in the small space reaction area.

In view of at least one of the above objects, an atomic layer deposition process method according to an embodiment of the present invention is applied to an atomic layer deposition apparatus. The atomic layer deposition process method comprises the following steps: the containing space of the cavity is pumped down through the bottom pumping hole; providing a precursor to the accommodating space of the cavity so that the precursor reacts with the substrate on the carrying disc in the small space reaction area; stopping providing the precursor into the accommodating space of the cavity; providing cleaning gas into the accommodating space of the cavity, and exhausting the accommodating space of the cavity upwards through the hollow part to remove the precursor; and stopping the upper air suction after the supply of the cleaning gas to the accommodating space of the cavity is stopped.

In view of at least one of the above objects, an atomic layer deposition process method according to an embodiment of the present invention is applied to an atomic layer deposition apparatus. The atomic layer deposition process method comprises the following steps: pumping down the accommodating space of the cavity through the bottom pumping hole, and pumping up the accommodating space of the cavity through the hollow part, wherein the pumping up is not interrupted during the atomic layer deposition process; providing a precursor to the accommodating space of the cavity so that the precursor reacts with the substrate on the carrying disc in the small space reaction area; stopping providing the precursor into the accommodating space of the cavity; providing cleaning gas into the accommodating space of the cavity; and continuously exhausting air upwards after the supply of the cleaning gas to the accommodating space of the cavity is stopped.

Optionally, the atomic layer deposition apparatus further includes a fixing member connecting the heating stage and the carrier plate to fix the carrier plate to the heating stage.

Optionally, the fixing member is a screw.

Optionally, the diameter of the collar is smaller than the diameter of the disc.

Optionally, the diameter of the collar is equal to the diameter of the disc.

Optionally, the protruding ring corresponds to a suction hole of the hollow member.

Optionally, the extraction aperture is located at the bottom of the hollow member.

Optionally, the lifting device drives the heating table and the carrying disc to be close to or far away from the hollow part so as to adjust the first distance between the hollow part and the carrying disc.

Optionally, the extraction holes are located on the side of the hollow member.

Optionally, the protruding ring corresponds to a suction hole of the hollow member.

In short, the embodiment of the utility model provides an atomic layer deposition equipment, permeable shower nozzle subassembly, hollow part and the little space reaction district that carries the dish to form make predecessor deposit at little space reaction district to the substrate, and hollow part can guide predecessor and/or cleaning gas formation slow velocity flow field and from hollow part by the extraction with the bulge loop of carrying the dish, borrow this to react and deposit the substrate with dynamic mode, further regulate and control the substrate in the atomic layer deposition process and receive the sedimentary degree of consistency. Therefore, the atomic layer deposition apparatus and the fabrication method of the present invention are advantageous in the fabrication process and market (e.g., integrated circuit) requiring atomic layer deposition.

Drawings

FIG. 1 is a schematic diagram of an atomic layer deposition apparatus according to an embodiment of the invention;

FIG. 2 is a schematic top view of a boat according to an embodiment of the present invention;

FIG. 3 is a schematic partial view of an atomic layer deposition apparatus according to another embodiment of the invention;

FIG. 4 is a schematic partial view of an atomic layer deposition apparatus according to yet another embodiment of the invention;

FIG. 5 is a graph of the trend of steps versus time for an atomic layer deposition process according to an embodiment of the present invention;

fig. 6 is a graph illustrating a trend of steps of an ald process versus time according to another embodiment of the present invention.

Description of reference numerals: 1-an atomic layer deposition device; 101-a cavity; 102. 202, 302-heating table; 1021-a fixture; 103-a hollow member; 1031. 2031, 3031-carrying disc; 104-a showerhead assembly; 105-a lifting device; d3, d 5-first distance; g101-precursor; g102-cleaning gas; h1031, H2031 and H3031204-chassis; line 1-line 5-line; o101-bottom extraction opening; o103, O203, O303-pumping holes; p1031-upper pumping path; s-an accommodating space; s0-small space reaction zone; s1-top surface; v1031, V2031, V3031-convex; w-a substrate.

Detailed Description

The following detailed description of the embodiments of the present invention will be made with reference to the accompanying drawings. The same symbols represent members or devices having the same or similar functions.

The utility model provides an atomic layer deposition equipment. The atomic layer deposition apparatus may further form an upper pumping path with the carrier plate through the hollow member, in addition to having a bottom pumping port connected to the cavity, to guide the excess precursor to be pumped out of the cavity, different from the prior art in which the deposition apparatus may only pump out the excess precursor through the bottom pumping port. By means of the structural design of the carrier plate, the surplus precursor can form stable and slow airflow, so that the substrate can be uniformly deposited by the precursor.

The lifting device drives the heating table and the carrying disc to be close to or far away from the hollow part, so that the first distance between the hollow part and the carrying disc can be adjusted, the flow condition of the precursor guided by the upper pumping path can be adjusted, the deposition condition of the precursor to be reacted with the substrate can be further adjusted, and the deposition uniformity of the substrate is further optimized.

Referring to fig. 1, fig. 1 is a schematic view of an atomic layer deposition apparatus according to an embodiment of the invention. As shown in fig. 1, the ald apparatus 1 includes a chamber 101, at least one bottom pumping port O101, a heating stage 102, a susceptor 1031, a plurality of hollow members 103, and a showerhead assembly 104. The chamber 101 has a receiving space S, and the bottom pumping hole O101 is in fluid communication with the receiving space S of the chamber 101, wherein the bottom pumping hole O101 may be connected to a power device (e.g., a pump) to form a lower pumping device for discharging at least one fluid in the receiving space S.

The heating stage 102 is disposed in the accommodating space S of the chamber 101 and has a top surface S1, and the tray 1031 is disposed on the top surface S1 of the heating stage 102 and can be connected to the heating stage 102 and the tray 1031 by a fixing member 1021 (e.g., a screw) to fix the tray 1031 to the heating stage 102. Furthermore, the heating stage 102 is connected to a lifting device 105, and the lifting device 105 is used for driving the heating stage 102 to move vertically relative to the chamber 101.

The susceptor 1031 has a bottom plate H1031 and a convex portion V1031, the convex portion V1031 is connected to the upper surface of the susceptor H1031, and the susceptor H1031 is used for carrying a substrate W (such as but not limited to a wafer).

Referring to fig. 2, fig. 2 is a schematic top view of a tray according to an embodiment of the present invention. The bottom disk H1031 of the carrier disk 1031 may be a circular disk and the protrusion V1031 may be a circular convex ring, wherein the diameter of the convex ring may be smaller than the diameter of the circular disk. In other embodiments, the bottom plate H1031 may be a polygonal plate, and the convex portion V1031 may be a continuous or discontinuous protrusion made up of multiple members.

Referring to fig. 3 and 4, in other embodiments, when the base plates H2031 and H3031 of the carrier plates 2031 and 3031 are circular convex rings and the convex portions V2031 and V3031 are circular convex rings, the diameter of the convex rings may be equal to the diameter of the circular plates, or when the base plates H2031 and H3031 are not circular convex rings and the convex portions V2031 and V3031 are not circular convex rings, the convex portions V2031 and V3031 may be aligned with the base plates H2031 and H3031.

Next, with reference to fig. 1, the hollow part 103 is in fluid communication with the accommodating space S of the cavity 101, and the hollow part 103 is higher than the tray 1031. The hollow part 103 has at least one pumping hole O103 and a top opening O102, and has a hollow region penetrating the pumping hole O103 and the top opening O102, wherein the hollow region may communicate with the outside, and a hollow path of the hollow region is not limited.

Specifically, the suction holes O103 are located at the bottom of the hollow part 103, and the convex portion V1031 of the boat 1031 may correspond to the suction holes O103 of the hollow part 103. In other embodiments, the air exhaust hole O103 may be located on the side of the hollow component 103, and the convex portion V1031 of the susceptor 1031 may correspond to the air exhaust hole O103 of the hollow component 103. For example, when the susceptor is a disk 1031 and the protrusion V1031 is a convex ring, and the air exhaust hole O103 is located on the side of the hollow member 103, the convex ring corresponds to the air exhaust hole O103 (not shown) of the hollow member 103.

As shown in fig. 4, in other embodiments, the convex portion V3031 of the carrier plate 3031 may not correspond to the suction hole O303 at the bottom of the hollow member 303, and the convex portion V3031 of the carrier plate 3031 may surround and be located below the hollow member 303. In other embodiments, the protruding portion V3031 of the carrier plate 3031 may not correspond to the air exhaust hole O303 on the side of the hollow member 303, and the protruding portion V3031 of the carrier plate 3031 may surround the hollow member 103 and the air exhaust hole O303.

The showerhead assembly 104 is integrally connected to the receiving space S of the chamber 101, is higher than the carrier plate 3031, and is surrounded by the hollow member 303 to provide the precursor G101 or the purge gas G102 into the chamber 101.

With continued reference to fig. 1 to 3, in the ald process, the susceptor 1031, 2031, 3031 and the hollow member 103, 203, 303 form an upper pumping path P1031. Specifically, the showerhead assembly 104, the carrier plates 1031, 2031, 3031 and the hollow members 103, 203, 303 have small-area spaces therebetween and form a small-space reaction zone S0, so that the precursor G101 can be confined in the small-space reaction zone S0 and deposit on the substrate. Furthermore, the pump connected to the hollow members 103, 203, 303 is used to slowly pump away the unreacted precursor G101 in the ald process, so that the precursor G101 can form a slow and stable flow field, and most of the unreacted precursor G101 is pumped away by the hollow members 103, 203, 303.

Specifically, the small-area space formed by the showerhead assembly 104, the carrier plates 1031, 2031, 3031 and the hollow members 103, 203, 303 provides a small-space reaction zone S0 between the precursor G101 and the substrate W, so that the amount of the precursor G101 used can be reduced to reduce the cost. Furthermore, the small-space reaction zone S0 may also reduce turbulence of the precursor G101, so that the precursor G101 may be slowly and stably drawn away by the hollow members 103, 203, 303, thereby improving uniformity of the substrate W after deposition of the precursor G101.

In one embodiment, when the carrier plates 1031, 2031, 3031 are circular plates and the protrusions V1031, V2031, V3031 are convex rings, the convex rings are connected to the upper surfaces of the circular plates, and the circular plates are used for carrying the substrate W. Since the protruding ring has no angle, the gas flow is not blocked by any angle of the protruding ring, and furthermore, the protruding ring can surround the complete small space reaction region S0 compared to the discontinuous protruding part, so that the flow of the precursor G101 can be more stable and better regulation and control can be obtained when the hollow part 103, 203, 303 is extracted from the precursor G101.

Specifically, the lifting device 105 can drive the heating stage 102, 202, 302 to displace such that the convex ring of the carrier plate 1031, 2031, 3031 surrounds at least a portion of the hollow member 103, 203, 303 (e.g., surrounds about half of the hollow member 103, 203, 303, or surrounds all of the hollow member 103, 203, 303), and the pumping hole O103, O203, O303 is fully or partially surrounded by the convex ring, wherein the diameter of the convex ring may be equal to or less than the diameter of the disc, and the convex ring may or may not correspond to the pumping hole O103, O203, O303 of the hollow member 103, 203, 303.

The chassis H1031, H2031, H3031 of the carrier plates 1031, 2031, 3031 has an adjustable first distance d3, d5 with the bottom of the hollow parts 103, 203, 303. Specifically, the lifting device 105 of the ald apparatus 1 is connected to the heating stage 102, and the lifting device 105 drives the heating stage 102 and the carrier plates 1031, 2031, 3031 to approach or separate from the hollow members 103, 203, 303, so as to adjust the first distances d3, d5 between the hollow members 103, 203, 303 and the carrier plates 1031, 2031, 3031, thereby performing finer control on the flow of the precursor G101.

Next, please refer to fig. 5 to know the flow and method of the ald process, and fig. 5 is a graph illustrating a trend relationship between steps and time of the ald process according to an embodiment of the present invention.

First, referring to the line5, after the substrate W is placed on the susceptor 1031, the lower pumping device of the ald apparatus 1 pumps down the accommodating space S of the chamber 101 through the bottom pumping hole O101 of the chamber 101, wherein the lower pumping is not interrupted from the beginning to the end of the process.

Then, referring to line1, the first precursor G101 is provided to the receiving space S of the chamber 101 through the showerhead assembly 104 and diffuses above the substrate W to react with and deposit material on the surface of the substrate W. Specifically, the first precursor G101 may react with the substrate on the platen in the small space reaction zone S0.

When the target volume of the first precursor G101 is injected into the chamber 101 (which may be determined based on process parameters), the showerhead assembly 104 stops supplying the first precursor G101 into the chamber 101.

Then, referring to the line3 and the line4, after the supply of the first precursor G101 to the receiving space S of the chamber 101 is stopped, the cleaning gas G102 (for example, but not limited to, nitrogen gas) is provided to the receiving space S of the chamber 101 through the showerhead assembly 104 to perform cleaning (purge) on the first precursor G101, and simultaneously, the precursor G101 in the chamber 101 is pumped out through the upper pumping path P1031 formed between the hollow part 103 and the carrier tray 1031.

Specifically, most of the first precursor G101 exists in the small space reaction region S0 created by the hollow component 103 and the carrier tray 1031, and the first precursor G101 is slowly pumped away by the pump connected to the hollow component 103, so that the first precursor G101 exhibits a slow flow field. Thus, the first precursor G101 may react and deposit on the substrate W in a dynamic manner. Likewise, the flow field of the purge gas G102 can also be stably controlled.

When the first precursor G101 and the purge gas G102 in the chamber 101 flow at a slow speed, the flow field can be stably controlled, and turbulence can be prevented, so that uniformity of the substrate W during atomic layer deposition can be well controlled.

Then, referring to the line3 and the line4, when the cleaning gas G102 stops being supplied to the chamber 101, the upper pumping device continues pumping the gas and then stops pumping the accommodating space S of the chamber 101.

In one embodiment, the time for the upper pumping is longer than the time for providing the cleaning gas G102, but the present invention is not limited thereto, and the time for the upper pumping may be the same as the time for providing the cleaning gas.

Then, referring to line2, the step of providing the second precursor is similar to the step of providing the first precursor. After the purge gas G102 stops being supplied to the chamber 101 for a period of time and the upper pumping device stops pumping, the second precursor is provided to the receiving space S of the chamber 101 through the showerhead assembly 104 and diffuses above the substrate W to react with and deposit material on the surface of the substrate W.

Then, when the injection amount of the second precursor into the chamber 101 reaches a target amount, the showerhead assembly 104 stops supplying the second precursor to the receiving space S of the chamber 101.

Further, referring to line3 and line4, after the supply of the second precursor to the receiving space S of the chamber 101 is stopped, the purge gas is supplied to the receiving space S of the chamber 101 through the showerhead assembly 104 to purge the second precursor. Simultaneously, the second precursor G101 in the chamber 101 can be pumped out through the upper pumping path P1031 formed between the hollow member 103 and the carrier plate 1031, so as to stably control the flow fields of the second precursor and the cleaning gas.

Finally, after the supply of the cleaning gas to the accommodating space S of the chamber 101 is stopped, the second precursor is stopped being pumped out of the accommodating space S of the chamber 101 through the upper pumping path P1031. It is noted that the fluid pumped out of the receiving space S of the chamber 101 through the upper pumping path P1031 may be different in different stages of the ald process, wherein the fluid may be air, cleaning gas, precursor or any substance left in the receiving space S of the chamber 101 before the process is started.

In one embodiment, the time for the upper pumping is longer than the time for providing the cleaning gas, but the present invention is not limited thereto, and the time for the upper pumping may be the same as the time for providing the cleaning gas.

After the first precursor and the second precursor complete the reaction and deposition on the surface of the substrate W, a complete cycle of the atomic layer deposition process is achieved, and the process of each subsequent cycle is the same as described above.

Referring to fig. 6, another atomic layer deposition process flow and method are shown, and fig. 6 is a graph illustrating a trend relationship between steps and time of an atomic layer deposition process according to another embodiment of the present invention.

First, referring to the line4 and the line5, after the substrate W is placed on the susceptor 1031, the lower pumping device of the ald apparatus 1 pumps the fluid in the chamber 101 through the bottom pumping hole O101 of the chamber 101 to pump the receiving space S of the chamber 101, wherein the lower pumping is not interrupted from the beginning to the end of the process. Furthermore, the fluid in the chamber 101 is pumped out through the upper pumping path P1031 formed between the hollow part 103 and the carrier plate 1031, wherein the upper pumping is not interrupted from the beginning to the end of the process.

Further, referring to line1, a first precursor G101 is provided to the receiving space S of the chamber 101 through the showerhead assembly 104 and diffuses above the substrate W to react with and deposit material on the surface of the substrate W. Specifically, the first precursor G101 may react with the substrate on the platen in the small space reaction zone S0.

When the target volume of the first precursor G101 is injected into the chamber 101 (which may be determined based on process parameters), the showerhead assembly 104 stops supplying the first precursor G101 into the chamber 101.

Then, after stopping supplying the first precursor G101 to the receiving space S of the chamber 101, a purge gas G102 (such as, but not limited to, nitrogen) is supplied to the receiving space S of the chamber 101 through the showerhead assembly 104 to purge the first precursor G101.

Finally, the supply of the cleaning gas G102 to the accommodating space S of the chamber 101 is stopped, and the precursor G101 is continuously pumped out from the accommodating space S of the chamber 101 through the upper pumping path P1031, so that the flow fields of the first precursor G101 and the cleaning gas G102 can be continuously and stably controlled. It is noted that the fluid pumped out of the receiving space S of the chamber 101 through the upper pumping path P1031 may be different in different stages of the ald process, wherein the fluid may be air, cleaning gas, precursor or any substance left in the receiving space S of the chamber 101 before the process is started.

The step of providing the second precursor is similar to the step of providing the first precursor. After the first precursor and the second precursor complete the reaction and deposition on the surface of the substrate W, a complete cycle of the atomic layer deposition process is achieved, and the process of each subsequent cycle is the same as described above.

In the ald process, the lifting device 105 may further drive the heating stage 102 and the carrier plate 1031 to approach or separate from the hollow member 103, so as to adjust a first distance between the carrier plate 1031 and the bottom of the hollow member 103, thereby controlling a flow field of a fluid in the process.

Referring to table 1, table 1 shows a wafer thickness table of 12 inches silicon wafers after the atomic layer deposition process, and as shown in table 1, after the atomic layer deposition process is performed on the 12 inches silicon wafers, the thickness uniformity of the wafers is 0.34686 and a good effect is achieved.

TABLE 1

In summary, compared with the prior art, the atomic layer deposition apparatus provided by the embodiments of the present invention has the following technical effects.

In the prior art, the atomic layer deposition process mostly uses a large-scale chamber and introduces a large amount of reaction precursors to react and deposit a substrate, so the process cost is high, while the traditional method for reducing the cost is to reduce the volume of the chamber, but the method often causes the precursors to generate turbulence inside the chamber, so the uniformity of the deposited substrate is not good. It is anti-at sight atomic layer deposition equipment, permeable hollow part forms little space reaction zone with carrying the dish to save the quantity of processing procedure predecessor, and see through air exhaust device and make predecessor form stable slow speed and even flow field, receive the degree of consistency after the deposit with optimizing the substrate.

Of course, the present invention can have other embodiments, and those skilled in the art can make various corresponding changes and modifications according to the present invention without departing from the spirit and the essence of the present invention, and these corresponding changes and modifications should fall within the protection scope of the claims of the present invention.

Claims (10)

1. An atomic layer deposition apparatus, comprising:

a cavity having an accommodating space;

the heating table is arranged in the accommodating space of the cavity and is provided with a top surface, and the heating table is connected with a lifting device so as to drive the heating table to vertically displace relative to the cavity;

a carrier plate disposed on the top surface of the heating stage and having a circular plate and a protruding ring, wherein the protruding ring is connected to the upper surface of the circular plate, and the circular plate is used for carrying a substrate;

at least one hollow part which is communicated with the containing space of the cavity body in a fluid mode, is higher than the carrying disc and is provided with at least one air suction hole, wherein the heating table is driven to displace by the lifting device, so that the convex ring of the carrying disc surrounds at least one part of the hollow part, and the air suction hole is surrounded by the convex ring;

the bottom air suction port is communicated with the accommodating space of the cavity and is connected with the pump, and is used for discharging at least one fluid in the accommodating space; and

a showerhead assembly fluidly coupled to the receiving space of the chamber, above the susceptor and surrounded by the hollow member, for providing at least one precursor or purge gas into the chamber;

wherein a small space reaction zone is formed among the showerhead assembly, the hollow member and the carrier plate so that the precursor deposits on the substrate in the small space reaction zone.

2. The atomic layer deposition apparatus according to claim 1, further comprising a fixing member connecting the heating stage and the carrier plate to fix the carrier plate to the heating stage.

3. The atomic layer deposition apparatus according to claim 2, wherein the fastener is a screw.

4. The atomic layer deposition apparatus according to claim 1, wherein a diameter of the raised ring is smaller than a diameter of the disk.

5. The atomic layer deposition apparatus according to claim 1, wherein a diameter of the raised ring is equal to a diameter of the disk.

6. The atomic layer deposition apparatus according to claim 1, wherein the convex ring corresponds to the pumping hole of the hollow member.

7. The atomic layer deposition apparatus according to claim 6, wherein the pumping hole is located at a bottom of the hollow member.

8. The atomic layer deposition apparatus according to claim 1, wherein the lifting device drives the heating stage and the carrier plate to approach or separate from the hollow member to adjust the first distance between the hollow member and the carrier plate.

9. The atomic layer deposition apparatus according to claim 1, wherein the pumping hole is located at a side of the hollow part.

10. The atomic layer deposition apparatus according to claim 9, wherein the convex ring corresponds to the pumping hole of the hollow member.

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