CN214088643U

CN214088643U - Coating tower for PVD coating furnace

Info

Publication number: CN214088643U
Application number: CN202022910024.4U
Authority: CN
Inventors: 刘风光; 代兴志; 万正华
Original assignee: Zhuzhou Weikai Cutting Tools Co ltd
Current assignee: Zhuzhou Weikai Cutting Tools Co ltd
Priority date: 2020-12-04
Filing date: 2020-12-04
Publication date: 2021-08-31
Anticipated expiration: 2030-12-04

Abstract

The utility model discloses a coating tower for a PVD coating furnace, which comprises a first bottom plate and a second bottom plate, wherein the first bottom plate and the second bottom plate are connected through a connecting pipe; the first bottom plate and the second bottom plate are provided with a plurality of positioning seats, a charging rod is arranged on each positioning seat, a clamping plate is arranged on the outer side of the first bottom plate, a circle of bulges are arranged on the clamping plate along the edge of the bottom plate, and meshing teeth are arranged on the inner sides of the bulges; the charging rod is provided with a gear, and the gear is in meshing transmission with the meshing teeth. The utility model discloses an engaging tooth and gear cooperation on the cardboard drive the charging arm and work piece rotation on it, and can ensure all charging arms constantly at the uniform velocity and rotate for the coating can be stable, evenly coat on each face of work piece.

Description

Coating tower for PVD coating furnace

Technical Field

The utility model relates to a carbide coating technical field, more specifically relates to a PVD coating furnace is with coating tower.

Background

The PVD coating furnace takes a target source as a cathode, and the target is evaporated and ionized to form space plasma through arc discharge between the target source and an anode cavity under the vacuum condition. And the metal positive ions in the plasma are plated on the surface of the workpiece substrate under the traction of the bias electric field to form a coating.

The PVD coating is widely applied to hard alloy cutting tools, and a workpiece needs to be stirred in the plating process to enable the coating to be uniform on the surface of a substrate. In the prior art, a shifting sheet is usually arranged on the side surface of a coating tower, and a charging rod is shifted to rotate. In the mode, the gap between the shifting sheet and the charging rod is unstable, so that the charging rod rotates unevenly, the coating thickness and the color uniformity are influenced, and the product quality difference is caused.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a PVD coating furnace is with coating tower to not enough among the prior art, drive the even rotation of work piece on the loading arm through engagement device, be favorable to carrying out the coating plating.

The purpose of the utility model is realized through the following technical scheme:

a coating tower for a PVD coating furnace comprises a first bottom plate and a second bottom plate, wherein the first bottom plate and the second bottom plate are connected through a connecting pipe; the first bottom plate and the second bottom plate are provided with a plurality of positioning seats, a charging rod is arranged on each positioning seat, a clamping plate is arranged on the outer side of the first bottom plate, a circle of bulges are arranged on the clamping plate along the edge of the bottom plate, and meshing teeth are arranged on the inner sides of the bulges; the charging rod is provided with a gear, and the gear is in meshing transmission with the meshing teeth.

Furthermore, the plurality of positioning seats are uniformly distributed on the edge of the bottom plate.

Further, the number of the positioning seats is 16.

Further, the clamping plate is connected with the first bottom plate through screws.

Further, the connection pipe is disposed at the center of the first and second bottom plates.

Furthermore, the connecting pipe and the bottom plate are welded.

Furthermore, a pin column is arranged between the bottom plate and the positioning seat.

Further, the clamping plate is provided with a protruding part which is matched with a large disc support of the PVD coating machine and used for keeping the clamping plate and the large disc relatively static during operation.

Furthermore, the protruding part is provided with a notch for clamping the large disc support.

Furthermore, the number of the positioning seats on the first bottom plate is the same as that of the positioning seats on the second bottom plate, and the positioning seats are in one-to-one correspondence.

Compared with the prior art, the beneficial effects of the utility model are as follows:

the utility model discloses an engaging tooth and gear cooperation on the cardboard drive the work piece rotation on the charging beam, and the interval is unanimous between the work piece on the commentaries on classics material pole, and all charging beams are at the uniform velocity constantly rotates for the PVD coating can evenly plate on the work piece, improves the coating quality.

Drawings

FIG. 1 is a schematic structural view of a coating tower for a PVD coating furnace;

FIG. 2 is a schematic cross-sectional view at the first backplane and the card;

FIG. 3 is a schematic cross-sectional view at a second base plate;

wherein, 1 is first bottom plate, 2 is the second bottom plate, 3 is the cardboard, 4 is the connecting pipe, 5 is the loading arm, 6 is the positioning seat, 7 is the gear, 8 is the round pin post, 9 is the bulge.

Detailed Description

The drawings are for illustrative purposes only and are not to be construed as limiting the invention; for the purpose of better illustrating the embodiments, certain features of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted. The positional relationships depicted in the drawings are for illustrative purposes only and are not to be construed as limiting the invention.

Example 1

As shown in FIGS. 1 to 3, the embodiment provides a coating tower for a PVD coating furnace, comprising a first bottom plate 1 and a second bottom plate 2, wherein the first bottom plate 1 and the second bottom plate 2 are connected through a connecting pipe 4, the connecting pipe 4 is arranged at the center of the first bottom plate 1 and the second bottom plate 2, and is formed by welding. A plurality of positioning seats 6 are arranged on the first bottom plate 1 and the second bottom plate 2, a charging rod 5 used for loading workpieces is arranged on each positioning seat 6, and a pin 8 is arranged between each bottom plate and each positioning seat 6 for fixing. The number of the positioning seats 6 on the first bottom plate 1 and the second bottom plate 2 is the same and is in one-to-one correspondence, in this embodiment, the number of the positioning seats 6 on the bottom plate is 16, the positioning seats are uniformly distributed on the edge of the bottom plate, and the intervals between the charging rods 5 on the positioning seats 6 are consistent, so that the uniform rotation speed is ensured.

A clamping plate 3 is arranged on the outer side of the first bottom plate 1, the clamping plate 3 is connected with the first bottom plate 1 through a screw, a circle of bulges are arranged on the clamping plate 3 along the edge of the bottom plate, and meshing teeth are arranged on the inner sides of the bulges; correspondingly, a gear 7 is arranged on the charging rod 5, and the gear 7 is in meshing transmission with meshing teeth. The clamping plate 3 can be rotated to drive the charging rod 5 to rotate, and the clamping plate 3 is provided with a protruding part 9 which is matched with a large disc support of the PVD coating machine. Specifically, the protrusion 9 is provided with a notch matched with a large disc support of the PVD coating machine, and the large disc support is clamped into the notch, so that the clamping plate 3 and the large disc of the PVD coating machine keep relatively static during operation.

It should be understood that the above-mentioned embodiments are only examples for clearly illustrating the technical solutions of the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. The coating tower for the PVD coating furnace is characterized by comprising a first bottom plate and a second bottom plate, wherein the first bottom plate and the second bottom plate are connected through a connecting pipe; the first bottom plate and the second bottom plate are provided with a plurality of positioning seats, a charging rod is arranged on each positioning seat, a clamping plate is arranged on the outer side of the first bottom plate, a circle of bulges are arranged on the clamping plate along the edge of the bottom plate, and meshing teeth are arranged on the inner sides of the bulges; the charging rod is provided with a gear, and the gear is in meshing transmission with the meshing teeth.

2. The PVD coated furnace coating tower of claim 1, wherein the plurality of positioning seats are evenly distributed on the edge of the bottom plate.

3. The PVD coated furnace coating tower of claim 1, wherein the number of positioning seats is 16.

4. The PVD coated furnace coating tower of claim 1, wherein the clamping plate is connected with the first bottom plate by a screw.

5. The PVD coated furnace coating tower of claim 1, wherein the connecting tube is arranged at the center of the first and second bottom plates.

6. The PVD coated furnace coating tower of claim 5, wherein the connecting pipe and the bottom plate are welded together.

7. The PVD coated furnace coating tower of claim 1, wherein a pin is mounted between the bottom plate and the positioning seat.

8. The PVD coating furnace coating tower of claim 1, wherein the chuck plate is provided with protrusions for cooperating with large plate supports of a PVD coating machine for keeping the chuck plate and the large plate relatively stationary during operation.

9. The PVD coated furnace coating tower of claim 8, wherein the protrusion is provided with a notch for snapping into a large disc support.

10. The PVD coated furnace coating tower of claim 1, wherein the number of positioning seats on the first bottom plate and the second bottom plate is the same and corresponds to one another.