CN214075815U - Little oxygen adsorption regenerating unit for waste gas recovery purification electron level hexafluoroethane - Google Patents
Little oxygen adsorption regenerating unit for waste gas recovery purification electron level hexafluoroethane Download PDFInfo
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- CN214075815U CN214075815U CN202023125024.XU CN202023125024U CN214075815U CN 214075815 U CN214075815 U CN 214075815U CN 202023125024 U CN202023125024 U CN 202023125024U CN 214075815 U CN214075815 U CN 214075815U
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Abstract
The utility model discloses a little oxygen adsorption regenerating unit is used to waste gas recovery purification electron level hexafluoroethane, include: an adsorption tower, wherein a deoxidizing device is arranged in the adsorption tower, the adsorption tower is respectively connected with an air inlet head and an air outlet head, the peripheral surface of the deoxidizing device is provided with a conveying cylinder, the air inlet joint is externally connected with a heater, the gas heated by the heater is reversely input into the deoxidizing device and the conveying cylinder through the air outlet joint, a plurality of swirl ports are arranged in the conveying cylinder, a first pressurizing step and a second pressurizing step are sequentially arranged at the swirl ports along the direction of the deoxidizing device, nitrogen is heated to 300 ℃ by a heater, the heated nitrogen is reversely input into the deoxidizing device in the adsorption tower through an air outlet head, reacting with the deoxidizing agent in the deoxidizing device, introducing the oxidizing impurities in the deoxidizing agent into a tail gas discharge pipe through hot nitrogen entrainment, discharging, the adsorption capacity of the deoxidizer is recovered, and the reducibility of the deoxidizer can be recovered without manual work.
Description
Technical Field
The utility model relates to an electron level is purification device for hexafluoroethane, especially a little oxygen adsorption regenerating unit for hexafluoroethane of waste gas recovery purification electron level.
Background
The recovery of carbon tetrafluoride produces some oxidizing impurities in the course of extracting electronic grade hexafluoroethane, the existence of the oxidizing impurities can affect the use effect of hexafluoroethane, so that it must control the index, and the common refining and purifying method is difficult to separate them, so that it must seek more effective removing method, and by filling the adsorbent tower with deoxidant, under the action of deoxidant the crude gas of carbon tetrafluoride can remove the oxidizing impurities,
in the traditional process, the deoxidizer needs to be replaced after being used for a period of time, the consumption of manpower and material resources is large, the economic benefit is low,
and other devices adopt a device for activating the deoxidization property of the deoxidant by gas, the mixing effect of the gas and the deoxidant is not obvious, the gas and the deoxidant are completely reacted and intersected after long-time waiting, and the regeneration efficiency is low.
SUMMERY OF THE UTILITY MODEL
The utility model provides a little oxygen adsorption regenerating unit for waste gas recovery purification electron level hexafluoroethane can effectively solve above-mentioned problem.
The utility model discloses a realize like this:
a little oxygen adsorption regenerating unit for waste gas recovery purification electronic grade hexafluoroethane includes: an adsorption tower, wherein a deoxidizing device is arranged in the adsorption tower, the adsorption tower is respectively connected with an air inlet head and an air outlet head,
the peripheral surface of the deoxidizing device is provided with a conveying cylinder, the air inlet joint is externally connected with a heater, the gas heated by the heater is reversely input into the deoxidizing device and the conveying cylinder through the air outlet joint,
a plurality of swirl ports are arranged in the conveying cylinder, and a first pressurizing step and a second pressurizing step are sequentially arranged at the swirl ports along the direction of the deoxidizing device.
As a further improvement, a heating cavity is included in the heater, a heating pipe is arranged on one side of the heating cavity, and a temperature display is fixed on the heating cavity.
As a further improvement, the air inlet end of the heating cavity is connected with an external air compressor, and the air outlet end of the heating cavity is connected with an air outlet head.
As a further improvement, the gas filled in the external gas compressor is nitrogen.
As a further improvement, the heating temperature of the heating pipe for the gas is 250-350 ℃.
As a further improvement, the adsorption tower is provided with a vacuum connecting pipe which can be externally connected with a vacuum machine.
As a further improvement, the adsorption tower is provided with a tail gas discharge pipe, and tail gas can be discharged through the tail gas discharge pipe during nitrogen charging.
As a further improvement, a guide fin arranged along the gas flow direction is inserted on the first pressurizing step.
As a further improvement, a temperature measuring instrument is inserted on the adsorption tower.
As a further improvement, the swirl ports are oriented obliquely downwards.
The utility model has the advantages that:
1. the utility model discloses heat to 300 ℃ in passing through the heater with nitrogen gas, in the nitrogen gas after will heating through the deoxidation device of giving vent to anger head reverse input in the adsorption tower, take place the reaction with the deoxidier among the deoxidation device, smuggle the oxidizing impurity in the deoxidier and get into tail gas discharge pipe discharge through hot nitrogen gas secretly for the adsorption efficiency of deoxidier resumes, can not need to resume the reducibility of deoxidier through the manual work, reduces artifical expenditure and reduces the time of dismouting equipment.
2. The utility model discloses still can have the part to let in the whirl mouth of a transport section of thick bamboo when letting in the deoxidation device with hot nitrogen gas, the nitrogen gas that lets in the deoxidation device can be with the deoxidier toward extrapolating, and the nitrogen gas that lets in the whirl mouth can be with the deoxidier toward pushing away, and the two gaseous intersection forms the mixed flow effect, can eliminate the impurity that has the oxidation property completely attached to on the deoxidier and take away, and is better to the adsorption efficiency of impurity, improves the regeneration effect of deoxidier.
3. The utility model discloses a first pressure boost that sets up is ordered, the second pressure boost is ordered, the water conservancy diversion fin, can carry out the pressure boost to the nitrogen gas of the whirl mouth that lets in, through twice space size's the transform that reduces, it is higher to make the nitrogen gas pressure who spouts into deoxidation device, improve the output pressure of side nitrogen gas, the boost pressure when additionally pressurizing equipment can be littleer, reduce the energy consumption of booster compressor, and the high pressure of side can make the deoxidier draw close toward the centre as far as possible, reaction and firing efficiency are better.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a micro-oxygen adsorption regeneration device for recovering and purifying electronic-grade hexafluoroethane from waste gas.
Fig. 2 is a gas flow diagram of the adsorption tower during nitrogen charging in the embodiment of the present invention.
Fig. 3 is a schematic structural diagram of a heater according to an embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a swirl port according to an embodiment of the present invention.
Fig. 5 is a flow chart of the micro-oxygen adsorption regeneration device for recovering and purifying electronic grade hexafluoroethane from waste gas.
In the figure: 31; a vacuum connecting pipe,
32, a first step of removing the first layer; a heater, 321; a heating cavity 322; a heating pipe 323; a temperature display,
33; an air outlet head,
34; an adsorption column, 341; a temperature measuring instrument,
35; a deoxidizing device,
36; a delivery cylinder 360; a swirl port 361; a first boost stage, 362; a second pressurizing step,
3611; a guide fin,
37; an air inlet head.
Detailed Description
To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined to clearly and completely describe the technical solutions of the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
Referring to fig. 1-5, a micro-oxygen adsorption regeneration device for recovering and purifying electronic grade hexafluoroethane from waste gas comprises: the method comprises the following steps: an adsorption tower 34, wherein a deoxidizing device 35 is arranged in the adsorption tower 34,
the adsorption tower 34 is respectively connected with an air inlet head 37 and an air outlet head 33,
the peripheral face of deoxidation device 35 is provided with and carries a section of thick bamboo 36, the air inlet 33 is external to have heater 32, and the gas after heater 32 heats is through going out the gas head 33 reverse input to deoxidation device 35, carry in the section of thick bamboo 36, inputs nitrogen gas from the air outlet 33, and reverse input mode can let the deoxidier be stirred the motion completely, lets its surperficial oxidation impurity can fully contact with hot gas, if from the air inlet input, then the deoxidier can be along with the motion mode of being used to, has partial impurity easily to be taken away.
The conveying cylinder 36 is internally provided with a plurality of swirl ports 360, the swirl ports 360 are sequentially provided with a first pressurizing step 361 and a second pressurizing step 362 along the direction of the deoxidizing device 35, the pressure of flushed hot gas can be increased step by step through the first pressurizing step 361 and the second pressurizing step 362, the pressure of the flushed hot gas is stronger and is larger than that of the hot gas in a central area, the deoxidizing device can be pushed towards the middle direction while continuously stirring, and oxidation impurities on the deoxidizing device can be completely stripped off.
Further, a heating cavity 321 is included in the heater 32, a heating pipe 322 is disposed at one side of the heating cavity 321, a temperature display 323 is fixed on the heating cavity 321, the air inlet end of the heating cavity 321 is connected with an external air compressor, the air outlet end of the heating cavity 321 is connected with an air outlet head 33, the gas filled by the external air compressor is nitrogen, the heating temperature of the heating pipe 322 to the gas is 250-350 ℃, preferably, the heating temperature of the heating pipe 322 to the gas is 300 ℃, so that the gas can burn to take away impurities without destroying the chemical properties of the deoxidizer, if the temperature is too high, the deoxidizer can be directly destroyed, if the temperature is too low, the influence on the oxidized impurities is difficult to cause, the oxidized impurities cannot be completely removed, and the flushed gas not only can be nitrogen, but also can be other gases which do not react with the deoxidizer.
Further, the adsorption tower 34 is provided with a vacuum connecting pipe 31 which can be externally connected with a vacuum machine, and can carry out vacuum treatment on the inside of the equipment before and after work, thereby reducing the influence of other gases on the whole purification process.
Further, be provided with the tail gas delivery pipe on adsorption tower 34, can discharge tail gas through the tail gas delivery pipe when filling nitrogen, separate the tail gas passageway with the passageway of normal operating, prevent that some tail gas from remaining and causing the influence to the purity of hexachloromethane at the end of giving vent to anger or the end of admitting air.
Furthermore, a guide fin 3611 is inserted into the first pressurizing stage 361 and is disposed along the gas flow direction, so as to guide the gas flow direction and reduce the energy lost when the gas rubs against the first pressurizing stage 361.
Further, a temperature measuring instrument 341 is inserted into the adsorption tower 34.
Further, the orientation of the swirl port 360 is inclined downwards, so that gas from top to bottom can be naturally output through the swirl port 360 without overcoming other resistance, and the flow resistance of the gas during flowing is reduced.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A little oxygen adsorption regenerating unit for waste gas recovery purification electronic grade hexafluoroethane includes: an adsorption tower (34), a deoxidizing device (35) is arranged in the adsorption tower (34), the adsorption tower (34) is respectively connected with an air inlet head (37) and an air outlet head (33), the adsorption tower is characterized in that,
the peripheral surface of the deoxidizing device (35) is provided with a conveying cylinder (36), the air inlet head (37) is externally connected with a heater (32), the gas heated by the heater (32) is reversely input into the deoxidizing device (35) and the conveying cylinder (36) through the air outlet head (33),
a plurality of rotational flow ports (360) are arranged in the conveying cylinder (36), and a first pressurizing step (361) and a second pressurizing step (362) are sequentially arranged on the rotational flow ports (360) along the direction of the deoxidizing device (35).
2. The micro-oxygen adsorption regeneration device for the electronic grade hexafluoroethane recovery and purification from exhaust gas as claimed in claim 1, wherein the heater (32) comprises a heating cavity (321), a heating pipe (322) is disposed at one side of the heating cavity (321), and a temperature display (323) is fixed on the heating cavity (321).
3. The micro-oxygen adsorption regeneration device for the electronic grade hexafluoroethane recovery and purification of exhaust gas as claimed in claim 2, wherein the gas inlet end of the heating chamber (321) is connected with an external gas compressor, and the gas outlet end of the heating chamber (321) is connected with the gas outlet head (33).
4. The micro-oxygen adsorption regeneration device for the recovery and purification of electronic-grade hexafluoroethane in waste gas according to claim 3, wherein the gas charged by the external gas compressor is nitrogen.
5. The micro-oxygen adsorption regeneration device for recovering and purifying electronic grade hexafluoroethane as claimed in claim 2, wherein the heating temperature of the heating pipe (322) for gas is 250-350 ℃.
6. The micro-oxygen adsorption regeneration device for the electronic grade hexafluoroethane recovery and purification of waste gas as claimed in claim 1, wherein the adsorption tower (34) is provided with a vacuum connection pipe (31) which can be externally connected with a vacuum machine.
7. The micro-oxygen adsorption regeneration device for the electronic grade hexafluoroethane recovery and purification of waste gas as claimed in claim 1, wherein said adsorption tower (34) is provided with a tail gas discharge pipe, and the tail gas can be discharged through the tail gas discharge pipe during nitrogen charging.
8. The micro-oxygen adsorption regeneration device for recovering and purifying electronic grade hexafluoroethane as claimed in claim 1, wherein the first pressure increasing step (361) is inserted with a flow guide fin (3611) arranged along the gas flow direction.
9. The micro-oxygen adsorption regeneration device for the electronic-grade hexafluoroethane recovery and purification of waste gas as claimed in claim 1, wherein a temperature measuring instrument (341) is inserted into the adsorption tower (34).
10. The micro-oxygen adsorption regeneration device for the recovery and purification of electronic grade hexafluoroethane as claimed in claim 1, wherein the orientation of said swirl port (360) is inclined downward.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023125024.XU CN214075815U (en) | 2020-12-21 | 2020-12-21 | Little oxygen adsorption regenerating unit for waste gas recovery purification electron level hexafluoroethane |
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| CN202023125024.XU CN214075815U (en) | 2020-12-21 | 2020-12-21 | Little oxygen adsorption regenerating unit for waste gas recovery purification electron level hexafluoroethane |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114531745A (en) * | 2022-01-19 | 2022-05-24 | 杭州量动自动化设备有限公司 | Fluoride purification system, explosion-proof heater in fluoride purification system and use method |
| CN114823326A (en) * | 2022-03-30 | 2022-07-29 | 浙江陶特容器科技股份有限公司 | Method for etching semiconductor by using high-purity hexafluoroethane |
-
2020
- 2020-12-21 CN CN202023125024.XU patent/CN214075815U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114531745A (en) * | 2022-01-19 | 2022-05-24 | 杭州量动自动化设备有限公司 | Fluoride purification system, explosion-proof heater in fluoride purification system and use method |
| CN114823326A (en) * | 2022-03-30 | 2022-07-29 | 浙江陶特容器科技股份有限公司 | Method for etching semiconductor by using high-purity hexafluoroethane |
| CN114823326B (en) * | 2022-03-30 | 2023-09-12 | 宿州伊维特新材料有限公司 | Method for carrying out semiconductor etching by utilizing high-purity hexafluoroethane |
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Address after: No. 6, Gongye Road, Jiaoyang industrial concentration zone, Jiaoyang Town, Shanghang County, Longyan City, Fujian Province, 364204 Patentee after: Fujian del Technology Co.,Ltd. Address before: No. 6, Gongye Road, Jiaoyang industrial concentration zone, Jiaoyang Town, Shanghang County, Longyan City, Fujian Province, 364000 Patentee before: FUJIAN DEER TECHNOLOGY CO.,LTD. |
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