CN114531745A - Fluoride purification system, explosion-proof heater in fluoride purification system and use method - Google Patents

Fluoride purification system, explosion-proof heater in fluoride purification system and use method Download PDF

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Publication number
CN114531745A
CN114531745A CN202210061075.5A CN202210061075A CN114531745A CN 114531745 A CN114531745 A CN 114531745A CN 202210061075 A CN202210061075 A CN 202210061075A CN 114531745 A CN114531745 A CN 114531745A
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explosion
proof
heating
group
proof heater
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武晓文
李超俊
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Hangzhou Liangdong Automation Equipment Co ltd
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Hangzhou Liangdong Automation Equipment Co ltd
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/02Details
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00Details of electric heating devices
    • H05B1/02Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227Applications
    • H05B1/023Industrial applications
    • H05B1/0247For chemical processes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/02Details
    • H05B3/06Heater elements structurally combined with coupling elements or holders
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2256/00Main component in the product gas stream after treatment
    • B01D2256/26Halogens or halogen compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/40083Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/037Heaters with zones of different power density

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

The invention provides an explosion-proof heater in a fluoride purification system, which comprises a heating container and a heat-insulating sleeve; the outer side of the heating container is sleeved with a heat-insulating sleeve; the heating container comprises an upper section, a middle section and a lower section which are arranged along the length direction of the heating container; heating detection components are arranged at the positions, close to the middle, of the upper section, the middle section and the lower section; the heating detection assembly comprises a heating pipe and an explosion-proof sensor which are matched with each other; the invention also provides a use method of the fluoride purification system; the heater is detachable, so that later-period disassembly and maintenance are facilitated, the adsorbent is filled in the inner container, and fluoride gas also circulates in the inner container and is not in contact with the heater. The isolation of poisonous and harmful gas is guaranteed, the possibility of leakage is reduced, the temperature of the heating container is controlled by the upper, middle and lower sections independently, the temperature accuracy is guaranteed, the AB group explosion-proof heater group is used in an exchange mode, and the working efficiency is improved.

Description

一种氟化物提纯系统、氟化物提纯系统内的防爆加热器及使 用方法A kind of fluoride purification system, explosion-proof heater in fluoride purification system and using method

技术领域technical field

本发明涉及氟化物提纯装置,具体涉及一种氟化物提纯系统、氟化物提纯系统内的防爆加热器及使用方法。The invention relates to a fluoride purification device, in particular to a fluoride purification system, an explosion-proof heater in the fluoride purification system and a use method.

背景技术Background technique

电加热器是一种国际流行的电加热设备,用于对流动的液态、气态介质的升温、保温、加热,当加热介质在压力作用下通过电加热器加热腔,采用流体热力学原理均匀地带走电热元件工作中所产生的巨大热量,使被加热介质温度达到用户工艺要求。Electric heater is an internationally popular electric heating equipment, which is used for heating, heat preservation and heating of flowing liquid and gaseous media. The huge heat generated in the operation of the electric heating element makes the temperature of the heated medium meet the user's technological requirements.

现有的氟化物提纯系统没有吸附剂吸附氟化物气体内杂质提纯,这一步骤,生产的氟化物内含有微量杂质。In the existing fluoride purification system, there is no adsorbent to adsorb and purify impurities in the fluoride gas. In this step, the produced fluoride contains trace impurities.

因此,需要对现有技术进行改进。Therefore, there is a need for improvements to the prior art.

发明内容SUMMARY OF THE INVENTION

本发明要解决的技术问题是提供高效的一种氟化物提纯系统、氟化物提纯系统内的防爆加热器及使用方法。The technical problem to be solved by the present invention is to provide an efficient fluoride purification system, an explosion-proof heater in the fluoride purification system and a method of use.

为解决上述技术问题,本发明提供一种氟化物提纯系统内的防爆加热器,包括加热容器和保温套管;In order to solve the above technical problems, the present invention provides an explosion-proof heater in a fluoride purification system, including a heating container and a thermal insulation sleeve;

所述加热容器外侧套设有保温套管;The outer side of the heating container is provided with a thermal insulation sleeve;

所述加热容器包括沿着其长度方向设置的上段、中段和下段;所述上段、中段和下段靠近中间的位置均设置有加热检测组件;The heating container includes an upper section, a middle section and a lower section arranged along its length direction; the upper section, the middle section and the lower section are all provided with heating detection components near the middle;

所述加热检测组件包括配合使用的加热管和防爆传感器;The heating detection component includes a heating tube and an explosion-proof sensor used in conjunction;

所述加热管位于保温套管内,加热管螺旋设置在加热容器靠近四周的位置,加热管上还设置有防爆接线盒;The heating pipe is located in the thermal insulation sleeve, the heating pipe is spirally arranged at a position close to the surrounding of the heating container, and an explosion-proof junction box is also arranged on the heating pipe;

所述防爆传感器通过传感器安装支架固定设置在保温套管上;The explosion-proof sensor is fixedly arranged on the thermal insulation casing through the sensor mounting bracket;

所述传感器安装支架为圆锥台形的框架,传感器安装支架底部与保温套管固定连接为一体,传感器安装支架顶部设置有旋转套,旋转套内表面设置有内螺纹;The sensor mounting bracket is a truncated cone-shaped frame, the bottom of the sensor mounting bracket is fixedly connected with the thermal insulation sleeve as a whole, the top of the sensor mounting bracket is provided with a rotating sleeve, and the inner surface of the rotating sleeve is provided with an internal thread;

所述防爆传感器上安装旋转轴,旋转轴外表面设置有外螺纹;A rotating shaft is installed on the explosion-proof sensor, and the outer surface of the rotating shaft is provided with an external thread;

所述旋转套与旋转轴相适配,旋转轴与旋转套螺纹连接,防爆传感器的检测探头穿过保温套管上的测温孔后与加热容器的外壁抵接;The rotating sleeve is adapted to the rotating shaft, the rotating shaft is threadedly connected with the rotating sleeve, and the detection probe of the explosion-proof sensor is in contact with the outer wall of the heating container after passing through the temperature measuring hole on the thermal insulation sleeve;

所述防爆传感器通过信号管与防爆接线盒信号连接。The explosion-proof sensor is signal-connected to the explosion-proof junction box through a signal tube.

作为对本发明一种氟化物提纯系统内的防爆加热器的改进:As the improvement to the explosion-proof heater in a kind of fluoride purification system of the present invention:

所述加热容器的上段、中段和下段为可拆卸连接。The upper, middle and lower sections of the heating vessel are detachably connected.

作为对本发明一种氟化物提纯系统内的防爆加热器的改进:As the improvement to the explosion-proof heater in a kind of fluoride purification system of the present invention:

本发明还提供一种氟化物提纯系统,包括AB两组防爆加热器组,每组防爆加热器组均包含依次串联的若干防爆加热器;The invention also provides a fluoride purification system, comprising two explosion-proof heater groups AB, and each group of explosion-proof heater groups includes several explosion-proof heaters connected in series in sequence;

氮气通道分别与AB两组防爆加热器组进口连通;The nitrogen channels are respectively connected with the inlets of the AB groups of explosion-proof heater groups;

氟化物气体通道分别与AB两组防爆加热器组进口连通;The fluoride gas channels are respectively connected with the inlets of the AB groups of explosion-proof heater groups;

所述AB两组防爆加热器组出口分别与后续处理设备及尾气处理设备连接。The outlets of the AB groups of explosion-proof heater groups are respectively connected with subsequent treatment equipment and exhaust gas treatment equipment.

本发明还提供一种氟化物提纯系统的使用方法,包括以下步骤:The present invention also provides a method for using the fluoride purification system, comprising the following steps:

1)、A组防爆加热器组通常温通氟化物气体,内部吸附剂吸附杂质;同时B组防爆加热器组通氮气,PLC程序控制防爆加热器组中的防爆加热器加热温度,分段定时加热,使吸附剂上杂质脱附,氮气带走杂质进尾气处理设备;直到一个工作流程结束,执行步骤2;1) The explosion-proof heater group of group A usually passes fluoride gas at a temperature, and the internal adsorbent absorbs impurities; at the same time, the explosion-proof heater group of group B is connected to nitrogen, and the PLC program controls the heating temperature of the explosion-proof heater in the explosion-proof heater group, and the timing is segmented. Heating to desorb the impurities on the adsorbent, and the nitrogen gas takes away the impurities into the tail gas treatment equipment; until the end of a working process, step 2 is performed;

2)、B组防爆加热器组通常温通氟化物气体,内部吸附剂吸附杂质;同时A组防爆加热器组通氮气,PLC程序控制防爆加热器组中的防爆加热器加热温度,分段定时加热,使吸附剂上杂质脱附,氮气带走杂质进尾气处理设备;直到一个工作流程结束,执行步骤3;2) Group B explosion-proof heaters usually pass fluoride gas at a temperature, and the internal adsorbent absorbs impurities; at the same time, group A explosion-proof heaters pass nitrogen, and the PLC program controls the heating temperature of the explosion-proof heaters in the explosion-proof heaters, segmented timing Heating to desorb the impurities on the adsorbent, and the nitrogen gas takes away the impurities into the tail gas treatment equipment; until the end of a working process, step 3 is performed;

3)、重复步骤1-2,AB组防爆加热器组交换使用。3), repeat steps 1-2, the explosion-proof heater group of group AB is used interchangeably.

本发明一种氟化物提纯系统、氟化物提纯系统内的防爆加热器及使用方法的技术优势为:The technical advantages of the fluoride purification system, the explosion-proof heater in the fluoride purification system and the use method of the present invention are:

1.加热器做成可拆卸式,方便后期拆装维修。1. The heater is made detachable, which is convenient for later disassembly and maintenance.

2.吸附剂填充在内部容器中,氟化物气体也在内部容器流通,与加热器无接触。保证有毒有害气体隔绝,减少泄露可能。2. The adsorbent is filled in the inner container, and the fluoride gas is also circulated in the inner container, and there is no contact with the heater. Ensure the isolation of toxic and harmful gases and reduce the possibility of leakage.

3.加热容器采用上中下三段单独控温,保证温度精准度。3. The heating container adopts the upper, middle and lower three sections of separate temperature control to ensure the temperature accuracy.

4.AB组防爆加热器组交换使用,增加工作效率。4. AB group explosion-proof heater group is used interchangeably to increase work efficiency.

附图说明Description of drawings

下面结合附图对本发明的具体实施方式作进一步详细说明。The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

图1是本发明一种氟化物提纯系统内的防爆加热器的结构示意图;Fig. 1 is the structural representation of the explosion-proof heater in a kind of fluoride purification system of the present invention;

图2是图1中防爆传感器3与加热容器1配合使用的结构示意图;FIG. 2 is a schematic structural diagram of the explosion-proof sensor 3 used in conjunction with the heating container 1 in FIG. 1;

图3是一种氟化物提纯系统的结构示意图。Figure 3 is a schematic structural diagram of a fluoride purification system.

具体实施方式Detailed ways

下面结合具体实施例对本发明进行进一步描述,但本发明的保护范围并不仅限于此。The present invention will be further described below with reference to specific embodiments, but the protection scope of the present invention is not limited thereto.

实施例1、一种氟化物提纯系统内的防爆加热器,如图1所示,包括加热容器1和保温套管2。Embodiment 1. An explosion-proof heater in a fluoride purification system, as shown in FIG. 1 , includes a heating vessel 1 and a thermal insulation sleeve 2 .

加热容器1外表面覆盖套设有保温套管2。The outer surface of the heating container 1 is covered with a thermal insulation sleeve 2 .

加热容器1沿着其长度方向设置有若干加热检测组件;加热容器1两端分别设有进气口14和出气口15。The heating container 1 is provided with several heating detection components along its length direction; the two ends of the heating container 1 are respectively provided with an air inlet 14 and an air outlet 15 .

在本实施例中,将加热容器1从上到下依次等距分为上段11、中段12和下段13共三段,每段的靠近中间的位置均设置有加热检测组件,分为三段可以方便后续对加热容器1进行分段单独控制,从而保证温度精准度。In this embodiment, the heating container 1 is divided into three sections, including an upper section 11, a middle section 12, and a lower section 13, in order from top to bottom, and a heating detection component is provided near the middle of each section, which can be divided into three sections. It is convenient to control the heating container 1 in sections and separately, so as to ensure the temperature accuracy.

加热检测组件包括配合使用的加热管4和防爆传感器3;The heating detection component includes a heating tube 4 and an explosion-proof sensor 3 that are used together;

加热管4位于保温套管2内,加热管4螺旋设置在加热容器1靠近四周的位置,通过控制加热管4对加热容器1进行升温加热,加热管4上还设置有防爆接线盒41。The heating pipe 4 is located in the thermal insulation sleeve 2, and the heating pipe 4 is spirally arranged at a position close to the surrounding of the heating container 1. The heating container 1 is heated and heated by controlling the heating pipe 4. The heating pipe 4 is also provided with an explosion-proof junction box 41.

防爆传感器3通过传感器安装支架31固定设置在保温套管2上;The explosion-proof sensor 3 is fixedly arranged on the thermal insulation sleeve 2 through the sensor mounting bracket 31;

传感器安装支架31为圆锥台形的框架,传感器安装支架31底部与保温套管2固定连接为一体,传感器安装支架31顶部设置有旋转套32,旋转套32内表面设置有内螺纹;The sensor mounting bracket 31 is a truncated cone-shaped frame, the bottom of the sensor mounting bracket 31 is fixedly connected with the thermal insulation sleeve 2 as a whole, the top of the sensor mounting bracket 31 is provided with a rotating sleeve 32, and the inner surface of the rotating sleeve 32 is provided with internal threads;

防爆传感器3上安装旋转轴33,旋转轴33外表面设置有外螺纹;A rotating shaft 33 is installed on the explosion-proof sensor 3, and the outer surface of the rotating shaft 33 is provided with an external thread;

旋转套32与旋转轴33相适配,旋转轴33与旋转套32螺纹连接,防爆传感器3的检测探头34穿过保温套管2上的测温孔21后与加热容器1的外壁抵接;The rotating sleeve 32 is adapted to the rotating shaft 33, the rotating shaft 33 is threadedly connected with the rotating sleeve 32, and the detection probe 34 of the explosion-proof sensor 3 passes through the temperature measuring hole 21 on the thermal insulation sleeve 2 and abuts against the outer wall of the heating container 1;

通过转动防爆传感器3,可以使得旋转轴33与旋转套32旋动,从而调整检测探头34在测温孔21中的伸入长度,从而调整检测探头34是否与加热容器1的外壁抵接。By rotating the explosion-proof sensor 3 , the rotating shaft 33 and the rotating sleeve 32 can be rotated to adjust the length of the detection probe 34 in the temperature measuring hole 21 , so as to adjust whether the detection probe 34 is in contact with the outer wall of the heating container 1 .

防爆传感器3通过信号管与防爆接线盒41信号连接,防爆传感器3检测加热容器1中的温度然后传输到防爆接线盒41,根据防爆传感器3检测到的加热容器1中的温度和预先设定的温度进行温控判断,通过控制加热管4的加热功率对加热容器1的加热。The explosion-proof sensor 3 is signally connected to the explosion-proof junction box 41 through a signal tube. The explosion-proof sensor 3 detects the temperature in the heating container 1 and then transmits it to the explosion-proof junction box 41. The temperature is determined by temperature control, and the heating container 1 is heated by controlling the heating power of the heating tube 4 .

在使用时,通过加热管4控制上段11、中段12和下段13的温度相同,三段单独控温,保证温度精准度。When in use, the temperature of the upper section 11, the middle section 12 and the lower section 13 is controlled to be the same by the heating tube 4, and the temperature of the three sections is controlled independently to ensure temperature accuracy.

加热容器1的上段11、中段12和下段13为可拆卸连接,在需要更换维修时,可以将上段11、中段12和下段13从保温套管2的内腔中依次取出,更换维修相应的部件,再重新组装回去。The upper section 11, the middle section 12 and the lower section 13 of the heating container 1 are detachably connected. When replacement and maintenance are required, the upper section 11, the middle section 12 and the lower section 13 can be taken out from the inner cavity of the thermal insulation sleeve 2 in turn, and the corresponding parts can be replaced and maintained. , and then reassemble it back.

加热容器1的上段11、中段12和下段13内部填充有氟化物吸附剂,氟化物吸附剂可以吸收氟化物气体中的大部分有毒有害气体,氟化物气体与加热管4无接触,能保证有毒有害气体隔绝,减少泄露可能。The upper section 11, the middle section 12 and the lower section 13 of the heating vessel 1 are filled with a fluoride adsorbent. The fluoride adsorbent can absorb most of the toxic and harmful gases in the fluoride gas, and the fluoride gas has no contact with the heating pipe 4, which can ensure that the toxic Harmful gases are isolated to reduce the possibility of leakage.

一种氟化物提纯系统,包括AB两组防爆加热器组,每组防爆加热器组均包含依次串联的若干防爆加热器(在本实施例中防爆加热器的数量为3个);A fluoride purification system, comprising two groups of AB explosion-proof heaters, and each group of explosion-proof heaters includes several explosion-proof heaters connected in series in sequence (in this embodiment, the number of explosion-proof heaters is 3);

氮气通道分别与AB两组防爆加热器组进口连通;The nitrogen channels are respectively connected with the inlets of the AB groups of explosion-proof heater groups;

氟化物气体通道分别与AB两组防爆加热器组进口连通;The fluoride gas channels are respectively connected with the inlets of the AB groups of explosion-proof heater groups;

AB两组防爆加热器组出口分别与后续处理设备及尾气处理设备连接。The outlets of the AB groups of explosion-proof heater groups are respectively connected with the subsequent treatment equipment and the exhaust gas treatment equipment.

氮气通道和氟化物气体通道上均设置有阀门。Valves are provided on both the nitrogen gas channel and the fluoride gas channel.

一种氟化物提纯系统的使用流程,包括以下步骤:A use flow of a fluoride purification system, comprising the following steps:

1)、正常使用时,A组防爆加热器组通常温通氟化物气体,内部吸附剂吸附杂质;同时B组防爆加热器组通氮气,PLC程序控制防爆加热器组中的防爆加热器加热温度,分段定时加热,使吸附剂上杂质脱附,氮气带走杂质进尾气处理设备;直到一个工作流程结束,执行步骤2;1) During normal use, the explosion-proof heater group of group A is usually warmed to fluoride gas, and the internal adsorbent adsorbs impurities; at the same time, the explosion-proof heater group of group B is connected to nitrogen, and the PLC program controls the heating temperature of the explosion-proof heater in the explosion-proof heater group. , heating in stages and regularly to desorb the impurities on the adsorbent, and the nitrogen gas takes away the impurities into the tail gas treatment equipment; until the end of a working process, step 2 is performed;

2)、阀门控制气体管路,B组防爆加热器组通常温通氟化物气体,内部吸附剂吸附杂质。同时A组防爆加热器组通氮气,PLC程序控制防爆加热器组中的防爆加热器加热温度,分段定时加热,使吸附剂上杂质脱附,氮气带走杂质进尾气处理设备;直到一个工作流程结束,执行步骤3;2) The valve controls the gas pipeline, and the explosion-proof heater group of group B usually passes fluoride gas warmly, and the internal adsorbent adsorbs impurities. At the same time, the explosion-proof heater group of group A is connected to nitrogen, and the PLC program controls the heating temperature of the explosion-proof heaters in the explosion-proof heater group, and the heating is performed in stages to desorb the impurities on the adsorbent, and the nitrogen gas takes away the impurities into the exhaust gas treatment equipment; until one works The process ends, go to step 3;

3)、重复步骤1-2,AB组防爆加热器组交换使用,增加工作效率。3), repeat steps 1-2, the explosion-proof heater group AB group is used interchangeably to increase the work efficiency.

最后,还需要注意的是,以上列举的仅是本发明的若干个具体实施例。显然,本发明不限于以上实施例,还可以有许多变形。本领域的普通技术人员能从本发明公开的内容直接导出或联想到的所有变形,均应认为是本发明的保护范围。Finally, it should also be noted that the above enumeration is only a few specific embodiments of the present invention. Obviously, the present invention is not limited to the above embodiments, and many modifications are possible. All deformations that those of ordinary skill in the art can directly derive or associate from the disclosure of the present invention shall be considered as the protection scope of the present invention.

Claims (5)

1.一种氟化物提纯系统内的防爆加热器,其特征在于:包括加热容器(1)和保温套管(2);1. an explosion-proof heater in a fluoride purification system, characterized in that: comprising a heating vessel (1) and a thermal insulation sleeve (2); 所述加热容器(1)外侧套设有保温套管(2);The outer side of the heating container (1) is sleeved with a thermal insulation sleeve (2); 所述加热容器(1)包括沿着其长度方向设置的上段(11)、中段(12)和下段(13);所述上段(11)、中段(12)和下段(13)靠近中间的位置均设置有加热检测组件;The heating vessel (1) comprises an upper section (11), a middle section (12) and a lower section (13) arranged along its length direction; the upper section (11), the middle section (12) and the lower section (13) are located near the middle All are equipped with heating detection components; 所述加热检测组件包括配合使用的加热管(4)和防爆传感器(3);The heating detection assembly includes a heating pipe (4) and an explosion-proof sensor (3) used in combination; 所述加热管(4)位于保温套管(2)内,加热管(4)螺旋设置在加热容器(1)靠近四周的位置,加热管(4)上还设置有防爆接线盒(41);The heating pipe (4) is located in the thermal insulation sleeve (2), the heating pipe (4) is spirally arranged at a position close to the surrounding of the heating container (1), and an explosion-proof junction box (41) is also provided on the heating pipe (4); 所述防爆传感器(3)通过传感器安装支架(31)固定设置在保温套管(2)上;The explosion-proof sensor (3) is fixedly arranged on the thermal insulation sleeve (2) through the sensor mounting bracket (31); 所述传感器安装支架(31)为圆锥台形的框架,传感器安装支架(31)底部与保温套管(2)固定连接为一体,传感器安装支架(31)顶部设置有旋转套(32),旋转套(32)内表面设置有内螺纹;The sensor mounting bracket (31) is a truncated cone-shaped frame, the bottom of the sensor mounting bracket (31) is fixedly connected to the thermal insulation sleeve (2) as a whole, and the top of the sensor mounting bracket (31) is provided with a rotating sleeve (32), the rotating sleeve (32) The inner surface is provided with internal threads; 所述防爆传感器(3)上安装旋转轴(33),旋转轴(33)外表面设置有外螺纹;A rotating shaft (33) is installed on the explosion-proof sensor (3), and an outer thread is provided on the outer surface of the rotating shaft (33); 所述旋转套(32)与旋转轴(33)相适配,旋转轴(33)与旋转套(32)螺纹连接,防爆传感器(3)的检测探头(34)穿过保温套管(2)上的测温孔(21)后与加热容器(1)的外壁抵接;The rotating sleeve (32) is adapted to the rotating shaft (33), the rotating shaft (33) is threadedly connected with the rotating sleeve (32), and the detection probe (34) of the explosion-proof sensor (3) passes through the thermal insulation sleeve (2) The temperature measuring hole (21) on the top is in contact with the outer wall of the heating container (1); 所述防爆传感器(3)通过信号管与防爆接线盒(41)信号连接。The explosion-proof sensor (3) is signal-connected to the explosion-proof junction box (41) through a signal pipe. 2.根据权利要求1所述的一种氟化物提纯系统内的防爆加热器,其特征在于:2. the explosion-proof heater in a kind of fluoride purification system according to claim 1, is characterized in that: 所述加热容器(1)的上段(11)、中段(12)和下段(13)为可拆卸连接。The upper section (11), the middle section (12) and the lower section (13) of the heating container (1) are detachably connected. 3.根据权利要求2所述的一种氟化物提纯系统内的防爆加热器,其特征在于:3. the explosion-proof heater in a kind of fluoride purification system according to claim 2, is characterized in that: 所述加热容器(1)的上段(11)、中段(12)和下段(13)内部填充有氟化物吸附剂。The upper section (11), the middle section (12) and the lower section (13) of the heating vessel (1) are filled with a fluoride adsorbent. 4.一种氟化物提纯系统,其特征在于:包括AB两组防爆加热器组,每组防爆加热器组均包含依次串联的若干防爆加热器;4. a fluoride purification system is characterized in that: comprise AB two groups of explosion-proof heater groups, and every group of explosion-proof heater groups all comprise several explosion-proof heaters connected in series in turn; 氮气通道分别与AB两组防爆加热器组进口连通;The nitrogen channels are respectively connected with the inlets of the AB groups of explosion-proof heater groups; 氟化物气体通道分别与AB两组防爆加热器组进口连通;The fluoride gas channels are respectively connected with the inlets of the AB groups of explosion-proof heater groups; 所述AB两组防爆加热器组出口分别与后续处理设备及尾气处理设备连接。The outlets of the AB groups of explosion-proof heater groups are respectively connected with subsequent treatment equipment and exhaust gas treatment equipment. 5.一种氟化物提纯系统的使用方法,其特征在于:包括以下步骤:5. a using method of fluoride purification system is characterized in that: comprise the following steps: 1)、A组防爆加热器组通常温通氟化物气体,内部吸附剂吸附杂质;同时B组防爆加热器组通氮气,PLC程序控制防爆加热器组中的防爆加热器加热温度,分段定时加热,使吸附剂上杂质脱附,氮气带走杂质进尾气处理设备;直到一个工作流程结束,执行步骤2;1) The explosion-proof heater group of group A usually passes fluoride gas at a temperature, and the internal adsorbent absorbs impurities; at the same time, the explosion-proof heater group of group B is connected to nitrogen, and the PLC program controls the heating temperature of the explosion-proof heater in the explosion-proof heater group, and the timing is segmented. Heating to desorb the impurities on the adsorbent, and the nitrogen gas takes away the impurities into the tail gas treatment equipment; until the end of a working process, step 2 is performed; 2)、B组防爆加热器组通常温通氟化物气体,内部吸附剂吸附杂质;同时A组防爆加热器组通氮气,PLC程序控制防爆加热器组中的防爆加热器加热温度,分段定时加热,使吸附剂上杂质脱附,氮气带走杂质进尾气处理设备;直到一个工作流程结束,执行步骤3;2) The explosion-proof heater group of group B usually passes fluoride gas at a temperature, and the internal adsorbent adsorbs impurities; at the same time, the explosion-proof heater group of group A is connected to nitrogen, and the PLC program controls the heating temperature of the explosion-proof heater in the explosion-proof heater group, and the timing is segmented. Heating to desorb the impurities on the adsorbent, and the nitrogen gas takes away the impurities into the tail gas treatment equipment; until the end of a working process, step 3 is performed; 3)、重复步骤1-2,AB组防爆加热器组交换使用。3), repeat steps 1-2, the explosion-proof heater group of group AB is used interchangeably.
CN202210061075.5A 2022-01-19 2022-01-19 Fluoride purification system, explosion-proof heater in fluoride purification system and use method Pending CN114531745A (en)

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