CN214004858U - Liquid suction device - Google Patents

Abstract

The utility model discloses a liquid suction means, liquid suction means is used for absorbing the liquid in the long brilliant stove, long brilliant stove includes the furnace body, liquid suction means includes storage container, suction tube and suction subassembly, inject storage space in the storage container, and be formed with liquid inlet and blow vent on the storage container, liquid inlet and blow vent communicate with storage space respectively, the suction tube is established on storage container and inject suction channel in the suction tube, suction channel and liquid inlet intercommunication, the suction tube is suitable for stretching into in the furnace body, suction subassembly and blow vent intercommunication are in order to reduce the pressure in the storage space. According to the utility model discloses a liquid suction means, simple structure can in time remove the liquid that pollutes in the long brilliant stove, guarantees that production lasts and goes on.

Description

Liquid suction device

Technical Field

The utility model belongs to the technical field of crystal growth equipment technique and specifically relates to a liquid suction means is related to.

Background

The crystal growth furnace is equipment for converting a substance from a gas phase, a liquid phase and a solid phase to form crystals with a specific linear dimension under the regulation of certain temperature, pressure and the like.

However, in the process of producing crystals, most of impurities have a segregation coefficient of less than 1 due to the segregation effect of the impurities, so that the impurities tend to remain in the liquid. The value of the pollutants of the residual liquid in the crystal growth furnace continuously increases along with the production; when the contaminant concentration reaches a certain critical value, continued increase in contaminants may cause production to stop, resulting in higher production costs.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a liquid suction means, liquid suction means simple structure can in time remove the liquid that pollutes in the long brilliant stove, guarantees that production lasts and goes on.

According to the utility model discloses a liquid suction means, liquid suction means is used for absorbing the liquid in the long brilliant stove, long brilliant stove includes the furnace body, liquid suction means includes: the storage container is internally provided with a storage space, a liquid inlet and a vent are formed on the storage container, and the liquid inlet and the vent are respectively communicated with the storage space; a suction tube disposed on the storage container and defining a suction channel therein, the suction channel communicating with the liquid inlet, the suction tube adapted to extend into the furnace body; a suction assembly in communication with the vent to reduce pressure within the storage space.

According to the utility model discloses a liquid suction means limits storage space through setting up in the storage container, and the suction tube is suitable for stretching into the furnace body, and the suction subassembly is used for reducing the pressure in the storage space for liquid suction means can in time remove the liquid that pollutes in the long brilliant stove, guarantees that production lasts and goes on, thereby reduction in production cost, and liquid suction means simple structure has good suitability moreover.

In some embodiments, the suction tube has an inlet and an outlet, and includes a straight tube section and a bent tube section, the straight tube section and the bent tube section are sequentially arranged along an axial direction of the suction tube, one end of the straight tube section defines the inlet and is adapted to extend into the furnace body, one end of the bent tube section is connected to the other end of the straight tube section, the other end of the bent tube section defines the outlet, and the outlet is disposed downward.

In some embodiments, the liquid inlet is formed at an upper portion of the storage container, the straight pipe section is located outside the storage space, and the bent pipe section is provided at the liquid inlet and communicates with the storage space.

In some embodiments, the liquid inlet is formed in a lower portion of the storage container, the elbow section is located within the storage space, the straight tube section is disposed through the liquid inlet and a portion of the straight tube section protrudes out of the storage space.

In some embodiments, the liquid inlet is formed at a bottom center position of the storage container.

In some embodiments, the suction tube is fixedly attached to the storage container; or the suction pipe is movably arranged on the storage container through an adjusting component, and the adjusting component is used for driving the suction pipe to move up and down relative to the storage container.

In some embodiments, the adjustment assembly is disposed between the elbow section and the storage container when the suction tube is movably mounted to the storage container by the adjustment assembly.

In some embodiments, the wall of the storage space is provided with a high temperature resistant member.

In some embodiments, the peripheral wall of the suction tube is provided with a thermal insulation member.

In some embodiments, the suction assembly comprises: a connecting pipe having one end connected to the storage container and communicating with the vent; a suction structure connected to the other end of the length of the connection pipe to reduce the pressure of the storage space.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

FIG. 1 is a schematic view of a liquid extraction device according to one embodiment of the present invention;

fig. 2 is a schematic view of a liquid extraction device according to another embodiment of the present invention;

fig. 3 is a schematic view of a liquid extraction device according to yet another embodiment of the present invention;

fig. 4 is a schematic view of a liquid suction device according to yet another embodiment of the present invention.

Reference numerals:

a liquid suction device 100,

A storage container 1, a storage space 10, a liquid inlet 10a, a vent 10b,

A high temperature resistant piece 11, a bottom plate 12,

A suction pipe 2, a suction channel 20, an inlet 20a, an outlet 20b,

A bend section 21, a straight section 22,

A suction component 3, a connecting pipe 31, a suction structure 32,

An adjusting component 4,

And a heat insulating member 5.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.

The following disclosure provides many different embodiments, or examples, for implementing different features of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present disclosure provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize the applicability of other processes and/or the use of other materials.

Next, a liquid suction device 100 according to an embodiment of the present invention is described with reference to the drawings. The liquid suction device 100 is used for sucking liquid in a crystal growth furnace, and the crystal growth furnace can be a sapphire growth furnace, a monocrystalline silicon growth furnace, a silicon carbide crystal growth furnace and the like.

As shown in fig. 1 to 4, the liquid suction apparatus 100 includes a storage container 1, a suction tube 2 and a suction assembly 3, the storage container 1 defines a storage space 10 therein, and the storage container 1 is formed with a liquid inlet 10a and a vent 10b, the liquid inlet 10a and the vent 10b respectively communicating with the storage space 10. The storage space 10 can be used for storing the liquid sucked from the furnace body by the liquid suction device 100.

The suction duct 2 is provided on the storage container 1, and the suction duct 2 defines therein a suction passage 20, the suction passage 20 communicating with the liquid inlet 10a, so that the suction passage 20 communicates with the storage space 10 through the liquid inlet 10 a. Wherein the suction pipe 2 is suitable for extending into the furnace body of the crystal growing furnace so as to facilitate the liquid suction device 100 to suck the liquid in the furnace body.

The suction assembly 3 communicates with the ventilation holes 10b to reduce the pressure in the storage space 10, and the suction assembly 3 operates to suck the gas in the storage space 10 out so that the pressure in the storage space 10 is less than the pressure in the furnace body, and at this time, if the suction pipe 2 is immersed below the liquid level in the furnace body, the liquid in the furnace body can flow into the storage space 10 through the suction pipe 2 under the effect of the pressure difference.

Therefore, when crystals are produced in the crystal growth furnace, the liquid polluted in the crystal growth furnace can be timely replaced through the liquid suction device 100, the liquid polluted in the crystal growth furnace can be conveniently replaced, continuous production is guaranteed, the production cost is favorably reduced, production stop caused by high pollutant content is avoided, and the production cost is high; moreover, the liquid suction device 100 has a simple structure, good applicability and flexibility in use, and can eliminate the need for structural modification of the crystal growth furnace.

From this, according to the utility model discloses liquid suction means 100 is through injecing storage space 10 in setting up storage container 2, and suction tube 2 is suitable for stretching into the furnace body, and suction subassembly 3 is used for reducing the pressure in storage space 10 for liquid suction means 100 can in time remove the liquid of long brilliant stove internal contamination, guarantees that production lasts and goes on, thereby reduction in production cost, and liquid suction means 100 simple structure has good suitability moreover.

In some embodiments, as shown in fig. 1-4, the draft tube 2 has an inlet 20a and an outlet 20b, and the draft tube 2 includes a straight tube section 22 and an elbow section 21, the straight tube section 22 and the elbow section 21 being sequentially arranged in the axial direction of the draft tube 2, one end of the straight tube section 22 defining the inlet 20a, one end of the elbow section 21 being connected to the other end of the straight tube section 22, and the other end of the elbow section 21 defining the outlet 20b, the draft tube 2 is simple in structure.

The one end of the straight pipe section 22 is suitable for extending into the furnace body, and the straight pipe section 22 occupies a small space, so that the suction pipe 2 can conveniently and rapidly extend into the furnace body, and meanwhile, the suction pipe 2 is suitable for furnace bodies with different sizes, and the applicability of the liquid suction device 100 can be further improved; the outlet 20b of the draft tube 2 is arranged downwards, then along the flowing direction of the liquid, at least part of the elbow section 21 is constructed to extend from the top to the bottom to the other end of the elbow section 21, that is, the liquid at the outlet 20b of the draft tube 2 flows downwards into the storage space 10, so that the liquid at the outlet 20b of the draft tube 2 flows along the gravity direction, thereby being convenient for ensuring that the high-temperature liquid maintains liquid state and stably flows back into the storage space 10, ensuring the smooth operation of the suction process, avoiding the phenomenon that the liquid is easy to solidify and solidify due to the fact that the gravity needs to be overcome when the high-temperature liquid flows upwards at the outlet 20b, further avoiding the solid particles from blocking the draft tube 2, being convenient for ensuring that the liquid in the furnace body completely flows into the storage space 10, and avoiding the liquid residue.

For example, in the example of fig. 1-4, the bend segment 21 extends in an arc to form an open annular structure to facilitate machining of the bend segment 21.

In some embodiments, as shown in fig. 2 and 4, a liquid inlet 10a is formed at an upper portion of the storage container 1, a straight pipe section 22 is located outside the storage space 10, a bent pipe section 21 is located at an upper side of the straight pipe section 22, the bent pipe section 21 is provided at the liquid inlet 10a, and the bent pipe section 21 communicates with the storage space 10. Wherein "the upper portion of the storage container 1" may refer to a portion above the middle portion of the storage container 1.

"the pipe bend 21 is provided at the liquid inlet 10 a", which may include the following cases: 1. one end of the length of the elbow section 21 is connected to the liquid inlet 10a, while the elbow section 21 does not extend into the storage space 10 (as shown in fig. 2); 2. one end of the length of the elbow section 21 extends into the storage space 10 through the liquid inlet 10 a. In other words, at least part of the pipe bend 21 is located outside the storage space 10. From this, the equipment is simple between suction tube 2 and the storage container 1, and need not to process more opening on the storage container 1, is convenient for simplify storage container 1's manufacturing procedure, and liquid inlet 10 a's the position that sets up can better match the structure of suction tube 2 simultaneously, makes things convenient for the equipment of suction tube 2 and storage container 1, can effectively utilize storage space 10 moreover for storage space 10 can hold more liquid.

In addition, above-mentioned suction tube 2's setting, be convenient for promote liquid suction means 100's use flexibility, make liquid suction means 100 when using, storage container 1 can be located outside the furnace body, suction tube 2 stretches into in the furnace body, realize the removal of liquid in the furnace body, perhaps storage container 1 and suction tube 2 can all be located the furnace body, can realize the removal of liquid in the furnace body equally, be convenient for realize liquid suction means 100's heat balance this moment, reduce the difference in temperature between liquid suction means 100 and the furnace body liquid, be favorable to reducing the temperature drop of liquid at the flow in-process, avoid liquid easy solidification, be favorable to avoiding liquid suction means 100's temperature shock simultaneously and easily influence liquid suction means 100's material attribute, thereby effectively guaranteed liquid suction means 100's use reliability.

It can be understood that the extending direction of the straight pipe section 22 can be specifically set according to the position of the liquid suction device 100 relative to the furnace body, etc., only by ensuring that the straight pipe section 22 can extend into the furnace body.

In some embodiments, as shown in fig. 1 and 3, the liquid inlet 10a is formed at a lower portion of the storage container 1, the elbow section 21 is located inside the storage space 10, the straight pipe section 22 is located at a lower side of the elbow section 21, the straight pipe section 22 is penetrated through the liquid inlet 10a, and a portion of the straight pipe section 22 protrudes out of the storage space 10. Wherein "the lower portion of the storage container 1" may refer to a portion below the middle portion of the storage container 1.

Therefore, the assembly between the suction pipe 2 and the storage container 1 is simple, the storage container 1 is not required to be provided with a plurality of openings, the processing procedure of the storage container 1 is convenient to simplify, and meanwhile, the arrangement position of the liquid inlet 10a can be matched with the structure of the suction pipe 2, so that the assembly of the suction pipe 2 and the storage container 1 is convenient.

In addition, the arrangement of the suction pipe 2 is also beneficial to improving the use flexibility of the liquid suction device 100, so that when the liquid suction device 100 is used, the storage container 1 can be positioned outside the furnace body, the suction pipe 2 extends into the furnace body, or the storage container 1 and the suction pipe 2 can be both positioned in the furnace body.

Of course, the arrangement of the suction pipe 2 is not limited thereto, for example, the liquid inlet 10a is formed at the top of the storage container 1, the top of the storage container 1 is further formed with a first opening which is spaced apart from the liquid inlet 10a, the bottom of the storage container 1 is formed with a second opening, the suction pipe 2 is penetrated through the first opening and the second opening, and the straight pipe section 22 protrudes out of the storage space 10 through the second opening, the elbow section 21 is provided at the liquid inlet 10a, and the elbow section 21 is communicated with the storage space 10.

Alternatively, as shown in fig. 1 and 2, the straight pipe section 22 and the bent pipe section 21 are one each. Of course, the present application is not so limited; in some embodiments, as shown in fig. 3 and 4, the suction tube 2 may comprise a straight tube section 22 and two bent tube sections 21, a partition is provided in the storage container 1 to partition the storage space 10 into a first subspace 10c and a second subspace 10d, the liquid inlet 10a is formed at the bottom center of the storage container 1 and the straight tube section 22 is inserted into the liquid inlet 10a (as shown in fig. 3), or the liquid inlet 10a is formed at the top of the storage container 1 and the straight tube section 22 is located outside the storage space 10 (as shown in fig. 4), wherein a portion of the straight tube section 22 extends out of the storage space 10, both bent tube sections 22 are located at the upper side of the straight tube section 21, and one of the two bent tube sections 21 extends into the first subspace 10c and the other extends into the second subspace 10 d. Therefore, the structure can ensure that the suction pipe 2 is positioned at the bottom center position of the storage container 1, ensure that the straight pipe section 22 sucks the solution at the center position of the liquid level, and ensure that the solution suction is more uniform.

The first subspace 10c and the second subspace 10d can be communicated; for example, when the first subspace 10c and the second subspace 10d communicate with each other, as shown in fig. 3, the number of the vent holes 10b may be one, and the communication position of the first subspace 10c and the second subspace 10d may be located at the upper part, the lower part, or the middle part of the first subspace 10 c; when the first subspace 10c and the second subspace 10d are independently disposed, the first subspace 10c and the second subspace 10d are not communicated with each other, the number of the air vents 10b is two, and the two air vents 10b correspond to the first subspace 10c and the second subspace 10d, respectively, so that the pumping assembly 3 can reduce the pressure of the first subspace 10c and the second subspace 10 d.

The first subspace 10c and the second subspace 10d may also be independently disposed; as shown in fig. 4, the storage container 1 includes two first subspaces 10c and second subspaces 10d independently arranged at intervals and a bottom plate 12 connecting the two spaces at the bottom, the straight tube section 22 passes through and is arranged on the bottom plate 12 between the first subspaces 10c and the second subspaces 10d, the structure not only can make the bottom center position of the suction tube 2 in the storage container 1, ensure that the straight tube section 22 sucks the solution at the center position of the liquid level, so that the solution sucking is more uniform, but also no through hole for the suction tube 2 to pass through is needed on the first subspaces 10c and the second subspaces 10d, so that the two subspaces are better sealed, and the solution sucking effect is better.

In some embodiments, a pressure differential between the crystal growth chamber 101a and the storage space 10 is required, and a height differential is required between the highest position of the suction tube 2 (e.g., the highest position of the elbow 21 in fig. 1-4) and the liquid level in the crucible 1011. In a specific embodiment, the pressure difference between the crystal growth chamber 101a and the storage space 10 is 300torr to 500torr (inclusive), and the height difference between the highest position of the suction pipe 2 (e.g., the highest position of the elbow 21 in fig. 1 and 2) and the liquid level in the crucible 1011 may be 0.92 m. Through the setting of pressure differential and difference in height, can guarantee the suction process of solution also liquid, prevent to absorb in-process liquid solidification, lead to the suction tube to be blocked up to the influence absorbs the effect.

The following description will be made by taking a single crystal silicon growth furnace as an example of the growth furnace. The technical solution of the crystal growth furnace as other types of equipment will be obvious to those skilled in the art after reading the following.

For example, when a single crystal silicon growth furnace produces an ingot using the continuous pulling method, the content of contaminants in a crucible of the single crystal silicon growth furnace gradually increases as the production proceeds, and when the contaminants reach a critical content, the continued increase in contaminants may cause the production to stop, resulting in a high production cost. Wherein the temperature of the liquid in the crucible is about 1430 ℃ and the solidification temperature of the liquid is about 1410 ℃, even if the liquid in the crucible is removed by using the liquid suction device 100 in the present application, in order to ensure that the liquid is always kept in a liquid state in the process of flowing from the crucible to the storage space 10 through the suction pipe 2, the temperature of the liquid in the process is required to be reduced by no more than 20 ℃, so as to avoid the blockage of the suction pipe 2 caused by the solidification of the liquid. Based on the method, the Bernoulli equation can be utilized to design proper pressure difference, liquid flow time and the like; because the liquid has a certain flow velocity under a certain pressure difference between the furnace body and the storage space 10, when the flow velocity of the liquid is higher, the time of the flowing process of the liquid is shorter, and the temperature drop of the liquid in the process is not more than 20 ℃ in combination with the temperature drop rate of the liquid, so that the liquid in the crucible is smoothly removed; for example, the time of the liquid flowing process can be about 0.5s, so that the liquid is always kept in a liquid state in the flowing process, and based on the structural size of the monocrystalline silicon growth furnace, the length of the suction pipe 2 can be about 1m, and the flowing speed of the liquid can reach 2 m/s.

In some embodiments, as shown in fig. 1, 3 and 4, the straight pipe section 22 is arranged coaxially with the storage container 1, i.e. the central axis of the straight pipe section 22 coincides with the central axis of the storage container 1, so as to ensure that the straight pipe section 22 is opposite to the center of the crucible 1011, e.g. the straight pipe section 22 can be opposite to the lowest position of the liquid containing space in the crucible 1011, which facilitates the liquid suction device 100 to suck the liquid more uniformly. For example, as shown in fig. 1 and 3, the liquid inlet 10a is formed at the bottom center position of the storage container 1, and the straight pipe section 22 may be penetrated at the bottom center position of the storage container 1, so that the straight pipe section 22 is coaxially arranged with the storage container 1; for another example, as shown in fig. 4, the liquid inlet 10a is formed at the top of the storage container 1, and the straight pipe section 22 may be inserted through the bottom of the storage container 1 at a central position thereof such that the straight pipe section 22 is coaxially disposed with the storage container 1.

Of course, the straight tube section 22 is disposed non-coaxially with the storage container 1, that is, the central axis of the straight tube section 22 is not coincident with the central axis of the storage container 1, for example, the central axis of the straight tube section 22 may be parallel to the central axis of the storage container 1, as shown in fig. 2, so as to enable the liquid suction device 100 to better meet the actual differentiation requirement.

In some embodiments, the suction tube 2 is fixedly arranged on the storage container 1, so that the suction tube 2 is always still relative to the storage container 1, which is beneficial to simplifying the structure of the liquid suction device 100 and reducing the cost, and meanwhile, in the process that liquid flows into the storage space 10 through the suction tube 2, the situation that the suction tube 2 is impacted by the liquid and is easy to be away from the liquid level due to large pressure difference between the storage space 10 and the furnace body can be avoided, so that the stable operation of the liquid suction device 100 is favorably ensured; at this time, the liquid inlet 10a may be formed at the top of the storage container 1, or may be formed at the bottom of the storage container 1.

For example, a liquid inlet 10a is formed at an upper portion of the storage container 1, a straight pipe section 22 is located outside the storage space 10, a bent pipe section 21 is fixedly provided at the liquid inlet 10a, and the bent pipe section 21 is communicated with the storage space 10; for another example, the liquid inlet 10a is formed at the lower portion of the storage container 1, the elbow section 21 is located in the storage space 10, the straight pipe section 22 is inserted through the liquid inlet 10a, and the straight pipe section 22 is fixedly disposed at the liquid inlet 10a, such that a portion of the straight pipe section 22 extends out of the storage space 10.

It can be understood that when the suction tube 2 is fixedly arranged on the storage container 1, the liquid suction device 100 can be correspondingly designed according to the size of the furnace body if the storage container 1 is arranged in the furnace body and the storage container 1 cannot move relative to the furnace body during the use process, so that the liquid suction device 100 can suck the liquid in the furnace body; if the storage container 1 is placed outside the furnace body, it is possible to ensure that the liquid suction means 100 can suck the liquid inside the furnace body by moving the storage container 1. In some embodiments of the present application, in order to improve the applicability of the liquid suction device 100, the liquid suction device 100 may be adapted to furnace bodies with different sizes, when the liquid suction device 100 is used, if the storage container 1 is disposed in the furnace body, the liquid suction device 100 is adapted to be connected to a lifting mechanism on the furnace body, so that the lifting mechanism drives the liquid suction device 100 to move, so that the storage container 1 may move up and down in the furnace body to adjust the relative height between the suction pipe 2 and the liquid level in the furnace body, and meanwhile, it may be avoided that the suction pipe 2 is longer or the storage container 1 is larger, thereby facilitating to save the occupied space of the liquid suction device 100.

For example, when the furnace body is a single crystal silicon growth furnace, the lifting mechanism of the single crystal silicon growth furnace may be connected to the liquid suction device 100 by a lifting rope, thereby lifting the liquid suction device 100. Wherein the pulling mechanism is connectable to the seed crystal to cause the seed crystal to be slowly extracted from the silicon solution at a predetermined rate while the ingot is repeatedly grown by the continuous pulling method.

Of course, the present invention is not limited thereto; in other embodiments, as shown in fig. 1 and 3, the suction pipe 2 is movably mounted on the storage container 1 through an adjusting component 4, and the adjusting component 4 is used for driving the suction pipe 2 to move up and down relative to the storage container 1 so as to adjust the relative height between the suction pipe 2 and the furnace body, so as to ensure that the liquid suction device 100 can suck all liquid in the furnace body, avoid liquid residue, and simultaneously enable the liquid suction device 100 to be suitable for furnace bodies with different sizes. In addition, because the adjusting component 4 is connected between the suction pipe 2 and the storage container 1, the adjusting component 4 can improve the shock resistance of the suction pipe 2, and avoid that the liquid level is easily kept away from due to the fact that the suction pipe 2 is impacted by liquid due to the large pressure difference between the storage space 10 and the furnace body.

For example, the liquid inlet 10a is formed at the upper portion of the storage container 1, the straight pipe section 22 is located outside the storage space 10, the elbow section 21 is movably disposed at the liquid inlet 10a to be movable up and down, and the elbow section 21 is communicated with the storage space 10, in which case one end of the length of the elbow section 21 is extended into the storage space 10 through the liquid inlet 10a, and the adjusting unit 4 is disposed between the suction pipe 2 and the storage container 1. Optionally, the adjusting assembly 4 is arranged between the elbow section 21 and the storage container 1, the adjusting assembly 4 drives the elbow section 21 to move up and down to realize the lifting of the suction pipe 2 relative to the storage container 1, and the elbow section 21 is provided with a bent part, so that the connection between the adjusting assembly 4 and the suction pipe 2 is facilitated, and the interference between the setting of the adjusting assembly 4 and the liquid flow of the elbow section 21 is not caused.

For another example, the liquid inlet 10a is formed at the lower portion of the storage container 1, the elbow section 21 is located in the storage space 10, the straight pipe section 22 is vertically movably inserted through the liquid inlet 10a, a portion of the straight pipe section 22 extends out of the storage space 10, and the adjustment assembly 4 is disposed between the suction pipe 2 and the storage container 1. Optionally, adjusting part 4 is established between elbow section 21 and storage container 1, and adjusting part 4 reciprocates through drive elbow section 21 and realizes the lift of suction tube 2 relative storage container 1, because elbow section 21 has the kink, has made things convenient for being connected between adjusting part 4 and the suction tube 2, and is convenient for guarantee that adjusting part 4's setting can not influence liquid and flow out from elbow section 21.

In some embodiments of the present application, when the suction tube 2 is movably mounted to the storage container 1 by the adjustment assembly 4, in order to further enhance the applicability of the liquid-aspirating device 100, the operation of the liquid-aspirating device 100 is simplified, while allowing a certain flexibility in the operation of the liquid-aspirating device 100; when the liquid suction device 100 is used, a lifting mechanism can be arranged on the furnace body, and the liquid suction device 100 is suitable for being connected with the lifting mechanism, so that the lifting mechanism drives the liquid suction device 100 to move up and down, and the storage container 1 can move up and down in the furnace body to adjust the relative height between the suction pipe 2 and the liquid level in the furnace body.

Optionally, in the example of fig. 1, the suction pipe 2 is movably mounted to the storage container 1 through the adjusting assembly 4, and a graphite plate is disposed between the adjusting assembly 4 and the suction pipe 2 to further improve the shock resistance of the suction pipe 2, so as to avoid that the suction pipe 2 is easily away from the liquid level due to the liquid impact caused by the large pressure difference between the storage space 10 and the furnace body. Wherein, the outer wall of the suction pipe 2 can be provided with a shell, and the shell and the graphite plate are fixed by a threaded fastener such as a screw, so that the suction pipe 2 and the graphite plate are fixedly connected; the shell can be selected as an alumina piece.

Optionally, the adjusting assembly 4 comprises a lead screw and nut mechanism and a driver, the lead screw and nut mechanism comprises a lead screw and a nut, the lead screw and the nut are in threaded fit, one of the lead screw and the nut is fixedly connected with the elbow section 21, the other of the lead screw and the nut is connected with the driver to be driven by the driver to rotate, and the driver is fixedly arranged on the storage container 1. For example, the driver is connected with the lead screw to drive the lead screw to rotate, and the nut is fixedly connected with the elbow section 21, so that the nut can drive the suction pipe 2 to move along the length direction of the lead screw, and the lifting of the suction pipe 2 relative to the storage container 1 is realized; wherein the drive may be a motor. Of course, the structure of the adjusting assembly 4 is not limited to this, and it is only necessary to ensure that the adjusting assembly 4 can drive the suction pipe 2 to move up and down relative to the storage container 1; for example, the adjustment assembly may include a rack and pinion mechanism.

In some embodiments, as shown in fig. 1 to 4, a wall surface of the storage space 10 is provided with a high temperature resistant member 11, for example, the bottom wall and the peripheral wall of the storage space 10 are both provided with the high temperature resistant members 11, so that the storage container 1 has good high temperature resistance, and after the high temperature liquid in the furnace body flows into the storage space 10, the storage container 1 can be ensured to stably contain the high temperature liquid, and the use reliability of the storage container 1 is ensured; meanwhile, due to the arrangement of the high-temperature resistant part 11, the storage container 1 is convenient to realize good heat insulation performance, and liquid flowing into the storage space 10 is prevented from being cured quickly.

Alternatively, the material of the suction pipe 2 may be specifically set according to the actual application; for example, when the liquid suction device 100 is applied to a monocrystalline silicon growth furnace, the suction pipe 2 can be made of quartz material, so that impurities are prevented from being introduced into the monocrystalline silicon growth furnace through the suction pipe 2, the cleanness of the monocrystalline silicon growth furnace is ensured, and the suction pipe 2 can be kept in a stable state under the condition that the temperature in the monocrystalline silicon growth furnace is higher, so that the use reliability of the suction pipe 2 is ensured.

In some embodiments, as shown in fig. 1 to 4, the peripheral wall of the suction pipe 2 is provided with the thermal insulation member 5, and the thermal insulation member 5 can wrap at least part of the peripheral wall of the suction pipe 2, which is beneficial to reducing the temperature drop of the high-temperature liquid in the flowing process, so as to further ensure that the temperature drop of the liquid in the furnace body flowing through the suction pipe 2 is smaller than the temperature difference from the liquid state to the solid state of the liquid, so that the liquid can be always kept in the liquid state in the whole process of flowing from the furnace body to the storage space 10, the liquid can be rapidly flowed into the storage space 10, and the liquid is prevented from being solidified in the flowing process, thereby effectively ensuring smooth and rapid operation of the liquid suction device 100.

It can be understood that the high-temperature liquid is always kept in a liquid state in the flowing process, so that the liquid can rapidly flow into the storage space 10, and similarly, the flowing speed of the high-temperature liquid is high, so that the flowing time of the liquid in the suction pipe 2 can be reduced, the temperature drop of the liquid in the flowing process can be reduced, and the high-temperature liquid is always kept in the liquid state.

Alternatively, the heat insulating member 5 may be a member of high temperature resistant material, for example, the heat insulating member 5 may be an alumina member.

In some embodiments, as shown in fig. 1 to 4, the suction assembly 3 includes a connection pipe 31 and a suction structure 32, both ends of the length of the connection pipe 31 are connected to the suction structure 32 and the storage container 1, respectively, and one end of the connection pipe 31 connected to the storage container 1 is communicated with the vent 10b, the suction structure 32 operates, and air in the storage space 10 may be discharged through the connection pipe 31, so that the pressure in the storage space 1 is reduced. Wherein the suction structure 32 may be selected as a vacuum pump, but is not limited thereto. Wherein, the vent 10b can be formed at the upper part of the storage container 1 to prevent the liquid in the storage space 10 from flowing to the vent 10b to affect the normal operation of the pumping assembly 3. Alternatively, the suction structure 32 may be provided on the storage container 1, or the suction structure 32 may be provided on the furnace body of the crystal growth furnace; but is not limited thereto.

When the liquid suction device 100 in this application is used, the storage container 1 can be located outside the furnace body, the suction tube 2 stretches into the furnace body, and then the liquid suction device 100 use can be: stretch into the furnace body with suction tube 2, then with below the liquid level of suction tube 2's one end submergence in the furnace body, suction module 3 operation to reduce the pressure in storage space 10, make the pressure in storage space 10 be less than the pressure in the furnace body, then the liquid in the furnace body passes through in suction tube 2 inflow storage space 10, in order to realize removing of the interior contaminated liquid of furnace body, be convenient for guarantee that production lasts and go on.

Alternatively, when the liquid suction device 100 is used, the storage container 1 and the suction tube 2 may be both located in the furnace body, and then the liquid suction device 100 may be used as follows: place storage container 1 in the furnace body to make suction tube 2 be close to the liquid level in the furnace body, then with below the liquid level in the furnace body 2's one end submergence suction tube 2, suction assembly 3 operates to reduce the pressure in storage space 10, make the pressure in storage space 10 be less than the pressure in the furnace body, then the liquid in the furnace body flows into in storage space 10 through suction tube 2, in order to realize removing of the interior contaminated liquid of furnace body, be convenient for guarantee that production lasts and go on.

In addition, after one end of the suction pipe 2 is immersed below the liquid level in the furnace body, the pressure in the furnace body can be increased, so that sufficient pressure difference between the storage space 10 and the furnace body is ensured, the flow speed of liquid is favorably improved, and the operation efficiency is improved. The term "increasing the pressure in the furnace body" is understood to mean that the pressure in the furnace body is gradually increased by the pressure increasing device, for example, gas can be introduced into the furnace body to increase the pressure in the furnace body.

It will be appreciated that if the suction pipe 2 is movable up and down relative to the vessel, the suction pipe 2 can be moved down to a predetermined position, for example, one end of the suction pipe 2 can correspond to the lowest position of the liquid in the vessel, so that the whole liquid in the vessel flows into the storage space 10 through the suction pipe 2, ensuring that the liquid is removed by 100% and preventing the liquid from remaining to contaminate the newly replaced material.

It should be noted that "the draft tube 2 is movable up and down with respect to the furnace body" may include the following cases: 1. when in use, the liquid suction device 100 is connected with a lifting mechanism on a furnace body to realize the lifting of the liquid suction device 100, and the suction pipe 2 is fixedly arranged on the storage container 1; 2. the suction pipe 2 is movably arranged on the storage container 1 through an adjusting component 4, and the adjusting component 4 is used for driving the suction pipe 2 to lift relative to the storage container 1; 3. the suction pipe 2 is movably arranged on the storage container 1 through an adjusting component 4, the adjusting component 4 is used for driving the suction pipe 2 to lift relative to the storage container 1, and when the liquid suction device 100 is used, the storage container 1 is connected with the lifting mechanism.

In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "top", "bottom", "inner", "outer", "axial", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and simplification of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. A liquid suction device (100), wherein the liquid suction device (100) is used for sucking liquid in a crystal growth furnace, the crystal growth furnace comprises a furnace body, and the liquid suction device (100) comprises:

a storage container (1), wherein a storage space (10) is defined in the storage container (1), a liquid inlet (10a) and a vent (10b) are formed on the storage container (1), and the liquid inlet (10a) and the vent (10b) are respectively communicated with the storage space (10);

a suction duct (2), said suction duct (2) being provided on said storage container (1) and defining a suction channel (20) inside said suction duct (2), said suction channel (20) being in communication with said liquid inlet (10a), said suction duct (2) being adapted to protrude inside said oven body;

a suction assembly (3), the suction assembly (3) being in communication with the vent (10b) to reduce pressure within the storage space (10).

2. The liquid suction device (100) according to claim 1, wherein the suction tube (2) has an inlet (20a) and an outlet (20b) and comprises a straight tube section (22) and a bent tube section (21), the straight tube section (22) and the bent tube section (21) are sequentially arranged along the axial direction of the suction tube (2), one end of the straight tube section (22) defines the inlet (20a) and is suitable for extending into the furnace body, one end of the bent tube section (21) is connected to the other end of the straight tube section (22), the other end of the bent tube section (21) defines the outlet (20b), and the outlet (20b) is arranged downwards.

3. The liquid suction device (100) according to claim 2, wherein the liquid inlet (10a) is formed at an upper portion of the storage container (1), the straight pipe section (22) is located outside the storage space (10), and the bent pipe section (21) is provided at the liquid inlet (10a) and communicates with the storage space (10).

4. The liquid suction device (100) according to claim 2, wherein the liquid inlet (10a) is formed at a lower portion of the storage container (1), the elbow section (21) is located in the storage space (10), the straight pipe section (22) is penetrated through the liquid inlet (10a) and a part of the straight pipe section (22) protrudes out of the storage space (10).

5. The liquid suction device (100) according to claim 4, wherein the liquid inlet (10a) is formed at a bottom center position of the storage container (1).

6. Liquid suction device (100) according to any of the claims 2 to 5, wherein the suction tube (2) is fixedly arranged to the storage container (1); alternatively, the first and second electrodes may be,

the suction pipe (2) is movably arranged on the storage container (1) through an adjusting component (4), and the adjusting component (4) is used for driving the suction pipe (2) to move up and down relative to the storage container (1).

7. Liquid suction device (100) according to claim 6, wherein the adjustment assembly (4) is provided between the elbow section (21) and the storage container (1) when the suction tube (2) is movably mounted to the storage container (1) by the adjustment assembly (4).

8. The liquid suction device (100) according to claim 1, wherein the wall of the storage space (10) is provided with a high temperature resistant member (11).

9. The liquid suction device (100) according to claim 1, wherein the peripheral wall of the suction tube (2) is provided with a thermal insulation member (5).

10. The liquid suction device (100) according to claim 1, wherein the suction assembly (3) comprises:

a connection pipe (31), one end of the length of the connection pipe (31) being connected to the storage container (1) and communicating with the vent (10 b);

a suction structure (32), the suction structure (32) being connected to the other end of the length of the connection pipe (31) to reduce the pressure of the storage space (10).

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