CN214004423U - Quartz glass production and processing is with annealing stove - Google Patents
Quartz glass production and processing is with annealing stove Download PDFInfo
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- CN214004423U CN214004423U CN202022355971.1U CN202022355971U CN214004423U CN 214004423 U CN214004423 U CN 214004423U CN 202022355971 U CN202022355971 U CN 202022355971U CN 214004423 U CN214004423 U CN 214004423U
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Abstract
The utility model discloses a quartz glass production and processing is with annealing stove, including annealing stove body, annealing stove body includes a box, and the top of box sets up the case lid, and one side that is located the box top of case lid is provided with control panel, and the inside of box is provided with interior furnace body, and the inside of interior furnace body is provided with a plurality of plate electrode that generates heat. The utility model relates to a quartz glass production and processing is with annealing stove, a plurality of electrode plates that generate heat through being equipped with in the internal furnace body, make it form a plurality of standing grooves that can supply to place quartz glass, make it once to carry out annealing treatment to a plurality of quartz glass, the back that finishes of annealing, the inside of the moving groove that furnace body and a plurality of electrode plate both sides were seted up is arranged in through two moving plates that are equipped with, make its quartz glass in the internal furnace body carry out the rising movement and take out it, this kind of quartz glass production and processing is with annealing stove, moreover, the steam generator is simple in structure, low in manufacturing cost, use in being applicable to quartz glass annealing treatment work.
Description
Technical Field
The utility model relates to an annealing furnace technical field specifically is an annealing furnace is used in quartz glass production and processing.
Background
An annealing furnace is a process used in semiconductor device manufacturing that includes heating a plurality of semiconductor wafers to affect their electrical properties. The heat treatment is designed for different effects. The wafer may be heated to activate the dopants, convert the thin film into a thin film or convert the thin film into a wafer substrate interface, densify the deposited thin film, change the state of the grown thin film, repair implanted damage, move dopants or transfer dopants from one thin film to another or from the thin film into the wafer substrate. The annealing furnace may be integrated into other furnace processing steps, such as oxidation, or may be self-processing. The annealing furnace is completed by an apparatus specifically designed for heating semiconductor wafers. The annealing furnace is an energy-saving periodic operation furnace, has a super energy-saving structure, adopts a fiber structure and saves electricity by 60 percent.
At present, the quartz glass can generate the phenomenon of explosion in the use process, and then the service life of the quartz glass is reduced, so that the quartz glass is required to be annealed to prolong the service life of the quartz glass. Therefore, we improve the annealing furnace for quartz glass production and processing.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a following technical scheme:
the utility model relates to a quartz glass production and processing is with annealing stove, including annealing stove body, annealing stove body includes a box, the top of box sets up the case lid, the one side that is located the box top of case lid is provided with control panel, the inside of box is provided with interior furnace body, the inside of interior furnace body is provided with a plurality of plate electrode that generates heat, two of interior furnace body all are provided with the inverted U-shaped board, two the inside of inverted U-shaped board all is provided with the threaded rod, two the outside of threaded rod all is provided with the slide, two be provided with two movable plates between the slide, the bottom that the bottom of interior furnace body is located the inside bottom of box is provided with the baffle, the bottom of baffle is provided with a plurality of fixed plate, a plurality of one side of fixed plate is provided with the thermantidote.
As an optimal technical scheme of the utility model, one side of case lid is articulated through one side activity on a plurality of hinge and box top, being provided with the handle of case lid.
As a preferred technical scheme of the utility model, control panel fixed mounting is in one side on box top, a plurality of generate heat the electrode board all with control panel electric connection.
As a preferred technical scheme of the utility model, the outside of interior furnace body and the inside fixed connection of box, a plurality of the electrode plate both sides that generate heat all with the both sides fixed connection of interior furnace body inner wall, the shifting chute has all been seted up to interior furnace body and a plurality of electrode plate both sides that generate heat.
As a preferred technical scheme of the utility model, two the both sides of furnace body are located the inside both sides fixed connection of box, two including the connecting plate all through one side of the falling U-shaped plate the both ends of threaded rod all rotate with the inside top and the bottom of two falling U-shaped plates and are connected, and the equal fixed mounting of electricity of two falling U-shaped plates has driving motor, two driving motor's output shaft all passes the bottom of two falling U-shaped plates and the bottom fixed connection of two threaded rods, two the outside at two threaded rods is all established with the cover to the slide, two the both ends of movable plate all with one side fixed connection of two slides, two the inside of the shifting chute that furnace body and a plurality of generate heat the electrode plate both sides and set up is arranged in to the movable plate homogeneous phase, driving motor and control panel electric connection.
As a preferred technical scheme of the utility model, a plurality of bleeder vent has been seted up to the baffle, the top of baffle and the bottom fixed connection of interior furnace body, one side of thermantidote all with a plurality of fixed plate bottom one side fixed connection, a plurality of the top of fixed plate all with the bottom fixed connection of baffle.
As a preferred technical scheme of the utility model, four corners of box bottom all are provided with the universal wheel, four all be provided with the wheel on the universal wheel and stop.
The utility model has the advantages that: this kind of quartz glass production and processing is with annealing stove, through the internal a plurality of electrode plates that generate heat that are equipped with of internal furnace, make it form a plurality of standing grooves that can supply to place quartz glass, make it can once carry out annealing treatment to a plurality of quartz glass, after the annealing finishes, through two moving plates that are equipped with arrange in the inside of the moving groove that internal furnace and a plurality of electrode plates both sides of generating heat seted up, make its two moving plates drive the threaded rod through driving motor and carry out the up motion, make it carry out the up motion to the quartz glass in the internal furnace and take out it, thereby improve the work efficiency to quartz glass annealing treatment, this kind of quartz glass production and processing is with annealing stove, simple structure, low in manufacturing cost, use in being applicable to quartz glass annealing treatment work.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic view of a structure of an annealing furnace for producing and processing quartz glass according to the present invention;
FIG. 2 is a schematic view of the structure of the inner furnace body of the annealing furnace for producing and processing quartz glass of the present invention;
FIG. 3 is a schematic view of the cooling fan of the annealing furnace for quartz glass production and processing of the present invention.
In the figure: 1. an annealing furnace body; 2. a box body; 3. a box cover; 4. a control panel; 5. an inner furnace body; 6. a heating electrode plate; 7. an inverted U-shaped plate; 8. a threaded rod; 9. a slide plate; 10. moving the plate; 11. a partition plate; 12. a fixing plate; 13. a cooling fan; 14. a handle; 15. a moving groove; 16. a drive motor; 17. a universal wheel.
Detailed Description
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are presented herein only to illustrate and explain the present invention, and not to limit the present invention.
Example (b): as shown in fig. 1-3, the utility model relates to an annealing furnace for quartz glass production and processing, including annealing furnace body 1, annealing furnace body 1 includes a box 2, the top of box 2 sets up case lid 3, the one side that is located the 2 tops of box of case lid 3 is provided with control panel 4, the inside of box 2 is provided with interior furnace body 5, the inside of interior furnace body 5 is provided with a plurality of plate 6 that generates heat, two of interior furnace body 5 all are provided with the U-shaped plate 7 that falls, the inside of two U-shaped plates 7 all is provided with threaded rod 8, the outside of two threaded rod 8 all is provided with slide 9, be provided with two movable plates 10 between two slide 9, the bottom that the bottom of interior furnace body 5 is located the inside bottom of box 2 is provided with baffle 11, the bottom of baffle 11 is provided with a plurality of fixed plate 12, one side of a plurality of fixed plate 12 is provided with thermantidote 13.
Wherein, one side of case lid 3 is through the activity hinge joint of a plurality of hinge and one side on box 2 top, and the case lid 3 is provided with handle 14, through case lid 3 and the handle 14 that the box 2 top was equipped with, makes it hold handle 14 and open case lid 3, places the quartz glass that will anneal the processing inside inner furnace body 5.
Wherein, control panel 4 fixed mounting is in one side on 2 tops of box, and a plurality of heating electrode board 6 all with control panel 4 electric connection, all with control panel 4 electric connection through a plurality of heating electrode board 6, makes its control panel 4 control a plurality of heating electrode board 6 to quartz glass's rate of heating.
Wherein, the outside of interior furnace body 5 and the inside fixed connection of box 2, a plurality of generate heat the 6 both sides of plate electrode all with the both sides fixed connection of interior furnace body 5 inner wall, the shifting chute 15 has all been seted up to interior furnace body 5 and a plurality of 6 both sides of plate electrode that generate heat, generate heat the 6 both sides of plate electrode all with the both sides fixed connection of interior furnace body 5 inner wall through a plurality of, make its quartz glass who places in its inside carry out the even heating through a plurality of plate electrode 6 that generates heat, in order to eliminate stress, increase quartz glass's life.
Wherein, one side of the two inverted U-shaped plates 7 is fixedly connected with the two sides of the inner furnace body 5 inside the box body 2 through the connecting plate, the two ends of the two threaded rods 8 are rotatably connected with the top and the bottom of the two inverted U-shaped plates 7, the two ends of the two inverted U-shaped plates 7 are fixedly provided with driving motors 16, the output shafts of the two driving motors 16 penetrate through the bottom of the two inverted U-shaped plates 7 and are fixedly connected with the bottom ends of the two threaded rods 8, the two sliding plates 9 are sleeved outside the two threaded rods 8, the two ends of the two movable plates 10 are fixedly connected with one side of the two sliding plates 9, the two movable plates 10 are respectively arranged inside the movable grooves 15 arranged on the two sides of the inner furnace body 5 and the plurality of heating electrode plates 6, the driving motors 16 are electrically connected with the control panel 4, the two movable plates 10 are respectively arranged inside the movable grooves 15 arranged on the two sides of the inner furnace body 5 and the plurality of heating electrode plates 6, the two moving plates 10 drive the threaded rod 8 to move upwards through the driving motor 16, so that the quartz glass in the inner furnace body 5 is taken out through the lifting movement.
Wherein, a plurality of bleeder vent has been seted up to baffle 11, the top of baffle 11 and the bottom fixed connection of interior furnace body 5, one side of thermantidote 13 all with 12 bottom one side fixed connection of a plurality of fixed plate, the top of a plurality of fixed plate 12 all with the bottom fixed connection of baffle 11.
Wherein, four corners of 2 bottoms of boxes all are provided with universal wheel 17, all are provided with the wheel on four universal wheels 17 and stop, through the universal wheel 17 that is equipped with in 2 bottoms of boxes, make it remove annealing stove body 1.
During operation, the cover 3 and the handle 14 arranged at the top end of the box body 2 are held by the handle 14 to open the cover 3, and the quartz glass to be annealed is placed in the inner furnace body 5. The heating electrode plates 6 are electrically connected with the control panel 4, so that the control panel 4 controls the heating speed of the heating electrode plates 6 to the quartz glass. Through the both sides of a plurality of 6 both sides of heating electrode board and the both sides fixed connection of inner wall of interior furnace body 5, make its quartz glass who places in its inside carry out the even heating through a plurality of 6 of heating electrode boards to stress relief increases quartz glass's life. The cooling fan 13 arranged at the bottom end of the inner furnace body 5 is used for rapidly cooling the heated quartz glass so as to enhance the quality of the quartz glass. Two moving plates 10 are mutually arranged in moving grooves 15 arranged at two sides of the inner furnace body 5 and the plurality of heating electrode plates 6, so that the two moving plates 10 drive the threaded rod 8 to move upwards through the driving motor 16, and the quartz glass in the inner furnace body 5 is taken out through the lifting movement.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. The annealing furnace for quartz glass production and processing comprises an annealing furnace body (1) and is characterized in that the annealing furnace body (1) comprises a box body (2), a box cover (3) is arranged at the top end of the box body (2), a control panel (4) is arranged on one side, located at the top end of the box body (2), of the box cover (3), an inner furnace body (5) is arranged inside the box body (2), a heating electrode plate (6) is arranged inside the inner furnace body (5), inverted U-shaped plates (7) are arranged on two inner furnace bodies (5), threaded rods (8) are arranged inside the two inverted U-shaped plates (7), sliding plates (9) are arranged outside the two threaded rods (8), two movable plates (10) are arranged between the two sliding plates (9), a partition plate (11) is arranged at the bottom end, located inside the box body (2), of the bottom end of the inner furnace body (5), the bottom of baffle (11) is provided with a plurality of fixed plate (12), a plurality of one side of fixed plate (12) is provided with thermantidote (13).
2. The lehr for producing and processing quartz glass according to claim 1, wherein one side of the box cover (3) is hinged to one side of the top end of the box body (2) by several hinges, and the box cover (3) is provided with a handle (14).
3. The annealing furnace for producing and processing quartz glass according to claim 1, wherein the control panel (4) is fixedly installed at one side of the top end of the box body (2), and the heating electrode plates (6) are electrically connected with the control panel (4).
4. The annealing furnace for producing and processing quartz glass according to claim 1, characterized in that the outside of the inner furnace body (5) is fixedly connected with the inside of the box body (2), both sides of the heating electrode plates (6) are fixedly connected with both sides of the inner wall of the inner furnace body (5), and both sides of the inner furnace body (5) and the plurality of heating electrode plates (6) are provided with moving grooves (15).
5. The annealing furnace for producing and processing quartz glass according to claim 1, wherein one side of each of the two inverted U-shaped plates (7) is fixedly connected with two sides of the inner furnace body (5) positioned inside the box body (2) through connecting plates, two ends of each of the two threaded rods (8) are rotatably connected with the top and bottom ends inside the two inverted U-shaped plates (7), a driving motor (16) is fixedly installed on each of the two inverted U-shaped plates (7), output shafts of the two driving motors (16) penetrate through the bottom ends of the two inverted U-shaped plates (7) and are fixedly connected with the bottom ends of the two threaded rods (8), the two sliding plates (9) are sleeved outside the two threaded rods (8), two ends of each of the two moving plates (10) are fixedly connected with one side of the two sliding plates (9), the two moving plates (10) are both positioned inside moving grooves (15) formed on two sides of the inner furnace body (5) and the heating electrode plate (6), the driving motor (16) is electrically connected with the control panel (4).
6. The annealing furnace for producing and processing quartz glass according to claim 1, wherein the partition plate (11) is provided with a plurality of air holes, the top end of the partition plate (11) is fixedly connected with the bottom end of the inner furnace body (5), one side of the cooling fan (13) is fixedly connected with one side of the bottom end of the plurality of fixing plates (12), and the top ends of the plurality of fixing plates (12) are fixedly connected with the bottom end of the partition plate (11).
7. The annealing furnace for producing and processing quartz glass according to claim 1, wherein four corners of the bottom end of the box body (2) are provided with universal wheels (17), and four universal wheels (17) are provided with wheel brakes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022355971.1U CN214004423U (en) | 2020-10-21 | 2020-10-21 | Quartz glass production and processing is with annealing stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022355971.1U CN214004423U (en) | 2020-10-21 | 2020-10-21 | Quartz glass production and processing is with annealing stove |
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| Publication Number | Publication Date |
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| CN214004423U true CN214004423U (en) | 2021-08-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202022355971.1U Active CN214004423U (en) | 2020-10-21 | 2020-10-21 | Quartz glass production and processing is with annealing stove |
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| CN (1) | CN214004423U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113277718A (en) * | 2020-10-21 | 2021-08-20 | 连云港睿晶石英材料有限公司 | Annealing furnace for quartz glass production and processing |
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2020
- 2020-10-21 CN CN202022355971.1U patent/CN214004423U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113277718A (en) * | 2020-10-21 | 2021-08-20 | 连云港睿晶石英材料有限公司 | Annealing furnace for quartz glass production and processing |
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