CN213956489U

CN213956489U - Gas universal combined and heat distributed miniature mass flowmeter

Info

Publication number: CN213956489U
Application number: CN202023130273.8U
Authority: CN
Inventors: 梁波; 吴钢; 姚登杰
Original assignee: Foshan Suofuke Hydrogen Energy Co ltd
Current assignee: Foshan Suofuke Hydrogen Energy Co ltd
Priority date: 2020-12-23
Filing date: 2020-12-23
Publication date: 2021-08-13
Anticipated expiration: 2030-12-23

Abstract

The utility model relates to a gaseous general type combination formula and miniature mass flow meter of hot distributing type, include: the device comprises a detection base, a control valve base, a bypass and a sensor, a flow control valve, a detection and temperature compensator, a flow control driver, a flow alarm display screen, a flow signal processor, a DB15 electrical interface, an RS485 interface and a gas selection switch. The flexible module has the advantages that the functions of measurement, display and alarm, measurement and control, research of various measurement and control methods and the like can be respectively realized for various gases with mass flow in the form of modern industrial products, and the flexible module combined application can be realized according to the needs of users.

Description

Gas universal combined and heat distributed miniature mass flowmeter

Technical Field

The utility model relates to a gaseous general type combination formula and the miniature mass flow meter of hot distributing type, the user can implement the hot distributed mass flow device of intelligence of mass flow's detection, demonstration, control and various methods research to existing gas as required, belongs to detection control and instrument technical field.

Background

Among the various parameters of modern industrial production and research, flow is one of the parameters that mainly needs to be measured and controlled frequently. The flow rate is a dynamically-changed component parameter, and many fluid types are involved in flow measurement and control, such as gas, liquid single-phase fluid and gas-liquid mixed multiphase fluid; the environmental factors in flow measurement and control are diverse, including the environmental factors such as measurement temperature, pressure, flow and components, for example, the measurement and control temperature is wide, the measurement and control can be carried out from high temperature to low temperature, the pressure during the measurement and control can also be from high pressure to low pressure, the flow of the measured fluid can be changed from micro flow to large flow, and the like; in addition, the measurement and control of mixed gas flow is a problem often encountered in industrial production processes, and is in a very important position in the field of measurement and control. Due to the complexity of the flow measurement and control technology and the rapid development of the scientific technology, in the measurement and control of modern industrial production, the updated and higher requirements are provided for the flow measurement and control, and the current situation of the flow measurement and control can not meet the production requirements, so that the research of a new mass flow measurement and control method is very important.

A thermal distribution type mass flowmeter, called thermal mass flowmeter for short, is a type of mass flowmeter which develops faster in recent years. The thermal mass flowmeter is a meter for measuring the mass flow of fluid by utilizing the heat exchange relationship between flowing fluid and an external heating source according to the principles of heat conduction and balance, and compared with other mass flowmeters, the thermal mass flowmeter is mainly used for measuring the mass flow with low flow speed. Because the structure of the device does not have movable parts, the device has firm structure, small pressure loss and high reliability, can carry out mass flow measurement in vibration or bumpy environment and is convenient to install, the device can be applied to the measurement research of mass flow in a narrow space.

The thermal gas mass flowmeter is mainly used for measuring various gases such as air, argon, hexafluoroethane, acetylene, ethylene, ethane, octafluoropropane, propylene, propane, octafluorocyclobutane, carbon tetrafluoride, methane, chlorine, carbon monoxide, carbon dioxide, hydrogen chloride, helium, butane, n-butane, isobutane, isobutylene, krypton, nitrogen monoxide, nitrous oxide, neon, nitrogen trifluoride, ammonia, oxygen, sulfur hexafluoride, silicon tetrafluoride, silane, sulfur dioxide, blast furnace gas, coke oven gas, coal gas, phosgene, natural gas, liquefied petroleum gas, hydrogen peroxide, flue gas, fuel gas, methane gas, compressed air, toluene, hydrogen sulfide and the like.

Through recent literature review, the current domestic and foreign research in the field of thermal mass flowmeters is mainly in the following directions: the sensor structure of the thermal mass flowmeter is improved, and the measurement and control precision is improved so as to enhance the environmental fitness; the gas flow measurement of a complex flow field is realized by adopting a nonlinear modeling method; the flow measurement and control method of a multi-sensor is adopted, so that the measurement and control of large pipe diameter, irregular pipe diameter and multiphase flow can be realized; measuring the micro flow of the gas; researching a compensation algorithm; advanced signal processing technology and method are adopted, and various advanced algorithms are adopted; analyzing the influence of the measurement environment and the flow field distribution on the precision; the influence of measurement on the gas flow velocity distribution is reduced by adopting a non-immersion heating method and a temperature measurement method; high-precision large-range-ratio flow sensor research; or to process the output signal of a thermal mass flow meter using a wide variety of devices.

However, the thermal mass flow meters produced at home and abroad at present are almost integrated products for measurement and control provided for modern industrial production, and each product is only limited to measurement and control of certain gas. When the research of the utility model in the related measurement and control field is planned to be carried out in colleges and universities, quality control institute and institute, often need redesign a miniature mass flowmeter of hot type, these miniature mass flowmeters of hot type that design moreover, also are a research device and system, do not possess the requirement that satisfies modern industrial product.

Therefore, the utility model relates to a gaseous general type combination formula hot type miniature mass flow meter is a modern industrial product promptly, is a hot type mass flow research and development system again. By adopting the flexible module combination mode, a user can carry out detection, display, control and research of various technologies and methods on the existing gas mass flow according to the needs.

In summary, in the art, there have been proposed measurement and control apparatuses and systems which are expected to accurately study and measure the mass flow rate of a fluid exhibiting characteristics different from those of an ideal gas by various techniques and methods in consideration of the kind of the fluid whose mass flow rate is desired to be measured, as described above. According to these techniques, it is possible to more accurately study and measure the mass flow rates of various gases in the form of modern industrial products, taking into consideration not only the types of gases whose mass flow rates are to be measured and controlled but also various combinations of the measurement and control of the mass flow rates.

Disclosure of Invention

The utility model aims at overcoming prior art not enough and providing a gaseous general type combination formula and the miniature mass flow meter of hot distributing type to the form of modern industrial product can realize measuring, demonstration and warning, measurement and control, various measurement and control method's functions such as research respectively to the gas of various kinds of mass flow, and can realize flexible module combination formula and use according to the user's needs.

In order to achieve the above object, the technical solution of the present invention is to provide a gas universal type combined and heat-distributed micro mass flow meter, which is characterized by comprising: the device comprises a detection base, a control valve base, a bypass and a sensor, a flow control valve, a detection and temperature compensator, a flow control driver, a flow alarm display screen, a flow signal processor, a DB15 electrical interface, an RS485 interface and a gas selection switch; the control valve base is installed at an air outlet of the detection base, the bypass and the sensor are installed on the detection base and communicated with the detection base, and the flow control valve is installed on the control valve base; the input end and the bypass of detection and temperature compensator are electrically connected with sensor, the output end of detection and temperature compensator is respectively electrically connected with the input end of flow alarm display screen and the input end of flow control driver, the input and output end of detection and temperature compensator is respectively electrically connected with the input and output end of flow signal processor and the input and output end of DB15 electrical interface, the input and output end of flow control driver is electrically connected with DB15 electrical interface and the input and output end of flow signal processor, the output end of flow control driver is electrically connected with the input end of flow control valve, the input and output end of flow signal processor and the input and output end of RS485 interface and the input and output end of gas selector switch are electrically connected.

In the technical scheme, the detection base comprises a shell, a turbulence filter and a laminar flow element; the turbulent flow filter and the laminar flow element are embedded in the shell, so that gas sequentially passes through the turbulent flow filter and the laminar flow element; the bypass measures pipe, heating coil RH, upstream sensor Rt1 and low reaches sensor Rt2 including the bypass with the sensor, heating coil RH, upstream sensor Rt1 and low reaches sensor Rt2 are respectively around on the outer wall that the bypass was surveyed the pipe, and heating coil RH is located the centre of bypass survey pipe, and upstream sensor Rt1 and low reaches sensor Rt2 are located the both sides and the symmetry each other of heating coil respectively, the air inlet and the gas outlet that the bypass was surveyed the pipe communicate with the casing respectively, and the air inlet that the bypass was surveyed the pipe is located between turbulence filter and the laminar flow component, and the gas outlet that the bypass was surveyed the pipe is located between laminar flow component and the detection base gas outlet.

In the technical scheme, the detection and temperature compensator comprises a resistor R1, a resistor R2, a flow detection circuit IC1, a temperature compensation circuit IC2, a heating power supply IC3, a power supply regulator IC4 and a CPU monitoring circuit IC 5; wherein, the resistor R1 and the resistor R2 are connected with the upstream sensor Rt1 and the downstream sensor Rt2 to form a Wheatstone bridge circuit, the output end of the Wheatstone bridge circuit is respectively and electrically connected with the input end of the temperature compensation circuit IC2 and the input end of the flow detection circuit IC1, the input end of the Wheatstone bridge circuit is respectively and electrically connected with the output end of the upstream sensor Rt1 of the bypass and sensor and the output end of the downstream sensor Rt2, the output end of the temperature compensation circuit IC2 is also and electrically connected with the input end of the Wheatstone bridge circuit after passing through the resistor R3 and the emitter of the power tube Q1, the output end of the flow detection circuit IC1 is respectively and electrically connected with the input end of the flow control driver, the input end of the flow alarm display screen and the input and output ends of the flow signal processor, the input end of the flow detection circuit IC1 is also and electrically connected with the output end of the CPU monitoring IC5, the input end of the heating power supply IC3 is electrically connected with a heating coil RH of the detection and bypass sensor; the input end of the power supply regulator IC4 is electrically connected with the DB15 electrical interface, and the output end of the power supply regulator IC4 provides working power supply for the detection and temperature compensator; the input end and the output end of the CPU monitoring circuit IC5 are electrically connected with the input end and the output end of the flow control driver and the input end and the output end of the flow signal processor.

In the technical scheme, the detection base, the control valve base, the bypass and the sensor, the flow control valve, the detection and temperature compensator, the flow control driver, the flow alarm display screen, the flow signal processor, the DB15 electrical interface, the RS485 interface and the gas selection switch are combined to realize mass flow measurement, display and control on gas.

In the technical scheme, the detection base, the bypass and the sensor are combined with the detection and temperature compensator to be used for measuring the gas mass flow.

In the technical scheme, the detection base, the bypass and the sensor, the detection and temperature compensator and the flow alarm display screen are combined to be used for measuring and displaying the gas mass flow in real time.

In the technical scheme, the detection base, the control valve base, the bypass and the sensor, the flow control valve, the detection and temperature compensator and the flow control driver are combined to be used for measuring and controlling the mass flow of the gas.

In the technical scheme, the control valve base, the flow control valve and the flow control driver are combined to provide a novel mass flow detection mode and control research for users.

Compared with the prior art, the utility model the advantage do: in the form of modern industrial products, the flexible module can respectively realize the functions of measurement, display and alarm, measurement and control, research of various measurement and control methods and the like for gases with various mass flow rates, and can realize the combined application of the flexible modules according to the needs of users.

Drawings

Fig. 1 is a block diagram of the present invention;

FIG. 2 is a block diagram of the detection and temperature compensator of the present invention in cooperation with other components;

fig. 3 is a schematic structural diagram of the detection base of the present invention.

Detailed Description

The following describes the present invention with reference to the accompanying drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. Furthermore, the technical features mentioned in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

As shown in fig. 1 to 3, it is a gas universal type combined and heat-distributed micro mass flow meter, comprising: the device comprises a detection base 1, a control valve base 2, a bypass and sensor 3, a flow control valve 4, a detection and temperature compensator 5, a flow control driver 6, a flow alarm display screen 7, a flow signal processor 8, a DB15 electrical interface 9, an RS485 interface 10 and a gas selection switch 11; the control valve base 2 is installed at an air outlet of the detection base 1, the bypass and the sensor 3 are installed on the detection base 1 and communicated with the detection base 1, and the flow control valve 4 is installed on the control valve base 2; the input end of the detection and temperature compensator 5 is electrically connected with the bypass and the sensor 3, the output end of the detection and temperature compensator 5 is electrically connected with the input end of the flow alarm display screen 7 and the input end of the flow control driver 6 respectively, the input end and the output end of the detection and temperature compensator 5 are electrically connected with the input end and the output end of the flow signal processor 8 and the input end and the output end of the DB15 electrical interface 9 respectively, the input end and the output end of the DB15 electrical interface 9 and the flow signal processor 8 of the flow control driver 6 are electrically connected, the output end of the flow control driver 6 is electrically connected with the input end of the flow control valve 4, and the input end and the output end of the RS485 interface 10 and the input end and the output end of the gas selection switch 11 of the flow signal processor 8 are electrically connected.

In operation, the utility model discloses a first working method, the user only needs to survey gas, and when not needing control, in gaseous general type combination formula heat distribution type miniature mass flowmeter, only need including detection base 1, bypass and sensor 3, detection and temperature compensator 5 and DB15 electrical interface 9, detection base 1 only realizes mechanical connection with bypass and sensor 3, and does not realize mechanical connection with control valve base 2, the output of bypass and sensor 3 realizes electrical connection with the input of detection and temperature compensator 5, the output of detection and temperature compensator 5 realizes electrical connection with the input or the output of DB15 electrical interface 9, the mass flow that will measure is exported through DB15 electrical interface 9, output voltage signal is 0-5VDC and output current signal is 4-20 mA; the second working mode of the utility model is used as the further optimization scheme of the gas general combined heat distribution type micro mass flow meter, if the user needs to measure the gas and display the mass flow in real time, the second working mode of the utility model is based on the first working mode of the utility model, the input end of the flow alarm display screen 7 is electrically connected with the output end of the detection and temperature compensator 5, and the measured current mass flow and the accumulated mass flow can be displayed in real time through the flow alarm display screen 7; the third working mode of the utility model is based on the first working mode of the utility model, the control valve base 2 is mechanically connected with the detection base 1 and the flow control valve 4; the input end of the flow control driver 6 is electrically connected with the output end of the detection and temperature compensator 5 and the input end or the output end of the DB15 electrical interface 9, the input end of the flow control valve 4 is electrically connected with the output end of the flow control driver 6, a user inputs a given flow signal of 0-5VDC or an input current signal of 4-20mA through the input end of the DB15 electrical interface 9, the flow control driver 6 generates a deviation signal according to the comparison between the given flow signal and a mass flow signal fed back by the output end of the detection and temperature compensator 5 to control and adjust the flow control valve 4, the flow control valve 4 is an electromagnetic proportional regulating valve, and the opening of the valve is correspondingly changed by controlling the current applied to the electromagnetic coil through a control circuit of the flow control driver 6, so that the aim of controlling the mass flow of the gas is fulfilled; the fourth working mode of the present invention is a further optimized scheme of the gas universal combined heat distribution type micro mass flow meter, if the user needs to measure and control any gas mass flow, the fourth working mode of the present invention is based on the third working mode of the present invention, wherein the input or output of the flow signal processor 8 is electrically connected to the input or output of the detection and temperature compensator 5, the RS485 interface 10 and the gas selector switch 11, the input or output of the DB15 electrical interface 9 is electrically connected to the input or output of the detection and temperature compensator 5 and the flow control driver 6, the input or output of the RS485 interface 10 is electrically connected to the input or output of the flow signal processor 8, and the output of the gas selector switch 11 is electrically connected to the input of the flow signal processor 8, through the flow signal processor 8 and the gas selector switch 11, the gas selector switch 11 is an eight-bit coding switch to realize electrical combination, gas flow parameters such as gas conversion coefficient, minimum flow rate, flow rate zero point, pipeline diameter, medium coefficient, full flow rate, instrument address, flow meter calculation calibration parameters and the like are preset for the type of gas of which the mass flow is to be measured and controlled, and are stored in a data storage unit of the mass flow signal processor in advance, in the technical field, the heat distribution type micro mass flow meter can measure and control 256 types of gas; the fifth working method, as the utility model relates to a gaseous general type combination formula heat distributed miniature mass flow meter further optimization scheme, if the user need survey and control various algorithms such as arbitrary gas mass flow when studying, the fifth working method is in the utility model discloses a on the basis of the fourth working method, RS485 interface 10 convey the CPU of flow signal processor 8 with various survey and the control algorithm software of host computer PC establishment in, flow signal processor 8's CPU adopts DSP digital processing chip TMS320F28335, can carry out various surveys and control algorithm's research, this heat distributed miniature mass flow meter can realize 256 gaseous various surveys and control algorithm's research.

In the present embodiment, the detection base 1 includes a housing 14, a turbulence filter 12, and a laminar flow element 13; wherein the turbulent filter 12 and the laminar flow element 13 are embedded in the shell 14, so that the gas passes through the turbulent filter 12 and the laminar flow element 13 in sequence; bypass and sensor 3 include bypass survey buret 31, heating coil RH, upstream sensor Rt1 and low reaches sensor Rt2, heating coil RH, upstream sensor Rt1 and low reaches sensor Rt2 wind respectively on the outer wall of bypass survey buret 31, and heating coil RH is located the centre of bypass survey buret 31, and upstream sensor Rt1 and low reaches sensor Rt2 are located the both sides of heating coil and symmetry each other respectively, the air inlet and the gas outlet of bypass survey buret 31 communicate with casing 14 respectively, and the air inlet of bypass survey buret 31 is located between turbulence filter 12 and laminar flow component 13, and the gas outlet of bypass survey buret 31 is located between laminar flow component 13 and detection base 1 gas outlet.

In this embodiment, the detection and temperature compensator 5 includes a resistor R1, a resistor R2, a flow detection circuit IC1, a temperature compensation circuit IC2, a heating power supply IC3, a power supply regulator IC4 and a CPU monitoring circuit IC5, and the flow detection circuit IC1, the temperature compensation circuit IC2, the heating power supply IC3, the power supply regulator IC4 and the CPU monitoring circuit IC5 may all adopt a lissah RL78/L13 single chip microcomputer; wherein, the resistor R1 and the resistor R2 are connected with the upstream sensor Rt1 and the downstream sensor Rt2 to form a Wheatstone bridge circuit, the output end of the Wheatstone bridge circuit is respectively and electrically connected with the input end of the temperature compensation circuit IC2 and the input end of the flow detection circuit IC1, the input end of the Wheatstone bridge circuit is respectively and electrically connected with the output end of the upstream sensor Rt1 of the bypass and the output end of the downstream sensor Rt2 of the sensor 3, the output end of the temperature compensation circuit IC2 is also and electrically connected with the input end of the Wheatstone bridge circuit after passing through the resistor R3 and the emitter of the power tube Q1, the output end of the flow detection circuit IC1 is respectively and electrically connected with the input end of the flow control driver 6, the input end of the flow alarm display 7 and the input and output ends of the flow signal processor 8, the input end of the flow detection circuit IC1 is also and electrically connected with the output end of the CPU monitoring circuit IC5, the input end of the heating power supply IC3 is electrically connected with a heating coil RH of the detection and bypass sensor 3; the input end of the power supply regulator IC4 is electrically connected with the DB15 electrical interface 9, and the output end of the power supply regulator IC4 provides working power supply for the detection and temperature compensator 5; the input and output terminals of the CPU monitor circuit IC5 are electrically connected to the input and output terminals of the flow rate control driver 6 and the input and output terminals of the flow rate signal processor 8.

In this embodiment, the detection base 1, the control valve base 2, the bypass and sensor 3, the flow control valve 4, the detection and temperature compensator 5, the flow control driver 6, the flow alarm display 7, the flow signal processor 8, the DB15 electrical interface 9, the RS485 interface 10, and the gas selection switch 11 are combined to measure, display, and control the mass flow of 256 gases, and scientific research can be carried out on various measurement and control algorithms proposed by users.

In the present embodiment, the three components of the detection base 1, the bypass and sensor 3 and the detection and temperature compensator 5 are combined for measuring the gas mass flow.

In the present embodiment, the detection base 1, the bypass and sensor 3, the detection and temperature compensator 5 and the flow alarm display 7 are combined for measuring the gas mass flow and displaying the gas mass flow in real time.

In the present embodiment, six components, namely, the detection base 1, the control valve base 2, the bypass and sensor 3, the flow control valve 4, the detection and temperature compensator 5 and the flow control actuator 6, are combined for measuring and controlling the gas mass flow.

In the present embodiment, the combination of the three components, i.e., the control valve base 2, the flow control valve 4 and the flow control actuator 6, is used to provide a user with a new mass flow detection mode and control research.

The embodiments of the present invention are described in detail with reference to the drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in the embodiments without departing from the principles and spirit of the invention.

Claims

1. A gas universal combined and heat distributed micro mass flowmeter is characterized by comprising: the device comprises a detection base (1), a control valve base (2), a bypass and sensor (3), a flow control valve (4), a detection and temperature compensator (5), a flow control driver (6), a flow alarm display screen (7), a flow signal processor (8), a DB15 electrical interface (9), an RS485 interface (10) and a gas selection switch (11); the control valve base (2) is detachably mounted at an air outlet of the detection base (1), the bypass and the sensor (3) are detachably mounted on the detection base (1) and communicated with the detection base (1), and the flow control valve (4) is mounted on the control valve base (2); the input end of the detection and temperature compensator (5) is electrically connected with the bypass and sensor (3), the output end of the detection and temperature compensator (5) is respectively electrically connected with the input end of the flow alarm display screen (7) and the input end of the flow control driver (6), the input end and the output end of the detection and temperature compensator (5) are respectively electrically connected with the input end and the output end of the flow signal processor (8) and the input end and the output end of the DB15 electrical interface (9), the input end and the output end of the flow control driver (6) are electrically connected with the DB15 electrical interface (9) and the input end and the output end of the flow signal processor (8), the output end of the flow control driver (6) is electrically connected with the input end of the flow control valve (4), and the input and output end of the flow signal processor (8) is electrically connected with the input and output end of the RS485 interface (10) and the input and output end of the gas selection switch (11).

2. A combined and thermally distributed micro mass flowmeter of the general type of gases, according to claim 1, characterized in that said detection base (1) comprises a casing (14), a turbulence filter (12) and a laminar flow element (13); wherein the turbulence filter (12) and the laminar flow element (13) are embedded in the shell (14) to enable the gas to sequentially pass through the turbulence filter (12) and the laminar flow element (13); bypass and sensor (3) are including bypass survey buret (31), heating coil RH, upstream sensor Rt1 and low reaches sensor Rt2, heating coil RH, upstream sensor Rt1 and low reaches sensor Rt2 are respectively around on the outer wall of bypass survey buret (31), and heating coil RH is located the centre of bypass survey buret (31), and upstream sensor Rt1 and low reaches sensor Rt2 are located the both sides of heating coil and symmetry each other respectively, the air inlet and the gas outlet of bypass survey buret (31) communicate with casing (14) respectively, and the air inlet of bypass survey buret (31) is located between turbulence filter (12) and laminar flow element (13), and the gas outlet of bypass survey buret (31) is located between laminar flow element (13) and detection base (1) gas outlet.

3. A combined and thermally distributed micro mass flow meter for gases as in claim 2, characterized by the sensing and temperature compensator (5) comprising a resistor R1, a resistor R2, a flow sensing circuit IC1, a temperature compensation circuit IC2, a heating power supply IC3, a power regulator IC4 and a CPU monitoring circuit IC 5; wherein, the resistor R1 and the resistor R2 are connected with the upstream sensor Rt1 and the downstream sensor Rt2 to form a Wheatstone bridge circuit, the output end of the Wheatstone bridge circuit is respectively and electrically connected with the input end of the temperature compensation circuit IC2 and the input end of the flow detection circuit IC1, the input end of the Wheatstone bridge circuit is respectively and electrically connected with the output end of the upstream sensor Rt1 and the output end of the downstream sensor Rt2 of the bypass and sensor (3), the output end of the temperature compensation circuit IC2 is also and electrically connected with the input end of the Wheatstone bridge circuit after passing through the resistor R3 and the emitter of the power tube Q1, the output end of the flow detection circuit IC1 is respectively and electrically connected with the input end of the flow control driver (6), the input end of the flow alarm display screen (7) and the input and output ends of the flow signal processor (8), the input end of the flow detection circuit IC1 is also and electrically connected with the output end of the CPU monitoring circuit IC5, the input end of the heating power supply IC3 is electrically connected with a heating coil RH of the detection and bypass sensor (3); the input end of the power supply regulator IC4 is electrically connected with the DB15 electrical interface (9), and the output end of the power supply regulator IC4 provides working power supply for the detection and temperature compensator (5); the input end and the output end of the CPU monitoring circuit IC5 are electrically connected with the input end and the output end of the flow control driver (6) and the input end and the output end of the flow signal processor (8).

4. The universal gas combined and heat distributed micro mass flowmeter of claim 1, wherein the detection base (1), the control valve base (2), the bypass and sensor (3), the flow control valve (4), the detection and temperature compensator (5), the flow control driver (6), the flow alarm display screen (7), the flow signal processor (8), the DB15 electrical interface (9), the RS485 interface (10) and the gas selection switch (11) are combined to measure, display and control the mass flow of the gas.

5. A combined and thermally distributed micro mass flow meter for gases as in claim 1, characterized by the fact that the three components of the sensing base (1), the bypass and sensor (3) and the sensing and temperature compensator (5) are combined for measuring the gas mass flow.

6. The combined type and distributed heat micro mass flowmeter of claim 1, wherein the four components of the detection base (1), the bypass and sensor (3), the detection and temperature compensator (5) and the flow alarm display screen (7) are combined for measuring and displaying the gas mass flow in real time.

7. The combined type and distributed heat micro mass flowmeter of claim 1, wherein the six components of the detection base (1), the control valve base (2), the bypass and sensor (3), the flow control valve (4), the detection and temperature compensator (5) and the flow control driver (6) are combined for measuring and controlling the gas mass flow.

8. The combined type and distributed type micro mass flowmeter for gas in claim 1, wherein the combination of the three components of the control valve base (2), the flow control valve (4) and the flow control driver (6) is used for providing a user with a new mass flow detection mode and control research.