CN112414488A - Gas general-purpose combined and thermally distributed micro-mass flowmeter - Google Patents

Gas general-purpose combined and thermally distributed micro-mass flowmeter Download PDF

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CN112414488A
CN112414488A CN202011533127.1A CN202011533127A CN112414488A CN 112414488 A CN112414488 A CN 112414488A CN 202011533127 A CN202011533127 A CN 202011533127A CN 112414488 A CN112414488 A CN 112414488A
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flow
detection
sensor
gas
bypass
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CN112414488B (en
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梁波
吴钢
姚登杰
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Foshan Suofuke Hydrogen Energy Co ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure

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Abstract

本发明涉及一种气体通用型组合式及热分布式微型质量流量计，包括：检测基座、控制阀基座、旁路与传感器、流量控制阀、检测与温度补偿器、流量控制驱动器、流量报警显示屏、流量信号处理器、DB15电气接口、RS485接口及气体选择开关。其具有以现代工业产品的形式，对各种种类质量流量的气体，能够分别实现测量、显示与报警、测量与控制、各种测量与控制方法的研究等功能，并可以根据用户需要，实现柔性模块组合式应用等优点。

Figure 202011533127

The invention relates to a gas universal combined and thermally distributed miniature mass flowmeter, comprising: a detection base, a control valve base, a bypass and a sensor, a flow control valve, a detection and temperature compensator, a flow control driver, a flow Alarm display screen, flow signal processor, DB15 electrical interface, RS485 interface and gas selection switch. It has the functions of measurement, display and alarm, measurement and control, research of various measurement and control methods for various types of mass flow gases in the form of modern industrial products, and can be flexible according to user needs. Modular combined application and other advantages.

Figure 202011533127

Description

Gas universal combined and heat distributed miniature mass flowmeter
Technical Field
The invention relates to a gas universal combined type and heat distribution type micro mass flow meter, which can be used for detecting, displaying and controlling mass flow of the existing gas and researching various methods by a user according to needs, and belongs to the technical field of detection control and instruments.
Background
Among the various parameters of modern industrial production and research, flow is one of the parameters that mainly needs to be measured and controlled frequently. The flow rate is a dynamically-changed component parameter, and many fluid types are involved in flow measurement and control, such as gas, liquid single-phase fluid and gas-liquid mixed multiphase fluid; the environmental factors in flow measurement and control are diverse, including the environmental factors such as measurement temperature, pressure, flow and components, for example, the measurement and control temperature is wide, the measurement and control can be carried out from high temperature to low temperature, the pressure during the measurement and control can also be from high pressure to low pressure, the flow of the measured fluid can be changed from micro flow to large flow, and the like; in addition, the measurement and control of mixed gas flow is a problem often encountered in industrial production processes, and is in a very important position in the field of measurement and control. Due to the complexity of the flow measurement and control technology and the rapid development of the scientific technology, in the measurement and control of modern industrial production, the updated and higher requirements are provided for the flow measurement and control, and the current situation of the flow measurement and control can not meet the production requirements, so that the research of a new mass flow measurement and control method is very important.
A thermal distribution type mass flowmeter, called thermal mass flowmeter for short, is a type of mass flowmeter which develops faster in recent years. The thermal mass flowmeter is a meter for measuring the mass flow of fluid by utilizing the heat exchange relationship between flowing fluid and an external heating source according to the principles of heat conduction and balance, and compared with other mass flowmeters, the thermal mass flowmeter is mainly used for measuring the mass flow with low flow speed. Because the structure of the device does not have movable parts, the device has firm structure, small pressure loss and high reliability, can carry out mass flow measurement in vibration or bumpy environment and is convenient to install, the device can be applied to the measurement research of mass flow in a narrow space.
The thermal gas mass flowmeter is mainly used for measuring various gases such as air, argon, hexafluoroethane, acetylene, ethylene, ethane, octafluoropropane, propylene, propane, octafluorocyclobutane, carbon tetrafluoride, methane, chlorine, carbon monoxide, carbon dioxide, hydrogen chloride, helium, butane, n-butane, isobutane, isobutylene, krypton, nitrogen monoxide, nitrous oxide, neon, nitrogen trifluoride, ammonia, oxygen, sulfur hexafluoride, silicon tetrafluoride, silane, sulfur dioxide, blast furnace gas, coke oven gas, coal gas, phosgene, natural gas, liquefied petroleum gas, hydrogen peroxide, flue gas, fuel gas, methane gas, compressed air, toluene, hydrogen sulfide and the like.
Through recent literature review, the current domestic and foreign research in the field of thermal mass flowmeters is mainly in the following directions: the sensor structure of the thermal mass flowmeter is improved, and the measurement and control precision is improved so as to enhance the environmental fitness; the gas flow measurement of a complex flow field is realized by adopting a nonlinear modeling method; the flow measurement and control method of a multi-sensor is adopted, so that the measurement and control of large pipe diameter, irregular pipe diameter and multiphase flow can be realized; measuring the micro flow of the gas; researching a compensation algorithm; advanced signal processing technology and method are adopted, and various advanced algorithms are adopted; analyzing the influence of the measurement environment and the flow field distribution on the precision; the influence of measurement on the gas flow velocity distribution is reduced by adopting a non-immersion heating method and a temperature measurement method; high-precision large-range-ratio flow sensor research; or to process the output signal of a thermal mass flow meter using a wide variety of devices.
However, the thermal mass flow meters produced at home and abroad at present are almost integrated products for measurement and control provided for modern industrial production, and each product is only limited to measurement and control of certain gas. When the invention in the related measurement and control field is planned to be developed in colleges and universities, quality control centers and research institutes, a thermal type micro mass flowmeter is often redesigned, and the designed thermal type micro mass flowmeter is only a research device and a system and does not meet the requirements of modern industrial products.
Therefore, the invention relates to a gas universal combined type thermal micro mass flowmeter, which is a modern industrial product and a thermal mass flow research and development system. By adopting the flexible module combination mode, a user can carry out detection, display, control and research of various technologies and methods on the existing gas mass flow according to the needs.
In summary, in the art, there have been proposed measurement and control apparatuses and systems which are expected to accurately study and measure the mass flow rate of a fluid exhibiting characteristics different from those of an ideal gas by various techniques and methods in consideration of the kind of the fluid whose mass flow rate is desired to be measured, as described above. According to these techniques, it is possible to more accurately study and measure the mass flow rates of various gases in the form of modern industrial products, taking into consideration not only the types of gases whose mass flow rates are to be measured and controlled but also various combinations of the measurement and control of the mass flow rates.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a gas universal combined type and heat distribution type micro mass flowmeter, which can respectively realize the functions of measurement, display and alarm, measurement and control, research of various measurement and control methods and the like for gases with various mass flow rates in the form of modern industrial products, and can realize the combined application of flexible modules according to the needs of users.
In order to achieve the above object, the present invention provides a gas universal type combined and thermally distributed micro mass flowmeter, comprising: the device comprises a detection base, a control valve base, a bypass and a sensor, a flow control valve, a detection and temperature compensator, a flow control driver, a flow alarm display screen, a flow signal processor, a DB15 electrical interface, an RS485 interface and a gas selection switch; the control valve base is installed at an air outlet of the detection base, the bypass and the sensor are installed on the detection base and communicated with the detection base, and the flow control valve is installed on the control valve base; the input end and the bypass of detection and temperature compensator are electrically connected with sensor, the output end of detection and temperature compensator is respectively electrically connected with the input end of flow alarm display screen and the input end of flow control driver, the input and output end of detection and temperature compensator is respectively electrically connected with the input and output end of flow signal processor and the input and output end of DB15 electrical interface, the input and output end of flow control driver is electrically connected with DB15 electrical interface and the input and output end of flow signal processor, the output end of flow control driver is electrically connected with the input end of flow control valve, the input and output end of flow signal processor and the input and output end of RS485 interface and the input and output end of gas selector switch are electrically connected.
In the technical scheme, the detection base comprises a shell, a turbulence filter and a laminar flow element; the turbulent flow filter and the laminar flow element are embedded in the shell, so that gas sequentially passes through the turbulent flow filter and the laminar flow element; bypass and sensor include bypass survey buret, heating coil RH, upstream sensor Rt1 and low reaches sensor Rt2, heating coil RH, upstream sensor Rt1 and low reaches sensor Rt2 wind respectively on the outer wall of bypass survey buret, and heating coil RH is located the centre of bypass survey buret, and upstream sensor Rt1 and low reaches sensor Rt2 are located the both sides of heating coil and symmetry each other respectively, the air inlet and the gas outlet of bypass test pipe communicate with the casing respectively, and the air inlet of bypass test pipe is located between turbulence filter and the laminar flow component, and the gas outlet of bypass test pipe is located between laminar flow component and the detection base gas outlet.
In the technical scheme, the detection and temperature compensator comprises a resistor R1, a resistor R2, a flow detection circuit IC1, a temperature compensation circuit IC2, a heating power supply IC3, a power supply regulator IC4 and a CPU monitoring circuit IC 5; wherein, the resistor R1 and the resistor R2 are connected with the upstream sensor Rt1 and the downstream sensor Rt2 to form a Wheatstone bridge circuit, the output terminal of the Wheatstone bridge circuit is electrically connected with the input terminal of the temperature compensation circuit IC2 and the input terminal of the flow detection circuit IC1, the input terminal of the Wheatstone bridge circuit is electrically connected with the output terminal of the upstream sensor Rt1 of the bypass and sensor and the output terminal of the downstream sensor Rt2, the output terminal of the temperature compensation circuit IC2 is also electrically connected with the input terminal of the Wheatstone bridge circuit after passing through the resistor R3 and the emitter of the power tube Q1, the output terminal of the flow detection circuit IC1 is electrically connected with the input terminal of the flow control driver, the input terminal of the flow alarm display screen and the input/output terminal of the flow signal processor, the input terminal of the flow detection circuit IC1 is also electrically connected with the output terminal of the CPU monitoring circuit 5, the input end of the heating power supply IC3 is electrically connected with a heating coil RH of the detection and bypass sensor; the input end of the power supply regulator IC4 is electrically connected with the DB15 electrical interface, and the output end of the power supply regulator IC4 provides working power supply for the detection and temperature compensator; the input end and the output end of the CPU monitoring circuit IC5 are electrically connected with the input end and the output end of the flow control driver and the input end and the output end of the flow signal processor.
In the technical scheme, the detection base, the control valve base, the bypass and the sensor, the flow control valve, the detection and temperature compensator, the flow control driver, the flow alarm display screen, the flow signal processor, the DB15 electrical interface, the RS485 interface and the gas selection switch are combined, mass flow measurement, display and control of 256 gases are realized, and scientific research can be carried out on various measurement and control algorithms provided by a user.
In the technical scheme, the detection base, the bypass and the sensor are combined with the detection and temperature compensator to be used for measuring the gas mass flow.
In the technical scheme, the detection base, the bypass and the sensor, the detection and temperature compensator and the flow alarm display screen are combined to be used for measuring and displaying the gas mass flow in real time.
In the technical scheme, the detection base, the control valve base, the bypass and the sensor, the flow control valve, the detection and temperature compensator and the flow control driver are combined to be used for measuring and controlling the mass flow of the gas.
In the technical scheme, the control valve base, the flow control valve and the flow control driver are combined to provide a novel mass flow detection mode and control research for users.
Compared with the prior art, the invention has the advantages that: in the form of modern industrial products, the flexible module can respectively realize the functions of measurement, display and alarm, measurement and control, research of various measurement and control methods and the like for gases with various mass flow rates, and can realize the combined application of the flexible modules according to the needs of users.
Drawings
FIG. 1 is a block diagram of the present invention;
FIG. 2 is a block diagram of the detection and temperature compensator of the present invention in combination with other components;
FIG. 3 is a schematic structural diagram of the detection base of the present invention.
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
As shown in fig. 1 to 3, it is a gas universal type combined and heat-distributed micro mass flow meter, comprising: the device comprises a detection base 1, a control valve base 2, a bypass and sensor 3, a flow control valve 4, a detection and temperature compensator 5, a flow control driver 6, a flow alarm display screen 7, a flow signal processor 8, a DB15 electrical interface 9, an RS485 interface 10 and a gas selection switch 11; the control valve base 2 is installed at an air outlet of the detection base 1, the bypass and the sensor 3 are installed on the detection base 1 and communicated with the detection base 1, and the flow control valve 4 is installed on the control valve base 2; the input end of the detection and temperature compensator 5 is electrically connected with the bypass and the sensor 3, the output end of the detection and temperature compensator 5 is electrically connected with the input end of the flow alarm display screen 7 and the input end of the flow control driver 6 respectively, the input end and the output end of the detection and temperature compensator 5 are electrically connected with the input end and the output end of the flow signal processor 8 and the input end and the output end of the DB15 electrical interface 9 respectively, the input end and the output end of the DB15 electrical interface 9 and the flow signal processor 8 of the flow control driver 6 are electrically connected, the output end of the flow control driver 6 is electrically connected with the input end of the flow control valve 4, and the input end and the output end of the RS485 interface 10 and the input end and the output end of the gas selection switch 111 of the flow signal processor 8 are.
In the first working mode, when a user only needs to measure gas and does not need to control the gas, the gas universal combined type heat distribution micro mass flowmeter only needs to comprise a detection base 1, a bypass and sensor 3, a detection and temperature compensator 5 and a DB15 electrical interface 9, wherein the detection base 1 is only mechanically connected with the bypass and sensor 3 but not mechanically connected with a control valve base 2, the output end of the bypass and sensor 3 is electrically connected with the input end of the detection and temperature compensator 5, the output end of the detection and temperature compensator 5 is electrically connected with the input end or the output end of the DB15 electrical interface 9, the measured mass flow is output through the DB15 electrical interface 9, the output voltage signal is 0-5VDC, and the output current signal is 4-20 mA; the second working mode of the invention is used as a further optimization scheme of the gas universal combined heat distribution type micro mass flowmeter, if a user needs to measure gas and display mass flow in real time, the second working mode of the invention is based on the first working mode of the invention, the input end of the flow alarm display screen 7 is electrically connected with the output end of the detection and temperature compensator 5, and the measured current mass flow and the accumulated mass flow can be displayed in real time through the flow alarm display screen 7; in a third operation mode of the present invention, based on the first operation mode of the present invention, the control valve base 2 is mechanically connected to the detection base 1 and the flow control valve 4; the input end of the flow control driver 6 is electrically connected with the output end of the detection and temperature compensator 5 and the input end or the output end of the DB15 electrical interface 9, the input end of the flow control valve 4 is electrically connected with the output end of the flow control driver 6, a user inputs a given flow signal of 0-5VDC or an input current signal of 4-20mA through the input end of the DB15 electrical interface 9, the flow control driver 6 generates a deviation signal according to the comparison between the given flow signal and a mass flow signal fed back by the output end of the detection and temperature compensator 5 to control and adjust the flow control valve 4, the flow control valve 4 is an electromagnetic proportional regulating valve, and the opening of the valve is correspondingly changed by controlling the current applied to the electromagnetic coil through a control circuit of the flow control driver 6, so that the aim of controlling the mass flow of the gas is fulfilled; the fourth working mode of the invention is a further optimized scheme of the gas general-purpose combined type heat-distributed micro mass flow meter, if a user needs to measure and control any gas mass flow, on the basis of the third working mode of the invention, the input end or the output end of the flow signal processor 8 is electrically connected with the input end or the output end of the detection and temperature compensator 5, the RS485 interface 10 and the gas selector switch 11 respectively, the input end or the output end of the DB15 electrical interface 9 is electrically connected with the input end or the output end of the detection and temperature compensator 5 and the flow control driver 6 respectively, the input end or the output end of the RS485 interface 10 is electrically connected with the input end or the output end of the flow signal processor 8, the output end of the gas selector switch 11 is electrically connected with the input end of the flow signal processor 8, through the flow signal processor 8 and the gas selector switch 11, the gas selector switch is an eight-bit coding switch to realize electrical combination, gas flow parameters such as gas conversion coefficient, minimum flow rate, flow rate zero point, pipeline diameter, medium coefficient, full flow rate, instrument address, flow meter formula calibration parameters and the like are preset aiming at the type of gas of which the mass flow is to be measured and controlled, and are stored in a data storage unit of the mass flow signal processor in advance, in the technical field, the heat distribution type micro mass flow meter can measure and control 256 kinds of gas; the fifth working mode of the invention is a further optimization scheme of the gas universal combined type heat distribution type micro mass flow meter, if a user needs to research various algorithms such as measurement and control of mass flow of any gas, the fifth working mode of the invention is based on the fourth working mode of the invention, the RS485 interface 10 transmits various measurement and control algorithm software programmed by an upper computer PC to the CPU of the flow signal processor 8, the CPU of the flow signal processor 8 adopts a DSP digital processing chip TMS320F28335, and can research various measurement and control algorithms, and the heat distribution type micro mass flow meter can realize the research of various measurement and control algorithms of 256 gases.
In the present embodiment, the detection base 1 includes a housing 11, a turbulence filter 12, and a laminar flow element 13; wherein the turbulent filter 12 and the laminar flow element 13 are embedded in the shell 11, so that the gas passes through the turbulent filter 12 and the laminar flow element 13 in sequence; bypass and sensor 3 include bypass survey buret 31, heating coil RH, upstream sensor Rt1 and downstream sensor Rt2, heating coil RH, upstream sensor Rt1 and downstream sensor Rt2 wind respectively on the outer wall of bypass survey buret 31, and heating coil RH is located the centre of bypass survey buret 31, and upstream sensor Rt1 and downstream sensor Rt2 are located the both sides of heating coil and mutual symmetry respectively, bypass test pipe 31's air inlet and gas outlet communicate with casing 11 respectively, and bypass test pipe 31's air inlet is located between turbulence filter 12 and laminar flow element 13, and bypass test pipe 31's gas outlet is located between laminar flow element 13 and detection base 1 gas outlet.
In this embodiment, the detection and temperature compensator 5 includes a resistor R1, a resistor R2, a flow detection circuit IC1, a temperature compensation circuit IC2, a heating power supply IC3, a power supply regulator IC4 and a CPU monitoring circuit IC5, and the flow detection circuit IC1, the temperature compensation circuit IC2, the heating power supply IC3, the power supply regulator IC4 and the CPU monitoring circuit IC5 may all adopt a lissah RL78/L13 single chip microcomputer; wherein, the resistor R1 and the resistor R2 are connected with the upstream sensor Rt1 and the downstream sensor Rt2 to form a Wheatstone bridge circuit, the output terminal of the Wheatstone bridge circuit is electrically connected with the input terminal of the temperature compensation circuit IC2 and the input terminal of the flow detection circuit IC1, the input terminal of the Wheatstone bridge circuit is electrically connected with the output terminal of the upstream sensor Rt1 and the output terminal of the downstream sensor Rt2 of the bypass and the sensor 3, the output terminal of the temperature compensation circuit IC2 is also electrically connected with the input terminal of the Wheatstone bridge circuit after passing through the resistor R3 and the emitter of the power tube Q1, the output terminal of the flow detection circuit IC1 is electrically connected with the input terminal of the flow control driver 6, the input terminal of the flow alarm display 7 and the input/output terminal of the flow signal processor 8, the input terminal of the flow detection circuit IC1 is also electrically connected with the output terminal of the CPU monitoring circuit IC5, the input end of the heating power supply IC3 is electrically connected with a heating coil RH of the detection and bypass sensor 3; the input end of the power supply regulator IC4 is electrically connected with the DB15 electrical interface 9, and the output end of the power supply regulator IC4 provides working power supply for the detection and temperature compensator 5; the input and output terminals of the CPU monitor circuit IC5 are electrically connected to the input and output terminals of the flow rate control driver 6 and the input and output terminals of the flow rate signal processor 8.
In this embodiment, the detection base 1, the control valve base 2, the bypass and sensor 3, the flow control valve 4, the detection and temperature compensator 5, the flow control driver 6, the flow alarm display 7, the flow signal processor 8, the DB15 electrical interface 9, the RS485 interface 10, and the gas selection switch 11 are combined to measure, display, and control the mass flow of 256 gases, and scientific research can be carried out on various measurement and control algorithms proposed by users.
In the present embodiment, the three components of the detection base 1, the bypass and sensor 3 and the detection and temperature compensator 5 are combined for measuring the gas mass flow.
In the present embodiment, the detection base 1, the bypass and sensor 3, the detection and temperature compensator 5 and the flow alarm display 7 are combined for measuring the gas mass flow and displaying the gas mass flow in real time.
In the present embodiment, six components, namely, the detection base 1, the control valve base 2, the bypass and sensor 3, the flow control valve 4, the detection and temperature compensator 5 and the flow control actuator 6, are combined for measuring and controlling the gas mass flow.
In the present embodiment, the combination of the three components, i.e., the control valve base 2, the flow control valve 4 and the flow control actuator 6, is used to provide a user with a new mass flow detection mode and control research.
The embodiments of the present invention are described in detail above with reference to the drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention.

Claims (8)

1.一种气体通用型组合式及热分布式微型质量流量计，其特征在于包括：检测基座（1）、控制阀基座（2）、旁路与传感器（3）、流量控制阀（4）、检测与温度补偿器（5）、流量控制驱动器（6）、流量报警显示屏（7）、流量信号处理器（8）、DB15电气接口（9）、RS485接口（10）及气体选择开关（11）；其中，所述控制阀基座（2）可拆卸的安装在检测基座（1）的出气口处，所述旁路与传感器（3）可拆卸的安装在检测基座（1）上并与检测基座（1）连通，所述流量控制阀（4）安装在控制阀基座（2）上；所述检测与温度补偿器（5）的输入端与旁路与传感器（3）电气连接，检测与温度补偿器（5）的输出端分别与流量报警显示屏（7）的输入端及流量控制驱动器（6）的输入端电气连接，检测与温度补偿器（5）的输入输出端分别与流量信号处理器（8）的输入输出端及DB15电气接口（9）的输入输出端电气连接，所述流量控制驱动器（6）的输入输出端与DB15电气接口（9）及流量信号处理器（8）的输入输出端电气连接，流量控制驱动器（6）的输出端与流量控制阀（4）的输入端电气连接，所述流量信号处理器（8）的输入输出端与RS485接口（10）的输入输出端及气体选择开关（111）的输入输出端电气连接。1. A gas universal combined type and thermally distributed miniature mass flowmeter, characterized by comprising: a detection base (1), a control valve base (2), a bypass and a sensor (3), a flow control valve ( 4), detection and temperature compensator (5), flow control driver (6), flow alarm display screen (7), flow signal processor (8), DB15 electrical interface (9), RS485 interface (10) and gas selection A switch (11); wherein the control valve base (2) is detachably installed at the air outlet of the detection base (1), and the bypass and the sensor (3) are detachably installed on the detection base ( 1) and communicate with the detection base (1), the flow control valve (4) is installed on the control valve base (2); the input end of the detection and temperature compensator (5) and the bypass and sensor (3) Electrical connection, the output end of the detection and temperature compensator (5) is respectively electrically connected to the input end of the flow alarm display screen (7) and the input end of the flow control driver (6), and the detection and temperature compensator (5) The input and output ends of the flow signal processor (8) are electrically connected to the input and output ends of the flow signal processor (8) and the input and output ends of the DB15 electrical interface (9). The input and output ends of the flow control driver (6) are electrically connected to the DB15 electrical interface (9). and the input and output ends of the flow signal processor (8) are electrically connected, the output end of the flow control driver (6) is electrically connected with the input end of the flow control valve (4), and the input and output ends of the flow signal processor (8) It is electrically connected with the input and output ends of the RS485 interface (10) and the input and output ends of the gas selection switch (111). 2.根据权利要求1所述的一种气体通用型组合式及热分布式微型质量流量计，其特征在于所述检测基座（1）包括壳体（11）、湍流滤波器（12）及层流元件（13）；其中湍流滤波器（12）及层流元件（13）嵌入于壳体（11）中使气体依次通过湍流滤波器（12）及层流元件（13）；所述旁路与传感器（3）包括旁路测量管（31）、加热线圈RH、上游传感器Rt1和下游传感器Rt2，所述加热线圈RH、上游传感器Rt1及下游传感器Rt2分别绕在旁路测量管（31）的外壁上，加热线圈RH位于旁路测量管（31）的中间，上游传感器Rt1及下游传感器Rt2分别位于加热线圈的两边且相互对称，所述旁路测试管（31）的进气口及出气口分别与壳体（11）连通，旁路测试管（31）的进气口位于湍流滤波器（12）及层流元件（13）之间，旁路测试管（31）的出气口位于层流元件（13）与检测基座（1）出气口之间。2. A gas universal combined type and thermally distributed miniature mass flowmeter according to claim 1, characterized in that the detection base (1) comprises a housing (11), a turbulence filter (12) and A laminar flow element (13); wherein the turbulent flow filter (12) and the laminar flow element (13) are embedded in the casing (11) so that the gas passes through the turbulent flow filter (12) and the laminar flow element (13) in sequence; The road and sensor (3) comprises a bypass measuring tube (31), a heating coil RH, an upstream sensor Rt1 and a downstream sensor Rt2, the heating coil RH, the upstream sensor Rt1 and the downstream sensor Rt2 are respectively wound around the bypass measuring tube (31) On the outer wall of the heating coil, the heating coil RH is located in the middle of the bypass measuring tube (31), the upstream sensor Rt1 and the downstream sensor Rt2 are located on both sides of the heating coil and are symmetrical to each other. The air ports are respectively communicated with the housing (11), the air inlet of the bypass test pipe (31) is located between the turbulence filter (12) and the laminar flow element (13), and the air outlet of the bypass test pipe (31) is located in the laminar flow element (13). between the flow element (13) and the air outlet of the detection base (1). 3.根据权利要求2所述的一种气体通用型组合式及热分布式微型质量流量计，其特征在于所述检测与温度补偿器（5）包括电阻R1、电阻R2、流量检测电路IC1、温度补偿电路IC2、加热电源IC3、电源调节器IC4以及CPU监控电路IC5；其中，所述电阻R1、电阻R2与上游传感器Rt1及下游传感器Rt2连接形成惠登斯电桥电路，所述惠登斯电桥电路的输出端分别与温度补偿电路IC2的输入端和流量检测电路IC1的输入端电气连接，惠登斯电桥电路的输入端分别与旁路与传感器（3）的上游传感器Rt1的输出端、下游传感器Rt2的输出端电气连接，所述温度补偿电路IC2的输出端经电阻R3及功率管Q1的发射极后也与惠登斯电桥电路的输入端电气连接，所述流量检测电路IC1的输出端分别与流量控制驱动器（6）的输入端、流量报警显示屏（7）的输入端及流量信号处理器（8）的输入输出端电气连接，流量检测电路IC1输入端还与CPU监控电路IC5的输出端电气连接，所述加热电源IC3的输入端与检测与旁路传感器（3）的加热线圈RH电气连接；所述电源调节器IC4的输入端与DB15电气接口（9）电气连接，电源调节器IC4的输出端为检测与温度补偿器（5）提供工作电源；CPU监控电路IC5的输入端输出端与流量控制驱动器（6）的输入输出端及流量信号处理器（8）的输入输出端电气连接。3. A gas universal combined type and thermally distributed miniature mass flowmeter according to claim 2, characterized in that the detection and temperature compensator (5) comprises a resistor R1, a resistor R2, a flow detection circuit IC1, The temperature compensation circuit IC2, the heating power supply IC3, the power regulator IC4 and the CPU monitoring circuit IC5; wherein, the resistor R1 and the resistor R2 are connected with the upstream sensor Rt1 and the downstream sensor Rt2 to form a Wheatens bridge circuit. The output end of the bridge circuit is electrically connected with the input end of the temperature compensation circuit IC2 and the input end of the flow detection circuit IC1 respectively, and the input end of the Wheatens bridge circuit is respectively connected with the bypass and the output of the upstream sensor Rt1 of the sensor (3). terminal and the output terminal of the downstream sensor Rt2 are electrically connected, the output terminal of the temperature compensation circuit IC2 is also electrically connected to the input terminal of the Wheatens bridge circuit through the resistor R3 and the emitter of the power tube Q1, the flow detection circuit The output end of IC1 is respectively electrically connected with the input end of the flow control driver (6), the input end of the flow alarm display screen (7) and the input and output ends of the flow signal processor (8). The input end of the flow detection circuit IC1 is also connected to the CPU The output end of the monitoring circuit IC5 is electrically connected, and the input end of the heating power supply IC3 is electrically connected to the heating coil RH of the detection and bypass sensor (3); the input end of the power conditioner IC4 is electrically connected to the DB15 electrical interface (9) The output terminal of the power regulator IC4 provides the working power supply for the detection and temperature compensator (5); the input terminal and output terminal of the CPU monitoring circuit IC5 are connected with the input and output terminals of the flow control driver (6) and the flow signal processor (8). The input and output terminals are electrically connected. 4.根据权利要求1所述的一种气体通用型组合式及热分布式微型质量流量计，其特征在于所述的检测基座（1）、控制阀基座（2）、旁路与传感器（3）、流量控制阀（4）、检测与温度补偿器（5）、流量控制驱动器（6）、流量报警显示屏（7）、流量信号处理器（8）、DB15电气接口（9）、RS485接口（10）及气体选择开关（11）组合，对256种气体实现质量流量测定及显示与控制，并且能够对用户提出的各种测定和控制算法开展科学研究。4. A gas universal combined type and thermally distributed miniature mass flowmeter according to claim 1, characterized in that the detection base (1), the control valve base (2), the bypass and the sensor (3), flow control valve (4), detection and temperature compensator (5), flow control driver (6), flow alarm display screen (7), flow signal processor (8), DB15 electrical interface (9), The combination of RS485 interface (10) and gas selection switch (11) can realize mass flow measurement, display and control of 256 kinds of gases, and can carry out scientific research on various measurement and control algorithms proposed by users. 5.根据权利要求1所述的一种气体通用型组合式及热分布式微型质量流量计，其特征在于所述的检测基座（1）、旁路与传感器（3）和检测与温度补偿器（5）三个部件组合后用于对气体质量流量进行测定。5. A gas universal combined type and thermally distributed miniature mass flowmeter according to claim 1, characterized in that the detection base (1), bypass and sensor (3) and detection and temperature compensation The three components of the device (5) are combined to measure the gas mass flow. 6.根据权利要求1所述的一种气体通用型组合式及热分布式微型质量流量计，其特征在于所述的检测基座（1）、旁路与传感器（3）、检测与温度补偿器（5）和流量报警显示屏（7）四个部件组合用于对气体质量流量进行测定以及实时显示。6. A gas universal combined type and thermally distributed miniature mass flowmeter according to claim 1, characterized in that the detection base (1), bypass and sensor (3), detection and temperature compensation The four components of the device (5) and the flow alarm display screen (7) are used to measure and display the gas mass flow in real time. 7.根据权利要求1所述的一种气体通用型组合式及热分布式微型质量流量计，其特征在于所述的检测基座（1）、控制阀基座（2）、旁路与传感器（3）、流量控制阀（4）、检测与温度补偿器（5）及流量控制驱动器（6）六个部件组合用于对气体质量流量进行测定和控制。7. A gas universal combined type and thermally distributed miniature mass flowmeter according to claim 1, characterized in that the detection base (1), the control valve base (2), the bypass and the sensor (3), the flow control valve (4), the detection and temperature compensator (5) and the flow control driver (6) are combined to measure and control the gas mass flow. 8.根据权利要求1所述的一种气体通用型组合式及热分布式微型质量流量计，其特征在于所述的控制阀基座（2）、流量控制阀（4）及流量控制驱动器（6）三个部件组合用于提供用户实现提出的新型质量流量检测方式和控制研究。8. A gas universal combined type and thermally distributed miniature mass flowmeter according to claim 1, characterized in that the control valve base (2), the flow control valve (4) and the flow control driver ( 6) The combination of three components is used to provide users with the proposed new mass flow detection method and control research.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113391653A (en) * 2021-05-30 2021-09-14 合肥工业大学 Distributed multifunctional gas mass flow controller based on single chip microcomputer

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101126652A (en) * 2007-09-29 2008-02-20 重庆前卫仪表厂 Electronic gas meter for mass and flow
CN101421592A (en) * 2003-08-14 2009-04-29 流体元件国际公司 Dynamic mixed gas flowmeter
CN102644787A (en) * 2011-02-15 2012-08-22 株式会社堀场Stec Fluid control device and pressure control device
CN103207626A (en) * 2012-01-16 2013-07-17 中国科学院空间科学与应用研究中心 Gas flow control system and gas flow control method for space microgravity combustion experiment
CN104254812A (en) * 2013-03-01 2014-12-31 日立金属株式会社 Mass flow controller and method for improved performance across fluid types
CN207113982U (en) * 2017-08-29 2018-03-16 杭州先锋电子技术股份有限公司 A kind of detection means for detecting gas meter, flow meter card table
CN208038489U (en) * 2018-02-12 2018-11-02 唐山钢铁集团微尔自动化有限公司 A kind of double bypass flow control devices of LF furnace bottoms Argon
CN213956489U (en) * 2020-12-23 2021-08-13 佛山索弗克氢能源有限公司 Gas universal combined and heat distributed miniature mass flowmeter

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101421592A (en) * 2003-08-14 2009-04-29 流体元件国际公司 Dynamic mixed gas flowmeter
CN101126652A (en) * 2007-09-29 2008-02-20 重庆前卫仪表厂 Electronic gas meter for mass and flow
CN102644787A (en) * 2011-02-15 2012-08-22 株式会社堀场Stec Fluid control device and pressure control device
CN103207626A (en) * 2012-01-16 2013-07-17 中国科学院空间科学与应用研究中心 Gas flow control system and gas flow control method for space microgravity combustion experiment
CN104254812A (en) * 2013-03-01 2014-12-31 日立金属株式会社 Mass flow controller and method for improved performance across fluid types
CN207113982U (en) * 2017-08-29 2018-03-16 杭州先锋电子技术股份有限公司 A kind of detection means for detecting gas meter, flow meter card table
CN208038489U (en) * 2018-02-12 2018-11-02 唐山钢铁集团微尔自动化有限公司 A kind of double bypass flow control devices of LF furnace bottoms Argon
CN213956489U (en) * 2020-12-23 2021-08-13 佛山索弗克氢能源有限公司 Gas universal combined and heat distributed miniature mass flowmeter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113391653A (en) * 2021-05-30 2021-09-14 合肥工业大学 Distributed multifunctional gas mass flow controller based on single chip microcomputer

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