CN213934277U - Device for preparing diffraction grating by femtosecond laser multipath parallel technology - Google Patents
Device for preparing diffraction grating by femtosecond laser multipath parallel technology Download PDFInfo
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- CN213934277U CN213934277U CN202022545249.4U CN202022545249U CN213934277U CN 213934277 U CN213934277 U CN 213934277U CN 202022545249 U CN202022545249 U CN 202022545249U CN 213934277 U CN213934277 U CN 213934277U
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Abstract
A device for preparing diffraction gratings by utilizing a femtosecond laser multipath parallel technology comprises a femtosecond laser system, a first collimation diaphragm, a second collimation diaphragm, a half-wave plate, a Glan Taylor polarizer, an electronic high-speed shutter, a first computer, a first convex lens, a pinhole filter, a second convex lens, a double-lens, a Dammann grating, a convergent lens, a three-dimensional precision moving platform, a glass substrate attached with a metal film, an illumination light source, a semi-transparent semi-reflecting mirror, a CCD camera, a second computer and a helium neon laser light source. The utility model realizes femtosecond laser multi-path parallel direct writing processing based on Dammann grating uniform beam splitting property, thereby greatly improving processing efficiency; LabView software is adopted to write a control program in the processing process, so that the grating processing can be completed at one time, and the adjustment is convenient; the CCD camera is adopted to observe the surface appearance and the reflected light diffraction pattern of the processed grating in real time, so that the processing quality is ensured. The utility model discloses have good application prospect in the aspect of utilizing femto second laser preparation grating.
Description
Technical Field
The utility model belongs to the technical field of the preparation of grating, especially an utilize device of femto second laser multichannel parallel technique preparation diffraction grating.
Background
A diffraction grating is one of the most basic optical elements consisting of a large number of parallel slits of equal slit width and equal slit spacing, which, by virtue of a regular structure, subjects the amplitude or phase (or both) of the incident light to periodic spatial modulation. The diffraction grating is an important optical splitter in optics, is often applied to monochromators and spectrometers, and is also widely applied to various fields such as optical precision measurement, astronomy, optical communication, lasers and the like. Diffraction grating fabrication techniques can be broadly divided into masked photolithography techniques and maskless direct writing techniques. The mask photoetching technology has the defects of multiple processing links, long time, high cost, difficulty in controlling the alignment precision and influence of diffraction limit on the resolution ratio. In recent years, with the advent of femtosecond laser having good processing performance, femtosecond laser direct writing has attracted attention as a maskless direct writing technique in the field of micromachining. Because the femtosecond laser has the characteristics of ultrahigh peak power and ultrashort pulse width, the absorbed laser energy is not conducted to the interior of the material in time of the action of the femtosecond laser and the material, and most energy is deposited in a thin layer with a certain thickness on the surface of the material. In the interaction area, the femtosecond laser with high energy density can rapidly heat the surface thin layer of the material to reach or be higher than thermodynamic critical temperature instantly, and the temperature exceeds the breakdown threshold of the ablated material, so that the surface thin layer of the material is subjected to ionization breakdown and is directly converted from a solid state to a plasma state to be sprayed outwards, and the surface of the material is separated to form ablation, thereby achieving the purpose of removing the material and realizing the laser processing with micron scale. The femtosecond laser processing material has the advantages of obvious threshold effect, small heat affected zone, smooth and sharp edge, high processing precision, strong controllability and the like.
Currently, single-beam laser focusing is mostly adopted in the femtosecond laser direct writing technology, a material to be processed is fixed on a micro-motion platform, and single-path laser scanning of the material to be processed is realized through the movement of the micro-motion platform. The problems of low processing speed and low efficiency exist in single-path laser scanning. In order to improve efficiency, a multi-path parallel mode is generally adopted for processing, and one method is realized by utilizing a cascade mode of a plurality of beam splitters, which undoubtedly increases complexity of optical path realization and debugging. The other method is realized by a micro-lens array, and the method has the defects of high manufacturing cost, high requirement on light source uniformity, insufficient utilization rate of light beam energy and the like.
Disclosure of Invention
In order to overcome the defects and deficiencies in the prior art, the utility model provides an utilize femto second laser multichannel parallel technology to prepare diffraction grating's device. The device is based on Dammann grating beam splitting characteristics, and the moving track and the shutter switch of the three-dimensional precision moving platform are controlled through LabView software in a linkage mode, so that femtosecond laser multi-path parallel processing of the grating can be realized. Besides, the device can observe the surface appearance and the reflected light diffraction pattern of the grating in real time while preparing the grating.
In order to achieve the above object, the technical solution of the present invention is as follows:
a device for preparing diffraction grating by utilizing femtosecond laser multipath parallel technology comprises a femtosecond laser system, a first collimation diaphragm, a second collimation diaphragm, a half-wave plate, a Glan Taylor polarizer, an electronic high-speed shutter, a first computer, a first convex lens, a pinhole filter, a second convex lens, a dichroic mirror, a Dammann grating, a convergent lens, a three-dimensional precision moving platform, a glass substrate attached with a metal film, an illumination light source, a half-transmitting half-reflecting mirror, a CCD camera, a second computer and a helium neon laser light source; the device is characterized in that a femtosecond laser beam emitted from a femtosecond laser system sequentially passes through a first collimating diaphragm, a second collimating diaphragm, a half wave plate, a Glan-Taylor polarizing prism and an electronic high-speed shutter, the electronic high-speed shutter is connected with a first computer through a controller, and a software program in the first computer can be used for controlling the opening and closing of the electronic high-speed shutter; the light beam is focused on a glass substrate which is fixed on a three-dimensional precise moving platform and is provided with a metal film through a first convex lens, a pinhole filter, a second convex lens, a dichroic mirror, a Dammann grating and a converging lens, the dichroic mirror is placed at an angle of 45 degrees with a light path, the light beam generates diffracted light beams in different directions after passing through the Dammann grating, the diffracted light beams are focused on the glass substrate which is provided with the metal film through the converging lens to form a plurality of focusing light spots with uniform energy, an illumination light source irradiates the surface of a sample to provide a bright field of view, the three-dimensional precise moving platform is connected with a first computer, and the positioning and moving of the three-dimensional precise moving platform can be controlled by the first computer; the semi-transparent semi-reflecting mirror and the CCD camera are sequentially arranged on the transmission side of the dichroic mirror, the semi-transparent semi-reflecting mirror and the light path are arranged at an angle of 45 degrees, the CCD camera is connected with a second computer, and the helium-neon laser light source is arranged on the reflection side of the semi-transparent semi-reflecting mirror.
The femtosecond laser system is a high-power high-repetition-frequency photonic crystal fiber femtosecond laser system which is composed of an oscillation level and an amplification level and has the central wavelength of 1040 nm.
The half wave plate and the Glan Taylor polarizing prism form a laser power continuous adjusting system, and the continuous change of the femtosecond laser beam power can be realized.
The first collimating diaphragm and the second collimating diaphragm are circular diaphragms with adjustable apertures and diameters.
The electronic high-speed shutter can control the opening and closing states of the shutter after being connected with a first computer through a controller.
The first convex lens, the second convex lens and the convergent lens are achromatic biconvex lenses.
The pinhole filter can prevent dust in the air, optical elements or laser from scattering and interfering, and converts femtosecond laser beams into plane waves together with the first convex lens and the second convex lens.
The dichroic mirror is a dielectric film lens capable of realizing total reflection of a femtosecond laser light source coverage wave band and total transmission of a visible light wave band.
The Dammann grating is a 1 XN beam splitting Dammann grating with a high damage threshold value manufactured according to the requirement.
The glass substrate attached with the metal film is a substrate plated with a single-layer metal film on a glass substrate.
The three-dimensional precision moving platform is connected with a first computer, and the three-dimensional precision moving platform and a glass substrate to be processed and attached with a metal film can be subjected to three-dimensional precision positioning and movement adjustment through LabView software in the first computer.
The first computer is a computer provided with electronic high-speed shutter control software and LabView software.
The illumination light source is a white light LED light source.
The half-transmitting and half-reflecting mirror is a dielectric film lens which can realize half transmission and half reflection in visible light wave band.
The CCD camera has an optical zooming function and is connected with a second computer, and the processing process can be displayed on the screen of the second computer.
The second computer is a computer provided with CCD camera image acquisition software.
The helium neon laser light source is a common helium neon laser, the emission wavelength is 632.8nm, and the power is more than 1.5 mW.
The utility model relates to an utilize femto second laser multichannel parallel technique to prepare diffraction grating's device principle as follows:
a Dammann grating as a pure phase diffraction optical device can generate one-dimensional or two-dimensional plasma intensity spot array by optimally controlling the position and magnitude of phase change points in one period (see the literature: Zhou, Changhe, Liu, Liren. When the femtosecond laser is incident to the Dammann grating designed according to the requirement, a set number of isocandela arrays can be generated in a back focal plane through the convergent lens.
The glass substrate to be processed with the metal film attached is also placed at the back focal plane of the converging lens. When the beam-splitting femtosecond laser is focused and irradiates the metal film, free electrons in the metal generate high-frequency oscillation, electrons in a conduction band absorb laser energy by utilizing a bremsstrahlung process within pulse duration, the electron relaxation time is short, and the electron temperature is rapidly increased. Within the range of a few picoseconds to a few hundred picoseconds, the lattice obtains energy in an electron-phonon collision mode, the temperature of electrons and the lattice approximately reaches a thermal equilibrium state, the temperature in a metal material action area rapidly rises within an ultra-short time and can exceed the temperature required by melting (vaporization) of the metal material instantly, the metal material can be highly ionized, high-temperature, high-pressure and high-density plasma is generated and is outwards sprayed in a plasma form, and the ablation effect of removing the metal material is achieved. In the process, the plasma eruption almost takes away the heat generated by the femtosecond laser ablation material, and then the temperature in the processing area is reduced to the state before processing, so that the femtosecond laser cold processing is realized in a relative sense. A two-temperature model is often used to describe the process of transferring electron energy into a lattice in metals (see Chichkov B N, Momma C, Nolte S, et al. Fertosecond, picosecond and nanosecond laser associations [ J ]. Applied Physics A,1996,63(2): 109-.
Compared with the prior art, the utility model has the advantages as follows:
(1) the utility model discloses a Dammann grating carries out the beam splitting and realizes the parallel processing of multichannel, compares in single beam processing, has advantage with low costs, that machining efficiency is high.
(2) The utility model discloses a three-dimensional accurate moving platform and shutter switch coordinated control procedure are compiled to LabView software, can realize automated processing through the parameter setting, have the advantage that the regulation is convenient, the processing flexibility ratio is high.
(3) The utility model discloses the in-process of processing the grating can realize the real-time observation of grating appearance and diffraction pattern, has guaranteed processingquality.
Description of the drawings:
fig. 1 is a schematic structural diagram of an apparatus for manufacturing a diffraction grating by using a femtosecond laser multi-path parallel technique according to the present invention.
Wherein: 1-femtosecond laser system, 2-first collimation diaphragm, 3-second collimation diaphragm, 4-half wave plate, 5-Glan Taylor polarizer, 6-electronic high-speed shutter, 7-first computer, 8-first convex lens, 9-pinhole filter, 10-second convex lens, 11-dichroic mirror, 12-Dammann grating, 13-convergent lens, 14-three-dimensional precision moving platform, 15-glass substrate attached with metal film, 16-illumination light source, 17-half-lens half-mirror, 18-CCD camera, 19-second computer and 20-helium neon laser light source.
The specific implementation mode is as follows:
the present invention will be further described with reference to the following drawings and examples, but is not limited thereto.
Example 1:
The femtosecond laser system 1 is a photonic crystal fiber nonlinear femtosecond laser system composed of an oscillation stage and an amplification stage, and has a repetition frequency of 56.9MHz, a central wavelength of 1040nm, a maximum average power of 18W and a pulse width of 66.5 fs.
The first collimating diaphragm 2 and the second collimating diaphragm 3 are circular diaphragms with adjustable apertures and diameters.
The electronic high-speed shutter 6 can control the opening and closing states of the shutter 6 after being connected with the first computer 7 through the controller.
The dichroic mirror 11 is a dielectric film lens capable of realizing the total reflection of a femtosecond laser light source coverage wave band and the total transmission of a visible light wave band.
The Dammann grating 12 is a 1 XN beam splitting Dammann grating with a high damage threshold manufactured according to the requirement.
The three-dimensional precision moving platform 14 is connected with the first computer 7, and the LabView software in the first computer 7 can realize the three-dimensional precision moving and positioning of a free path, and the precision is less than 1 μm.
The glass substrate 15 with the metal film is a substrate plated with a single metal film on a glass substrate.
The first computer 7 is a computer installed with electronic shutter control software and LabView software.
The illumination source 16 is a white LED light source.
The half-transmitting and half-reflecting mirror 17 is a dielectric film lens which can realize that the transmission and the reflection of a visible light wave band respectively account for 50 percent when the half-transmitting and half-reflecting mirror is placed at an angle of 45 degrees.
The second computer 19 is a computer equipped with CCD camera image capturing software.
The helium neon laser light source 20 is a common helium neon laser, the emission wavelength is 632.8nm, and the power is more than 1.5 mW.
The femtosecond laser source used in this embodiment is a photonic crystal fiber nonlinear femtosecond laser system composed of an oscillator stage and an amplifier stage. Gain media of the system oscillation stage and the amplification stage are ytterbium-doped large-mode-field-area photonic crystal fibers, so that high compatibility and coupling efficiency between the oscillation stage and the amplification stage are ensured. The oscillating stage and the amplifying stage are both pumped by multimode commercial semiconductor lasers with the wavelength of 976 nm. After the seed pulse emitted from the oscillation stage is subjected to nonlinear amplification and grating pair compression by the gain fiber, the finally output femtosecond laser with the pulse time width of 66.5fs, the repetition frequency of 56.9MHz, the central wavelength of 1040nm and the maximum power of 18W can be obtained. The half wave plate and the Glan Taylor polarizer form a transmission light power continuous adjusting system; the first collimating diaphragm and the second collimating diaphragm are diaphragms with the maximum aperture of 20mm, which are produced by Thorlabs company; the electronic shutter is an electric control shutter produced by Vincentassociates, the clear aperture of the electronic shutter is 25mm, and the electronic shutter is communicated with a computer to control the femtosecond laser irradiation time in a process sequence; the first convex lens, the second convex lens and the converging lens are double convex lenses with antireflection films; the pinhole filter is a precise aperture adjustable filter produced by Thorlabs company; the Dammann grating is a fused quartz substrate Dammann grating with a high damage threshold value of 1 multiplied by 3 and split beams; the three-dimensional precision moving platform is an Esp300 electric control three-dimensional precision moving platform manufactured by Newport company, and is controlled by a computer to have the three-dimensional minimum resolution of 1 mu m, the positioning precision of 0.1 mu m and the stroke of 100 mm; the glass substrate with the metal film is a substrate plated with a single-layer metal film on a glass substrate; the helium neon laser light source is a common helium neon laser, the emission wavelength is 632.8nm, and the power is more than 1.5 mW.
Claims (9)
1. A device for preparing diffraction grating by utilizing femtosecond laser multipath parallel technology comprises a femtosecond laser system, a first collimation diaphragm, a second collimation diaphragm, a half-wave plate, a Glan Taylor polarizer, an electronic high-speed shutter, a first computer, a first convex lens, a pinhole filter, a second convex lens, a dichroic mirror, a Dammann grating, a convergent lens, a three-dimensional precision moving platform, a glass substrate attached with a metal film, an illumination light source, a half-transmitting half-reflecting mirror, a CCD camera, a second computer and a helium neon laser light source; the device is characterized in that a femtosecond laser beam emitted from a femtosecond laser system sequentially passes through a first collimating diaphragm, a second collimating diaphragm, a half wave plate, a Glan-Taylor polarizing prism and an electronic high-speed shutter, the electronic high-speed shutter is connected with a first computer through a controller, and a software program in the first computer can be used for controlling the opening and closing of the electronic high-speed shutter; the light beam is focused on a glass substrate which is fixed on a three-dimensional precise moving platform and is provided with a metal film through a first convex lens, a pinhole filter, a second convex lens, a dichroic mirror, a Dammann grating and a converging lens, the dichroic mirror is placed at an angle of 45 degrees with a light path, the light beam generates diffracted light beams in different directions after passing through the Dammann grating, the diffracted light beams are focused on the glass substrate which is provided with the metal film through the converging lens to form a plurality of focusing light spots with uniform energy, an illumination light source irradiates the surface of a sample to provide a bright field of view, the three-dimensional precise moving platform is connected with a first computer, and the positioning and moving of the three-dimensional precise moving platform can be controlled by the first computer; the semi-transparent semi-reflecting mirror and the CCD camera are sequentially arranged on the transmission side of the dichroic mirror, the semi-transparent semi-reflecting mirror and the light path are arranged at an angle of 45 degrees, the CCD camera is connected with a second computer, and the helium-neon laser light source is arranged on the reflection side of the semi-transparent semi-reflecting mirror.
2. The apparatus for fabricating a diffraction grating using femtosecond laser multiplexing parallel technique as claimed in claim 1, wherein the femtosecond laser system is a high power high repetition frequency photonic crystal fiber femtosecond laser system having a center wavelength of 1040nm composed of an oscillation stage and an amplification stage.
3. The apparatus for fabricating a diffraction grating using femtosecond laser multiplexing according to claim 1, wherein the first convex lens, the second convex lens and the condensing lens are achromatic biconvex lenses.
4. The apparatus for fabricating a diffraction grating using a femtosecond laser multiplexing parallel technique as set forth in claim 1, wherein the pinhole filter prevents scattering interference of dust in the air, optical elements, or laser itself, and converts the femtosecond laser beam into a plane wave with the first convex lens and the second convex lens.
5. The apparatus for preparing a diffraction grating using femtosecond laser multi-path parallel technology as claimed in claim 1, wherein the dichroic mirror is a dielectric film lens capable of realizing total reflection of the femtosecond laser source in the coverage band and total transmission of the visible light band.
6. The apparatus for fabricating a diffraction grating using femtosecond laser multiplexing according to the parallel technique as set forth in claim 1, wherein the Dammann grating is a high-threshold-of-destruction 1 xn beam-splitting Dammann grating fabricated according to the requirement.
7. The apparatus for preparing diffraction grating using femtosecond laser multi-path parallel technology as claimed in claim 1, wherein the three-dimensional precision moving platform is connected to a first computer, and the three-dimensional precision moving platform and the glass substrate to be processed and attached with the metal film can be adjusted by LabView software in the first computer.
8. The apparatus for fabricating a diffraction grating using a femtosecond laser multi-pass parallel technique according to claim 1, wherein the glass substrate attached with the metal film is a substrate on which a single metal film is plated on a glass substrate.
9. The apparatus for fabricating a diffraction grating using femtosecond laser multiplexing according to claim 1, wherein the CCD camera has an optical zoom function, and is connected to a second computer to observe the process in real time on a second computer screen.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115629442A (en) * | 2022-12-01 | 2023-01-20 | 武汉光谷航天三江激光产业技术研究院有限公司 | Device and method for parallel direct writing of large-core-diameter fiber gratings by long-focus deep femtosecond laser |
| CN117130428A (en) * | 2022-12-02 | 2023-11-28 | 上海交通大学 | NP complete problem implementation method based on programmable photon chip |
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2021
- 2021-05-11 CN CN202022545249.4U patent/CN213934277U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115629442A (en) * | 2022-12-01 | 2023-01-20 | 武汉光谷航天三江激光产业技术研究院有限公司 | Device and method for parallel direct writing of large-core-diameter fiber gratings by long-focus deep femtosecond laser |
| CN117130428A (en) * | 2022-12-02 | 2023-11-28 | 上海交通大学 | NP complete problem implementation method based on programmable photon chip |
| CN117130428B (en) * | 2022-12-02 | 2024-04-19 | 上海交通大学 | NP complete problem implementation method based on programmable photon chip |
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