CN213933446U - Device capable of detecting micro displacement and micro force - Google Patents
Device capable of detecting micro displacement and micro force Download PDFInfo
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- CN213933446U CN213933446U CN202022767066.7U CN202022767066U CN213933446U CN 213933446 U CN213933446 U CN 213933446U CN 202022767066 U CN202022767066 U CN 202022767066U CN 213933446 U CN213933446 U CN 213933446U
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Abstract
The utility model belongs to the technical field of mechanical properties precision measurement detecting instrument, specifically disclose a device of small displacement of detectable and small power, including pressure point, frame and connecting rod, the inside fixedly connected with inside casing of frame, and the flexible hinge of front end top fixedly connected with of inside casing. This device of small displacement of detectable and small power, compare with current ordinary detection device, it provides a nanometer measurement loading unit to for nanometer indentation appearance, this unit compact structure, intermediate link has been reduced, capacitanc force transducer lug connection pressure head, power value information transfer piece, reduce initial pressure point and sample contact displacement loss in the twinkling of an eye, and then improved displacement measurement precision and force measurement precision, the original data precision of nanometer indentation measurement has been improved, because this local flexible hinge and frame formula structure as an organic whole, the complete machine rigidity has more been increased, consequently, the influence of installation clearance to the compliance has been reduced, consequently, measurement accuracy has been further improved.
Description
Technical Field
The utility model relates to a mechanical properties precision measurement detecting instrument technical field specifically is a device of small displacement of detectable and small power.
Background
The machine is mainly used for detecting the surface characteristics of the material, and calculating the mechanical properties of the obtained material according to the test result, and particularly has advantages in the aspects of measuring the hardness and the elastic modulus of a surface film of the material. The main detection process of the machine is that the pressure head exerts a tiny force on the surface of the sample, the force is changed from small to large, when the force value reaches the maximum value, the pressure head is withdrawn to the initial position, and the pressure head leaves a trace on the surface of the sample. In order to obtain the mechanical property of the material, a device for driving the pressure head is required to record the force value of the stress of the sharp point of the pressure head and the pressing depth of the sharp point of the pressure head in the process that the pressure head contacts the sample. The higher the force value precision, the depth measurement precision and the deep resolution of the pressure head, the higher the precision of the whole machine can be reflected.
The existing displacement detection device is low in resolution ratio, authenticity can not be guaranteed through data obtained through tests, samples with smaller film thickness can not be detected, using requirements of people can not be well met, and technical innovation is conducted on the basis of the existing detection device according to the situation.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a device of small displacement of detectable and small power to it is low to propose current displacement detection device resolution ratio among the above-mentioned background art to solve, and the authenticity can't be guaranteed to the data that the experiment was obtained, and can't detect the sample that film thickness is littleer, can not be fine satisfies people's user demand problem.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a device of small displacement of detectable and small power, is including pressing point, frame and connecting rod, the inside fixedly connected with inside casing of frame, and the flexible hinge of the front end of inside casing top fixedly connected with, the inside fixedly connected with piezoceramics of flexible hinge, the inside middle-end fixedly connected with centre sill of inside casing, and the inside fixedly connected with of centre sill is displacement sensor for the power, the connecting rod runs through in the frame, and the below fixedly connected with pressure head mount pad of connecting rod, the inside threaded connection of pressure head mount pad has pressure point set screw, the inside bottom fixedly connected with underbeam of frame, and the middle-end swing joint of underbeam has displacement sensor, displacement sensor's front end threaded connection has capacitive sensor set screw.
Preferably, the flexible hinges and the outer frame are of an integrated structure, the number of the flexible hinges is two, and the two flexible hinges are symmetrical about the central axis of the outer frame.
Preferably, the connecting rod is perpendicular and runs through in the frame, and parallel arrangement between the axis of connecting rod and the axis of pressure head mount pad.
Preferably, the pressure head mounting seat is detachably connected with the pressure tip fixing screw, and the central axis of the pressure head mounting seat is parallel to the central axis of the pressure tip.
Preferably, the middle beam and the lower beam are arranged in parallel, and a central axis of the middle beam and a central axis of the outer frame form a 90-degree angle.
Preferably, the displacement sensor forms a detachable structure with the lower beam through a capacitor sensor fixing screw, and the central axis of the displacement sensor and the central axis of the force displacement sensor are overlapped.
Compared with the prior art, the beneficial effects of the utility model are as follows:
1. the utility model discloses a flexible hinge and piezoceramics's setting, the device is the main action part who measures the loading pressure head from taking linear actuator, mainly plays the effect that makes the pressure head go forward, and linear actuator has adopted the structure that flexible hinge and piezoceramics combined together, and when piezoceramics obtained the high resolution signal, the displacement of the exportable nanometer of linear actuator. When the reaction is completed, the pressure head can apply the nano-scale displacement and generate milli-Newton force on the surface of the sample;
2. the utility model discloses a displacement sensor's for power setting, when the pressure head with the definite speed is unlimited to be close by the test appearance surface, displacement sensor for power detects the power value and begins to carry out the power control in the twinkling of an eye, and displacement sensor lug connection pressure head for power, power value information transmission piece reduce initial pressure point and sample contact displacement loss in the twinkling of an eye, and then improved displacement measurement precision and power measurement accuracy. The accuracy of the original data of the nano-scale indentation measurement is improved;
3. the utility model uses the displacement sensor as the structure part for detecting force by the displacement sensor, the displacement sensor is a capacitance displacement sensor, and the magnitude of the force applied by the pressure point at the time is calculated by detecting the relative displacement of the capacitance displacement sensor;
4. the utility model discloses a flexible hinge and the setting of frame, local flexible hinge and frame formula structure as an organic whole more have increased the complete machine rigidity, have consequently reduced the influence of installation clearance to the flexibility, have consequently further improved measurement accuracy.
Drawings
FIG. 1 is a schematic front view of the present invention;
FIG. 2 is a schematic perspective view of the present invention;
FIG. 3 is a schematic side view of the present invention;
fig. 4 is a schematic view of the top view structure of the present invention.
In the figure: 1. a flexible hinge; 2. piezoelectric ceramics; 3. a connecting rod; 4. a middle beam; 5. a force displacement sensor; 6. a displacement sensor; 7. a lower beam; 8. a capacitance displacement sensor fixing screw; 9. pointing; 10. pressing and pointing the fixing screw; 11. a pressure head mounting base; 12. an outer frame; 13. an inner frame.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: a device capable of detecting micro displacement and micro force comprises a pressure point 9, an outer frame 12 and a connecting rod 3, wherein an inner frame 13 is fixedly connected inside the outer frame 12, a flexible hinge 1 is fixedly connected above the front end of the inner frame 13, an integrated structure is formed between the flexible hinge 1 and the outer frame 12, the number of the flexible hinges 1 is two, the two flexible hinges 1 are symmetrical relative to the central axis of the outer frame 12, and the flexible hinge 1 and the outer frame 12 are integrated through the arrangement of the flexible hinge 1 and the outer frame 12, so that the rigidity of the whole machine is increased, the influence of an installation gap on flexibility is reduced, and the measurement precision is further improved;
the piezoelectric ceramic 2 is fixedly connected inside the flexible hinge 1, the device is provided with a linear actuator which is a main action part for measuring and loading a pressure head through the arrangement of the flexible hinge 1 and the piezoelectric ceramic 2, the linear actuator mainly plays a role of advancing the pressure head, the linear actuator adopts a structure of combining the flexible hinge 1 and the piezoelectric ceramic 2, when the piezoelectric ceramic 2 obtains a high-resolution signal, the linear actuator can output nano-scale displacement, and the nano-scale displacement can be applied and millinewton-level force can be generated on the surface of a sample through reaction when the pressure head is reacted;
the inside middle-end fixedly connected with centre sill 4 of inside casing 13, and the inside fixedly connected with of centre sill 4 is power with displacement sensor 5, through the setting of power with displacement sensor 5, when the pressure head infinitely approaches by the test sample surface with the constant speed, power with displacement sensor 5 detects the power value and begins to carry out the force control in the twinkling of an eye, power with displacement sensor 5 lug connection pressure head, power value information transfer piece. The loss of the initial pressure point 9 and the sample in contact instant displacement is reduced, and the displacement measurement precision and the force measurement precision are further improved. The accuracy of the original data of the nano-scale indentation measurement is improved;
the connecting rod 3 penetrates through the outer frame 12, a pressure head mounting seat 11 is fixedly connected below the connecting rod 3, the connecting rod 3 vertically penetrates through the outer frame 12, the central axis of the connecting rod 3 and the central axis of the pressure head mounting seat 11 are arranged in parallel, the pressure head mounting seat 11 and a pressure tip 9 fixing screw are detachably connected, the central axis of the pressure head mounting seat 11 and the central axis of the pressure tip 9 are arranged in parallel, a pressure tip fixing screw 10 is connected to the inner thread of the pressure head mounting seat 11, a lower beam 7 is fixedly connected to the inner bottom end of the outer frame 12, a displacement sensor 6 is movably connected to the middle end of the lower beam 7, a middle beam 4 and the lower beam 7 are arranged in parallel, the central axis of the middle beam 4 and the central axis of the outer frame 12 are 90 degrees, the displacement sensor 6 is arranged, a structural part for detecting force of the device uses the displacement sensor 6, and the displacement sensor 6 is a capacitance displacement sensor, calculating the force applied to the pressure tip 9 at that time by detecting the relative displacement of the capacitance displacement sensor;
the front end of the displacement sensor 6 is in threaded connection with a capacitor sensor fixing screw 8, the displacement sensor 6 and the lower beam 7 form a detachable structure through the capacitor sensor fixing screw 8, and the central axis of the displacement sensor 6 and the central axis of the force displacement sensor 5 are arranged in a superposition mode.
The working principle is as follows: when the device capable of detecting the micro displacement and the micro force is used, the flexible hinge 1 and the outer frame 12 are integrated, the flexible hinge 1 is connected with the inner frame 13 after one-time processing is finished, the piezoelectric ceramic 2 is embedded into the flexible hinge 1, when the piezoelectric ceramic 2 extends or shortens, the flexible hinge 1 moves along with the flexible hinge 1, the inner frame 13 moves along with the flexible hinge 1, the middle beam 4 is arranged in the inner frame 13, the middle beam 4 and the inner frame 13 are integrated, the force displacement sensor 5 is arranged in the middle of the middle beam 4, the force displacement sensor 5 can measure the movement of the connecting rod 3 relative to the inner frame 13, the stress magnitude of the pressure tip 9 is further calculated, the pressure head mounting seat 11 is arranged on the connecting rod 3, the pressure tip 9 is arranged on the pressure head mounting seat 11 and is fixed through the pressure tip fixing screw 10 to prevent the pressure tip 9 from falling off the pressure head mounting seat 11, the lower beam 7 is fixed on the outer frame 12, the displacement sensor 6 is fixed on the lower beam 7 by the capacitance sensor fixing screw 8, the movement of the link 3 reflects the movement of the pressure point 9, and therefore the displacement of the link 3 measured by the displacement sensor 6 is the displacement of the pressure point 9 relative to the outer frame 12, which is the operation principle of the device capable of detecting a minute displacement and a minute force.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a device of detectable small displacement and small power, includes pressure point (9), frame (12) and connecting rod (3), its characterized in that: an inner frame (13) is fixedly connected inside the outer frame (12), a flexible hinge (1) is fixedly connected above the front end of the inner frame (13), the interior of the flexible hinge (1) is fixedly connected with piezoelectric ceramics (2), the middle end of the interior of the inner frame (13) is fixedly connected with a middle beam (4), and the inner part of the middle beam (4) is fixedly connected with a force displacement sensor (5), the connecting rod (3) penetrates through the outer frame (12), a pressure head mounting seat (11) is fixedly connected below the connecting rod (3), a pressure point fixing screw (10) is connected with the inner thread of the pressure head mounting seat (11), a lower beam (7) is fixedly connected with the inner bottom end of the outer frame (12), and the middle end of the lower beam (7) is movably connected with a displacement sensor (6), and the front end of the displacement sensor (6) is in threaded connection with a capacitor sensor fixing screw (8).
2. The device of claim 1, wherein the micro-displacement and micro-force detecting unit comprises: the flexible hinge structure is characterized in that the flexible hinges (1) and the outer frame (12) are of an integrated structure, the number of the flexible hinges (1) is two, and the two flexible hinges (1) are symmetrical about the central axis of the outer frame (12).
3. The device of claim 1, wherein the micro-displacement and micro-force detecting unit comprises: the connecting rod (3) is vertically penetrated through the outer frame (12), and the central axis of the connecting rod (3) and the central axis of the pressure head mounting seat (11) are arranged in parallel.
4. The device of claim 1, wherein the micro-displacement and micro-force detecting unit comprises: the pressure head mounting seat (11) is detachably connected with a pressure tip (9) fixing screw, and the central axis of the pressure head mounting seat (11) is parallel to the central axis of the pressure tip (9).
5. The device of claim 1, wherein the micro-displacement and micro-force detecting unit comprises: the middle beam (4) and the lower beam (7) are arranged in parallel, and the central axis of the middle beam (4) and the central axis of the outer frame (12) form a 90-degree angle.
6. The device of claim 1, wherein the micro-displacement and micro-force detecting unit comprises: displacement sensor (6) pass through capacitive sensor set screw (8) and constitute detachable construction with underbeam (7), and coincide between the axis of displacement sensor (6) and the axis of power displacement sensor (5) sets up.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022767066.7U CN213933446U (en) | 2020-11-26 | 2020-11-26 | Device capable of detecting micro displacement and micro force |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022767066.7U CN213933446U (en) | 2020-11-26 | 2020-11-26 | Device capable of detecting micro displacement and micro force |
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| CN213933446U true CN213933446U (en) | 2021-08-10 |
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| CN202022767066.7U Active CN213933446U (en) | 2020-11-26 | 2020-11-26 | Device capable of detecting micro displacement and micro force |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114137073A (en) * | 2021-11-22 | 2022-03-04 | 吉林大学 | Device and method for measuring excitation response of solid medium to ultrasonic frequency vibration |
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2020
- 2020-11-26 CN CN202022767066.7U patent/CN213933446U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114137073A (en) * | 2021-11-22 | 2022-03-04 | 吉林大学 | Device and method for measuring excitation response of solid medium to ultrasonic frequency vibration |
| CN114137073B (en) * | 2021-11-22 | 2024-01-26 | 吉林大学 | Device and method for measuring response of solid medium to ultrasonic vibration excitation |
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