CN103697818B - Calibration device of micro-displacement sensor based on single-freedom and flexible fine motion guiding mechanism - Google Patents
Calibration device of micro-displacement sensor based on single-freedom and flexible fine motion guiding mechanism Download PDFInfo
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- CN103697818B CN103697818B CN201310675863.4A CN201310675863A CN103697818B CN 103697818 B CN103697818 B CN 103697818B CN 201310675863 A CN201310675863 A CN 201310675863A CN 103697818 B CN103697818 B CN 103697818B
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Abstract
Calibration device of micro-displacement sensor based on single-freedom and flexible fine motion guiding mechanism belongs to precise jiggle adjustment and detection field, it is therefore intended that solve the repetitive positioning accuracy difference of the measurement that prior art exists and the problem of long-time stability difference.The present invention includes adjusting frame, piezoelectric actuator and reference-calibrating assembly；Described piezoelectric actuator is fixed on described adjustment frame, described piezoelectric actuator drives the moving lever motion adjusting frame, described reference-calibrating assembly is fixed on described adjustment frame, and described reference-calibrating assembly and micro-displacement sensor to be calibrated measure the output shift quantity of described moving lever simultaneously.The invention provides a kind of telecontrol equipment that micrometric displacement can be provided and a kind of higher sensor grating scale of precision as detection benchmark, measured the output displacement of moving lever, it is achieved the demarcation to micro-displacement sensor to be calibrated by grating scale and micro-displacement sensor to be calibrated simultaneously.This caliberating device has simple in construction, and repetitive positioning accuracy is high and good long term stability.
Description
Technical field
The invention belongs to precise jiggle adjustment and detection field, be specifically related to a kind of calibration device of micro-displacement sensor based on single-freedom and flexible fine motion guiding mechanism.
Background technology
Micro-displacement sensor is as the detecting device of precise jiggle guiding mechanism, and its performance indications directly determine the closed loop control precision of guiding mechanism, it is therefore desirable to it is demarcated.
Publication number is that the Chinese patent of CN202501835U discloses a key name and is called the technical scheme of a kind of vertical straight line displacement transducer demarcation/calibration device, this device adopts linear electric motors as driving, adopt precise guide rail seat as guiding, adopt grating scale as reference-calibrating, but owing to have employed linear electric motors and guide rail, motor process also exists the shortcomings such as friction, hysterisis error, the repetitive positioning accuracy of impact measurement and long-time stability.Publication number is the technical scheme that the Chinese patent of CN102374846A discloses that denomination of invention is a kind of closed type displacement sensor calibrating device, tested sensor rotating ring is arranged on moving axis, moving axis adopts power motor as driving, adopt angular contact bearing as support, the standard transducer of opposite side is led by differential head, bearing is as guiding, but owing to have employed power motor and bearing, motor process equally exists the shortcomings such as friction, hysterisis error, and the difficulty that required parts are many, process, debug strengthens.
Summary of the invention
It is an object of the invention to propose a kind of calibration device of micro-displacement sensor based on single-freedom and flexible fine motion guiding mechanism, solve the repetitive positioning accuracy difference of the measurement that prior art exists and the problem of long-time stability difference.
For achieving the above object, the calibration device of micro-displacement sensor based on single-freedom and flexible fine motion guiding mechanism of the present invention includes adjusting frame, piezoelectric actuator and reference-calibrating assembly；
Described piezoelectric actuator is fixed on described adjustment frame, described piezoelectric actuator drives the moving lever motion adjusting frame, described reference-calibrating assembly is fixed on described adjustment frame, and described reference-calibrating assembly and micro-displacement sensor to be calibrated measure the output shift quantity of described moving lever simultaneously.
Described adjustment frame includes adjusting frame housing, outside shell fragment, inner side shell fragment, upper connecting rod, lower link, moving lever；Described adjustment frame housing is connected with upper connecting rod and lower link respectively through two outside shell fragments, and described moving lever is connected with upper connecting rod and lower link respectively through two inner side shell fragments.
Described adjustment frame is integral type structure, overall symmetrical about moving lever major axis, and described adjustment frame is by low-speed WEDM or electrochemical corrosion processing.
Piezoelectric actuator is fixed on adjustment frame housing, actuation movement bar moves, described reference-calibrating assembly is fixed on described adjustment frame housing, and described reference-calibrating assembly measures the output shift quantity of described moving lever with the micro-displacement sensor to be calibrated being arranged on described adjustment frame housing simultaneously.
Described reference-calibrating assembly includes grating scale, grating ruler reading head and read head support, described grating scale is adhesively fixed on moving lever, described grating ruler reading head is fixed by a pin on read head support, described read head support is fixed by screws on adjustment frame housing, described read head is vertical with the direction of motion of described moving lever, and the data that described grating ruler reading head obtains by measuring grating scale motion are as the benchmark data of output shift quantity.
The invention have the benefit that the calibration device of micro-displacement sensor based on single-freedom and flexible fine motion guiding mechanism of the present invention is in micro-displacement sensor calibration process, provide a kind of telecontrol equipment that micrometric displacement can be provided and a kind of higher sensor grating scale of precision as detection benchmark, measured the output displacement of moving lever, it is achieved the demarcation to micro-displacement sensor to be calibrated by grating scale and micro-displacement sensor to be calibrated simultaneously.Present configuration is simple, the shortcoming being absent from friction and hysterisis error in motor process, and repetitive positioning accuracy is high, long-time stability are strong.
Accompanying drawing explanation
Fig. 1 is the calibration device of micro-displacement sensor overall structure front view based on single-freedom and flexible fine motion guiding mechanism of the present invention；
Fig. 2 is the calibration device of micro-displacement sensor overall structure schematic diagram based on single-freedom and flexible fine motion guiding mechanism of the present invention；
Fig. 3 be the present invention based on the adjustment shelf structure schematic diagram in the calibration device of micro-displacement sensor of single-freedom and flexible fine motion guiding mechanism；
Wherein: 1, adjust frame, 101, adjust frame housing, 102, outside shell fragment, 103, inner side shell fragment, 104, upper connecting rod, 105, lower link, 106, moving lever, 2, piezoelectric actuator, 3, micro-displacement sensor to be calibrated, 4, reference-calibrating assembly, 401, grating scale, 402, grating ruler reading head, 403, read head support.
Detailed description of the invention
Below in conjunction with accompanying drawing, embodiments of the present invention are described further.
Referring to accompanying drawing 1, accompanying drawing 2 and accompanying drawing 3, the calibration device of micro-displacement sensor based on single-freedom and flexible fine motion guiding mechanism of the present invention includes adjusting frame 1, piezoelectric actuator 2 and reference-calibrating assembly 4；
Described piezoelectric actuator 2 is fixed on described adjustment frame 1, and input displacement is acted on the moving lever 106 adjusting frame 1, the moving lever 106 adjusting frame 1 is driven to move, described micro-displacement sensor to be calibrated 3 is fixed on the opposite side adjusting frame 1, for measuring the output shift quantity of moving lever 106, described reference-calibrating assembly 4 is fixed on described adjustment frame 1, described reference-calibrating assembly 4 and micro-displacement sensor 3 to be calibrated measure the output shift quantity of described moving lever 106 simultaneously, and then realize the demarcation to micro-displacement sensor 3 to be calibrated.
Described adjustment frame 1 includes adjusting frame housing 101, outside shell fragment 102, inner side shell fragment 103, upper connecting rod 104, lower link 105 and moving lever 106；Described adjustment frame housing 101 is connected with upper connecting rod 104 and lower link 105 respectively through two outside shell fragments 102, described moving lever 106 is connected with upper connecting rod 104 and lower link 105 respectively through two inner side shell fragments 103, described piezoelectric actuator 2 is fixed on adjustment frame housing 101, actuation movement bar 106 moves, described moving lever 106 should meet the following conditions with described micro-displacement sensor 3 measuring surface to be calibrated in the horizontal direction near the end of micro-displacement sensor 3 side to be calibrated: the movement travel of moving lever 106 is more than the range of micro-displacement sensor 3 to be calibrated, and in moving lever 106 motor process, the measuring surface of micro-displacement sensor 3 to be calibrated will not be touched.
The axial symmetry integral structure that described adjustment frame 1 is is axis of symmetry with moving lever 106, described adjustment frame 1 is by low-speed WEDM or electrochemical corrosion processing.
Described reference-calibrating assembly 4 includes grating scale 401, grating ruler reading head 402 and read head support 403, described grating scale 401 is adhesively fixed on moving lever 106, described grating ruler reading head 402 is fixed by a pin on read head support 403, described read head support 403 is fixed by screws on adjustment frame housing 101, described grating ruler reading head 402 is vertical with the direction of motion of described moving lever 106, and the data that described grating ruler reading head 402 obtains by measuring grating scale 401 motion are as the benchmark data of output shift quantity.
It is attached by multiple inner sides shell fragment 103, outside shell fragment 102 and upper connecting rod 104 and lower link 105 between moving lever 106 and the adjustment frame housing 101 of adjustment frame 1, it is possible to utilize inner side shell fragment 103 and outside shell fragment 102 elastic deformation to transmit the displacement along moving lever 106 direction.Therefore, when being fixed on the piezoelectric actuator 2 adjusted on frame housing 101 and moving, it is possible to promote moving lever 106 along its axially-movable.Now it is fixed on the micro-displacement sensor to be calibrated 3 adjusting frame housing 101 opposite side and is able to detect that the displacement data of moving lever 106.It is fixed on the grating ruler reading head 402 adjusted on frame housing 101 simultaneously by read head support 403 and also can obtain the displacement data of moving lever 106 by measuring the motion of grating scale 401.Owing to the certainty of measurement of high accuracy grating scale 401 is higher than the certainty of measurement of micro-displacement sensor 3 to be calibrated, therefore by the measurement data of grating scale 401, the data of micro-displacement sensor 3 to be calibrated can be modified, thus completing the demarcation of micro-displacement sensor 3 to be calibrated.
Claims (4)
1. based on the calibration device of micro-displacement sensor of single-freedom and flexible fine motion guiding mechanism, it is characterised in that include adjusting frame (1), piezoelectric actuator (2) and reference-calibrating assembly (4)；
Described piezoelectric actuator (2) is fixed on described adjustment frame (1), described piezoelectric actuator (2) drives moving lever (106) motion adjusting frame (1), described reference-calibrating assembly (4) is fixed on described adjustment frame (1), and described reference-calibrating assembly (4) and micro-displacement sensor to be calibrated (3) measure the output shift quantity of described moving lever (106) simultaneously；
Described adjustment frame (1) includes adjusting frame housing (101), outside shell fragment (102), inner side shell fragment (103), upper connecting rod (104), lower link (105) and moving lever (106)；Described adjustment frame housing (101) is connected with upper connecting rod (104) and lower link (105) respectively through two outsides shell fragment (102), and described moving lever (106) is connected with upper connecting rod (104) and lower link (105) respectively through two inner sides shell fragment (103).
2. the calibration device of micro-displacement sensor based on single-freedom and flexible fine motion guiding mechanism according to claim 1, it is characterized in that, described adjustment frame (1) is integral type structure, overall symmetrical about moving lever (106) major axis adjusting frame (1), described adjustment frame (1) is processed by low-speed WEDM or electrochemical corrosion.
3. the calibration device of micro-displacement sensor based on single-freedom and flexible fine motion guiding mechanism according to claim 1, it is characterized in that, piezoelectric actuator (2) is fixed in adjustment frame housing (101), actuation movement bar (106) moves, described reference-calibrating assembly (4) is fixed on described adjustment frame housing (101), and described reference-calibrating assembly (4) measures the output shift quantity of described moving lever (106) with the micro-displacement sensor to be calibrated (3) being arranged on described adjustment frame housing (101) simultaneously.
4. the calibration device of micro-displacement sensor based on single-freedom and flexible fine motion guiding mechanism according to claim 1, it is characterized in that, described reference-calibrating assembly (4) includes grating scale (401), grating ruler reading head (402) and read head support (403), described grating scale (401) is adhesively fixed on moving lever (106), described grating ruler reading head (402) is fixed by a pin on read head support (403), described read head support (403) is fixed by screws in adjustment frame housing (101), described grating ruler reading head (402) is vertical with the direction of motion of described moving lever (106), the data that described grating ruler reading head (402) obtains by measuring grating scale (401) motion are as the benchmark data of output shift quantity.
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| CN201310675863.4A CN103697818B (en) | 2013-12-12 | 2013-12-12 | Calibration device of micro-displacement sensor based on single-freedom and flexible fine motion guiding mechanism |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104296649B (en) * | 2014-09-26 | 2016-12-07 | 中国科学院长春光学精密机械与物理研究所 | A kind of linearity scaling method of capacitive displacement transducer |
| CN105136007B (en) * | 2015-05-20 | 2017-12-08 | 广州中国科学院先进技术研究所 | A kind of Linear displacement detection device based on capacitive displacement meter |
| CN107367222A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of current vortex sensor linearity compensation |
| CN107367223A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of capacitance sensor bit shift compensation |
| CN107367221B (en) * | 2016-05-12 | 2019-07-16 | 哈尔滨工业大学 | Supersonic motor drives host-guest architecture inductance sensor calibrating installation |
| CN108267782B (en) * | 2017-12-29 | 2019-07-26 | 中国地震局地球物理研究所 | Earth's surface absolute displacement test macro and method based on machine vision and numeric value analysis |
| CN108413877B (en) * | 2018-02-10 | 2019-07-26 | 北京工业大学 | Horizontal shaft fine adjustment device for laser tracking measurement system |
| CN114485519B (en) * | 2022-01-10 | 2023-08-29 | 同济大学 | Calibration device and calibration method for flexible rod type bidirectional horizontal displacement sensor |
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