CN213902735U - Vacuum degree measuring equipment - Google Patents
Vacuum degree measuring equipment Download PDFInfo
- Publication number
- CN213902735U CN213902735U CN202120090625.7U CN202120090625U CN213902735U CN 213902735 U CN213902735 U CN 213902735U CN 202120090625 U CN202120090625 U CN 202120090625U CN 213902735 U CN213902735 U CN 213902735U
- Authority
- CN
- China
- Prior art keywords
- vacuum
- pump
- interface
- vacuum degree
- degree
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The application relates to a vacuum measuring equipment for measure the vacuum of equipment under test, it includes: a vacuum chamber, a plurality of interfaces for forming gas passages being provided on a surface of the vacuum chamber; a first vacuum pump for generating a vacuum in a first vacuum degree range to the vacuum chamber; a second vacuum pump for generating a vacuum in a second vacuum degree range to the vacuum chamber; a third vacuum pump for generating a vacuum in a third vacuum degree range to the vacuum chamber; a vacuum gauge for measuring a vacuum degree of the vacuum chamber; the second vacuum degree range is partially overlapped with the first vacuum degree range and the third vacuum degree range respectively, the vacuum degrees are reduced from the first vacuum range to the second vacuum degree range and then to the third vacuum degree range in sequence, and the device to be tested, the first vacuum pump, the third vacuum pump and the vacuum gauge are in fluid communication with the vacuum cavity through a plurality of interfaces. The vacuum degree measuring device has the advantages of being small in size, wide in measuring range, suitable for measuring various devices and easy to expand.
Description
Technical Field
The present application relates to a vacuum measurement device, and more particularly, to a vacuum measurement device applicable to a particle therapy system.
Background
The degree of gas rarefaction in the vacuum state is called a degree of vacuum, and is generally expressed by a pressure value (unit is Pa, mbar, 1mbar is 100Pa, for example). The smaller the pressure value, the higher the degree of vacuum. The vacuum zone is divided into: rough vacuum (1.013X 10)3mbar-1.333 x 10mbar), low vacuum (1.333 x 10 mbar-1.333 x 10mbar)-3mbar), high vacuum (1.333X 10)-3 mbar～1.333×10-8mbar) and ultrahigh vacuum (1.333X 10)-8mbar～1.333×10-12mbar) and very high vacuum: (mbar)<1.333×10-12mbar). The main means for obtaining vacuum are vacuum pumps of various types, while vacuum gauges of different types are responsible for the measurement of the vacuum level inside the vacuum chamber.
The types of vacuum-related devices in particle therapy systems are numerous and all rely on the vacuum system of the particle therapy system to create the required vacuum environment to operate. Vacuum applied to particle therapy requires 10-8A high vacuum of mbar, which can be generated substantially without a single vacuum pumping device. When the vacuum components in the particle therapy system need to be tested off-line, there is a difficulty in vacuum degree measurement due to the difficulty in creating the vacuum environment required for the vacuum components. Furthermore, the various vacuum components are of various sizes and must be installed in specific locations of the particle therapy system for use. In general, the measurement or detection of a vacuum component or the detection of a vacuum related device requires the vacuum component or the vacuum related device to be installed in a particle therapy system for measurement to judge the functionality or for troubleshooting. This makes it necessary to disrupt or interrupt the operation of the particle therapy system. When the vacuum system for particle therapy is used to generate a vacuum environment, the vacuum system is bulky (the volume of a chamber in the system is bulky), so that hours or even days are required to obtain a desired vacuum degree, and the whole testing process which is too long affects the normal operation of the particle therapy system.
At present, the vacuum acquisition needs a huge system, and the system has single function and is difficult to meet various complex requirements. Most of the vacuum related devices of the existing particle therapy systems require the on-line interruption of the beam operation for inspection or measurement, so that special maintenance time is required for arranging the measurement and inspection of the vacuum related devices or sending the vacuum related devices to a professional manufacturer for measurement and inspection, which is time-consuming and costly.
SUMMERY OF THE UTILITY MODEL
The main aim at of this application provides a vacuum measuring equipment to solve among the prior art can't utilize the problem of the vacuum under the miniaturized, independent, extensible vacuum measuring equipment measurement different scope.
In order to achieve the above object, according to one aspect of the present application, there is provided a vacuum degree measuring apparatus for measuring a vacuum degree of a device under test, the vacuum degree measuring apparatus including: a vacuum chamber, a plurality of interfaces for forming gas passages being provided on a surface of the vacuum chamber; a first vacuum pump connected to the vacuum chamber, configured to generate a vacuum of a first vacuum degree range to the vacuum chamber; a second vacuum pump connected to the vacuum chamber, configured to generate a vacuum of a second vacuum degree range for the vacuum chamber; a third vacuum pump connected to the vacuum chamber, configured to generate a vacuum of a third vacuum degree range for the vacuum chamber; a vacuum gauge connected to the vacuum chamber for measuring a vacuum degree of the vacuum chamber; wherein the second vacuum degree range partially overlaps with the first vacuum degree range and the third vacuum degree range respectively, the vacuum degree in the second vacuum degree range is higher than or equal to the vacuum degree in the first vacuum degree range, the vacuum degree in the third vacuum degree range is higher than or equal to the vacuum degree in the second vacuum degree range, the device under test, the first vacuum pump, the second vacuum pump, the third vacuum pump, and the vacuum gauge are respectively in fluid communication with the vacuum chambers via a plurality of interfaces, and the vacuum degree measuring device further comprises one or more first transfer interfaces, the plurality of interfaces comprising a first interface, via which the vacuum gauge is connected to the first interface, the one or more first transfer interfaces being further configured to be connected to other vacuum gauges and/or other vacuum pumps.
In this manner, since the device under test, the first vacuum pump, the second vacuum pump, the third vacuum pump, and the vacuum gauge are fluidly communicated with the vacuum chamber, the degree of vacuum in the vacuum chamber is equal to that of the device under test, and the vacuum gauge obtains the degree of vacuum of the device under test by measuring the degree of vacuum of the vacuum chamber. In addition, because three vacuum pumps in three vacuum degree ranges are adopted, vacuum in a wider range can be obtained, so that the constructed vacuum degree measuring equipment can meet the measuring requirement of the wider vacuum degree range; because a plurality of interfaces on the surface of the vacuum cavity are adopted for connection, the compact structure and miniaturization of the vacuum degree measuring equipment can be realized.
In addition, due to the adoption of one or more first transfer ports, the constructed small-sized vacuum degree measuring equipment can be easily expanded to be connected with other vacuum gauges and/or other vacuum pumps by using the reserved joints on the first transfer ports, so that the functions of the vacuum degree measuring equipment are expanded. For example, when one or more first porting ports are also connected to other vacuum pumps, the time taken to evacuate the interior of the vacuum degree measuring apparatus can be shortened by increasing the number of vacuum pumps used, thereby speeding up the measuring process. When one or more first interfaces are also connected to other vacuum gauges, the measured vacuum degree can be calibrated by increasing the number of vacuum gauges so that the vacuum degree can be measured by a plurality of vacuum gauges at the same time. That is, by adopting one or more first transfer ports and reserving a joint on the first transfer port, the vacuum degree measuring apparatus according to the present application can freely add a vacuum gauge or a vacuum pump as needed, thereby making the apparatus expandable to meet various measurement requirements.
Further, according to an embodiment of the present application, the plurality of interfaces further includes a second interface and a third interface, the second vacuum pump includes an exhaust port and an exhaust port, and the first vacuum pump includes an exhaust port and an exhaust port; the pumping port of the second vacuum pump is connected to the second interface, and the third vacuum pump is connected to the third interface; and an exhaust port of the second vacuum pump is connected to the suction port of the first vacuum pump, the exhaust port of the first vacuum pump being configured to exhaust air from the first vacuum pump to the outside of the vacuum degree measurement apparatus.
In this way, the chamber of the second vacuum pump is located on the pumping path of the first vacuum pump, i.e., the first vacuum pump serves as the backing pump of the second vacuum pump, and therefore the vacuum degree measuring apparatus constructed can be further miniaturized.
Further, according to an embodiment of the present application, the vacuum degree measurement device further includes a second adapter port, and the plurality of interfaces further includes a fourth interface configured to be connected to the second adapter port to be connected to the device under test.
In this way, by adopting the second adapter interface with various interface sizes, the fourth interface can be connected with the devices to be tested with various interface sizes, so that the vacuum degree measuring device is suitable for the devices to be tested with various interface sizes.
Further, according to an embodiment of the present application, the plurality of interfaces further includes a second interface, a third interface, a fourth interface, and a fifth interface, the second vacuum pump includes an air pumping port and an air exhaust port, and the first vacuum pump includes an air pumping port and an air exhaust port; the air suction port of the second vacuum pump is connected to the second interface, the third vacuum pump is connected to the third interface, the equipment to be tested is connected to the fourth interface, and the air suction port of the first vacuum pump is connected to the fifth interface; and the exhaust port of the first vacuum pump is configured to exhaust air from the first vacuum pump to the outside of the vacuum degree measurement device, and the exhaust port of the second vacuum pump is configured to exhaust air from the second vacuum pump to the outside of the vacuum degree measurement device.
In this way, instead of cascading the first vacuum pump and the second vacuum pump, the first vacuum pump and the second vacuum pump are directly connected to the vacuum chamber, respectively, so that the vacuum degree measuring apparatus may be variously configured to be adapted to different use environments.
Further, according to an embodiment of the present application, the vacuum gauge includes a first vacuum gauge measuring a degree of vacuum corresponding to a first vacuum degree range, a second vacuum gauge measuring a degree of vacuum corresponding to a second vacuum degree range, and a third vacuum gauge measuring a degree of vacuum corresponding to a third vacuum degree range.
In this manner, by employing three different vacuum gauges, measurement and calibration of the vacuum degrees in the first to third vacuum degree ranges can be achieved.
Further, according to an embodiment of the present application, the one or more first interface comprises a first sub-adapter interface and a second sub-adapter interface, the second sub-adapter interface being connected to the first interface via the first sub-adapter interface; the first vacuum gauge and the second vacuum gauge are connected to the first sub-adapter interface, and the third vacuum gauge is connected to the second sub-adapter interface; and the second sub-adapter port is also configured to connect to other vacuum gauges and/or other vacuum pumps.
In this way, the connection of the first to third vacuum gauges to the vacuum chamber is achieved. Meanwhile, the vacuum degree measuring device can be further connected with other vacuum meters and/or other vacuum pumps through a second sub-adapter (for example, a joint reserved on the vacuum degree measuring device), so that the device attached to the vacuum degree measuring device can be expanded to meet various measuring requirements.
Further, according to an embodiment of the present application, the first vacuum range includes 103mbar to 5mbar, and the second vacuum degree range comprises 5mbar to 10-6mbar, and the third vacuum range comprises 10-6mbar～10-8mbar。
In this way, a desired wide range of vacuum degrees can be achieved by the first to third vacuum pumps, so that the measurement range of the vacuum degree measurement apparatus is wide.
Further, according to an embodiment of the application, the first vacuum pump is a mechanical pump, the second vacuum pump is a molecular pump, and the third vacuum pump is an ion pump.
In this way, it is possible to realize vacuum pumps that respectively generate the above-described ranges of vacuum degrees, while enabling the first vacuum pump to be cascaded therewith as a backing pump for the second vacuum pump.
In the embodiment of the application, the vacuum degree measuring equipment consisting of three vacuum pumps corresponding to different vacuum degree ranges, corresponding vacuum meters and vacuum cavities is provided, wherein a plurality of interfaces are arranged on the vacuum cavities of the vacuum degree measuring equipment and are further connected with the adapter ports comprising the reserved connectors, so that the technical problems that in the prior art, the measurement and detection of vacuum components in a particle treatment system are complex and time-consuming, and the measuring system is difficult to meet various requirements are solved, and the technical effects of providing the vacuum degree measuring equipment which is small in size, wide in measuring range, suitable for measurement of various equipment, expandable and high in efficiency are realized.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the application and, together with the description, serve to explain the application and are not intended to limit the application. In the drawings:
FIG. 1 is a schematic view of a vacuum measurement device according to an embodiment of the present application;
FIG. 2 is a schematic view of a vacuum measurement device according to an exemplary embodiment of the present application.
Wherein the figures include the following reference numerals:
100. 200: vacuum degree measuring equipment
101: vacuum chamber
103: a first vacuum pump
1031 air extraction opening
1033 gas vent
105: second vacuum pump
1051: air extraction opening
1053: exhaust port
107: third vacuum pump
109: vacuum gauge
1091: first vacuum gauge
1093: second vacuum gauge
1095: third vacuum gauge
201: first interface
203: second interface
205: third interface
207: fourth interface
301: first sub-adapter
303: second sub-adapter
3031 reserved joint
401 device under test
501 second adapter
Detailed Description
In order to avoid conflict, the embodiments and features of the embodiments of the present application may be combined with each other. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
It is noted that, unless otherwise indicated, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
In this application, where the contrary is not intended, directional words such as "upper, lower, top and bottom" are generally used with respect to the orientation shown in the drawings, or with respect to the component itself in the vertical, vertical or gravitational direction; likewise, for ease of understanding and description, "inner and outer" refer to the inner and outer relative to the profile of the components themselves, but the above directional words are not intended to limit the application.
Fig. 1 is a schematic view of a vacuum degree measuring apparatus according to an embodiment of the present application. As shown in fig. 1, the vacuum degree measuring apparatus 100 for measuring the vacuum degree of a device under test 401 includes: a vacuum chamber 101 having a plurality of ports for forming gas passages provided on a surface of the vacuum chamber 101; a first vacuum pump 103 connected to the vacuum chamber 101, configured to generate a vacuum of a first vacuum degree range to the vacuum chamber 101; a second vacuum pump 105 connected to the vacuum chamber 101, configured to generate a vacuum of a second vacuum degree range for the vacuum chamber 101; a third vacuum pump 107 connected to the vacuum chamber 101, configured to generate a vacuum of a third vacuum degree range for the vacuum chamber 101; and a vacuum gauge 109 connected to the vacuum chamber 101 for measuring a degree of vacuum of the vacuum chamber 101. Wherein the second vacuum degree range partially overlaps with the first vacuum degree range and the third vacuum degree range respectively, the vacuum degree in the second vacuum degree range is higher than or equal to the vacuum degree in the first vacuum degree range, the vacuum degree in the third vacuum degree range is higher than or equal to the vacuum degree in the second vacuum degree range, the device under test 401, the first vacuum pump 103, the second vacuum pump 105, the third vacuum pump 107, and the vacuum gauge 109 are respectively in fluid communication with the vacuum chamber 101 via a plurality of interfaces, and the vacuum degree measuring device further comprises one or more first transfer interfaces, the plurality of interfaces comprising a first interface 201, the vacuum gauge 109 being connected to the first interface 201 via one or more first transfer interfaces, the one or more first transfer interfaces being further configured to be connected to other vacuum gauges and/or other vacuum pumps.
In this way, the degree of vacuum of the device under test 401 is obtained by measuring the degree of vacuum of the vacuum chamber 101, and the small-sized vacuum degree measuring device 100 having a wide range, a compact structure, and an expanded capability is constructed. Because the vacuum pumps in three vacuum degree ranges are adopted, the vacuum in a wider range can be obtained, and therefore the constructed vacuum degree measuring equipment 100 can meet the measuring requirement of the wider vacuum degree range; because a plurality of interfaces on the surface of the vacuum cavity are adopted for connection, the compact structure and miniaturization of the vacuum degree measuring equipment can be realized; the compact vacuum measuring device constructed is also easily expanded to connect with other vacuum gauges and/or other vacuum pumps due to the use of one or more first interfaces, thereby expanding the functionality of the vacuum measuring device.
For example, when one or more first transfer ports are also connected to other vacuum pumps, the time taken to evacuate the interior of the vacuum degree measurement apparatus 100 can be shortened by increasing the number of vacuum pumps used, thereby speeding up the measurement process. When one or more first interfaces are also connected to other vacuum gauges, the measured vacuum degree can be calibrated by increasing the number of vacuum gauges so that the vacuum degree can be measured by a plurality of vacuum gauges at the same time. That is, by adopting one or more first transfer ports and reserving a joint on the first transfer port, the vacuum degree measurement apparatus 100 according to the present application may freely add a vacuum gauge or a vacuum pump as needed, and the type of the added vacuum gauge or vacuum pump may be the same as or different from the type of the vacuum gauge or vacuum pump included in the vacuum degree measurement apparatus 100, thereby making the vacuum degree measurement apparatus 100 expandable to meet various measurement requirements.
Further, in this embodiment, the plurality of ports further includes a second port 203 and a third port 205, the second vacuum pump 105 includes a pumping port 1051 and an exhaust port 1053, and the first vacuum pump 103 includes a pumping port 1031 and an exhaust port 1033; the pumping port 1051 of the second vacuum pump is connected to the second interface 203, and the third vacuum pump 107 is connected to the third interface 205; and the exhaust port 1053 of the second vacuum pump is connected to the exhaust port 1031 of the first vacuum pump 103, and the exhaust port 1033 of the first vacuum pump is configured to exhaust air from the first vacuum pump 103 to the outside of the vacuum degree measurement apparatus 100.
In this way, the chamber of the second vacuum pump 105 is located on the pumping path of the first vacuum pump 103, i.e., the first vacuum pump 103 serves as a backing pump for the second vacuum pump 105, and therefore the vacuum degree measurement apparatus 100 constructed can be further miniaturized.
Further, in the present embodiment, the vacuum degree measurement device 100 further includes a second adapter 501, and the plurality of interfaces further includes a fourth interface 207, and the fourth interface 207 is configured to be connected to the second adapter 501 to connect to the device under test 401.
By adopting the second adapter 501 with various interface sizes, the fourth interface 207 can be connected with the devices to be tested 401 with various interface sizes, so that the vacuum degree measuring device 100 is suitable for measuring the vacuum degrees of the devices to be tested 401 with various interface sizes.
Alternatively, in this embodiment, the plurality of interfaces further includes a second interface 203, a third interface 205, a fourth interface 207, and a fifth interface, the second vacuum pump 105 includes a pumping port 1051 and an exhaust port 1053, and the first vacuum pump 103 includes a pumping port 1031 and an exhaust port 1033; the pumping port of the second vacuum pump 105 is connected to the second interface 203, the third vacuum pump 107 is connected to the third interface 205, the device under test 401 is connected to the fourth interface 207, and the pumping port of the first vacuum pump 103 is connected to the fifth interface; and the exhaust port 1033 of the first vacuum pump 103 is configured to exhaust the gas from the first vacuum pump 103 to the outside of the vacuum degree measurement apparatus 100, and the exhaust port 1053 of the second vacuum pump 105 is configured to exhaust the gas from the second vacuum pump 105 to the outside of the vacuum degree measurement apparatus 100.
In this way, by increasing the number of interfaces on the surface of the vacuum chamber 101, the first vacuum pump 103 and the second vacuum pump 105 are not limited to the cascade connection manner, but the connection manner of the first vacuum pump 103, the second vacuum pump 105 and the vacuum chamber 101 may be freely set, thereby making the configuration of the vacuum degree measuring apparatus 100 more flexible and adaptable to different use environments.
Further, in the present embodiment, the first vacuum degree range includes 103mbar to 5mbar, and the second vacuum degree range comprises 5mbar to 10-6mbar, and the third vacuum range comprises 10-6mbar～10-8mbar。
Further, in the present embodiment, first vacuum pump 103 is a mechanical pump, second vacuum pump 105 is a molecular pump, and third vacuum pump 107 is an ion pump. For example, the first vacuum pump 103 is a pre-mechanical pump, the second vacuum pump 105 is a turbo-molecular pump, and the third vacuum pump 107 is a sputtering type titanium ion pump, so that they can generate a vacuum degree in a desired range, respectively, and also so that the first vacuum pump 103 can be cascaded therewith as a pre-pump of the second vacuum pump 105.
Further, in the present embodiment, the first to third vacuum pumps 103 to 107 are also connected to respective controllers or to an integrated, single controller to perform the pumping operation under the control of the controller.
In the present embodiment, when the vacuum degree measuring apparatus 100 is connected to the device under test 401 to measure the vacuum degree of the device under test 401, the first vacuum pump 103 is first started at normal pressure, and the chamber gas of the connected vacuum chamber 101, the device under test 401, the first vacuum pump 103, the second vacuum pump 105, the third vacuum pump 107, and the vacuum gauge 109 is evacuated by the first vacuum pump 103 to generate at least 10% of the chamber gas3Vacuum of mbar to 5 mbar. The vacuum gauge 109 measures and displays the degree of vacuum in the vacuum chamber 101 (i.e., the degree of vacuum in the device under test 401). Then, in measuringWhen the vacuum reaches the vacuum range of the second vacuum pump 105 (e.g. at least 5mbar), the second vacuum pump 105 is started. The second vacuum pump 105 pumps the gas in the vacuum degree measuring apparatus 100 to generate at least 5mbar to 10mbar-6Vacuum of mbar. Also, the vacuum gauge 109 measures and displays the degree of vacuum in the device under test 401. Next, the measured vacuum level reaches the vacuum level range of third vacuum pump 107 (e.g., at least 10 degrees F)-6mbar), the third vacuum pump 107 is started. The third vacuum pump 107 then evacuates the gas within the vacuum measurement apparatus 100 to produce at least 10-6mbar～10-8Vacuum of mbar. Meanwhile, the vacuum gauge 109 measures and displays the degree of vacuum in the device under test 401. Thus, the vacuum degree measurement device 100 can perform vacuum degree measurement on the device under test 401 or perform troubleshooting on the device under test 401 within a wide vacuum degree range.
FIG. 2 is a schematic view of a vacuum measurement device according to an exemplary embodiment of the present application. As shown in FIG. 2, the vacuum measurement device 200 includes all of the components of the vacuum measurement device 100 shown in FIG. 1, differing primarily in that: the vacuum gauge 109 shown in FIG. 2 includes a first vacuum gauge 1091, a second vacuum gauge 1093, and a third vacuum gauge 1095, and the one or more first interfaces include a first sub-interface 301 and a second sub-interface 303.
In this embodiment, the first vacuum gauge 1091 measures a degree of vacuum corresponding to a first vacuum range, the second vacuum gauge 1093 measures a degree of vacuum corresponding to a second vacuum range, and the third vacuum gauge 1095 measures a degree of vacuum corresponding to a third vacuum range.
Since the second vacuum range partially overlaps the first vacuum range and the third vacuum range, respectively, there is an overlap of the measurement ranges of the first vacuum gauge 1091, the second vacuum gauge 1093, and the third vacuum gauge 1095, thereby achieving a full coverage 103mbar～10-8Vacuum measurements in the mbar range. Different types of vacuum gauges with overlapping measurement ranges can be used to calibrate the measured vacuum level.
For example, the first vacuum gauge is a resistance vacuum gauge (Pirani gauge), which measuresRange is 103mbar～10-3mbar, second vacuum gauge is a hot cathode ionization vacuum gauge with a measuring range of 10-1mbar～10-7mbar, and the third gauge is a cold cathode ionization gauge (penning gauge) with a measurement range of 10-3mbar～10-9mbar。
In this way, by using three different types of vacuum gauges, it is possible to pair 103mbar～10-8Various vacuums in the mbar range were measured and calibrated.
In this embodiment, the first 1091 through third 1095 vacuum gauges are also coupled to respective controllers or to an integrated, single controller.
Further, in this embodiment, the second sub adapter 303 is connected to the first interface 201 via the first sub adapter 301, the first vacuum gauge 1091 and the second vacuum gauge 1093 are connected to the first sub adapter 301, the third vacuum gauge 1095 is connected to the second sub adapter 303, and the second sub adapter 303 is further configured to be connected to other vacuum gauges and/or other vacuum pumps. For example, the second sub adapter port 303 includes a reserved connector 3031 to further connect to other vacuum gauges and/or other vacuum pumps.
In this way, the connection of the first to third vacuum gauges 1091 to 1095 to the vacuum chamber 101 is achieved. Meanwhile, the vacuum degree measuring apparatus 200 can be connected with other apparatuses through the reserved joint 3031 on the second sub adapter port 303, so that the apparatuses to which the vacuum degree measuring apparatus 200 is attached can be expanded. In addition, the reserved connector 3031 on the second sub adapter port 303 can also be used for exhausting air to the outside after the vacuum degree measuring device 200 stops working and air is filled in the device.
For example, the first sub-adapter 301 and the second sub-adapter 303 are three-way interfaces or four-way interfaces.
It should be noted that, in the present embodiment, the number of the transfer ports connected to the first interface 201 is not limited to two, but may be any number according to the number of devices to be connected. For example, the reserved connector 3031 of the second sub-adapter 303 may be further connected to a third adapter, which may be connected to another vacuum gauge or another vacuum pump, and which also includes a reserved connector.
In this manner, the vacuum measurement device 200 can perform any expansion of the attached devices and functions by using the adapter ports that are increased step by step.
In this embodiment, the interface and the adapter interface are both flange interfaces.
In summary, the vacuum degree measuring apparatus realized by the above embodiment has the following features:
1) the vacuum pump has the advantages that the volume is small, the structure is compact, and the required vacuum degree can be quickly reached due to the adoption of a small vacuum cavity and the arrangement of the vacuum pump for generating different vacuum degree ranges and the vacuum gauge with different measuring ranges;
2) by various combinations of three vacuum pumps, 10 can be produced3mbar～10-8The wide range of vacuum degree of mbar can meet the requirements of various vacuum degrees;
3) the equipment can be connected with different switching ports in an extensible mode, and connection with equipment to be tested 401 with different interface sizes can be achieved;
4) the device is also reserved with an interface, so that the device is easy to further expand without the limitation of the existing structure.
In addition, the vacuum degree measurement apparatus realized by the above-described embodiments is particularly suitable for a particle therapy system. A vacuum system of a particle therapy system is used to evacuate a particle beam flow channel of the particle therapy system and measure its vacuum level. The vacuum degree measuring equipment has larger functional similarity with a vacuum system of the particle therapy system, can simulate the vacuum operation of the particle therapy system, and is suitable for measuring and troubleshooting vacuum components in the vacuum system of the particle therapy system. When applied to measurement and troubleshooting of vacuum components in a particle therapy system, the vacuum components in the particle therapy system may be detached from the particle therapy system, connected to the fourth interface 207 of the vacuum measurement device for measurement. Thereby, the down time or the occupied time of the particle therapy system due to the measurement and detection of the vacuum component can be reduced, the operation influence on the vacuum of the particle therapy system is reduced, and the particle therapy system is used more efficiently.
Vacuum components in a particle therapy system that may be used as the device to be tested 401 include, but are not limited to: different ranges of vacuum gauges (e.g., penning gauges), different types of vacuum pumps (e.g., ion pumps), flanged connections, etc., are used in the vacuum system of the particle therapy system. The vacuum component described above can be connected directly to the fourth interface 207 of the vacuum measurement device according to the present application or via the second adapter interface 501 to the fourth interface 207.
It is to be understood that the above-described embodiments are only a few, but not all, of the embodiments described herein. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular is intended to include the plural unless the context clearly dictates otherwise, and it should be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of features, steps, operations, devices, components, and/or combinations thereof.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are capable of operation in sequences other than those illustrated or described herein.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (8)
1. Vacuum degree measuring equipment for measuring a vacuum degree of a device under test (401), characterized in that the vacuum degree measuring equipment (100) comprises:
a vacuum chamber (101), a surface of the vacuum chamber (101) being provided with a plurality of ports for forming gas passages;
a first vacuum pump (103) connected to the vacuum chamber (101) configured to generate a vacuum of a first vacuum degree range for the vacuum chamber (101);
a second vacuum pump (105) connected to the vacuum chamber (101) configured to generate a vacuum of a second vacuum degree range for the vacuum chamber (101);
a third vacuum pump (107) connected to the vacuum chamber (101) configured to generate a vacuum of a third vacuum degree range for the vacuum chamber (101);
a vacuum gauge (109) connected to the vacuum chamber (101) for measuring a vacuum degree of the vacuum chamber (101);
wherein the second vacuum degree range is partially overlapped with the first vacuum degree range, the third vacuum degree range, respectively, a vacuum degree in the second vacuum degree range is higher than or equal to a vacuum degree in the first vacuum degree range, a vacuum degree in the third vacuum degree range is higher than or equal to a vacuum degree in the second vacuum degree range,
the device under test (401), the first vacuum pump (103), the second vacuum pump (105), the third vacuum pump (107), and the vacuum gauge (109) are in fluid communication with the vacuum chamber (101) via the plurality of interfaces, respectively, and
the vacuum level measurement device (100) further comprises one or more first interfaces, the plurality of interfaces comprising a first interface (201), the vacuum gauge (109) being connected to the first interface (201) via the one or more first interfaces, the one or more first interfaces being further configured to be connected to further vacuum gauges and/or further vacuum pumps.
2. The vacuum degree measuring apparatus according to claim 1,
the plurality of interfaces further comprises a second interface (203) and a third interface (205), the second vacuum pump (105) comprises a suction port (1051) and an exhaust port (1053), the first vacuum pump (103) comprises a suction port (1031) and an exhaust port (1033);
the suction opening (1051) of the second vacuum pump (105) is connected to the second interface (203), and the third vacuum pump (107) is connected to the third interface (205); and is
An exhaust port (1053) of the second vacuum pump (105) is connected to an exhaust port (1031) of the first vacuum pump (103), and an exhaust port (1033) of the first vacuum pump (103) is configured to exhaust gas from the first vacuum pump (103) to the outside of the vacuum degree measurement apparatus (100).
3. The vacuum level measurement device according to claim 1, characterized in that the vacuum level measurement device (100) further comprises a second adapter interface (501), the plurality of interfaces further comprising a fourth interface (207), the fourth interface (207) being configured to connect with the second adapter interface (501) for connecting with the device under test (401).
4. The vacuum degree measuring apparatus according to claim 1,
the plurality of interfaces further comprises a second interface (203), a third interface (205), a fourth interface (207), and a fifth interface, the second vacuum pump (105) comprises a suction port (1051) and an exhaust port (1053), and the first vacuum pump comprises a suction port (1031) and an exhaust port (1033);
the suction opening (1051) of the second vacuum pump (105) is connected to the second interface (203), the third vacuum pump (107) is connected to the third interface (205), the device under test (401) is connected to the fourth interface (207), and the suction opening (1031) of the first vacuum pump (103) is connected to the fifth interface; and is
An exhaust port (1033) of the first vacuum pump (103) is configured to exhaust from the first vacuum pump (103) to the outside of the vacuum degree measurement apparatus (100), and an exhaust port (1053) of the second vacuum pump (105) is configured to exhaust from the second vacuum pump (105) to the outside of the vacuum degree measurement apparatus (100).
5. The vacuum degree measuring apparatus according to claim 1,
the vacuum gauge (109) includes a first vacuum gauge (1091), a second vacuum gauge (1093), a third vacuum gauge (1095), and
the first vacuum gauge (1091) measures a vacuum degree corresponding to the first vacuum degree range, the second vacuum gauge (1093) measures the vacuum degree corresponding to the second vacuum degree range, and the third vacuum gauge (1095) measures a vacuum degree corresponding to the third vacuum degree range.
6. The vacuum degree measuring apparatus according to claim 5,
the one or more first interfaces comprise a first sub-adapter interface (301) and a second sub-adapter interface (303), the second sub-adapter interface (303) being connected to the first interface (201) via the first sub-adapter interface (301);
said first vacuum gauge (1091) and said second vacuum gauge (1093) are connected to said first sub-adapter (301), said third vacuum gauge (1095) is connected to said second sub-adapter (303); and is
The second sub-adapter (303) is further configured to be connected to the further vacuum gauge and/or the further vacuum pump.
7. The vacuum level measurement device of claim 1, wherein the first vacuum level range comprises 103mbar to 5mbar, and the second vacuum degree range comprises 5mbar to 10-6mbar, and the third vacuum range comprises 10-6mbar～10-8mbar。
8. The vacuum degree measurement apparatus according to claim 7, wherein the first vacuum pump (103) is a mechanical pump, the second vacuum pump (105) is a molecular pump, and the third vacuum pump (107) is an ion pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120090625.7U CN213902735U (en) | 2021-01-13 | 2021-01-13 | Vacuum degree measuring equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120090625.7U CN213902735U (en) | 2021-01-13 | 2021-01-13 | Vacuum degree measuring equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213902735U true CN213902735U (en) | 2021-08-06 |
Family
ID=77107740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120090625.7U Active CN213902735U (en) | 2021-01-13 | 2021-01-13 | Vacuum degree measuring equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213902735U (en) |
-
2021
- 2021-01-13 CN CN202120090625.7U patent/CN213902735U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0218458B1 (en) | Method and apparatus for gross leak detection | |
| JP2000298073A (en) | Dual-mode leak detector | |
| JP2005264938A (en) | Vacuum pump system | |
| CN106802218B (en) | Vacuum coating cavity leak detection system and leak detection method | |
| CN205826237U (en) | The outer device for detecting leakage of a kind of heat exchanger internal hemorrhage due to trauma | |
| CN213902735U (en) | Vacuum degree measuring equipment | |
| CN107907273B (en) | A kind of partially sealed outer surface air-tightness detection method of product | |
| CN108087719A (en) | The air charging system of small-sized sealing product and the inflation method of the device | |
| CN103119413A (en) | Leak detection appliance | |
| CN201828387U (en) | Testing platform for high-and low pressure air valves | |
| CN106197878A (en) | The outer device for detecting leakage of a kind of heat exchanger internal hemorrhage due to trauma and detection method | |
| CN112901450A (en) | Movable rapid high-vacuum air pumping system | |
| CN203798516U (en) | Vacuum testing platform | |
| CN108801563A (en) | Helium leak detection fixture, helium leak detection device and method | |
| CN106500910B (en) | Dynamic contrast calibration device for vacuum gauge | |
| CN104729809A (en) | Helium mass spectrometer leak detection method for accelerator | |
| CN114562586B (en) | Centralized control module for gas switching | |
| CN112326150B (en) | Air tightness test device and method for aircraft body structure | |
| CN109707612A (en) | A kind of ionic pump performance test and optimization device and its test and optimization method | |
| CN112095088B (en) | Method and equipment for rapidly switching coating process gas | |
| CN112556921A (en) | Vacuum detection device for multi-joint and vacuum detection method for film gauge | |
| CN210036906U (en) | Negative pressure source device and gas meter verification gas circuit system | |
| CN213392595U (en) | Vacuum pumping system | |
| CN111999014A (en) | Molecular pump unit and vacuum system leak detection method | |
| US6282946B1 (en) | Leak detector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |