CN213816110U

CN213816110U - Wafer welding fixing device

Info

Publication number: CN213816110U
Application number: CN202022853376.0U
Authority: CN
Inventors: 蓝远锋
Original assignee: Shenzhen Far East Excellence Technology Co ltd
Current assignee: Shenzhen Far East Excellence Technology Co ltd
Priority date: 2020-12-02
Filing date: 2020-12-02
Publication date: 2021-07-27
Anticipated expiration: 2030-12-02

Abstract

The utility model discloses a wafer welding fixing device, including welding the seat, the welding seat top is provided with places the dish, places a bottom fixedly connected with rotation axis, has seted up the transmission chamber in the welding seat, and the rotation axis bottom runs through to the transmission intracavity to the vertical bevel gear of fixedly connected with, vertical bevel gear is connected with the transmission fluted disc through drive assembly, welds the backup pad that a top fixedly connected with is the L type, is connected with the lead screw post through screw nut in the backup pad, and the lead screw post is connected with the removal post through universal ball, and the removal post is connected with the arc holder through buffer. The utility model discloses utilize the removal of lead screw post, make vertical bevel gear drive rotation axis rotate under the effect of removing post, rack, transmission fluted disc, ratchet subassembly, rotation bevel gear, transmission bevel gear to make and utilize the continuous movement of lead screw post to realize the rotation to placing the dish and go up the wafer after loosening the centre gripping, thereby the welding position of quick adjustment wafer.

Description

Wafer welding fixing device

Technical Field

The utility model relates to a wafer fixing technology field especially relates to wafer welding fixing device.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; various circuit device structures can be fabricated on the silicon wafer to become IC products with specific electrical functions; wafers are the basic material for manufacturing semiconductor chips, and the most important raw material of semiconductor integrated circuits is silicon, so that the corresponding is silicon wafers.

The wafer needs to be welded with connection points during processing, and needs to be fixed in order to ensure the stability of the wafer during welding, but because the wafer is extremely thin, special care needs to be taken when clamping is performed, the clamping effect of a common clamping tool is poor, and the trouble of adjusting the position by rotating the wafer during welding is very troublesome.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the current need be very careful when carrying out the centre gripping, and ordinary clamping tool centre gripping effect is not good to when welding, come the trouble shortcoming of adjusting position ten minutes through rotating the wafer, and the wafer welded fastening device who proposes.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

wafer welding fixing device, including welding the seat, the welding seat top is provided with places the dish, place a set bottom fixedly connected with rotation axis, the transmission chamber has been seted up in the welding seat, the rotation axis bottom runs through to the transmission intracavity to the vertical bevel gear of fixedly connected with, vertical bevel gear is connected with the transmission fluted disc through transmission assembly, welding seat top fixedly connected with is the backup pad of L type, be connected with the lead screw post through screw nut in the backup pad, the lead screw post is connected with through universal ball and removes the post, it is connected with the arc holder through buffer to remove the post, it runs through to the transmission intracavity to remove the bottom of the column portion to fixedly connected with rack, the rack is connected with the meshing of transmission fluted disc.

Preferably, the transmission assembly comprises a rotating shaft rotatably connected in the transmission cavity, the outer side wall of the rotating shaft is connected with the inner side wall of the transmission gear disc through a ratchet assembly, and the end part of the rotating shaft is fixedly connected with a rotating bevel gear.

Preferably, a fixed block is fixedly connected in the transmission cavity, the fixed block is rotatably connected with a transmission shaft, transmission bevel gears are fixedly connected to both ends of the transmission shaft, and the two transmission bevel gears located at both ends of the transmission shaft are respectively in meshed connection with the vertical bevel gear and the rotating bevel gear.

Preferably, buffer includes the solid fixed ring of fixed connection on removing the post lateral wall, gu fixed ring is connected with the slip ring through the buffer spring of cover on removing the post lateral wall, the slip ring cover is established on removing the post lateral wall, slip ring lateral wall fixedly connected with connecting piece, connecting piece and arc holder lateral wall fixed connection.

Preferably, a connecting port penetrating through the side wall is formed in the supporting plate, the lead screw nut is fixedly connected in the connecting port, and the top of the lead screw column is fixedly connected with a knob.

Preferably, a rubber protective layer is arranged at the bottom of the arc-shaped clamping piece.

Compared with the prior art, the beneficial effects of the utility model are that:

1. through placing the wafer on placing the dish, make arc holder downstream carry out the centre gripping to the wafer under the effect of lead screw post, backup pad, removal post, solid fixed ring, slip ring and connecting piece, the quick effectual centre gripping that realizes the wafer guarantees the stability of wafer in welding process.

2. Utilize the removal of lead screw post, make vertical bevel gear drive the rotation axis and rotate under the effect of removing post, rack, transmission fluted disc, ratchet subassembly, rotation bevel gear, transmission bevel gear to make and utilize the continuous movement of lead screw post to realize the rotation to placing the dish on the wafer after loosening the centre gripping, thereby the welded position of quick adjustment wafer.

Drawings

Fig. 1 is a schematic structural view of a wafer welding and fixing device according to the present invention;

fig. 2 is a schematic top view of a cross-sectional structure of the wafer welding and fixing device according to the present invention;

fig. 3 is a schematic view of a connection structure of a ratchet assembly in the wafer welding and fixing device of the present invention.

In the figure: 1 welding seat, 2 placing plate, 3 rotating shaft, 4 transmission cavity, 5 vertical bevel gear, 6 transmission fluted disc, 7 support plate, 8 lead screw nut, 9 lead screw column, 10 moving column, 11 arc clamping piece, 12 rack, 13 rotating shaft, 14 ratchet wheel component, 15 rotating bevel gear, 16 transmission shaft, 17 fixing ring, 18 sliding ring, 19 connecting piece and 20 rubber protective layer.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-3, a wafer welding and fixing device includes a welding seat 1, a placing plate 2 is disposed above the welding seat 1, a rotating shaft 3 is fixedly connected to the bottom of the placing plate 2, a transmission cavity 4 is formed in the welding seat 1, the bottom of the rotating shaft 3 penetrates into the transmission cavity 4, the rotating shaft 3 is rotatably connected to the welding seat 1 through a bearing, and is fixedly connected with a vertical bevel gear 5, the vertical bevel gear 5 is connected to a transmission fluted disc 6 through a transmission assembly, further, the transmission assembly includes a rotating shaft 13 rotatably connected to the transmission cavity 4, the outer side wall of the rotating shaft 13 is connected to the inner side wall of the transmission fluted disc 6 through a ratchet assembly 14, the ratchet assembly 14 is a prior art, which is not described herein again, and can realize that the rotating shaft 13 is not driven to rotate when a rack 12 moves down, the end of the rotating shaft 13 is fixedly connected with a rotating bevel gear 15, by disposing the ratchet assembly 14, when the screw rod 9 moves downwards, the rotation of the transmission fluted disc 6 does not enable the rotation shaft 13 to rotate due to the ratchet wheel assembly 14.

Furthermore, a fixed block is fixedly connected in the transmission cavity 4, the fixed block is rotatably connected with a transmission shaft 16, two ends of the transmission shaft 16 are fixedly connected with transmission bevel gears, and the two transmission bevel gears at the two ends of the transmission shaft 16 are respectively meshed with the vertical bevel gear 5 and the rotating bevel gear 15.

Weld 1 top fixedly connected with of seat and be the backup pad 7 of L type, be connected with lead screw post 9 through screw nut 8 in the backup pad 7, lead screw post 9 is connected with through universal ball and removes post 10, it is connected with arc holder 11 through buffer to remove post 10, furthermore, buffer includes fixed ring 17 of fixed connection on removing post 10 lateral wall, fixed ring 17 is connected with slip ring 18 through the buffer spring of cover on removing post 10 lateral wall, slip ring 18 cover is established on removing post 10 lateral wall, slip ring 18 lateral wall fixedly connected with connecting piece 19, connecting

piece

19 and 11 lateral walls fixed connection of arc holder.

The bottom of the movable column 10 penetrates into the transmission cavity 4, the movable column 10 is in sliding contact with the side wall of the welding seat 1, a rack 12 is fixedly connected with the movable column, and the rack 12 is meshed with the transmission gear plate 6.

Further, set up the connector that runs through the lateral wall on the backup pad 7, in screw nut 8 fixed connection was in the connector, 9 top fixedly connected with knobs of lead screw post, and arc holder 11 bottoms are provided with rubber inoxidizing coating 20.

The utility model discloses when welding the wafer, place the wafer on placing the dish 2, through rotating the knob, make lead screw post 9 rotate, when lead screw post 9 rotates and can move down under the effect of screw nut 8, slip ring 18 on lead screw post 9 can move down and drive the arc holder 11 that is connected with it through connecting piece 19 and move down, when arc holder 11 moves down, can with the wafer upper surface contact on placing the dish 2, thereby centre gripping the wafer, guarantee the stability in the welding;

in the welding process, when a wafer needs to be rotated to adjust the position, the screw rod column 9 moves upwards through the reverse rotation knob, the fixing ring 17 is driven to move upwards in the upward movement process of the screw rod column 9, the arc-shaped clamping piece 11 connected with the sliding ring 18 through the connecting piece 19 moves upwards, the clamping of the wafer is cancelled, after the arc-shaped clamping piece 11 cancels the clamping of the wafer, the rack 12 continuously moves upwards under the driving of the upward movement of the screw rod column 9, the rack 12 moves upwards to enable the driving toothed disc 6 meshed and connected with the rack to rotate, the rotating shaft 13 rotates under the action of the ratchet wheel assembly 14, the rotating bevel gear 15 is driven to drive the transmission shaft 16 to rotate through the rotating shaft 3, the vertical bevel gear 5 drives the placing disc 2 to rotate through the rotating shaft 3, the wafer on the placing disc 2 rotates along with the rotating shaft, and the angle position is adjusted;

after the position adjustment is completed, when the screw rod column 9 moves downwards, the rotation of the transmission fluted disc 6 cannot enable the rotation shaft 13 to rotate due to the ratchet wheel assembly 14, so that the placing disc 2 is in a static state in the clamping process, and the clamping effect is ensured.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The wafer welding and fixing device comprises a welding seat (1) and is characterized in that a placing disc (2) is arranged above the welding seat (1), the bottom of the placing disc (2) is fixedly connected with a rotating shaft (3), a transmission cavity (4) is formed in the welding seat (1), the bottom of the rotating shaft (3) penetrates into the transmission cavity (4) and is fixedly connected with a vertical bevel gear (5), the vertical bevel gear (5) is connected with a transmission fluted disc (6) through a transmission assembly, the top of the welding seat (1) is fixedly connected with an L-shaped supporting plate (7), the supporting plate (7) is connected with a lead screw column (9) through a lead screw nut (8), the lead screw column (9) is connected with a moving column (10) through a universal ball, the moving column (10) is connected with an arc-shaped clamping piece (11) through a buffering device, and the bottom of the moving column (10) penetrates into the transmission cavity (4), and is fixedly connected with a rack (12), and the rack (12) is meshed with the transmission gear disc (6).

2. The wafer welding fixing device according to claim 1, characterized in that the transmission assembly comprises a rotating shaft (13) rotatably connected in the transmission cavity (4), the outer side wall of the rotating shaft (13) is connected with the inner side wall of the transmission toothed disc (6) through a ratchet assembly (14), and a rotating bevel gear (15) is fixedly connected to the end part of the rotating shaft (13).

3. The wafer welding and fixing device according to claim 2, wherein a fixed block is fixedly connected in the transmission cavity (4), the fixed block is rotatably connected with a transmission shaft (16), transmission bevel gears are fixedly connected at both ends of the transmission shaft (16), and the two transmission bevel gears at both ends of the transmission shaft (16) are respectively in meshed connection with the vertical bevel gear (5) and the rotary bevel gear (15).

4. The wafer welding and fixing device according to claim 1, wherein the buffering device comprises a fixing ring (17) fixedly connected to the outer side wall of the moving column (10), the fixing ring (17) is connected with a sliding ring (18) through a buffering spring sleeved on the outer side wall of the moving column (10), the sliding ring (18) is sleeved on the outer side wall of the moving column (10), a connecting piece (19) is fixedly connected to the side wall of the sliding ring (18), and the connecting piece (19) is fixedly connected with the side wall of the arc-shaped clamping piece (11).

5. The wafer welding and fixing device according to claim 1, wherein a connecting port penetrating through the side wall is formed in the supporting plate (7), the lead screw nut (8) is fixedly connected in the connecting port, and a knob is fixedly connected to the top of the lead screw column (9).

6. The wafer welding fixture according to claim 1, characterized in that the bottom of the arc-shaped clamping piece (11) is provided with a rubber protective layer (20).