CN213816085U

CN213816085U - Automatic source titanium cleaning equipment of semiconductor

Info

Publication number: CN213816085U
Application number: CN202023332152.1U
Authority: CN
Inventors: 董兴玉; 刘民; 浦爱东
Original assignee: Changzhou Rongdao Precision Equipment Co ltd
Current assignee: Changzhou Rongdao Precision Equipment Co ltd
Priority date: 2020-12-31
Filing date: 2020-12-31
Publication date: 2021-07-27
Anticipated expiration: 2030-12-31

Abstract

The utility model relates to a semiconductor washs technical field, and discloses semiconductor automation source titanium cleaning equipment, the on-line screen storage device comprises a base, the outer wall of base is provided with the washing basin, and the outer wall fixedly connected with mounting bracket of base, the dead lever is installed to the inner wall of mounting bracket, and the outer wall fixedly connected with fixed block of dead lever, the inner wall of mounting bracket is provided with servo motor, and servo motor's output shaft has the carousel through shaft coupling swing joint, the outer wall fixedly connected with bull stick of carousel, and the outer wall of bull stick is provided with adjusting gear, the one end fixedly connected with regulating block of bull stick, and the outer wall fixedly connected with regulation pole of regulating block. This automatic source titanium cleaning equipment of semiconductor uses through the cooperation of servo motor, carousel and bull stick isotructure can concentrate on a plurality of small-size semiconductors in the wash basin to automatic stirring washs, can realize that a plurality of semiconductors wash in step, is favorable to practicing thrift a large amount of human costs and time cost.

Description

Automatic source titanium cleaning equipment of semiconductor

Technical Field

The utility model relates to a semiconductor cleaning technology field specifically is semiconductor automation source titanium cleaning equipment.

Background

Semiconductors, which are materials having electrical conductivity between conductors and insulators at normal temperature, have been widely used in radio sets, televisions, and thermometry, and with the continuous progress of integrated circuit manufacturing processes, the volume of semiconductor devices is becoming smaller and smaller, and thus, the cleaning technology is becoming more and more important.

Most semiconductor cleaning equipment on the existing market is mostly single clean for the semiconductor, the time-wasting cost and the cost of labor, the most position of semiconductor is fixed during cleaning, single cleaning can not be carried out comprehensive cleaning to the semiconductor, and is not favorable to the clean thoroughness.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model provides a not enough to prior art, the utility model provides an automatic source titanium cleaning equipment of semiconductor possesses a plurality of semiconductors and cleans in step, comprehensive thorough advantage such as clean, has solved most semiconductor cleaning equipment on the current market and has mostly be single clean of semiconductor, waste time cost and cost of labor, and the most rigidity of semiconductor during the washing, single washing can not clean comprehensively to the semiconductor, is unfavorable for the problem of clear thoroughness.

(II) technical scheme

In order to achieve the above object, the utility model provides a following technical scheme: automatic source titanium cleaning equipment of semiconductor, the on-line screen storage device comprises a base, the outer wall of base is provided with the washing basin, and the outer wall fixedly connected with mounting bracket of base, the dead lever is installed to the inner wall of mounting bracket, and the outer wall fixedly connected with fixed block of dead lever, the inner wall of mounting bracket is provided with servo motor, and servo motor's output shaft has the carousel through shaft coupling swing joint, the outer wall fixedly connected with bull stick of carousel, and the outer wall of bull stick is provided with adjusting gear, the one end fixedly connected with regulating block of bull stick, and the outer wall fixedly connected with regulation pole of regulating block, the outer wall fixedly connected with transmission block of regulation pole, and the outer wall of transmission block is provided with drive gear, the puddler is installed to the outer wall of transmission block, the outer wall of base is provided with the air-blower, and the output swing joint of air-blower has the blast pipe.

Preferably, the outer wall of the base is provided with a limiting pipe, and the shape and size of the limiting pipe are matched with those of the air supply pipe.

Preferably, the inner wall of mounting bracket is provided with the mounting bar, and the outer wall of mounting bar installs the collar, the outer wall of collar is provided with adjusting bolt, and adjusting bolt's outer wall threaded connection has adjusting nut.

Preferably, the outer wall of the fixed block is provided with a through hole, and the rotating rod is movably connected with the adjusting block through the through hole.

Preferably, the transmission gears are symmetrically arranged by taking a vertical central line of the adjusting gear as a symmetry axis, the transmission gears and the adjusting gear are horizontally arranged, and the shape and the size of the transmission gears are matched with those of the adjusting gear.

Preferably, the stirring rod is an S-shaped stirring rod, and the stirring rod is symmetrically arranged by taking the vertical central line of the rotating rod as a symmetry axis.

Preferably, one end of the limiting pipe penetrates through the inner wall of the mounting frame and extends to the inner wall of the mounting frame, and the limiting pipe is fixedly connected with the mounting frame through the mounting ring.

Compared with the prior art, the utility model provides an automatic source titanium cleaning equipment of semiconductor possesses following beneficial effect:

1. this automatic source titanium cleaning equipment of semiconductor uses through the cooperation of servo motor, carousel and bull stick isotructure can concentrate on a plurality of small-size semiconductors in the wash basin to automatic stirring washs, can realize that a plurality of semiconductors wash in step, is favorable to practicing thrift a large amount of human costs and time cost.

2. This automatic source titanium cleaning equipment of semiconductor uses through the cooperation of regulating block, transmission piece and puddler isotructure, can make the semiconductor in the wash basin, stirs the operation for a plurality of surfaces of semiconductor by the washing carry out the washing operation of different degrees, can carry out comprehensive clean operation to the semiconductor, are favorable to carrying out thorough comprehensive cleanness to the semiconductor.

3. This automatic source titanium cleaning equipment of semiconductor uses through the cooperation of air-blower, blast pipe and spacing pipe isotructure, can make the semiconductor after the cleanness weather the operation, prevents that the humidity on semiconductor surface from influencing follow-up use and processing, and the stirring of puddler can accelerate the air-drying of semiconductor simultaneously.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic front view of the present invention;

FIG. 3 is a schematic diagram of a right side view cross-sectional structure of the mounting ring of the present invention;

fig. 4 is a schematic view of the adjusting gear according to the present invention.

Wherein: 1. a base; 2. a wash basin; 3. a mounting frame; 4. fixing the rod; 5. a fixed block; 6. a servo motor; 7. a turntable; 8. a rotating rod; 9. an adjusting gear; 10. an adjusting block; 11. adjusting a rod; 12. a transmission block; 13. a transmission gear; 14. a stirring rod; 15. a blower; 16. an air supply pipe; 17. a limiting pipe; 18. mounting a bar; 19. a mounting ring; 20. adjusting the bolt; 21. and adjusting the nut.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, the semiconductor automatic source titanium cleaning device comprises a base 1, a cleaning basin 2 is arranged on the outer wall of the base 1, a mounting frame 3 is fixedly connected on the outer wall of the base 1, a fixing rod 4 is arranged on the inner wall of the mounting frame 3, a fixing block 5 is fixedly connected on the outer wall of the fixing rod 4, a servo motor 6 is arranged on the inner wall of the mounting frame 3, an output shaft of the servo motor 6 is movably connected with a rotary table 7 through a coupler, a rotary rod 8 is fixedly connected on the outer wall of the rotary table 7, an adjusting gear 9 is arranged on the outer wall of the rotary rod 8, an adjusting block 10 is fixedly connected on one end of the rotary rod 8, an adjusting rod 11 is fixedly connected on the outer wall of the adjusting block 10, a transmission block 12 is fixedly connected on the outer wall of the adjusting rod 11, a transmission gear 13 is arranged on the outer wall of the transmission block 12, a stirring rod 14 is arranged on the outer wall of the transmission block 12, and an air blower 15 is arranged on the outer wall of the base 1, and the output end of the blower 15 is movably connected with an air supply pipe 16.

Through the technical scheme, a plurality of small semiconductors can be concentrated in the cleaning basin 2 through the matching use of the structures such as the servo motor 6, the rotary table 7, the rotary rod 8 and the like, and can be automatically stirred and cleaned, so that the synchronous cleaning of the semiconductors can be realized, the saving of a large amount of labor cost and time cost is facilitated, the semiconductors can be stirred in the cleaning basin 2 through the matching use of the structures such as the adjusting block 10, the transmission block 12, the stirring rod 14 and the like, the cleaning operation of different degrees can be carried out on a plurality of surfaces of the cleaned semiconductors, the comprehensive cleaning operation can be carried out on the semiconductors, the thorough and comprehensive cleaning of the semiconductors can be facilitated, the drying operation of the cleaned semiconductors can be carried out through the matching use of the structures such as the air blower 15, the air supply pipe 16, the limiting pipe 17 and the like, the influence of the humidity on the surface of the semiconductors on the subsequent use and processing can be prevented, and the stirring of the stirring rod 14 can accelerate the air drying of the semiconductor.

Specifically, the outer wall of the base 1 is provided with a limiting pipe 17, and the shape and size of the limiting pipe 17 are matched with the shape and size of the air supply pipe 16.

Through the technical scheme, the limiting pipe 17 is favorable for fixing and limiting the position of the air supply pipe 16, and the air supply pipe 16 is prevented from being separated from the original fixed track position due to wind power.

Specifically, the inner wall of the mounting bracket 3 is provided with a mounting bar 18, the outer wall of the mounting bar 18 is provided with a mounting ring 19, the outer wall of the mounting ring 19 is provided with an adjusting bolt 20, and the outer wall of the adjusting bolt 20 is in threaded connection with an adjusting nut 21.

Through above-mentioned technical scheme, thereby realize fixing the centre gripping of collar 19 through screwing up adjusting nut 21, realize fixing spacing pipe 17 position, wind-force concentration nature when being favorable to blast pipe 16 and spacing pipe 17 to drying to the semiconductor.

Specifically, the outer wall of the fixed block 5 is provided with a through hole, and the rotating rod 8 is movably connected with the adjusting block 10 through the through hole.

Through above-mentioned technical scheme, be favorable to the rotation of carousel 7 to drive the rotation of bull stick 8, be favorable to the operation smoothness nature of device.

Specifically, the transmission gear 13 is symmetrically arranged by taking a vertical center line of the adjusting gear 9 as a symmetry axis, the transmission gear 13 and the adjusting gear 9 are horizontally arranged, and the shape and the size of the transmission gear 13 are matched with those of the adjusting gear 9.

Through the technical scheme, the adjusting gear 9 and the transmission gear 13 rotate in a matched mode, so that the running smoothness of the device is facilitated, and the rotation of the stirring rod 14 is guaranteed.

Specifically, the stirring rod 14 is an S-shaped stirring rod, and the stirring rod 14 is symmetrically disposed with respect to the vertical center line of the rotating rod 8 as a symmetry axis.

Through the technical scheme, the stirring rod 14 is favorable for fully stirring the cleaning objects, and the semiconductor is favorable for comprehensive and thorough cleaning.

Specifically, one end of the limiting pipe 17 penetrates through the inner wall of the mounting frame 3 and extends to the inner wall of the mounting frame 3, and the limiting pipe 17 is fixedly connected with the mounting frame 3 through the mounting ring 19.

Through above-mentioned technical scheme, be favorable to spacing pipe 17's rigidity, be favorable to blast pipe 16 and spacing pipe 17 to the semiconductor when weathering wind-force concentration nature.

When the cleaning device is used, firstly, a semiconductor material to be cleaned is placed in the cleaning basin 2, the servo motor 6 is started to drive the rotary disc 7 and the rotary rod 8 to rotate, the rotary rod 8 rotates to drive the adjusting gear 9 and the adjusting block 10 to rotate, the adjusting rod 11 is fixedly connected to the outer wall of the adjusting block 10, the transmission block 12 is fixedly connected with the adjusting rod 11, the adjusting block 10 rotates to drive the adjusting rod 11 and the transmission block 12 to rotate, the transmission gear 13 and the stirring rod 14 are arranged on the outer wall of the transmission block 12, the transmission block 12 rotates to drive the transmission gear 13 and the stirring rod 14 to rotate, meanwhile, the transmission gear 13 is meshed with the adjusting gear 9, the adjusting gear 9 rotates to drive the transmission gear 13 to rotate, secondary guarantee is provided for the rotation of the stirring rod 14, and the stirring rod 14 is used for rotationally stirring the cleaned object, be favorable to the comprehensive thorough cleanness of washings, after the completion of the work of washing, open air-blower 15, opening of air-blower 15 can make a large amount of wind transmit to mounting bracket 3 in from blast pipe 16, air-dry the washings in the wash basin 2, accomplish whole work so far.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. Semiconductor automation source titanium cleaning equipment, including base (1), its characterized in that: the outer wall of the base (1) is provided with a cleaning basin (2), the outer wall of the base (1) is fixedly connected with a mounting rack (3), a fixing rod (4) is installed on the inner wall of the mounting rack (3), the outer wall of the fixing rod (4) is fixedly connected with a fixing block (5), the inner wall of the mounting rack (3) is provided with a servo motor (6), an output shaft of the servo motor (6) is movably connected with a rotary table (7) through a coupler, the outer wall of the rotary table (7) is fixedly connected with a rotary rod (8), the outer wall of the rotary rod (8) is provided with an adjusting gear (9), one end of the rotary rod (8) is fixedly connected with an adjusting block (10), the outer wall of the adjusting block (10) is fixedly connected with an adjusting rod (11), the outer wall of the adjusting rod (11) is fixedly connected with a transmission block (12), and the outer wall of the transmission block (12) is provided with a transmission gear (13), the outer wall of the transmission block (12) is provided with a stirring rod (14), the outer wall of the base (1) is provided with a blower (15), and the output end of the blower (15) is movably connected with an air supply pipe (16).

2. The automated source titanium semiconductor cleaning apparatus of claim 1, wherein: the outer wall of the base (1) is provided with a limiting pipe (17), and the shape and the size of the limiting pipe (17) are matched with those of the air supply pipe (16).

3. The automated source titanium semiconductor cleaning apparatus of claim 1, wherein: the inner wall of mounting bracket (3) is provided with mounting bar (18), and the outer wall of mounting bar (18) installs collar (19), the outer wall of collar (19) is provided with adjusting bolt (20), and the outer wall threaded connection of adjusting bolt (20) has adjusting nut (21).

4. The automated source titanium semiconductor cleaning apparatus of claim 1, wherein: the outer wall of the fixed block (5) is provided with a through hole, and the rotating rod (8) is movably connected with the adjusting block (10) through the through hole.

5. The automated source titanium semiconductor cleaning apparatus of claim 1, wherein: the transmission gears (13) are symmetrically arranged by taking the vertical center line of the adjusting gear (9) as a symmetry axis, the transmission gears (13) and the adjusting gear (9) are horizontally arranged, and the shape and the size of the transmission gears (13) are matched with those of the adjusting gear (9).

6. The automated source titanium semiconductor cleaning apparatus of claim 1, wherein: the stirring rod (14) is an S-shaped stirring rod, and the stirring rod (14) is symmetrically arranged by taking the vertical central line of the rotating rod (8) as a symmetry axis.

7. The automated source titanium semiconductor cleaning apparatus of claim 2, wherein: one end of the limiting pipe (17) penetrates through the inner wall of the mounting frame (3) and extends to the inner wall of the mounting frame (3), and the limiting pipe (17) is fixedly connected with the mounting frame (3) through a mounting ring (19).