CN213708549U - Graphite crucible for silicon carbide crystal growth thermal field - Google Patents
Graphite crucible for silicon carbide crystal growth thermal field Download PDFInfo
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- CN213708549U CN213708549U CN202022808980.1U CN202022808980U CN213708549U CN 213708549 U CN213708549 U CN 213708549U CN 202022808980 U CN202022808980 U CN 202022808980U CN 213708549 U CN213708549 U CN 213708549U
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Abstract
The utility model discloses a graphite crucible for carborundum long crystal thermal field, including crucible body, draft tube, graphite ring and crucible cover, this internal bottom of crucible is equipped with the draft tube, the upper end screw thread of crucible body even has the graphite ring, the upper end screw thread of graphite ring even has the crucible cover. The guide cylinder can prevent the peripheral airflow from directly upwards, so that the bottom temperature field is more uniform, the sublimation speed is more uniform and stable, carbon inclusions can be reduced, the dust amount is reduced, and the crystal growth quality is improved; all adopt screw-thread fit between graphite ring and crucible body, the crucible lid, connect more reliably to when having solved originally only simple contact cooperation, owing to relapse the dismouting wearing and tearing lead to the problem that the joint gap increases, improved the life of crucible, prevented external impurity from getting into the crucible, guaranteed product quality, also stopped the outer of the inside carborundum of crucible and scattered, avoided the corruption of outside heat preservation felt, reduced manufacturing cost.
Description
Technical Field
The utility model relates to a silicon carbide crystal growth technical field specifically is a graphite crucible for silicon carbide crystal growth thermal field.
Background
The material source and the crystal growth environment are both in the graphite crucible in the growth process of the silicon carbide crystal, and the structural design and the selection of corresponding materials of the graphite crucible can directly influence the service life of the crucible and the quality of the crystal.
At present, when a crucible is used, the problem of easy corrosion exists in the matching between the crucible and a graphite ring and between the crucible and a crucible cover, so that the service life of the crucible is shortened, meanwhile, the corrosion at the matching position easily causes external impurities to enter the crucible to influence the crystal quality, silicon carbide and silicon in the crucible diffuse outwards to corrode an external heat preservation felt, the cost of the heat preservation felt is high, and the production cost is increased; meanwhile, the temperature around the bottom of the crucible is higher, so that the sublimation of the material source inside is preferential, local carbon particles and air flow are uneven, and the product quality is influenced.
SUMMERY OF THE UTILITY MODEL
The utility model provides a graphite crucible for a silicon carbide crystal growth thermal field, aiming at the defects in the prior art, the bottom temperature field is more uniform through the guide cylinder, the dust quantity is reduced, and the crystal growth quality is improved; the graphite ring is in threaded fit with the crucible body and the crucible cover, so that the problem that the connection gap is increased due to repeated disassembly and assembly abrasion when the graphite ring is in simple contact fit with the crucible body and the crucible cover is solved, the service life of the crucible is prolonged, and the production cost is reduced.
In order to achieve the above object, the utility model provides a following technical scheme:
the utility model provides a graphite crucible for carborundum long crystal thermal field, includes crucible body, draft tube, graphite ring and crucible cover, this internal bottom of crucible is equipped with the draft tube, the upper end screw thread of crucible body even has the graphite ring, the upper end screw thread of graphite ring even has the crucible cover.
Preferably, the diameter of the guide cylinder is gradually reduced from bottom to top, and the lower end of the guide cylinder is connected with the inner wall of the crucible body.
Preferably, the upper end edge of the guide shell is provided with a support ring connected with the inner wall of the crucible body.
Preferably, the upper end of the crucible body is provided with a connecting ring, the inner wall of the graphite ring is provided with a lower connecting groove matched with the connecting ring, the inner wall of the lower connecting groove is in threaded fit with the outer wall of the connecting ring, and the lower end of the graphite ring is pressed at the upper end of the crucible body.
Preferably, the edge of the crucible cover is provided with a blocking edge, the inner wall of the graphite ring is provided with an upper connecting groove in threaded fit with the crucible cover, and the blocking edge is pressed at the upper end of the graphite ring.
Preferably, the outer side of the graphite ring is sleeved with a protective ring, the protective ring and the graphite ring are of an integral structure, the upper end of the protective ring is sleeved outside the blocking edge, and the lower end of the protective ring is sleeved outside the crucible body.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the utility model can avoid the direct upward of the peripheral air flow through the guide cylinder, so that the bottom temperature field is more uniform, the sublimation speed is more uniform and stable, thus reducing the carbon coating, reducing the dust amount and improving the crystal growth quality; all adopt screw-thread fit between graphite ring and crucible body, the crucible lid, connect more reliably to when having solved originally only simple contact cooperation, owing to relapse dismouting wearing and tearing lead to the problem that the joint gap increases, thereby improved sealed effect, improved the life of crucible, prevented external impurity from getting into the crucible, guaranteed product quality, also prevented the outer of the inside carborundum of crucible and scattered, avoided the corruption of outside heat preservation felt, reduced manufacturing cost.
2. The utility model discloses upper end edge at the draft tube be equipped with the support ring of the interior wall connection of crucible body to carry out spacing fixed to the upper end of draft tube, prevent that the draft tube from rocking, ensure the reliability of using.
3. The utility model discloses set up the guard ring in the outside of graphite ring, can block induced-current direct corrosion to the screw thread of junction has been protected, has improved life, has reduced manufacturing cost, has also improved sealed effect, has guaranteed product quality.
Drawings
Fig. 1 is a cross-sectional view of the present invention;
FIG. 2 is a schematic structural view of a crucible body;
FIG. 3 is a schematic structural view of the draft tube;
FIG. 4 is a schematic structural view of a graphite ring;
FIG. 5 is a schematic view of the structure of the crucible cover.
In the figure: 1-crucible body; 101-a connecting ring; 2-a guide shell; 201-support ring; 3-a graphite ring; 301-a guard ring; 302-lower connecting groove; 303-upper connecting groove; 4-crucible cover; 401-catch edge.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in figure 1, a graphite crucible for a silicon carbide crystal growth thermal field comprises a crucible body 1, a draft tube 2, a graphite ring 3 and a crucible cover 4, wherein the draft tube 2 is arranged at the bottom in the crucible body 1 and can guide the ascending air flow and ensure the uniformity of the air flow, the graphite ring 3 is connected with the upper end of the crucible body 1 through a thread, the crucible cover 4 is connected with the upper end of the graphite ring 3 through a thread, the graphite ring 3 is matched with the crucible body 1 and the crucible cover 4 through threads, the connection is more reliable, and therefore the problem that when the original crucible is only in simple contact matching is solved, the problem that the connection gap is increased due to repeated disassembly and assembly abrasion is solved, so that the sealing effect is improved, the service life of the crucible is prolonged, external impurities are prevented from entering the crucible, the product quality is ensured, the silicon carbide in the crucible is prevented from scattering, the corrosion of an external heat insulation felt is avoided, and the production cost is reduced.
Wherein, as shown in fig. 3, the diameter of draft tube 2 is dwindled from bottom to top gradually, and the lower extreme of draft tube 2 and the interior wall connection of crucible body 1, because crucible body 1 bottom problem all around is higher for sublimation rate is faster than the middle part all around, can avoid the air current directly upwards all around through draft tube 2, makes the bottom temperature field more even, and sublimation rate is more even steady, can reduce carbon parcel thing like this, reduces dust quantity, has improved long crystal quality.
In order to ensure the reliability of the fixing of the guide shell 2, as shown in fig. 2, a support ring 201 connected with the inner wall of the crucible body 1 is arranged at the edge of the upper end of the guide shell 2, so that the upper end of the guide shell 2 is limited and fixed, and the guide shell 2 is prevented from shaking.
In order to further improve the sealing performance, as shown in fig. 1 and 4-5, the specific structure adopted in the present embodiment is:
the upper end of the crucible body 1 is provided with the connecting ring 101, the inner wall of the graphite ring 3 is provided with a lower connecting groove 302 matched with the connecting ring 101, the inner wall of the lower connecting groove 302 is in threaded fit with the outer wall of the connecting ring 101, and the lower end of the graphite ring 3 is pressed at the upper end of the crucible body 1.
The edge of crucible cover 4 is equipped with and keeps off along 401, is equipped with on the inner wall of graphite ring 3 and covers 4 screw-thread fit's last spread groove 303 with the crucible, keeps off along 401 and presses in the upper end of graphite ring 3.
The outside cover of graphite ring 3 has guard ring 301, and guard ring 301 and graphite ring 3 structure as an organic whole, and the pot head of guard ring 301 is in the outside of keeping off along 401, and the pot head of guard ring 301 is in the outside of crucible body 1.
Through the connecting structure, the graphite ring 3 is in threaded connection with the crucible body 1, a horizontal contact surface is arranged on the inner side of the thread, a horizontal contact surface is arranged on the outer side of the thread, and a vertical contact surface is arranged on the outer side of the horizontal contact surface; adopt threaded connection between graphite ring 3 and crucible cover 4, the outside of screw thread sets up a vertical contact surface of horizontal contact surface, because the crucible induced current distributes on the lateral wall of crucible mostly in the use, can block induced current through above-mentioned structure and to the direct corrosion of screw thread to connecting thread has been protected, has improved life, has reduced manufacturing cost, has guaranteed product quality.
It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (6)
1. A graphite crucible for a silicon carbide long crystal thermal field is characterized in that: the crucible comprises a crucible body, a guide cylinder, a graphite ring and a crucible cover, wherein the guide cylinder is arranged at the bottom in the crucible body, the graphite ring is connected to the upper end of the crucible body in a threaded manner, and the crucible cover is connected to the upper end of the graphite ring in a threaded manner.
2. A graphite crucible for use in a silicon carbide long crystal thermal field as claimed in claim 1, wherein: the diameter of the guide cylinder is gradually reduced from bottom to top, and the lower end of the guide cylinder is connected with the inner wall of the crucible body.
3. A graphite crucible for a silicon carbide long crystal thermal field as claimed in claim 2, wherein: and a support ring connected with the inner wall of the crucible body is arranged at the edge of the upper end of the guide cylinder.
4. A graphite crucible for use in a silicon carbide long crystal thermal field as claimed in claim 1, wherein: the crucible comprises a crucible body and is characterized in that a connecting ring is arranged at the upper end of the crucible body, a lower connecting groove matched with the connecting ring is arranged on the inner wall of the graphite ring, the inner wall of the lower connecting groove is in threaded fit with the outer wall of the connecting ring, and the lower end of the graphite ring is pressed at the upper end of the crucible body.
5. A graphite crucible for use in a silicon carbide long crystal thermal field according to claim 4, wherein: the edge of crucible cover is equipped with keeps off along, be equipped with on the inner wall of graphite ring with crucible cover screw-thread fit's last spread groove, keep off along pressing in the upper end of graphite ring.
6. A graphite crucible for use in a silicon carbide crystal growth thermal field as claimed in claim 5, wherein: the outer side cover of graphite ring has the guard ring, guard ring and graphite ring structure as an organic whole, the upper end cover of guard ring is in the outside of keeping off the edge, and the lower pot head of guard ring is in the outside of crucible body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022808980.1U CN213708549U (en) | 2020-11-27 | 2020-11-27 | Graphite crucible for silicon carbide crystal growth thermal field |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022808980.1U CN213708549U (en) | 2020-11-27 | 2020-11-27 | Graphite crucible for silicon carbide crystal growth thermal field |
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| CN213708549U true CN213708549U (en) | 2021-07-16 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113622030A (en) * | 2021-08-18 | 2021-11-09 | 福建北电新材料科技有限公司 | Method for preparing silicon carbide single crystal |
-
2020
- 2020-11-27 CN CN202022808980.1U patent/CN213708549U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113622030A (en) * | 2021-08-18 | 2021-11-09 | 福建北电新材料科技有限公司 | Method for preparing silicon carbide single crystal |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Graphite crucible for silicon carbide long crystal thermal field Effective date of registration: 20220126 Granted publication date: 20210716 Pledgee: Bank of China Limited Jinan Quancheng Branch Pledgor: Shandong Zhonghong New Materials Co.,Ltd. Registration number: Y2022980001111 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20230131 Granted publication date: 20210716 Pledgee: Bank of China Limited Jinan Quancheng Branch Pledgor: Shandong Zhonghong New Materials Co.,Ltd. Registration number: Y2022980001111 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A graphite crucible for the thermal field of silicon carbide long crystal Effective date of registration: 20230206 Granted publication date: 20210716 Pledgee: Bank of China Limited Jinan Quancheng Branch Pledgor: Shandong Zhonghong New Materials Co.,Ltd. Registration number: Y2023370000033 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right |