CN213658809U - Automatic testing device for chip testing - Google Patents

Abstract

The utility model relates to an automatic testing device for chip testing, which comprises a machine table and an object stage, wherein the machine table comprises a bracket and a shell, and the object stage is arranged on the bracket and is positioned inside the shell; the shell above the objective table is provided with a first through hole which is communicated with the inner space and the outer space of the shell; a first probe setting unit is arranged on the first through hole; the first probe setting unit comprises a fixing plate, a second through hole arranged on the fixing plate and a probe seat connecting assembly which is arranged on the fixing plate and communicated with the inner space of the machine table through the second through hole; the fixing plate is connected with the top surface of the shell through an installation screw hole in the shell, so that the circle centers of the second through hole and the first through hole are overlapped. Implement the utility model discloses an automatic testing arrangement for chip test has following beneficial effect: the test cost is lower, and the operation is more convenient during high and low temperature tests.

Description

Automatic testing device for chip testing

Technical Field

The utility model relates to a chip testing field, more specifically say, relate to an automatic testing arrangement for chip testing.

Background

In chip testing, a Wafer (Wafer) is usually mounted on a stage of a fully automatic test bed (probe station) and a single chip (DIE) is physically contacted by a probe card provided in the test bed and then tested by an instrument. Meanwhile, the full-automatic probe stations with different functions can provide different environmental temperatures for the Wafer so as to realize the aging environment of DIE, and in order to ensure the temperature uniformity, the whole probe station is closed during the test period and the probe card cannot be moved; this is because the temperature change is caused by opening the test chamber (i.e., the space where the stage is located) in the high and low temperature environments of the probe stage, and thus the probe cannot be moved or changed in the high and low temperature environments. In addition, because the distance between all probes cannot be adjusted due to the process of the probe card, different probe cards need to be purchased for different kinds of DIE, and the corresponding probe cards need to be replaced on the probe station according to different DIE, so that the cost is high, and the operation is inconvenient during high-temperature and low-temperature tests.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model lies in, to the above-mentioned inconvenient defect of operation when testing cost is higher, high low temperature of prior art, provide a test cost lower, operate comparatively convenient automatic testing arrangement for chip testing when high low temperature tests.

The utility model provides a technical scheme that its technical problem adopted is: the automatic testing device for chip testing is constructed and comprises a machine table, an object stage and testing equipment, wherein the machine table comprises a support and a shell, and the object stage is arranged on the support and is positioned in the shell; the test equipment is arranged on the machine table; the shell above the objective table is provided with a first through hole which is communicated with the inner space and the outer space of the shell; a first probe setting unit is arranged on the first through hole; the first probe setting unit comprises a fixing plate, a second through hole arranged on the fixing plate and a probe seat connecting assembly which is arranged on the fixing plate and communicated with the inner space of the machine table through the second through hole; the fixing plate is connected with the top surface of the shell through an installation screw hole in the shell, so that the circle centers of the second through hole and the first through hole are overlapped.

Further, the probe base connecting assembly comprises a base plate and a probe base connecting piece; the shape of the bottom plate is matched with the second through hole, and the bottom plate is used for sealing other areas except the probe seat connecting piece on the second through hole.

Furthermore, the shape of the probe seat connecting piece comprises a columnar structure with a certain length, and the length of the columnar structure is equal to the diameter of the second through hole; and an installation gap for a fixing bolt of the probe seat to penetrate through is arranged at the axial line position of the columnar structure along the length direction of the columnar structure.

Furthermore, the probe seat connecting piece is composed of two vertically intersected columnar structures, the length of each columnar structure is equal to the diameter of the second through hole, and the two columnar structures form a cross shape on a horizontal plane; the four structures extending outwards in the cross shape are respectively provided with installation gaps which are arranged along the axial line of the length direction of the structures and are used for fixing bolts of the probe seat to penetrate through.

Furthermore, an observation through hole is arranged at the midpoint or the intersection point of the cross-shaped structure of the probe seat connecting piece.

Furthermore, the probe seat connecting assembly further comprises an observation assembly mounting seat, and the observation assembly mounting seat is arranged above the cross-shaped structure and fixed on the bottom plate; the central point of observing the subassembly mount pad puts and is provided with and observes the subassembly mounting hole, observe the subassembly mounting hole with observe the through-hole and overlap.

Still further, the viewing assembly includes a microscope assembly including an eyepiece, one end of the eyepiece being disposed in the viewing assembly mounting aperture.

Still further, the microscope assembly further comprises a microscope adjusting bracket, wherein the microscope adjusting bracket is fixed on the bottom plate and is connected with the ocular through a supporting arm for supporting the ocular.

Furthermore, the microscope adjusting bracket is also provided with an adjusting mechanism for adjusting the position of the supporting arm so as to adjust the position of the ocular.

Furthermore, the machine table is also provided with a probe card mounting structure which is arranged in the shell and surrounds the object stage.

Implement the utility model discloses an automatic testing arrangement for chip test has following beneficial effect: because use first probe setting unit and set up it on the first through-hole on the shell, be provided with probe seat setting assembly again on the above-mentioned first probe setting unit simultaneously for can set up extra probe seat on it, and probe seat is more convenient than the removal of probe card with regard to its structure, can make the temperature in the test cavity can not appear changing or can not appear great change on the one hand, and on the other hand has increased probe quantity and can carry out position control. Therefore, the test cost is low, and the operation is convenient during high and low temperature tests.

Drawings

FIG. 1 is a schematic diagram of an automatic test apparatus for chip testing in the prior art;

FIG. 2 is a schematic structural diagram of a first probe setting unit in an embodiment of the automatic testing device for testing chips according to the present invention;

fig. 3 is a schematic structural diagram of the automatic test apparatus for chip testing in the embodiment.

Detailed Description

The embodiments of the present invention will be further explained with reference to the drawings.

As shown in fig. 1 and 2, in the embodiment of the automatic testing apparatus for chip testing of the present invention, an automatic testing apparatus for chip testing is constructed based on the existing automatic testing apparatus for chip. Fig. 1 shows a specific structure of a prior art automatic chip testing device, and as can be seen from fig. 1, the prior art automatic chip testing device includes a machine table (a main structure in fig. 1), an object stage 2 and a testing device (a protruding part of a top surface of the machine table in fig. 1), the machine table includes a support (not shown in the figure) and a housing 1, the object stage 2 is disposed on the support and is inside the housing 1; the test equipment is arranged on the machine table; the shell 1 above the object stage 2 is provided with a first through hole 12 communicating the inner space and the outer space of the shell 1; the first through hole 12 is provided on the top surface 11 of the housing 1 and corresponds to the stage 11. In addition, the machine station is further provided with a probe card mounting structure (not shown in the figure), the probe card mounting structure is arranged in the shell 1 and surrounds the object stage 2, the arrangement position of the probe card mounting structure is higher than that of the object stage 2, so that a probe card can be conveniently arranged on the object stage 2, and probes on the probe card realize the electrical connection between the appointed points of the chip and the test equipment, so that the chip or die can be conveniently tested. On the basis of the structure in the prior art, in the present embodiment, the present invention further includes a first probe setting unit; the first probe setting unit covers and is fixed on the top surface 11 in fig. 1, and the first probe setting unit includes a fixing plate 3, a second through hole 31 arranged on the fixing plate 3, and a probe seat connecting assembly 4 communicated with the inner space of the machine table through the second through hole 31; the fixing plate 3 is connected with the top surface 11 of the housing 1 through a mounting screw hole on the housing such that the centers of the second through hole 31 and the first through hole 12 overlap.

In this embodiment, the probe base connection assembly 4 includes a base plate 42 and a probe base connection member 41; the shape of the base plate 42 is adapted to the second through hole 31 for closing the other areas except the probe base connecting piece 41 on the second through hole 31. In other words, in this embodiment, the base plate 42 and the probe base connecting member 41 are integrated, and have an external shape corresponding to the second through hole 31, and are mounted on the second through hole 31 to close the second through hole 31, but the probe base connecting member 41 is exposed from the base plate 42, or the base plate 42 is provided with a relief structure, so that the probe base can be mounted on the bottom surface of the base plate 42 in fig. 2, and the fixing bolt of the probe base can be tightened on the top surface of the probe base connecting member 41. That is, the fixing bolt of the probe socket can be extended out of the probe socket connector 41 and connected to the probe socket under the bottom surface of the base plate 42.

As shown in fig. 2, the outer shape of the probe base connecting member 41 includes a columnar structure having a length equal to or equivalent to the diameter of the second through hole 31; the columnar structure is provided with an installation gap 43 for a fixing bolt of the probe seat to pass through at the axial position along the length direction. In the present embodiment, the probe base connecting member 41 is composed of two vertically intersecting columnar structures, each of which has a length equal to the diameter of the second through hole 31, and the two columnar structures are crossed on the horizontal plane or on the base plate 42 to form a cross shape; the four structures extending outwards in the cross shape are respectively provided with mounting gaps 43 which are arranged along the axial line of the length direction and are used for fixing bolts of the probe seat to pass through. Thus, the entire probe base connector 41 is provided with four mounting slots 43. These mounting slots 43 may optionally be provided with one or more probe mounts, respectively.

In addition, in the present embodiment, a viewing through hole (not shown in fig. 2 due to the view angle) is provided at the midpoint or intersection of the cross-shaped structure of the probe holder connecting member 41. In order to facilitate observing the probe position during testing or moving the probe base, in this embodiment, the probe base connecting assembly 4 further includes an observing assembly mounting base 44, and the observing assembly mounting base 44 is disposed above the cross-shaped structure and fixed on the bottom plate 42; an observation component mounting hole 45 is formed in the center of the observation component mounting seat 44, and the observation component mounting hole 45 overlaps with the observation through hole.

In this embodiment, the viewing assembly comprises a microscope assembly including an eyepiece 46, one end of the eyepiece 46 being disposed in the viewing assembly mounting aperture 45. The microscope assembly further comprises a microscope adjusting support 38, the microscope adjusting support 48 is fixed on the base plate 42 and connected with the ocular 46 through a support arm 47 for supporting the ocular 46, and meanwhile, an adjusting mechanism is further arranged on the microscope adjusting support 48 for adjusting the position of the support arm 47 and further adjusting the position of the ocular 46, so that the probe position on the probe seat can be observed more clearly.

Fig. 3 is a schematic structural diagram of a position where the first probe setting unit is installed on the automatic test apparatus for testing a chip in this embodiment, which shows a specific position of the first probe setting unit on the machine.

The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims (10)

1. An automatic testing device for chip testing comprises a machine table and an object stage, wherein the machine table comprises a support and a shell, and the object stage is arranged on the support and is positioned in the shell; the device is characterized in that a first through hole communicated with the inner space and the outer space of the shell is formed in the shell above the objective table; a first probe setting unit is arranged on the first through hole; the first probe setting unit comprises a fixing plate, a second through hole arranged on the fixing plate and a probe seat connecting assembly which is arranged on the fixing plate and communicated with the inner space of the machine table through the second through hole; the fixing plate is connected with the top surface of the shell through an installation screw hole in the shell, so that the circle centers of the second through hole and the first through hole are overlapped.

2. The automatic test equipment for chip testing of claim 1, wherein said probe socket connection assembly comprises a base plate and a probe socket connection member; the shape of the bottom plate is matched with the second through hole, and the bottom plate is used for sealing other areas except the probe seat connecting piece on the second through hole.

3. The automatic test equipment for chip testing according to claim 2, wherein the outer shape of the probe socket connector comprises a columnar structure having a length equal to the diameter of the second through hole; and an installation gap for a fixing bolt of the probe seat to penetrate through is arranged at the axial line position of the columnar structure along the length direction of the columnar structure.

4. The automatic test equipment for chip testing according to claim 3, wherein the probe base connection member is formed of two vertically intersecting columnar structures, each having a length equal to the diameter of the second through hole, the two columnar structures forming a cross shape in a horizontal plane; the four structures extending outwards in the cross shape are respectively provided with installation gaps which are arranged along the axial line of the length direction of the structures and are used for fixing bolts of the probe seat to penetrate through.

5. The automatic test equipment for chip testing according to claim 4, wherein an observation through hole is provided on the midpoint or the intersection point of the cross-shaped structure of the probe socket connector.

6. The automatic test equipment for chip testing of claim 5, wherein the probe base connection assembly further comprises an observation assembly mount disposed above the cross-shaped structure and fixed on the base plate; the central point of observing the subassembly mount pad puts and is provided with and observes the subassembly mounting hole, observe the subassembly mounting hole with observe the through-hole and overlap.

7. The automated test equipment for chip testing of claim 6, wherein the viewing assembly comprises a microscope assembly, the microscope assembly comprising an eyepiece, one end of the eyepiece disposed in the viewing assembly mounting hole.

8. The automatic test equipment for chip testing of claim 7, wherein said microscope assembly further comprises a microscope adjustment bracket fixed to said base plate and connected to said eyepiece by a support arm for supporting said eyepiece.

9. The automatic test device for chip testing as claimed in claim 8, wherein said microscope adjusting bracket is further provided with an adjusting mechanism for adjusting the position of said supporting arm and thus the position of said eyepiece.

10. The automatic test equipment for chip testing according to claim 9, wherein the machine table is further provided with a probe card mounting structure disposed within the housing and surrounding the stage.

Images