CN213657922U - Magnetic angle sensor testing device - Google Patents
Magnetic angle sensor testing device Download PDFInfo
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- CN213657922U CN213657922U CN202022056287.3U CN202022056287U CN213657922U CN 213657922 U CN213657922 U CN 213657922U CN 202022056287 U CN202022056287 U CN 202022056287U CN 213657922 U CN213657922 U CN 213657922U
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Abstract
The utility model provides a magnetism angle sensor testing arrangement, it includes: a first substrate; the motor is arranged on the first substrate and comprises a motor main body and a motor rotating shaft; the magnetic field source is used for generating an external magnetic field, is arranged on the first substrate and is kept still during testing; the magnetic angle sensor to be measured is fixed on a motor rotating shaft of the motor and is opposite to the magnetic field source. Compared with the prior art, the utility model discloses with the magnetic field source rigid, the magnetism angle sensor that will await measuring is fixed in the motor shaft. In the testing process, the motor drives the magnetic angle sensor to be tested to rotate, the rotation angle is used as a reference angle, and the performance parameters of the magnetic angle sensor are calibrated according to the output of the sensor, so that not only can system errors caused by a geomagnetic field be avoided or eliminated, but also angle errors possibly caused by other constant weak magnetic field interference sources can be eliminated together, and the measurement precision of the rotation angle test of the magnetic angle sensor is improved.
Description
[ technical field ] A method for producing a semiconductor device
The utility model belongs to sensor test field especially relates to a simple and easy magnetism angle sensor testing arrangement of high accuracy.
[ background of the invention ]
At present, except for an automatic test system, a simple test device of the magnetic angle sensor generally adopts a mode that a motor rotates a permanent magnet and a sensor is fixed to measure. Except for special configuration, the rotating magnet mode has the problem that the reference angle of the motor rotation is inconsistent with the actual magnetic field direction rotation angle due to the existence of the geomagnetic field or other constant weak magnetic field interference sources, so that systematic angle errors are caused. If the magnetic shielding device is added, considering that the external magnetic field required by the magnetic angle sensor is large, and the magnetic shielding material is a high-permeability material and is easy to magnetize, a large amount of magnetic shielding material is required, and the magnetic shielding device with a large volume is manufactured, so that the cost is high. For high-precision magnetic angle sensors, such measurements are very disadvantageous for the precise calibration of the parameters.
Therefore, it is necessary to provide a technical solution to solve the systematic error caused by the above measurement method.
[ Utility model ] content
An object of the utility model is to provide a magnetism angle sensor testing arrangement, it not only can avoid or reject the systematic error that brings (or produce) by the geomagnetic field, but also can eliminate the angular error that other invariable low-intensity magnetic field interference sources probably brought together to realize the measurement of high accuracy.
According to an aspect of the utility model, the utility model provides a magnetism angle sensor testing arrangement, it includes: a first substrate; the motor is arranged on the first substrate and comprises a motor main body and a motor rotating shaft; the magnetic field source is used for generating an external magnetic field, is arranged on the first substrate and is kept still during testing; the magnetic angle sensor to be measured is fixed on a motor rotating shaft of the motor and is opposite to the magnetic field source.
Furthermore, the magnetic angle sensor to be detected is a magnetic angle sensor chip, and the sensing plane of the magnetic angle sensor to be detected is the surface of the magnetic angle sensor chip.
Furthermore, the center of the motor rotating shaft, the center of the magnetic field source and the center of the magnetic angle sensor to be detected are located on the same coaxial line.
Further, the magnetization direction of the magnetic field source is perpendicular to the coaxial line; and/or the external magnetic field generated by the magnetic field source at the magnetic angle sensor to be detected is parallel to the sensing plane of the magnetic angle sensor to be detected.
Further, magnetism angle sensor testing arrangement still includes adapting unit, the magnetism angle sensor that awaits measuring keeps certain distance with motor shaft, just the magnetism angle sensor that awaits measuring passes through adapting unit is fixed in on the motor shaft.
Furthermore, the connecting part is made of non-magnetic materials; and/or the test seat or the printed circuit board and the connecting wire which are used for loading the magnetic angle sensor to be tested adopt non-magnetic materials.
Further, the magnetic field source is a permanent magnet, the permanent magnet is in the shape of a cylindrical magnet or a cuboid magnet, and the magnetization direction of the cylindrical magnet is along the diameter direction of the cylindrical magnet; the magnetization direction of the rectangular magnet is along any side direction.
Furthermore, the magnetic field source is a double-magnet similar to a helmholtz coil, and the double-magnet similar to the helmholtz coil is equivalent to the helmholtz coil with fixed and unchangeable current.
Furthermore, the Helmholtz-like coil type double magnets comprise a first permanent magnet unit and a second permanent magnet unit which are opposite and arranged at intervals, and the magnetic poles of the adjacent surfaces of the first permanent magnet unit and the second permanent magnet unit are respectively an N pole and an S pole; the space magnetic field of the Helmholtz-like coil type double magnet points to the N pole and the S pole.
Furthermore, the first permanent magnet unit and the second permanent magnet unit are both disc-shaped permanent magnet units, the radius of each disc-shaped permanent magnet unit is R, and the magnetization direction of each disc-shaped permanent magnet unit is the thickness direction of each disc-shaped permanent magnet unit; the center distance between the first permanent magnet unit and the second permanent magnet unit is equal to the radius R of the disc-shaped permanent magnet unit.
Furthermore, the first permanent magnet unit and the second permanent magnet unit are both square permanent magnet units or rectangular permanent magnet units, and the magnetization directions of the square permanent magnet units and the rectangular permanent magnet units are along the thickness direction of the square permanent magnet units and the rectangular permanent magnet units.
Furthermore, the magnetic angle sensor testing device also comprises a first lifting table and a second lifting table which are arranged on the first substrate, and the motor is placed on the first lifting table and is placed along the plane of the substrate; the magnetic field source is placed on the second lifting platform.
Furthermore, the magnetic angle sensor testing device also comprises a first lifting table, a second lifting table and a second substrate, wherein the motor is arranged perpendicular to the plane of the substrate; the first lifting platform and the second lifting platform are arranged on the first substrate and are respectively positioned at two sides of the motor; the second substrate is positioned on the first lifting platform and the second lifting platform and is positioned above the motor rotating shaft; the magnetic field source is disposed on the second substrate.
Further, the magnetic angle sensor testing apparatus further includes: a servo controller for controlling a motor shaft of the motor to rotate to a predetermined rotation angle; and the signal processing circuit is used for collecting an angle signal output by the magnetic angle sensor to be detected after the motor rotating shaft rotates to a preset rotating angle, and detecting the performance parameter of the magnetic angle sensor to be detected by taking the preset rotating angle as a reference angle and combining the angle signal output by the magnetic angle sensor to be detected.
Compared with the prior art, the utility model discloses an among the magnetism angle sensor testing arrangement, with the source rigid that will look after, will await measuring magnetism angle sensor and be fixed in motor shaft. In the testing process, the motor drives the magnetic angle sensor to be tested to rotate, the rotation angle is used as a reference angle, and performance parameters of the magnetic angle sensor are calibrated according to the output of the sensor, so that not only can system errors caused by the geomagnetic field be avoided or reduced and eliminated, but also angle errors possibly caused by other constant weak magnetic field interference sources can be eliminated together, and the measurement precision of the rotation angle test of the magnetic angle sensor is improved.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without inventive labor. Wherein:
FIG. 1(a) is a schematic diagram of a vector analysis for measuring the error that a magnetic angle sensor will introduce into the earth's magnetic field by means of a rotating magnet;
FIG. 1(b) is a graph showing the variation of the angle error with the reference angle under different applied working magnetic fields H by using a rotating magnet;
fig. 2 is a schematic structural diagram of a high-precision simple magnetic angle sensor testing device according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a high-precision simple magnetic angle sensor testing device according to another embodiment of the present invention;
FIG. 4 is a schematic view of the magnetic field distribution of the permanent magnet of the present invention in the shape of a cylinder and a rectangular parallelepiped;
fig. 5 is a schematic structural diagram of a helmholtz-like coil type dual magnet according to an embodiment of the present invention.
[ detailed description ] embodiments
In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.
Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with at least one implementation of the invention is included. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Unless otherwise specified, the terms connected, and connected as used herein mean electrically connected, directly or indirectly.
Fig. 1(a) is a schematic diagram of vector analysis for measuring an error caused by a geomagnetic field introduced by a magnetic angle sensor by using a rotating magnet (or a magnetic field source), wherein an operating magnetic field (or an external magnetic field) generated by a magnet 101 is H, a component of the geomagnetic field is Hg, an angle of the operating magnetic field H at this time is θ 1 if the geomagnetic field is not considered, and an angle of a vector sum direction of a magnetic field (or an actual magnetic field) is θ 2 if the geomagnetic field is considered, so that the rotation angle of the reference angle and the actual magnetic field is not consistent, and the angle error Δ θ is an angle error between θ 1 and θ 2, and the angle error Δ θ varies with the rotation angle θ 1. Where Δ θ is arctan (Hgcos θ 1/(H-Hgsin θ 1)). Assuming that the component Hg of the geomagnetic field is-0.37 Gs, the variation curve of the angle error Δ θ caused by the geomagnetic field with the reference angle (i.e., the rotation angle of the motor shaft) θ 1 when different working magnetic fields H are applied is as shown in fig. 1 (b). As can be seen from fig. 1 (b): when the working magnetic field H is unchanged, the change curve of the angle error delta theta along with the rotation angle theta 1 of the motor rotating shaft has 360-degree periodicity; the size of the angle error delta theta is influenced by the size and the direction of the working magnetic field H, and the smaller the working magnetic field H is, the larger the angle error delta theta is; when the working magnetic field H is 300Gs, the maximum angle error Delta theta caused by geomagnetism is 0.07 degrees; when the applied magnetic field H is 200Gs and 100Gs, the maximum angle error Δ θ caused by the geomagnetism can reach 0.1 and 0.2 degrees, which is a great influence for a magnetic angle sensor with high precision.
The geomagnetic field can be regarded as constant in a certain area, and by adopting the mode of the rotating magnet, the magnetic field generated by the magnet is superposed with the geomagnetic field vector, so that the actual magnetic field angle is inconsistent with the rotating angle. If the magnet is fixed, the vector sum of the magnetic field generated by the magnet and the geomagnetism keeps unchanged, namely the magnitude direction of the resultant magnetic field is not changed, and the magnetic angle sensor to be measured is rotated during measurement. Therefore, the reference angle is based on the rotation angle of the magnetic angle sensor to be measured, the condition that the reference angle is inconsistent with the magnetic field angle is avoided, and high-precision measurement is realized. Therefore, the utility model provides a can avoid or reject the magnetic angle sensor testing arrangement of above-mentioned geomagnetic field error.
Please refer to fig. 2, which is a schematic structural diagram of a high-precision simple magnetic angle sensor testing apparatus according to an embodiment of the present invention. The magnetic angle sensor testing apparatus shown in fig. 2 includes a first base plate (or first horizontal stage) 201, a first elevating stage 202a, a second elevating stage 202b, a motor 203, a connection plate 205, a magnetic angle sensor 207 to be tested, and a magnetic field source (or magnet) 204.
The motor 203 is disposed on the first substrate 201, and includes a motor main body 203a and a motor shaft 203 b. In one embodiment, the motor 203 is controlled by a servo controller (not shown) to generate a precise rotation angle of the motor shaft 203b, the rotation angle of the motor shaft 203b being used as a reference angle. In the embodiment shown in fig. 2, the motor 203 is laterally disposed on the first substrate 201.
The magnetic field source 204 is configured to generate an external magnetic field (or working magnetic field) H, and is disposed on the first substrate 201 and opposite to the end of the motor shaft 203b, and the magnetic field source 204 is kept stationary (or fixed) during the test. In the embodiment shown in FIG. 2, the magnetic field source 204 is a permanent magnet, and the permanent magnet 204 may be made of other materials such as neodymium-iron-boron, samarium-cobalt, or ferrite.
The magnetic angle sensor 207 to be measured generates an angle signal representing a magnetic angle based on a magnetic field in a sensing plane. The magnetic angle sensor 207 to be measured is fixed to the end of the motor shaft 203b of the motor 203 and rotates along with the motor shaft 203 b. And the center (or axis, axis) of the magnetic angle sensor 207 to be measured and the center (or axis, axis) of the magnetic field source 204 and the center (or axis, axis) of the motor rotating shaft 203b are kept coaxial, such as the coaxial line 206 in fig. 2, so as to ensure that the magnetic angle sensor 207 to be measured is induced by the uniformity of the external magnetic field (or working magnetic field) H generated by the magnetic field source 204 in the rotating process, thereby reducing the angle error caused by the off-axis distance. Wherein the magnetization direction of the magnetic field source 204 is perpendicular to the coaxial line 206.
It should be noted that, in the magnetic angle sensor testing apparatus shown in fig. 2, except for the motor 203 and the magnetic field source 204, the other components are made of non-magnetic materials, including a test socket or a PCB (Printed Circuit Board) for loading the magnetic angle sensor 207 to be tested, and a connecting wire (not shown). The magnetic angle sensor 207 to be measured cannot be directly fixed on the motor rotating shaft 203b because the motor rotating shaft 203b is made of steel and has high magnetic permeability, and the motor rotating shaft 203b is provided with a notch on its axis in order to facilitate fixing of other parts, and if the motor rotating shaft 203b is close to a magnetic field source, the magnetic field distribution of the magnetic field source (or magnet) 204 is uneven, therefore, the magnetic angle sensor 207 to be measured and the motor rotating shaft 203b need to keep a certain distance and be fixed through the connecting component 205, and the connecting component 205 may be made of aluminum or other non-magnetic materials. In the specific embodiment shown in fig. 2, the connecting component 205 is a connecting plate, one end of the connecting plate 205 is fixed on the motor rotating shaft 203b, and the other end thereof is fixedly connected with the magnetic angle sensor 207 to be measured. In the embodiment shown in fig. 2, the magnetic angle sensor 207 to be measured is a magnetic angle sensor chip, and the sensing plane of the magnetic angle sensor 207 to be measured is the surface of the magnetic angle sensor chip; the external magnetic field generated by the magnetic field source 204 at the magnetic angle sensor 207 to be measured is parallel to the sensing plane of the magnetic angle sensor 207 to be measured.
The first elevating table 202a and the second elevating table 202b are placed on the first substrate (or the first horizontal table) 201; the motor 203 is placed on the first lifting platform 202a, and the magnetic angle sensor 207 to be detected is fixed on the motor rotating shaft 203 b; magnetic field source 204 is placed on second stage 202b opposite to magnetic angle sensor 207 to be measured. By adjusting the first and second lifting stages 202a and 202b, the center (or axis, axial center) of the motor shaft 203b, the center (or axis, axial center) of the magnetic field source 204, and the center (or axis, axial center) of the magnetic angle sensor 207 to be measured can be kept coaxial, such as the coaxial line 206 shown in fig. 2. In another embodiment, the lifting platforms 202a and 202b may be fixed-height platforms, as long as the centers of the motor rotating shaft 203b, the magnetic field source 204 and the magnetic angle sensor 207 to be measured are coaxial.
The size of the external magnetic field generated by the magnetic field source 204 in the magnetic angle sensor 207 to be measured is adjusted by the size and material type of the magnetic field source 204 and the distance between the magnetic field source 204 and the magnetic angle sensor 207 to be measured. For example, the magnitude of the external magnetic field generated by the magnetic field source 204 at the magnetic angle sensor 207 to be measured can be changed by adjusting the left-right distance between the first lifting table 202a and the second lifting table 202 b.
Please refer to fig. 3, which is a schematic structural diagram of a high-precision simple magnetic angle sensor testing apparatus according to another embodiment of the present invention. The magnetic angle sensor testing apparatus shown in fig. 3 includes a first substrate (or first horizontal stage) 301, a first elevating stage 302a, a second elevating stage 302b, a motor 303, a connection pipe 305, a magnetic angle sensor 307 to be tested, a second substrate (or second horizontal stage) 308, and a magnetic field source (or magnet) 304.
The motor 303 is disposed on the first substrate 301, and includes a motor main body 303a and a motor shaft 303 b. In one embodiment, the motor 303 is controlled by a servo controller (not shown) to generate a precise rotation angle of the motor shaft 303b, the rotation angle of the motor shaft 303b being used as a reference angle. In the embodiment shown in fig. 3, the motor 303 is vertically disposed on the first substrate 301.
The magnetic field source 304 is configured to generate an external magnetic field (or working magnetic field) H, which is disposed on the first substrate 301 and opposite to the end of the motor shaft 303b, and the magnetic field source 304 remains stationary during the test. In the embodiment shown in FIG. 3, the magnetic field source 304 is a permanent magnet, and the permanent magnet 304 may be made of other materials such as neodymium-iron-boron, samarium-cobalt, or ferrite. In the embodiment shown in fig. 3, the magnetic field source 304 is located above the end of the motor shaft 303 b.
The magnetic angle sensor 307 to be measured generates an angle signal representing a magnetic angle based on a magnetic field in a sensing plane. The magnetic angle sensor 307 to be measured is fixed to an end of a motor shaft 303b of the motor 303 and rotates along with the motor shaft 303 b. And the center (or axis, axis) of the magnetic angle sensor 307 to be measured, the center (or axis, axis) of the magnetic field source 304 and the center (or axis, axis) of the motor rotating shaft 303b are kept coaxial, such as the coaxial line 306 in fig. 3, so as to ensure that the magnetic angle sensor 307 to be measured senses the uniformity of the external magnetic field (or working magnetic field) H generated by the magnetic field source 304 in the rotating process, thereby reducing the angle error caused by the off-axis distance. Wherein the magnetization direction of the magnetic field source 304 is perpendicular to the coaxial axis 306.
It should be noted that, in the magnetic angle sensor testing apparatus shown in fig. 3, except for the motor 303 and the magnetic field source 304, the other components are made of non-magnetic materials, including a test socket or a PCB (Printed Circuit Board) for loading the magnetic angle sensor 307 to be tested, and a connecting wire (not shown). The magnetic angle sensor 307 to be measured cannot be directly fixed to the motor rotating shaft 303b because the motor rotating shaft 303b is made of steel and has high magnetic permeability, the motor rotating shaft 303b is easy to fix other parts, a gap is generally formed in the shaft, and the magnetic field distribution of the magnetic field source (or magnet) 304 is uneven because the motor rotating shaft 303b is too close to the magnetic field source, so that the magnetic angle sensor 307 to be measured and the motor rotating shaft 303b need to keep a certain distance and are fixed through the connecting component 305, and the connecting component 305 may be made of aluminum or other non-magnetic materials. In the embodiment shown in fig. 3, the connection component 305 is a connection tube, one end of the connection tube 305 is sleeved on the end of the motor shaft 303b, and the other end thereof is fixedly connected to the magnetic angle sensor 307 to be measured. In the embodiment shown in fig. 3, the magnetic angle sensor 307 to be measured is a magnetic angle sensor chip, and a sensing plane of the magnetic angle sensor 307 to be measured is a surface of the magnetic angle sensor chip; the external magnetic field generated by the magnetic field source 304 at the magnetic angle sensor 307 to be measured is parallel to the sensing plane of the magnetic angle sensor 307 to be measured.
A first lifting platform 302a and a second lifting platform 302b are placed on the first substrate (or the first horizontal platform) 301 and are positioned at two sides of the motor 303; a second substrate (or a second horizontal stage) 308 is placed on the first elevating stage 302a and the second elevating stage 302b, and is located above the motor 303; the magnetic angle sensor 307 to be measured is fixed on the end part of the motor rotating shaft 303 b; magnetic field source 304 is placed on a second substrate (or second horizontal stage) 308 opposite magnetic angle sensor 307 under test. During the testing process, the magnetic angle sensor 307 to be tested and the magnetic field source 304 are kept at a certain distance, and the center (or axis, axial center) of the motor rotating shaft 303b, the center (or axis, axial center) of the magnetic field source 304 and the center (or axis, axial center) of the magnetic angle sensor 307 to be tested are kept coaxial, such as the coaxial line 306 shown in fig. 3.
The size of the external magnetic field generated by the magnetic field source 304 at the magnetic angle sensor 307 to be measured is adjusted by the size and material type of the magnetic field source 304 and the distance between the magnetic field source 304 and the magnetic angle sensor 307 to be measured. For example, the magnitude of the external magnetic field generated by the magnetic field source 304 at the magnetic angle sensor 307 to be measured can be changed by adjusting the heights of the first lifting table 302a and the second lifting table 302 b.
The magnetic angle sensor testing device of the present invention further includes a servo controller (not shown) and a signal acquisition circuit (or a signal processing circuit) (not shown). The specific test mode is that the servo controller controls the motor rotating shafts 203b and 303b of the motors 203 and 303 to rotate to a preset rotating angle; after the motor rotating shaft 203b, 303b rotates to a predetermined rotation angle, the signal acquisition circuit acquires an angle signal output by the magnetic angle sensor to be detected, and detects the performance parameter of the magnetic angle sensor to be detected by taking the predetermined rotation angle (which is equal to the rotation angle of the magnetic angle sensor to be detected) of the rotation of the motor rotating shaft as a reference angle and combining the angle signal output by the magnetic angle sensor to be detected. Therefore, the reference angle is based on the rotation angle of the magnetic angle sensor to be measured, and the condition that the reference angle is inconsistent with the rotation angle of the actual magnetic field direction is avoided, so that not only can the system error caused by the geomagnetic field be avoided or reduced and eliminated, but also the angle error possibly caused by other constant weak magnetic field interference sources can be eliminated together, and the measurement precision of the rotation angle test of the magnetic angle sensor is improved.
Referring to fig. 4, the permanent magnets 204, 304 of the present invention may be cylindrical or rectangular. Wherein, the cylinder permanent magnet is shown as 400a in fig. 4, and the cuboid permanent magnet is shown as 400b in fig. 4. For convenience of description, a rectangular coordinate system is defined in fig. 4, in which the x-axis extends from left to right and the y-axis extends from bottom to top. In 400a, the magnetization direction of the cylindrical permanent magnet is along its diameter, and perpendicular to the magnet axis 402a (and perpendicular to the system co-axes 206 and 306); at a distance from the surface of the cylindrical permanent magnet, the magnetic induction lines are distributed as shown by a dotted line 401 a; the required working magnetic field direction is that the N pole points to the central line of the S pole along the x direction, if the N pole deviates from the center of the cylindrical permanent magnet, a component magnetic field in the y direction is generated, and off-axis errors are introduced, so that the coaxiality of the centers of the magnetic field sources 204 and 304 and the centers of the magnetic angle sensors 207 and 307 to be measured in the measurement process is also very important for the measurement accuracy. In 400b, the magnetization direction of the rectangular parallelepiped permanent magnet is along either side thereof, and is perpendicular to the magnet axis 402b (and to the system co-axes 206 and 306); at a certain distance from the surface of the rectangular permanent magnet, magnetic induction lines are distributed as shown by a dotted line 401 b; the required working magnetic field direction is that the N pole points to the central line of the S pole along the x direction, if the N pole deviates from the center of the rectangular permanent magnet, a component magnetic field in the y direction is also generated, and an off-axis error is introduced.
The utility model provides a permanent magnet 204, 304 also can be the two magnets of class helmholtz coil type, and the two magnets of this type helmholtz coil type are equivalent to the fixed unchangeable helmholtz coil of electric current. Fig. 5 is a schematic structural view of a helmholtz-like coil type dual magnet according to an embodiment of the present invention. The double magnets of the helmholtz-like coil type shown in fig. 5 include a first permanent magnet unit 510 and a second permanent magnet unit 520 that are disposed opposite and spaced apart from each other; the first and second permanent magnet units 510 and 520 are oriented parallel to the axis 530 (and 530 is parallel to the coaxial lines 206 and 306, wherein the coaxial lines 206 and 306 pass through the center of 500b, perpendicular to the plane of the paper); the magnetic poles of the adjacent surfaces of the first permanent magnet unit 510 and the second permanent magnet unit 520 are respectively an N pole and an S pole, the spatial magnetic field is directed to the N pole and the S pole, and is perpendicular to the axis 530, and the magnetic field uniformity in the central region is very high, as shown in fig. 5 b. In the specific embodiment shown in fig. 5, the first permanent magnet unit 510 and the second permanent magnet unit 520 are each a disc-shaped permanent magnet unit shown at 500a in fig. 5, and have a radius R, and a magnetization direction thereof is axial magnetization (or a magnetization direction thereof is along the axial direction of the disc-shaped permanent magnet unit, i.e., the thickness direction); the center distance d between the first permanent magnet unit 510 and the second permanent magnet unit 520 is equal to the radius R of the disc-shaped permanent magnet unit, which is shown in fig. 5 as 500 b.
The utility model provides a kind of helmholtz coil type double magnet also can constitute along the magnetized permanent magnet unit of thickness direction by two squares or rectangle. That is, the first and second permanent magnet units 510 and 520 may be both square or rectangular permanent magnet units, and the magnetization directions of the square and rectangular permanent magnet units are along the thickness direction thereof. For single cylinder or cuboid magnet, the kind helmholtz coil magnet can provide more even magnetic field, can reduce the off-axis error for the measuring accuracy of device further obtains promoting.
To sum up, the utility model provides a magnetism angle sensor testing arrangement includes: a first substrate 201, 301; a motor 203, 303 disposed on the first substrate 201, 301, the motor 203, 303 including a motor main body 203a, 303a and a motor rotation shaft 203b, 303 b; a magnetic field source 204, 304 for generating an external magnetic field, the magnetic field source 204, 304 being disposed on the first substrate 201, 301, the magnetic field source 204, 304 remaining stationary during testing; the magnetic angle sensors 207 and 307 to be measured are fixed on the motor rotating shafts 203b and 303b and are opposite to the magnetic field sources 204 and 304. Therefore, the reference angle is based on the rotation angle of the magnetic angle sensor to be measured, and the condition that the reference angle is inconsistent with the rotation angle of the actual magnetic field direction is avoided, so that not only can the system error caused by the geomagnetic field be avoided or reduced and eliminated, but also the angle error possibly caused by other constant weak magnetic field interference sources can be eliminated together, and the measurement precision of the rotation angle test of the magnetic angle sensor is improved.
In the present invention, the terms "connected," "connecting," and the like mean connected, and if not specifically stated, direct or indirect connection.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiment, but all equivalent modifications or changes made by those skilled in the art according to the present invention should be included in the protection scope of the claims.
Claims (14)
1. A magnetic angle sensor testing device, comprising:
a first substrate;
the motor is arranged on the first substrate and comprises a motor main body and a motor rotating shaft;
the magnetic field source is used for generating an external magnetic field, is arranged on the first substrate and is kept still during testing;
the magnetic angle sensor to be measured is fixed on a motor rotating shaft of the motor and is opposite to the magnetic field source.
2. A magnetic angle sensor testing device according to claim 1,
the magnetic angle sensor to be measured is a magnetic angle sensor chip,
and the sensing plane of the magnetic angle sensor to be detected is the surface of the magnetic angle sensor chip.
3. A magnetic angle sensor testing device according to claim 1,
the center of the motor rotating shaft, the center of the magnetic field source and the center of the magnetic angle sensor to be detected are located on the same coaxial line.
4. A magnetic angle sensor testing device according to claim 3,
the magnetization direction of the magnetic field source is perpendicular to the coaxial line; and/or
And the external magnetic field generated by the magnetic field source at the magnetic angle sensor to be detected is parallel to the sensing plane of the magnetic angle sensor to be detected.
5. A magnetic angle sensor testing device according to claim 1, characterized in that it further comprises a connecting member,
the magnetic angle sensor to be detected and the motor rotating shaft keep a preset distance, and the magnetic angle sensor to be detected is fixed on the motor rotating shaft through the connecting part.
6. A magnetic angle sensor testing device according to claim 5,
the connecting part is made of non-magnetic material; and/or
And the test seat or the printed circuit board and the connecting wire for loading the magnetic angle sensor to be tested are made of non-magnetic materials.
7. A magnetic angle sensor testing device according to claim 1,
the magnetic field source is a permanent magnet, the permanent magnet is in the shape of a cylindrical magnet or a cuboid magnet,
the magnetization direction of the cylindrical magnet is along the diameter direction of the cylindrical magnet;
the magnetization direction of the rectangular magnet is along any side direction.
8. A magnetic angle sensor testing device according to claim 1,
the magnetic field source is a Helmholtz coil-like double magnet, and the Helmholtz coil-like double magnet is equivalent to a Helmholtz coil with fixed and unchangeable current.
9. A magnetic angle sensor testing device according to claim 8,
the Helmholtz-like coil type double magnet comprises a first permanent magnet unit and a second permanent magnet unit which are oppositely and alternately arranged,
the magnetic poles of the adjacent surfaces of the first permanent magnet unit and the second permanent magnet unit are respectively an N pole and an S pole;
the space magnetic field of the Helmholtz-like coil type double magnet points to the N pole and the S pole.
10. A magnetic angle sensor testing device according to claim 9,
the first permanent magnet unit and the second permanent magnet unit are both disc-shaped permanent magnet units, the radius of each disc-shaped permanent magnet unit is R, and the magnetization direction of each disc-shaped permanent magnet unit is the thickness direction of each disc-shaped permanent magnet unit;
the center distance between the first permanent magnet unit and the second permanent magnet unit is equal to the radius R of the disc-shaped permanent magnet unit.
11. A magnetic angle sensor testing device according to claim 9,
the first permanent magnet unit and the second permanent magnet unit are both square permanent magnet units or rectangular permanent magnet units, and the magnetization directions of the square permanent magnet units and the rectangular permanent magnet units are along the thickness direction of the square permanent magnet units and the rectangular permanent magnet units.
12. The magnetic angle sensor testing device of claim 1, further comprising a first elevating stage and a second elevating stage disposed on the first substrate,
the motor is placed on the first lifting platform and is placed along the plane of the substrate;
the magnetic field source is placed on the second lifting platform.
13. A magnetic angle sensor testing device according to claim 1,
it also comprises a first lifting platform, a second lifting platform and a second base plate,
the motor is placed perpendicular to the plane of the substrate;
the first lifting platform and the second lifting platform are arranged on the first substrate and are respectively positioned at two sides of the motor;
the second substrate is positioned on the first lifting platform and the second lifting platform and is positioned above the motor rotating shaft;
the magnetic field source is disposed on the second substrate.
14. A magnetic angle sensor testing device according to claim 1, characterized in that it further comprises:
a servo controller for controlling a motor shaft of the motor to rotate to a predetermined rotation angle;
and the signal processing circuit is used for collecting an angle signal output by the magnetic angle sensor to be detected after the motor rotating shaft rotates to a preset rotating angle, and detecting the performance parameter of the magnetic angle sensor to be detected by taking the preset rotating angle as a reference angle and combining the angle signal output by the magnetic angle sensor to be detected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022056287.3U CN213657922U (en) | 2020-09-18 | 2020-09-18 | Magnetic angle sensor testing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022056287.3U CN213657922U (en) | 2020-09-18 | 2020-09-18 | Magnetic angle sensor testing device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113927629A (en) * | 2021-11-16 | 2022-01-14 | 国网湖南省电力有限公司 | Calibration system and calibration method for angle sensor of continuum mechanical arm |
| CN113970312A (en) * | 2021-09-17 | 2022-01-25 | 深圳市恒天伟焱科技股份有限公司 | Angle detection method, angle detection device, computer program product and storage medium |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113970312A (en) * | 2021-09-17 | 2022-01-25 | 深圳市恒天伟焱科技股份有限公司 | Angle detection method, angle detection device, computer program product and storage medium |
| CN113927629A (en) * | 2021-11-16 | 2022-01-14 | 国网湖南省电力有限公司 | Calibration system and calibration method for angle sensor of continuum mechanical arm |
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