CN112097635A - Magnetic angle sensor testing device - Google Patents
Magnetic angle sensor testing device Download PDFInfo
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- CN112097635A CN112097635A CN202010987231.1A CN202010987231A CN112097635A CN 112097635 A CN112097635 A CN 112097635A CN 202010987231 A CN202010987231 A CN 202010987231A CN 112097635 A CN112097635 A CN 112097635A
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- angle sensor
- magnetic
- magnetic angle
- testing device
- motor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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- Measuring Magnetic Variables (AREA)
Abstract
The invention provides a magnetic angle sensor testing device, which comprises: a motor including a motor main body and a motor shaft; the magnetic field source is used for generating an external magnetic field, is fixed on the motor rotating shaft and rotates along with the motor rotating shaft; the supporting body is used for fixing the magnetic angle sensor to be tested, wherein the sensing plane of the magnetic angle sensor to be tested fixed on the supporting body is perpendicular to the direction of the geomagnetic field of the area where the magnetic angle sensor testing device is located. Compared with the prior art, in the magnetic angle sensor testing device, the sensing plane of the magnetic angle sensor to be tested is perpendicular to the direction of the geomagnetic field in the area where the magnetic angle sensor testing device is located, so that the component of the geomagnetic field in the sensing plane of the magnetic angle sensor to be tested is 0, the influence of the geomagnetic field on the corner test of the magnetic angle sensor is eliminated or reduced, and the test is more accurate.
Description
[ technical field ] A method for producing a semiconductor device
The invention belongs to the field of sensor testing, and particularly relates to a magnetic angle sensor testing device.
[ background of the invention ]
At present, there are automatic testing devices for testing magnetic angle sensors, or simple testing systems using magnets in combination with motors. The former system is complex and high in cost, and cannot meet the requirement of simple test. The latter is generally measured by rotating a magnet on a plane, for the magnet itself, the magnitude and direction of the magnetic field are not changed, but if the rotating magnet is placed in the geomagnetic field, the vector sum of the two magnetic fields will have a difference with the rotation angle, i.e. the rotation angle of the motor is not consistent with the rotation angle of the actual magnetic field direction, and an error of the geomagnetic field will be introduced, and further parameters of the magnetic angle sensor cannot be accurately measured.
Therefore, it is necessary to provide a technical solution to solve the systematic error caused by the above measurement method.
[ summary of the invention ]
An object of the present invention is to provide a magnetic angle sensor testing device, which can avoid or reduce errors caused by a geomagnetic field, so that the test is more accurate.
According to one aspect of the present invention, there is provided a magnetic angle sensor testing apparatus comprising: a motor including a motor main body and a motor shaft; the magnetic field source is used for generating an external magnetic field, is fixed on the motor rotating shaft and rotates along with the motor rotating shaft; the supporting body is used for fixing the magnetic angle sensor to be tested, wherein the sensing plane of the magnetic angle sensor to be tested fixed on the supporting body is perpendicular to the direction of the geomagnetic field of the area where the magnetic angle sensor testing device is located.
Further, the magnetic angle sensor testing device further comprises an inclined plane, wherein the inclined plane and a horizontal plane form an angle theta, so that the inclined plane is parallel to the direction of the geomagnetic field; the motor, the magnetic field source and the support body are arranged on the inclined plane; and the sensing plane of the magnetic angle sensor to be detected fixed on the support body is vertical to the inclined plane.
Further, the theta angle and the placing direction of the inclined plane are determined based on the magnitude and the direction of the geomagnetic field.
Furthermore, the magnetic angle sensor to be detected is a magnetic angle sensor chip, and the sensing plane of the magnetic angle sensor to be detected is the surface of the magnetic angle sensor chip.
Furthermore, the center of the motor rotating shaft, the center of the magnetic field source and the center of the magnetic angle sensor to be detected are located on the same axis.
Furthermore, the magnetic angle sensor testing device further comprises a first lifting platform and a second lifting platform which are arranged on the inclined surface, the motor is fixed on the first lifting platform, the supporting body is fixed on the second lifting platform, and the center of the motor rotating shaft, the center of the magnetic field source and the center of the magnetic angle sensor to be tested are coaxial by adjusting the first lifting platform and the second lifting platform.
Further, the magnetic angle sensor testing apparatus further includes: a servo controller for controlling a motor shaft of the motor to rotate to a predetermined rotation angle; and the signal processing circuit is used for collecting an angle signal output by the magnetic angle sensor to be detected after the motor rotating shaft rotates to a preset rotating angle, and detecting the performance parameter of the magnetic angle sensor to be detected by taking the preset rotating angle as a reference angle and combining the angle signal output by the magnetic angle sensor to be detected.
Furthermore, the supporting body comprises a vertical end, the vertical end is perpendicular to the inclined plane, and the magnetic angle sensor to be measured is fixed at the vertical end of the supporting body.
Furthermore, the supporter is L type support frame, L type support frame includes mutually perpendicular's horizontal end and vertical end, the horizontal end of L type support frame with the inclined plane is parallel, its vertical end with the inclined plane is perpendicular, the magnetism angle sensor that awaits measuring is fixed in the vertical end of L type support frame.
Further, the external magnetic field generated by the magnetic field source at the magnetic angle sensor to be measured is parallel to the sensing plane of the magnetic angle sensor to be measured.
Furthermore, the magnetic field source is fixed in a manner of being directly adsorbed on the motor rotating shaft or indirectly fixed on the motor rotating shaft; the magnetic field source is a permanent magnet made of neodymium iron boron, samarium cobalt or ferrite.
Compared with the prior art, in the magnetic angle sensor testing device, the sensing plane of the magnetic angle sensor to be tested is perpendicular to the direction of the geomagnetic field in the area where the magnetic angle sensor testing device is located, so that the component of the geomagnetic field in the sensing plane of the magnetic angle sensor to be tested is 0, the influence of the geomagnetic field on the corner test of the magnetic angle sensor is eliminated or reduced, and the test is more accurate.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise. Wherein:
FIG. 1 is a schematic structural diagram of a conventional simple magnetic angle sensor testing device;
FIG. 2 is a schematic diagram of a vector analysis of the geomagnetic field error of the magnetic angle sensor testing apparatus shown in FIG. 1;
FIG. 3 is a graph showing the variation of the angle error caused by the geomagnetic field with the rotation angle of the motor shaft in the magnetic angle sensor testing apparatus shown in FIG. 1;
FIG. 4 is a schematic structural diagram of a magnetic angle sensor testing device according to an embodiment of the present invention.
[ detailed description ] embodiments
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic may be included in at least one implementation of the invention. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Unless otherwise specified, the terms connected, and connected as used herein mean electrically connected, directly or indirectly.
Fig. 1 is a schematic structural diagram of a conventional simple magnetic angle sensor testing device. The magnetic angle sensor testing device shown in fig. 1 includes a horizontal plane 101, lifting tables 102a and 102b, a motor 103 (which includes a motor main body 103a and a motor rotating shaft 103b), a permanent magnet 104, a supporting plate 105, a magnetic angle sensor 107 to be tested, and a necessary signal acquisition system (not shown). In which elevating stages 102a and 102b are placed on the same horizontal plane 101, and a motor 103 and a support plate 105 are fixed to the elevating stages 102a and 102b, respectively. The permanent magnet 104 is fixed to the motor rotation shaft 103b, and the center of the permanent magnet 104 is coaxial with the center of the motor rotation shaft 103 b. The magnetic angle sensor 107 to be measured is fixed on the support plate 105, and the centers of the permanent magnet 104, the motor rotating shaft 103b and the magnetic angle sensor 107 to be measured are coaxial, such as a coaxial line 106 shown in fig. 1, by adjusting the height of the lifting table 102, so that the angle error caused by the off-axis distance is reduced. The specific measurement mode is that the control system controls the motor 103 to rotate, after the motor 103 rotates for a certain angle, the motor 103 is kept still, the signal acquisition system extracts the output signal of the magnetic angle sensor 107 to be measured, and the result is subjected to fitting analysis.
In the above measurement method, due to the presence of the geomagnetic field, the method of directly rotating the permanent magnet 104 may generate a certain angle error to the test result. As shown in fig. 2, it is a schematic diagram of vector analysis of geomagnetic field error of the magnetic angle sensor testing apparatus shown in fig. 1, where H is an external magnetic field generated by the rotating permanent magnet 104 at the magnetic angle sensor 107 to be tested, and Hg is a magnetic field component of the geomagnetic field in the sensing plane of the magnetic angle sensor 107 to be tested. After the motor 103 drives the permanent magnet 104 to rotate by an angle θ 1, the actual magnetic field direction does not change by the angle θ 1, but changes by an angle θ 2, where θ 2 is determined by the vector sum H1 of the applied magnetic field H and the geomagnetic field component Hg. That is, the rotating electrical machine 103 as the generation reference angle does not rotate with the actual magnetic field direction by an angle. The angle error Δ θ is directly introduced, where Δ θ is θ 1 — θ 2, and varies with the rotation angle θ 1. Here, the angle error Δ θ is generated only by the action of the geomagnetic field, tan Δ θ is Hgcos θ 1/(H-Hgsin θ 1), and the change relation of the system angle error Δ θ with the rotation angle θ 1 can be obtained: Δ θ ═ arctan (Hgcos θ 1/(H-Hgsin θ 1)). Assuming that the component Hg of the geomagnetic field is-0.37 Gs, a change curve of the angle error Δ θ caused by the geomagnetic field with the rotation angle θ 1 of the motor shaft 103b is shown in fig. 3. As can be seen from fig. 3: when the external magnetic field H is unchanged, the change curve of the angle error delta theta along with the rotation angle theta 1 of the motor rotating shaft 103b has 360-degree periodicity; the magnitude of the angle error delta theta is influenced by the magnitude and direction of the external magnetic field H, and the smaller the external magnetic field H is, the larger the angle error delta theta is. In the application of the magnetic angle sensor, the required external magnetic field H is generally 300Gs or lower, and it can be obtained through calculation, specifically as shown in fig. 3, when the external magnetic field H is 300Gs, the maximum angle error Δ θ caused by the geomagnetism is 0.07 degrees; when the external magnetic field H is 200Gs and 100Gs, the maximum angle error Delta theta caused by geomagnetism can reach 0.1 degree and 0.2 degree, which seriously influences the accurate measurement of the device for a high-precision magnetic angle sensor.
Therefore, the present invention provides a magnetic angle sensor testing device that can avoid or reduce the geomagnetic field error. Fig. 4 is a schematic structural diagram of a magnetic angle sensor testing apparatus according to an embodiment of the invention. The magnetic angle sensor testing apparatus shown in fig. 4 includes a horizontal plane 301, a first elevating stage 302a, a second elevating stage 302b, a motor 303, a magnetic field source (or magnet) 304, a support body 305, a magnetic angle sensor 307 to be tested, and an inclined plane 308.
The motor 303 includes a motor main body 303a and a motor shaft 303 b. In one embodiment, the motor 303 is controlled by a servo controller (not shown) to generate a precise rotation angle of the motor shaft 303b, the rotation angle of the motor shaft 303b being used as a reference angle.
The magnetic field source 304 is configured to generate an external magnetic field (or working magnetic field) H, and is fixed on the motor rotating shaft 303b and rotates with the motor rotating shaft 303 b. The magnetic field source 304 may be directly attached to the motor shaft 303b, or may be fixed in other manners, and the center (or axis, axial center) of the magnetic field source 304 and the center (or axis, axial center) of the motor shaft 303b are on the same straight line. In the embodiment shown in fig. 4, the magnetic field source 304 is a permanent magnet, which may be made of other materials such as neodymium iron boron, samarium cobalt, or ferrite.
The support body 305 is used for fixing a magnetic angle sensor 307 to be measured. The sensing plane of the magnetic angle sensor 307 to be tested fixed on the support 305 is perpendicular to the geomagnetic field direction 309 in the region where the magnetic angle sensor testing apparatus shown in fig. 4 is located, so that the component of the geomagnetic field in the sensing plane of the magnetic angle sensor 307 to be tested is 0, and the influence of the geomagnetic field on the rotation angle test of the magnetic angle sensor is eliminated or reduced.
The magnetic angle sensor 307 to be measured generates an angle signal representing a magnetic angle based on a magnetic field in a sensing plane. In the embodiment shown in fig. 4, the magnetic angle sensor 307 to be measured is a magnetic angle sensor chip, and the sensing plane of the magnetic angle sensor 307 to be measured is the surface of the magnetic angle sensor chip; the external magnetic field generated by the magnetic field source 304 at the magnetic angle sensor 307 to be measured is parallel to the sensing plane of the magnetic angle sensor 307 to be measured.
In order to facilitate the fixing of the sensing plane of the magnetic angle sensor 307 to be tested on the support body 305 to be perpendicular to the geomagnetic field direction 309, the present invention provides an inclined plane 308 and places them together on the inclined plane, and places the core modules in the magnetic angle sensor testing apparatus shown in fig. 4, for example, the first lifting platform 302a, the second lifting platform 302b, the motor 303, the magnetic field source (or magnet) 304 and the support body 305 on the inclined plane 308.
The inclined surface 308 makes an angle theta with the horizontal plane 301, which angle theta makes the inclined surface 308 parallel to the direction 309 of the earth's magnetic field. In one embodiment, the angle θ and the orientation of the inclined plane 308 are determined based on the magnitude and direction of the geomagnetic field in the area where the magnetic angle sensor testing apparatus shown in fig. 4 is located, so that the inclined plane 308 is parallel to the geomagnetic field direction 309.
The first lifting platform 302a and the second lifting platform 302b are placed on the inclined plane 308; the motor 303 is placed on the first elevating platform 302a, and the magnetic field source 304 is fixed on the motor rotating shaft 303 b; the supporting body 305 is placed on the second lifting platform 302b, the magnetic angle sensor 307 to be measured is fixed on the supporting body 305, and the sensing plane of the magnetic angle sensor 307 to be measured is perpendicular to the inclined plane 308, so that the sensing plane of the magnetic angle sensor 307 to be measured is perpendicular to the geomagnetic field direction 309. By adjusting the first lifting platform 302a and the second lifting platform 302b, the center (or axis, axis) of the motor rotating shaft 303b, the center (or axis, axis) of the magnetic field source 304, and the center (or axis, axis) of the magnetic angle sensor 307 to be measured can be coaxial, such as the coaxial axis 306 shown in fig. 4, so as to ensure that the magnetic angle sensor 307 to be measured in the rotation process of the magnetic field source 304 feels the uniformity of the magnetic field, thereby reducing the angle error caused by the off-axis distance. In another embodiment, the lifting platforms 302a and 302b may be fixed-height platforms, as long as the centers of the motor rotating shaft 303b, the magnetic field source 304, and the magnetic angle sensor 307 to be measured are coaxial.
The size of the external magnetic field generated by the magnetic field source 304 at the magnetic angle sensor 307 to be measured is adjusted by the size and material type of the magnetic field source 304 and the distance between the magnetic field source 304 and the magnetic angle sensor 307 to be measured. For example, the magnitude of the external magnetic field generated by the magnetic field source 304 at the magnetic angle sensor 307 to be measured can be changed by adjusting the front-back distance of the first lifting stage 302a and the second lifting stage 302 b.
In the embodiment shown in fig. 4, the supporting body 305 may be an L-shaped supporting frame, the L-shaped supporting frame includes a horizontal end and a vertical end that are perpendicular to each other, the horizontal end of the L-shaped supporting frame is fixed on the second lifting platform 302b, the horizontal end of the L-shaped supporting frame is parallel to the inclined plane 308, the vertical end of the L-shaped supporting frame is perpendicular to the inclined plane 308, and the magnetic angle sensor 307 to be measured is fixed at the vertical end of the L-shaped supporting frame 305. It should be noted that the supporting body 305 may also be of other structures, for example, a T-shaped supporting frame, as long as the vertical end thereof can be perpendicular to the inclined plane 308, so that when the magnetic angle sensor 307 to be measured is fixed in parallel to the vertical end of the supporting body 305, the sensing plane of the magnetic angle sensor 307 to be measured can be easily perpendicular to the inclined plane 308.
In the embodiment shown in fig. 4, the magnetic angle sensor testing device of the present invention further includes a servo controller (not shown) and a signal acquisition circuit (or a signal processing circuit) (not shown). The specific test mode is that the servo controller controls the motor rotating shaft 303b of the motor 303 to rotate to a preset rotating angle; when the motor rotating shaft 303b rotates to a predetermined rotation angle, the signal acquisition circuit acquires an angle signal output by the magnetic angle sensor to be detected, and detects the performance parameter of the magnetic angle sensor to be detected by using the predetermined rotation angle at which the motor rotating shaft rotates as a reference angle in combination with the angle signal output by the magnetic angle sensor to be detected.
In summary, the magnetic angle sensor testing apparatus of the present invention includes an inclined plane 308, and a motor 303, a magnetic field source 304, a supporting body 305, and a magnetic angle sensor 307 to be tested, which are disposed on the inclined plane 308. The inclined surface 308 forms an angle θ with the horizontal plane 301, the angle θ makes the inclined surface 308 parallel to the direction 309 of the geomagnetic field; the sensing plane of the magnetic angle sensor 307 to be tested fixed on the support body 305 is perpendicular to the inclined plane 308, so that the direction of the geomagnetic field is perpendicular to the sensing plane of the magnetic angle sensor 307 to be tested, the component of the geomagnetic field on the sensing plane of the magnetic angle sensor to be tested is 0, the influence of the geomagnetic field on the corner test of the magnetic angle sensor is eliminated or reduced, and the test is more accurate.
In the present invention, the terms "connected", "connecting", and the like mean electrical connections, and direct or indirect electrical connections unless otherwise specified.
The above description is only a preferred embodiment of the present invention, and the scope of the present invention is not limited to the above embodiment, but equivalent modifications or changes made by those skilled in the art according to the present disclosure should be included in the scope of the present invention as set forth in the appended claims.
Claims (11)
1. A magnetic angle sensor testing device, comprising:
a motor including a motor main body and a motor shaft;
the magnetic field source is used for generating an external magnetic field, is fixed on the motor rotating shaft and rotates along with the motor rotating shaft;
a support body for fixing the magnetic angle sensor to be measured,
the sensing plane of the magnetic angle sensor to be tested fixed on the support body is perpendicular to the direction of the geomagnetic field of the area where the magnetic angle sensor testing device is located.
2. A magnetic angle sensor testing device according to claim 1,
it also comprises an inclined plane which is arranged on the upper surface of the frame,
the inclined plane and the horizontal plane form an angle theta so that the inclined plane is parallel to the direction of the geomagnetic field;
the motor, the magnetic field source and the support body are arranged on the inclined plane;
and the sensing plane of the magnetic angle sensor to be detected fixed on the support body is vertical to the inclined plane.
3. A magnetic angle sensor testing device according to claim 2,
and determining the theta angle and the placing direction of the inclined plane based on the magnitude and the direction of the geomagnetic field.
4. A magnetic angle sensor testing device according to any one of claims 1 to 3,
the magnetic angle sensor to be measured is a magnetic angle sensor chip,
and the sensing plane of the magnetic angle sensor to be detected is the surface of the magnetic angle sensor chip.
5. A magnetic angle sensor testing device according to claim 1,
the center of the motor rotating shaft, the center of the magnetic field source and the center of the magnetic angle sensor to be detected are located on the same axis.
6. A magnetic angle sensor testing device according to claim 2,
it also comprises a first lifting platform and a second lifting platform which are arranged on the inclined plane,
the motor is fixed on the first lifting platform, the supporting body is fixed on the second lifting platform,
and the center of the motor rotating shaft, the center of the magnetic field source and the center of the magnetic angle sensor to be detected are coaxial by adjusting the first lifting table and the second lifting table.
7. A magnetic angle sensor testing device according to claim 6, characterized in that it further comprises:
a servo controller for controlling a motor shaft of the motor to rotate to a predetermined rotation angle;
and the signal processing circuit is used for collecting an angle signal output by the magnetic angle sensor to be detected after the motor rotating shaft rotates to a preset rotating angle, and detecting the performance parameter of the magnetic angle sensor to be detected by taking the preset rotating angle as a reference angle and combining the angle signal output by the magnetic angle sensor to be detected.
8. A magnetic angle sensor testing device according to claim 2,
the support body comprises a vertical end, the vertical end is perpendicular to the inclined plane, and the magnetic angle sensor to be measured is fixed at the vertical end of the support body.
9. A magnetic angle sensor testing device according to claim 2,
the supporting body is an L-shaped supporting frame which comprises a horizontal end and a vertical end which are vertical to each other,
the horizontal end of the L-shaped support frame is parallel to the inclined plane, the vertical end of the L-shaped support frame is vertical to the inclined plane,
the magnetic angle sensor to be measured is fixed at the vertical end of the L-shaped support frame.
10. A magnetic angle sensor testing device according to claim 1,
and the external magnetic field generated by the magnetic field source at the magnetic angle sensor to be detected is parallel to the sensing plane of the magnetic angle sensor to be detected.
11. A magnetic angle sensor testing device according to claim 1,
the magnetic field source is fixed in a way of being directly adsorbed on the motor rotating shaft or indirectly fixed on the motor rotating shaft;
the magnetic field source is a permanent magnet made of neodymium iron boron, samarium cobalt or ferrite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010987231.1A CN112097635A (en) | 2020-09-18 | 2020-09-18 | Magnetic angle sensor testing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010987231.1A CN112097635A (en) | 2020-09-18 | 2020-09-18 | Magnetic angle sensor testing device |
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| CN112097635A true CN112097635A (en) | 2020-12-18 |
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| CN202010987231.1A Pending CN112097635A (en) | 2020-09-18 | 2020-09-18 | Magnetic angle sensor testing device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117760476A (en) * | 2023-12-23 | 2024-03-26 | 艾菲汽车零部件(武汉)有限公司 | Testing device for motor position sensor |
-
2020
- 2020-09-18 CN CN202010987231.1A patent/CN112097635A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117760476A (en) * | 2023-12-23 | 2024-03-26 | 艾菲汽车零部件(武汉)有限公司 | Testing device for motor position sensor |
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