CN213652623U

CN213652623U - Miniaturized cavity and evaporation table equipment

Info

Publication number: CN213652623U
Application number: CN202021766537.6U
Authority: CN
Inventors: 张军委; 王福平
Original assignee: Aifake Vacuum Technology Suzhou Co ltd
Current assignee: Aifake Vacuum Technology Suzhou Co ltd
Priority date: 2020-08-21
Filing date: 2020-08-21
Publication date: 2021-07-09
Anticipated expiration: 2030-08-21

Abstract

The utility model discloses a miniaturized cavity and evaporation station equipment, include: a first cavity; the second cavity is arranged at the center of the bottom of the first cavity; wherein the second cavity is in communication with the second cavity, and the volume of the second cavity is less than the volume of the first cavity; also includes a substrate carrier and an evaporation source; the substrate carrier is arranged at the top of the inner side of the first cavity, and the evaporation source is arranged at the bottom of the inner side of the second cavity. The utility model discloses first cavity and second cavity mutually support, and the gas of evaporation is the sphere form outward diffusion through second cavity, first cavity in proper order with the mode of relay, satisfies diffusion dimension's requirement for required vacuum cavity size specification effectively reduces, and equipment internal volume reduces by a wide margin, thereby makes the vacuum pump air exhaust ability requirement effectively reduce, and the required time of bleeding and broken vacuum required time reduce by a wide margin, and equipment cost of manufacture reduces by a wide margin.

Description

Miniaturized cavity and evaporation table equipment

Technical Field

The utility model relates to an evaporation table technical field, in particular to miniaturized cavity and evaporation table equipment.

Background

In the evaporation stage apparatus, the evaporation source is heated to evaporate, and the evaporated gas spreads outward in a spherical shape. The gas is condensed when diffusing to the surface of the substrate, and after a period of time, the condensed particles grow and are connected to form a layer of film. The substrates are attached to a carrier having a spherical surface, and generally, the larger the distance between the substrate carrier and the evaporation source, the better the uniformity of the film thickness generated on the substrate, and the smaller the distance between the substrate carrier and the evaporation source, the worse the uniformity of the film thickness generated on the substrate. The larger the distance between the substrate carrier and the evaporation source is, the larger the cavity volume of the evaporation environment equipment is required to be, the larger the cavity volume is, and the higher the cavity manufacturing cost is.

SUMMERY OF THE UTILITY MODEL

Therefore, a small-sized cavity for an evaporation table device is needed, the size and specification of the vacuum cavity are effectively reduced, and the manufacturing cost of the device is greatly reduced.

The utility model discloses a miniaturized cavity and evaporation station equipment, include:

a first cavity;

the second cavity is arranged at the center of the bottom of the first cavity;

the second cavity is communicated with the second cavity, and the volume of the second cavity is smaller than that of the first cavity.

The utility model also provides an evaporation table equipment, including above-mentioned miniaturized cavity.

In some embodiments, further comprising a substrate carrier and an evaporation source; the substrate carrier is arranged at the top of the inner side of the first cavity, and the evaporation source is arranged at the bottom of the inner side of the second cavity.

In some embodiments, the substrate carrier is located on the same centerline as the evaporation source.

Implement the utility model discloses a miniaturized cavity for evaporating platform equipment has following beneficial effect at least:

the first cavity and the second cavity are matched with each other, evaporated gas is in a spherical shape and is diffused outwards in a relay mode sequentially through the second cavity and the first cavity to meet the requirement of diffusion size, the size specification of the required vacuum cavity is effectively reduced, the internal volume of the equipment is greatly reduced, the requirement of the air suction capacity of the vacuum pump is effectively reduced, the time required by air suction and the time required by vacuum breaking are greatly reduced, and the manufacturing cost of the equipment is greatly reduced.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.

FIG. 1 is a schematic view of a miniaturized cavity structure of the present invention;

FIG. 2 is a schematic view of the operation of the miniaturized cavity of the present invention;

fig. 3 is a schematic diagram of the operation of the cavity of the evaporation table device in the prior art.

In the figure: 01-substrate carrier, 02-first chamber, 03-evaporation source, 04-equipment stand and 05-second chamber.

The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that all the directional indicators (such as upper, lower, left, right, front and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.

In addition, the descriptions related to "first", "second", etc. in the present invention are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit ly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, "and/or" in the whole text includes three schemes, taking a and/or B as an example, including a technical scheme, and a technical scheme that a and B meet simultaneously; in addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.

As shown in fig. 1, a miniaturized cavity for an evaporation stage device for fabrication of microelectronics, semiconductors, optical films, etc., the entire device being supported by a device stand 04. The miniaturized cavity is provided with a first cavity 02 and a second cavity 05 which are communicated with each other, wherein the second cavity 05 is externally arranged at the bottom of the first cavity 02, and the volume of the second cavity 05 is smaller than that of the first cavity 02, so that evaporated gas is in a spherical shape and is diffused outwards in a relay manner in the cavity;

in a specific application, the substrate carrier 01 is attached to a spherical carrier, the evaporation source 03 is sunk in structural design when a certain distance is required between the evaporation source 03 and the substrate carrier 01, and the external second cavity 05 is designed at the bottom of the first cavity 02. In a planar structure, the evaporation source 03 is distributed by upward evaporation in a fan-shaped structure, when the second cavity 05 is designed, the upper opening of the second cavity 05 needs to avoid the evaporation path of the evaporation source 03, and the evaporated gas meets the requirement of the evaporation size in a relay manner through the first cavity 02 and the second cavity 05. Under the condition, the size and specification of the first cavity 02 are effectively reduced, and the internal volume of the equipment is greatly reduced; the requirement on the air suction capacity of the vacuum pump is effectively reduced, the time required by air suction and the time required by vacuum breaking are greatly reduced, and the manufacturing cost of equipment is greatly reduced. The required space height of the equipment is effectively reduced, and the like, so that the problems of high manufacturing cost of the cavity, large occupied space, long vacuum pumping time and the like are solved.

As shown in fig. 3, in the evaporation stage apparatus of the prior art, an evaporation source is heated to become a gas, diffused upward, attached to a substrate on a substrate carrier after passing a distance of SS, and attached particles are crystallized and grown up, and after growing up to a certain extent, the crystallized particles are connected to each other to form a thin film on the substrate. After the requirements of the process conditions, the vacuum chamber is influenced by the SS requirements, and the height dimension H2 has to meet the corresponding requirements. With the upgrading of the requirements of process conditions, the SS is larger, the height of the vacuum cavity H2 is larger, and the manufacturing cost of equipment is higher. As shown in fig. 2, compared with the prior art, the evaporation table apparatus of the present invention has the evaporation source heated and evaporated, and the evaporated gas is diffused outward in a spherical shape. The gas is condensed when diffusing to the surface of the substrate, and after a period of time, the condensed particles grow and are connected to form a layer of film. The substrate is attached to a spherical carrier, the evaporation source is sunk in the structural design when the distance SS between the evaporation source and the substrate is required to be fixed, and a second cavity is designed at the bottom of the first cavity. In the plane structure, the evaporation sources are distributed in a fan-shaped structure in an upward evaporation manner, when the second cavity is designed, the upper opening of the second cavity needs to avoid the evaporation path of the evaporation source, and the evaporated gas meets the requirement of the SS size in a relay manner through the first cavity and the second cavity. Under the condition, the size of the first cavity is effectively reduced, and the internal volume of the equipment is greatly reduced. The requirement on the air suction capacity of the vacuum pump is effectively reduced, the time required by air suction and the time required by vacuum breaking are greatly reduced, and the manufacturing cost of equipment is greatly reduced. The required space of the equipment is effectively reduced, and the like.

The above only be the preferred embodiment of the utility model discloses a not consequently restriction the utility model discloses a patent range, all are in the utility model discloses a conceive, utilize the equivalent structure transform of what the content was done in the description and the attached drawing, or direct/indirect application all is included in other relevant technical field the utility model discloses a patent protection within range.

Claims

1. A miniaturized cavity, comprising:

a first cavity;

the second cavity is arranged at the center of the bottom of the first cavity;

the second cavity is communicated with the first cavity, the volume of the second cavity is smaller than that of the first cavity, and the opening in the second cavity needs to avoid an evaporation source evaporation path.

2. An evaporation station apparatus comprising a miniaturized cavity according to claim 1.

3. The evaporation station apparatus of claim 2, further comprising a substrate carrier and an evaporation source; the substrate carrier is arranged at the top of the inner side of the first cavity, and the evaporation source is arranged at the bottom of the inner side of the second cavity.

4. An evaporation station apparatus according to claim 3, wherein the substrate carrier is located on the same center line as the evaporation source.