CN213635926U - Trough type wet method flower basket for cleaning silicon wafers - Google Patents
Trough type wet method flower basket for cleaning silicon wafers Download PDFInfo
- Publication number
- CN213635926U CN213635926U CN202022344263.8U CN202022344263U CN213635926U CN 213635926 U CN213635926 U CN 213635926U CN 202022344263 U CN202022344263 U CN 202022344263U CN 213635926 U CN213635926 U CN 213635926U
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- basket
- flowers
- flower basket
- flower
- rods
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 29
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 29
- 239000010703 silicon Substances 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000004140 cleaning Methods 0.000 title claims abstract description 17
- 235000012431 wafers Nutrition 0.000 title claims description 21
- 230000003014 reinforcing effect Effects 0.000 claims abstract description 20
- 230000002787 reinforcement Effects 0.000 claims description 5
- 230000007423 decrease Effects 0.000 claims description 3
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 239000007921 spray Substances 0.000 abstract description 6
- 238000005406 washing Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 241000197194 Bulla Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 208000002352 blister Diseases 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a be used for abluent slot type wet process basket of flowers of silicon chip belongs to photovoltaic equipment technical field. The utility model discloses a trough type wet method basket of flowers, which comprises a basket of flowers end plate, a basket of flowers side rod group and a reinforcing side rod, wherein two sides of the basket of flowers end plate are respectively provided with two basket of flowers side rod groups, one of the two basket of flowers side rod groups is positioned at the upper part of the basket of flowers end plate, and the other one is positioned at the lower part of the basket of flowers end plate; the basket of flowers side pole group all includes the basket of flowers pole that two intervals set up, is arranged in four basket of flowers poles of basket of flowers end plate homonymy, and the interval between two adjacent basket of flowers poles in the middle is a, and a satisfies the relational expression: a is more than or equal to 40mm, the distance between the other two basket poles is b, and b satisfies the relation: b is more than or equal to 120 mm. The distance between the flower basket rods is increased, so that the silicon wafer can not be stuck. The diameter of the basket of flowers pole and the height of latch all reduce, avoid the basket of flowers pole to block and spray the waterline, reduce the latch seal, the cleaning performance is better.
Description
Technical Field
The utility model relates to a photovoltaic equipment technical field especially relates to a be used for abluent slot type wet process basket of flowers of silicon chip.
Background
In order to avoid the silicon wafer sticking of the current groove type wet method flower basket, a mode of increasing a pressure rod is adopted, or a mode of placing the flower basket on the side with a flower basket side rod upward is adopted, so that the silicon wafer sticking in the cleaning process is improved. However, the flower basket rod is arranged above the flower basket in a mode of adding the pressure lever or laterally placing the flower basket, so that the watermark of the flower basket rod can be generated, the watermark caused by the flower basket rod can cause a plurality of bad EL pieces, the manufacturing requirements of the battery can not be met, and especially the high-efficiency battery has higher requirements on cleaning and silicon wafer cleaning.
In addition, in order to improve the cleaning effect and reduce the cleaning cost, the current tank type cleaning machine is more inclined to use a water washing mode of spraying instead of an overflow and bubbling water washing mode. The spraying and water washing can save water, can generate larger washing force, and has better washing effect. However, the diameters of the basket rods of the conventional trough-type wet-method baskets are large, and the basket rods can block waterlines when being used for spraying and washing, so that poor washing is caused.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a be used for abluent slot type wet process basket of flowers of silicon chip not only can avoid the silicon chip to produce the bonding die in the cleaning process, and the cleaning performance is better, reduces the bad piece of EL because of the basket of flowers produces.
In order to realize the purpose, the following technical scheme is provided:
a trough type wet method flower basket for cleaning silicon wafers comprises the following components:
the two flower basket end plates are arranged at intervals;
the two sides of the basket end plate are respectively provided with two basket side rod groups, one of the two basket side rod groups is positioned at the upper part of the basket end plate, and the other one of the two basket side rod groups is positioned at the lower part of the basket end plate; the side rod group of the flower basket comprises two flower basket rods arranged at intervals, the four flower basket rods are positioned on the same side of the flower basket end plate, the distance between every two adjacent flower basket rods in the middle is a, and a satisfies the relational expression: a is more than or equal to 40mm, the distance between the rest two basket poles is b, and b satisfies the relation: b is more than or equal to 120 mm; the basket rods are provided with a plurality of clamping teeth arranged at intervals along the length direction;
and the reinforcing side rods are arranged on two sides of the flower basket end plate and fixed between the flower basket end plates.
Optionally, the latches on two adjacent basket rods are staggered along the length direction of the basket rod.
Optionally, a silicon wafer clamping groove is formed between two adjacent clamping teeth of two adjacent basket rods.
Optionally, the height of the latch is c, and c satisfies the relation: c is more than or equal to 3mm and less than or equal to 8 mm.
Optionally, the clamping teeth are formed into tapered teeth with gradually reduced width, and the tapered bottoms of the clamping teeth on two basket rods in the same basket side rod group are arranged oppositely.
Optionally, the cross-sectional area of the latch decreases in a direction away from the basketball pole.
Optionally, the diameter of the basket rod is d, and d satisfies the relation: d is more than or equal to 5mm and less than or equal to 10 mm.
Optionally, one reinforcing side bar is arranged between two basket bars in the same basket side bar group, and the reinforcing side bar is positioned outside the basket bars.
Optionally, a gap is arranged between the reinforcing side rod and the basket rod adjacent to the reinforcing side rod; the height of the gap is e, and e satisfies the relation: e is more than or equal to 2mm and less than or equal to 7 mm.
Optionally, the trough-type wet-process flower basket further comprises a flower basket bottom support rod, and the plurality of flower basket bottom support rods are all fixed between the flower basket end plates and located at the bottoms of the flower basket end plates.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses a trough type wet method flower basket, which comprises a flower basket end plate, a flower basket side rod group and a reinforcing side rod, wherein the two flower basket end plates are arranged at intervals; two sides of the basket end plate are provided with two basket side rod sets, one of the two basket side rod sets is positioned at the upper part of the basket end plate, and the other one of the two basket side rod sets is positioned at the lower part of the basket end plate; the basket of flowers side pole group all includes the basket of flowers pole that two intervals set up, is arranged in four basket of flowers poles of basket of flowers end plate homonymy, and the interval between two adjacent basket of flowers poles in the middle is a, and a satisfies the relational expression: a is more than or equal to 40mm, the distance between the other two basket poles is b, and b satisfies the relation: b is more than or equal to 120 mm; the basket rods are provided with a plurality of clamping teeth arranged at intervals along the length direction; both sides of basket of flowers end plate all are equipped with a plurality of reinforcement side levers, and the reinforcement side lever is all fixed between the basket of flowers end plate. The number of the flower basket rods on one side is increased to four from two, and the distance between the flower basket rods is increased, so that the distance between the supporting points for fixing the silicon wafer is larger, and the silicon wafer can not be stuck. The diameter of the basket rod is reduced to 5-10mm from 12-20mm, the basket rod is prevented from blocking a spray waterline, and the position of the basket rod avoids the central position of the basket, so that the direct-injection spray waterline is directly washed on a silicon wafer, and the cleaning effect is better. The height size of the latch on the basket rod is reduced from 10-16mm to 3-8mm, and although the number of the basket rod is increased, the latch mark is smaller and lighter. Simultaneously, the reinforcing side rods are added, and the strength of the flower basket is prevented from being lowered due to the reduction of the diameter of the flower basket rods.
Drawings
FIG. 1 is a front view of a trough type wet flower basket according to an embodiment of the present invention;
FIG. 2 is a top view of the embodiment of the present invention;
fig. 3 is a sectional view of the embodiment of the present invention showing a trough type wet flower basket.
Reference numerals:
1. a flower basket end plate;
2. a side rod group of the flower basket; 21. a basket rod; 211. clamping teeth;
3. reinforcing side rods;
4. a flower basket bottom support rod.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description of the present invention and simplification of description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; either mechanically or electrically. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
As shown in fig. 1-3, the embodiment provides a trough-type wet-process flower basket for cleaning silicon wafers, which includes a flower basket end plate 1, a flower basket side rod group 2, a reinforcing side rod 3 and a flower basket bottom support rod 4, wherein the two flower basket end plates 1 are arranged at intervals; two sides of the basket end plate 1 are respectively provided with two basket side rod groups 2, one of the two basket side rod groups 2 is positioned at the upper part of the basket end plate 1, and the other is positioned at the lower part of the basket end plate 1; the side rod group 2 of the flower basket comprises two flower basket rods 21 arranged at intervals, the four flower basket rods 21 are positioned on the same side of the flower basket end plate 1, the distance between two adjacent flower basket rods 21 in the middle is a, and a satisfies the relational expression: a is more than or equal to 40mm, the distance between the other two basket poles 21 is b, and b satisfies the relation: b is more than or equal to 120 mm; the basket rods 21 are provided with a plurality of latch teeth 211 arranged at intervals along the length direction; both sides of basket of flowers end plate 1 all are equipped with a plurality of reinforcement side lever 3, and reinforcement side lever 3 all fixes between basket of flowers end plate 1. The plurality of flower basket bottom support rods 4 are all fixed between the flower basket end plates 1 and are positioned at the bottoms of the flower basket end plates 1.
It should be noted that the number of the basket rods 21 on the same side of the trough-type wet-process basket is increased from two to four, and the distance between the basket rods 21 is increased, so that the distance between the supporting points for fixing the silicon wafer is larger, and the silicon wafer is prevented from being stuck. In this embodiment, the distance between the basket rods 21 is adjusted from 65-100mm to 120-150mm between the uppermost basket rod 21 and the lowermost basket rod 21, and the distance between two adjacent basket rods 21 is 40-60 mm. The distance between the basket rods 21 can be adjusted according to the size of the silicon wafer, in other embodiments, such as 182mm silicon wafer, the distance between the uppermost basket rod 21 and the lowermost basket rod 21 can be 130-170 mm; the distance between two adjacent basket poles 21 in the middle can be 60-90 mm; for example, a silicon wafer of 210mm, the distance between the uppermost basket rod 21 and the lowermost basket rod 21 can be 150-200mm, and the distance between two adjacent basket rods 21 in the middle can be 80-110 mm.
Further, the diameter of the basket rod 21 is d, and d satisfies the relation: d is more than or equal to 5mm and less than or equal to 10 mm. The diameter of the basket of flowers pole 21 is reduced to 5-10mm by 12-20mm, avoid basket of flowers pole 21 to block and spray the waterline, two baskets of flowers side pole group 2, one is located the upper portion of slot type wet process basket of flowers, and another is located the lower part of slot type wet process basket of flowers for the central point that basket of flowers pole 21 puts away from the basket of flowers in the position, and then make the waterline of spraying of directly spouting directly wash on the silicon chip, the cleaning performance is better.
Optionally, the height of the latch 211 is c, and c satisfies the relation: c is more than or equal to 3mm and less than or equal to 8 mm. Further, the latch 211 on two adjacent basket poles 21 are staggered along the length direction of the basket poles 21. A silicon chip clamping groove is formed between two adjacent clamping teeth 211 in two adjacent basket rods 21. The height dimension of the latch 211 on the basket bar 21 is reduced from 10-16mm to 3-8mm and is arranged in a staggered manner, so that the contact area between the silicon wafer and the latch 211 is reduced under the condition that the distance between the latch 211 is not increased, the activity space of the silicon wafer is increased, the uniformity of the liquid medicine is further improved, and although the number of the basket bar 21 is increased, the latch printing is smaller and lighter.
Optionally, one reinforcing side bar 3 is arranged between two basket bars 21 in the same basket side bar group 2, and the reinforcing side bar 3 is located outside the basket bars 21. The diameter of the reinforcing side bar 3 is f, and f satisfies the relation: f is more than or equal to 7mm and less than or equal to 11 mm. The reinforcing side rods 3 are added, so that the strength of the flower basket is prevented from being lowered due to the reduction of the diameter of the flower basket rod 21.
Optionally, a gap is arranged between the reinforcing side rod 3 and the flower basket rod 21 adjacent to the reinforcing side rod; the height of the gap is e, and e satisfies the relation: e is more than or equal to 2mm and less than or equal to 7 mm. It remains sufficient space between side lever 3 and the basket of flowers pole 21 to consolidate for consolidate side lever 3 and can not influence the cleaning performance that sprays yet, make the basin formula wet process basket of flowers not only can be applied to the overflow and add the washing mode of tympanic bulla, also can be applied to the washing mode that sprays.
Alternatively, as shown in fig. 2 in conjunction with fig. 1, the latches 211 are each formed as a tapered tooth with a gradually decreasing width, and the tapered bottoms of the latches 211 on two basket poles 21 in the same basket side pole group 2 are arranged oppositely. Further, the cross-sectional area of the latch 211 gradually decreases in a direction away from the basket pole 21. On the premise of ensuring the stability of the silicon wafer, the contact area between the latch 211 and the silicon wafer is further reduced, so that the latch mark is reduced, and defective products are reduced.
It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.
Claims (10)
1. A trough type wet method flower basket for cleaning silicon wafers is characterized by comprising:
the flower basket comprises flower basket end plates (1), wherein the two flower basket end plates (1) are arranged at intervals;
the two sides of the basket end plate (1) are respectively provided with two basket side rod groups (2), one of the two basket side rod groups (2) is positioned at the upper part of the basket end plate (1), and the other one of the two basket side rod groups is positioned at the lower part of the basket end plate (1); the side rod group (2) of the flower basket comprises two flower basket rods (21) arranged at intervals, the four flower basket rods (21) are positioned on the same side of the flower basket end plate (1), the distance between every two adjacent flower basket rods (21) in the middle is a, and a satisfies the relational expression: a is more than or equal to 40mm, the distance between the other two basket poles (21) is b, and b satisfies the relation: b is more than or equal to 120 mm; the basket rods (21) are provided with a plurality of clamping teeth (211) which are arranged at intervals along the length direction;
consolidate side lever (3), the both sides of basket of flowers end plate (1) all are equipped with a plurality of reinforcement side lever (3), consolidate side lever (3) and all fix between basket of flowers end plate (1).
2. The trough type wet flower basket according to claim 1, wherein the latch teeth (211) on two adjacent flower basket rods (21) are staggered along the length direction of the flower basket rods (21).
3. The wet grooved flower basket according to claim 2, wherein a silicon slot is formed between two adjacent latches (211) of two adjacent basket rods (21).
4. The wet slotted flower basket according to claim 3, wherein the latch (211) has a height c, and c satisfies the relationship: c is more than or equal to 3mm and less than or equal to 8 mm.
5. The wet channel flower basket according to claim 4, wherein the fastening teeth (211) are each formed as a tapered tooth with gradually decreasing width, and the tapered bottoms of the fastening teeth (211) on two basket rods (21) in the same basket side rod group (2) are arranged oppositely.
6. The wet slotted flower basket according to claim 5, wherein the cross-sectional area of the latch (211) decreases gradually in a direction away from the basket stem (21).
7. The wet grooved flower basket according to claim 1, wherein the diameter of the basket rod (21) is d, d satisfying the relation: d is more than or equal to 5mm and less than or equal to 10 mm.
8. The wet grooved flower basket according to claim 1, wherein one reinforcing side bar (3) is arranged between two basket bars (21) in the same basket side bar group (2), and the reinforcing side bar (3) is positioned outside the basket bars (21).
9. The grooved wet-process flower basket according to claim 8, characterized in that a gap is arranged between the reinforcing side bar (3) and the flower basket bar (21) adjacent to the reinforcing side bar; the height of the gap is e, and e satisfies the relation: e is more than or equal to 2mm and less than or equal to 7 mm.
10. The trough wet basket according to any one of claims 1 to 9, further comprising basket bottom support rods (4), wherein a plurality of the basket bottom support rods (4) are fixed between the basket end plates (1) and located at the bottom of the basket end plates (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022344263.8U CN213635926U (en) | 2020-10-20 | 2020-10-20 | Trough type wet method flower basket for cleaning silicon wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022344263.8U CN213635926U (en) | 2020-10-20 | 2020-10-20 | Trough type wet method flower basket for cleaning silicon wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213635926U true CN213635926U (en) | 2021-07-06 |
Family
ID=76623115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022344263.8U Active CN213635926U (en) | 2020-10-20 | 2020-10-20 | Trough type wet method flower basket for cleaning silicon wafers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213635926U (en) |
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2020
- 2020-10-20 CN CN202022344263.8U patent/CN213635926U/en active Active
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