CN218554913U

CN218554913U - Crystal bar lifting spraying device and auxiliary spraying equipment thereof

Info

Publication number: CN218554913U
Application number: CN202222401441.5U
Authority: CN
Inventors: 王嘉; 冯琰; 王艺澄
Original assignee: Baotou Meike Silicon Energy Co Ltd; Jiangsu Meike Solar Technology Co Ltd
Current assignee: Baotou Meike Silicon Energy Co Ltd; Jiangsu Meike Solar Technology Co Ltd
Priority date: 2022-09-09
Filing date: 2022-09-09
Publication date: 2023-03-03
Anticipated expiration: 2032-09-09

Abstract

The utility model relates to a crystal bar lifting auxiliary spraying device, which comprises two spray pipes and water inlet pipes, wherein the two spray pipes are arranged in parallel and are respectively positioned at two sides of a crystal bar, a plurality of spray holes are uniformly distributed at one side of the two spray pipes opposite to each other, one end of each spray pipe is sealed, the other end of each spray pipe is communicated with the water inlet pipe, and the two water inlet pipes are communicated with each other through water pipes; the equipment effectively washes the silicon wafer and improves the quality of the silicon wafer.

Description

Crystal bar lifting spraying device and auxiliary spraying equipment thereof

Technical Field

The utility model relates to a spray set, concretely relates to crystal bar rises excellent spray set and supplementary equipment that sprays thereof.

Background

The problem of rod lifting and scratching of large-size crystal rods is always a main influence factor disturbing the surface quality of silicon wafers. Deep scratches can cause line mark degradation at the downstream cell end, thereby affecting product quality. The main reasons for the scratch are as follows: 1. the cross-sectional area of the silicon wafer is large (210 mm is 44mm larger than the former 166 mm). 2. The silicon wafer becomes thinner and is easier to adsorb together. (it was changed from 170 μm to 150 μm and 20 μm thinner). 3. The silicon powder content between the sheets is high, and water in the existing nozzle cannot enter the sheets.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that, overcome prior art's shortcoming, provide a crystal bar and rise excellent spray set and supplementary spraying equipment thereof, this equipment effectively washes the silicon chip, improves the silicon chip quality.

In order to solve the technical problem, the utility model provides a crystal bar rises excellent supplementary spraying apparatus, including spray pipe and inlet tube, two both sides that are located the crystal bar respectively of spray pipe parallel arrangement, one side equipartition that two spray pipes are relative has the several hole for water spraying, and the one end of every spray pipe is sealed, and other end intercommunication has the inlet tube, leads to pipe intercommunication between two inlet tubes.

The utility model discloses the technical scheme who further prescribes a limit to is:

furthermore, in the crystal bar lifting auxiliary spraying equipment, the water spraying holes are uniformly distributed along the length of the water spraying pipe.

The technical effect, the utility model discloses the length equipartition of spray pipe is followed to the hole for water spraying, all is provided with the hole for water spraying on the length of whole spray pipe and is convenient for spray water clearance silica flour to the crystal bar on the widest range, and is clean effectual, effectively solves the crystal bar and lifts excellent fish tail problem.

In the crystal bar lifting auxiliary spraying equipment, the water spraying holes are positioned at the lower part of one opposite side surface of the two water spraying pipes.

The technical effect, because the crystal bar promotes, set up the hole for water spraying in the lower part of the relative side of spray pipe, the direction of dashing is opposite with the direction of lifting, and the crystal bar that washes that can be better improves and washes the effect.

In the crystal bar lifting auxiliary spraying equipment, the water inlet pipe is perpendicular to the spray pipe, and one end of the water inlet pipe, which is far away from the spray pipe, is bent outwards and extends to form the water adding pipe.

The technical effect is that the upper end of the water inlet pipe extends outwards to form the water adding pipe, so that the water adding pipe is convenient to connect with the external water pipe, is convenient and quick, and simultaneously increases the attractiveness.

The utility model discloses still design a crystal bar and rise excellent spray set, rise excellent supplementary spraying equipment and the water spray box including above-mentioned crystal bar, the water spray box includes nozzle and nozzle holder, and the crystal bar rises excellent supplementary spraying equipment and sets up in nozzle holder's below, is equipped with the nozzle on the nozzle holder, wherein:

the nozzle support sets up two relatively, and the one end of nozzle support is vertical upwards to extend outer baffle and interior baffle and form the water storage district, is equipped with the nozzle in the water storage district, and the other end downward sloping of nozzle support extends and forms the slope water deflector, and the slope water deflector cleans water direction crystal bar, and the spray pipe that the crystal bar rises among the supplementary equipment that sprays of stick sets up in the below of slope water deflector.

Technical effect, the utility model discloses a spraying apparatus is rising excellent in-process, except that waterfall formula sprays, has installed one set of supplementary spraying additional, and the rivers that spray are waterfall formula, carry out a clean back in waterfall formula's rivers, and the supplementary rivers that spray are direct injection formula, and the supplementary direct injection formula rivers pressure that sprays is big, strikes in the middle of silicon chip and the silicon chip more easily and goes, carries out the secondary and cleans, effectively gets rid of silica flour, effectively solves the crystal bar and lifts excellent fish tail problem.

In the crystal bar lifting spray device, the spray pipe in the crystal bar lifting auxiliary spray equipment is arranged in parallel with the inclined water guide plate, and the spray holes in the spray pipe and the inclined water guide plate face the crystal bar.

The technical effect is that the crystal bar is well cleaned by guiding all water to the crystal bar better, the cleaning efficiency is improved, and the problem of scratching the crystal bar by lifting the crystal bar is effectively solved.

In the crystal bar lifting spray device, one end of the inclined water guide plate, which is far away from the nozzle support, extends outwards to form a horizontal water guide plate, and the horizontal water guide plate is vertical to a crystal bar arranged in the middle of the crystal bar production device.

The technical effect is that the horizontal water guide plate is arranged to guide the crystal bar in a shorter distance with water, so that the cleaning effect of the crystal bar by the water is improved.

In the crystal bar lifting spray device, the height of the inner baffle is smaller than that of the outer baffle.

The technical effect, the height that highly is less than outer baffle of interior baffle is convenient for water to spill over the back like this and flows to the crystal bar along slope water guide plate, if interior baffle height is higher than outer baffle water can spill over, is unfavorable for rivers to the crystal bar.

The beneficial effects of the utility model are that:

the utility model discloses, rising excellent in-process, except spraying waterfall formula, installed one set of supplementary spraying additional, waterfall formula combines the rivers of direct injection formula to wash, and after waterfall formula sprayed and washed, the direct injection formula water pressure that supplementary sprayed was big, goes in the middle of impacting silicon chip and silicon chip more easily, effectively washes, improves the silicon chip quality, and the fish tail proportion is reduced to 5% by original 80%.

Drawings

Fig. 1 is a schematic structural view of an auxiliary crystal bar lifting spraying device according to an embodiment of the present invention;

FIG. 2 is a schematic view of the sprinkler pipe of FIG. 1;

FIG. 3 is a schematic structural diagram of a crystal bar lifting and spraying device applied to a crystal bar production device according to an embodiment of the present invention;

FIG. 4 is a schematic structural view of a water spray box in the crystal bar lifting and spraying device of the embodiment of the present invention

In the figure: 1-a water spray pipe, 2-a water inlet pipe, 3-a water spray hole, 4-a water adding pipe, 5-a nozzle, 6-a nozzle bracket, 7-an outer baffle, 8-an inner baffle, 9-a water storage area, 10-an inclined water guide plate, 11-a horizontal water guide plate, 12-a chip box, 13-a crystal bar, 14-a workpiece platform, 15-a cushion strip, 16-a plastic plate and 17-a guide wheel.

Detailed Description

Example 1

The embodiment provides a crystal bar rises excellent supplementary equipment that sprays, and the structure is shown in fig. 1-2, including spray pipe 1 and inlet tube 2, two the both sides that are located the crystal bar respectively of 1 parallel arrangement of spray pipe, and two one side equipartitions that spray pipe 1 is relative have several hole for water spraying 3, and the one end of every spray pipe 1 is sealed, and the other end intercommunication has inlet tube 2, leads to the pipe intercommunication between two inlet tubes 2.

In this embodiment, the water jet holes 3 are evenly distributed along the length of the water jet pipe 1.

In this embodiment, the water spray holes are located at the lower part of the opposite side of the two water spray pipes.

In the present embodiment, the spray pipe 2 is perpendicular to the spray pipe 1, and one end of the water inlet pipe 2 away from the spray pipe 1 is bent and extended outwards to form the water adding pipe 4.

The utility model provides a crystal bar rises excellent spray set, the structure is shown as fig. 3-4, rises excellent auxiliary spray equipment and the box that sprays water including above-mentioned crystal bar, and the box that sprays water includes nozzle 5 and nozzle carrier 6, and the crystal bar rises excellent auxiliary spray equipment and sets up in nozzle carrier 6's below, is equipped with nozzle 5 on the nozzle carrier 6, wherein:

nozzle support 6 sets up two relatively, two nozzle support settings are in the both sides of 12 upper ends of chip box in the crystal bar apparatus for producing, the one end of nozzle support 6 is vertical upwards to extend outer baffle 7 and interior baffle 8 and form water storage area 9, be equipped with nozzle 5 in the water storage area 9, the other end downward sloping of nozzle support 6 extends and forms slope water deflector 10, slope water deflector 10 is cleaned water direction crystal bar, spray pipe 1 among the crystal bar rises the supplementary spray set of stick sets up in the below of slope water deflector 10.

In the embodiment, the spray pipe 1 in the crystal bar lifting auxiliary spray device is arranged in parallel with the inclined water guide plate 10, and the spray holes 3 in the spray pipe 1 and the inclined water guide plate 10 both face the crystal bar 13.

In the embodiment, one end of the inclined water guide plate 10 far away from the nozzle support 6 extends outwards to form a horizontal water guide plate 11, and the horizontal water guide plate 11 is perpendicular to a crystal bar 13 arranged in the middle of the crystal bar production device.

In the present embodiment, the height of the inner barrier 8 is smaller than the height of the outer barrier 7.

In this embodiment, pack this spray set into in the crystal bar apparatus for producing as shown in fig. 3, crystal bar apparatus for producing adopts current work piece platform 14 including being used for promoting the crystal bar, and work piece platform 14 has filler strip 15 and bonds and set up plastic slab 16 below filler strip 15, and connect work piece platform 14, and the below of plastic slab 16 is equipped with crystal bar 13, and the below of crystal bar 13 is equipped with fragment box 12, and the three-terminal of keeping away from crystal bar 13 on the fragment box 12 is equipped with guide pulley 17 respectively, the utility model discloses crystal bar rises excellent spray set up the both sides in fragment box 12's upper end for wash crystal bar 13, spray water box carries out waterfall formula when washing and washes and combine crystal bar to rise the big spray pipe 1 in the supplementary spray set of equipment middling pressure of crystal bar and directly spout rivers, more easily impact silicon chip and silicon chip in the middle of, effectively wash, improve the silicon chip quality, and the fish tail proportion has been reduced to 5 by original 80%.

In addition to the above embodiments, the present invention may have other embodiments. All the technical solutions formed by adopting equivalent substitutions or equivalent transformations fall within the protection scope claimed by the present invention.

Claims

1. The utility model provides a crystal bar rises stick auxiliary spray equipment which characterized in that: the water spraying device comprises water spraying pipes (1) and water inlet pipes (2), wherein the two water spraying pipes (1) are arranged in parallel, a plurality of water spraying holes (3) are uniformly distributed in one side, opposite to the two water spraying pipes (1), one end of each water spraying pipe (1) is sealed, the other end of each water spraying pipe is communicated with the corresponding water inlet pipe (2), and the two water inlet pipes (2) are communicated through water pipes.

2. The crystal rod lifting auxiliary spraying device according to claim 1, wherein: the water spraying holes (3) are uniformly distributed along the length of the water spraying pipe (1).

3. The crystal rod lifting auxiliary spraying device according to claim 1, wherein: the water spray holes are positioned at the lower part of the opposite side surfaces of the two water spray pipes.

4. The crystal rod lifting auxiliary spraying device according to claim 1, wherein: the water inlet pipe (2) is perpendicular to the water spraying pipe (1), and one end, far away from the water spraying pipe (1), of the water inlet pipe (2) is bent outwards and extends to form a water adding pipe (4).

5. The utility model provides a crystal bar rises excellent spray set which characterized in that: the crystal rod lifting auxiliary spraying device and the water spraying box comprise any one of the crystal rod lifting auxiliary spraying devices of claims 1 to 4, wherein the water spraying box comprises a nozzle (5) and a nozzle support (6), the crystal rod lifting auxiliary spraying device is arranged below the nozzle support (6), the nozzle (5) is arranged on the nozzle support (6), and the crystal rod lifting auxiliary spraying device comprises:

the crystal bar lifting auxiliary spraying device is characterized in that the two nozzle supports (6) are arranged oppositely, one end of each nozzle support (6) vertically extends upwards to form an outer baffle (7) and an inner baffle (8) to form a water storage area (9), the nozzles (5) are arranged in the water storage area (9), the other end of each nozzle support (6) inclines downwards to extend to form an inclined water guide plate (10), the inclined water guide plates (10) guide water to a crystal bar for cleaning, and a water spraying pipe (1) in the crystal bar lifting auxiliary spraying device is arranged below the inclined water guide plates (10).

6. The crystal rod lifting and spraying device according to claim 5, wherein: a water spray pipe (1) in the crystal bar lifting auxiliary spraying equipment is parallel to the inclined water guide plate (10), and a water spray hole (3) in the water spray pipe (1) and the inclined water guide plate (10) face the crystal bar.

7. The crystal rod lifting and spraying device according to claim 5, wherein: one end of the inclined water guide plate (10) far away from the nozzle support (6) extends outwards to form a horizontal water guide plate (11), and the horizontal water guide plate (11) is perpendicular to the crystal bar arranged in the middle of the crystal bar production device.

8. The crystal rod lifting and spraying device according to claim 5, wherein: the height of the inner baffle (8) is less than that of the outer baffle (7).