CN213612129U - Shield aluminum spraying shielding jig - Google Patents
Shield aluminum spraying shielding jig Download PDFInfo
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- CN213612129U CN213612129U CN202022184054.1U CN202022184054U CN213612129U CN 213612129 U CN213612129 U CN 213612129U CN 202022184054 U CN202022184054 U CN 202022184054U CN 213612129 U CN213612129 U CN 213612129U
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Abstract
The utility model provides an outer protective cover aluminum spraying shielding jig, which comprises a jig body, wherein the jig body is in a hollow cap-shaped structure and comprises an extension part and a main body part which are coaxially connected from top to bottom, the jig body can be matched and placed in the outer protective cover, and the extension part and the main body part respectively shield the top surface and the inner wall of the outer protective cover; through designing the tool that shields of cavity cap shape structure, it corresponds the matching setting with outer protection casing size and shielding face shape to use "putting" as the design key, only need place the tool in outer protection casing before the spraying operation and can realize effectively shielding, realize using fast and correctly, and effectively shelter from the part that aluminium raw materials splash need not the coating, solved the efficiency that exists among the prior art slow, the deviation is big and impurity remains many technical problem.
Description
Technical Field
The utility model relates to a coating spraying field, concretely relates to guard shield aluminium spraying shields tool.
Background
The EnCore TaN model, one of the semiconductor manufacturing sectors, is mainly used in the field of Physical Vapor Deposition (PVD) of metals, and is widely used in sub-28 nm processes, where the component shield needs to be surface treated to produce an aluminum coating in a specific location, as required by the integrated circuit manufacturing process. Since the sprayed layer is directed to a part of the used surface of the shield, and the non-used surface is not required to be sprayed, the non-sprayed part is required to be shielded before the spraying operation.
The Chinese utility model patent with application number CN201821174719.7 discloses a special protection jig for cleaning and sand blasting of a cover ring part of a semiconductor silicon tungsten device, which comprises a jig body, wherein the jig body is of a circular ring structure and comprises an outer protection layer and an inner protection layer, the outer protection layer is connected with the inner protection layer, and the outer protection layer is higher than the inner protection layer; the outer protective layer comprises an outer covering layer and an outer annular winding which are connected, the inner protective layer comprises an intermediate layer and an inner annular winding which are connected, and an inner covering layer is arranged at the bottom of the inner annular winding; the outer ring winding is connected with the intermediate layer; a positioning groove is defined among the outer ring winding, the intermediate layer and the inner ring winding, wherein the lowest plane of the outer ring winding is lower than that of the intermediate layer.
However, the conventional method of using a shielding material for the partition has the following disadvantages: 1. the efficiency is slow; 2. the deviation is large; 3. the impurities remain much.
SUMMERY OF THE UTILITY MODEL
To above problem, the utility model provides an outer protection casing aluminium spraying shields tool, shield tool through designing a cavity hat shape structure, it corresponds the matching setting with outer protection casing size and shielding face shape, and use "put" as the design key, only need place the tool before the spraying operation and can realize effectively shielding in outer protection casing, realize using fast and correctly, and effectively shelter from the part that the aluminium raw materials splash need not the coating, the efficiency that exists among the prior art is slow, the deviation is big and impurity remains many technical problem.
In order to achieve the above object, the utility model provides a following technical scheme:
the utility model provides an outer protection casing spouts aluminium and shields tool, includes the tool body, the tool body is cavity cap-shaped structure, and it includes epitaxial portion and main part of coaxial coupling from top to bottom in proper order, the tool body can match and place in outer protection casing, just epitaxial portion and main part are right respectively the top surface and the inner wall of outer protection casing shield.
Preferably, the extension portion has an annular structure, the main body portion has a hollow cylindrical structure, and the extension portion and the main body portion have the same inner diameter.
Preferably, the outer layer protection cover comprises a hollow cylinder, an outer ring part extending outwards from one axial end of the hollow cylinder in the radial direction, an inner ring part extending inwards from the other axial end of the hollow cylinder in the radial direction, and a circular ring part extending upwards from the extending end of the inner ring part in the axial direction, wherein the height of the circular ring part is smaller than that of the hollow cylinder.
Preferably, a portion of the inner wall of the hollow cylinder higher than the circular ring portion is a vertical shielding surface, and an upper surface of the outer ring portion is a horizontal shielding surface.
Preferably, an outer diameter of the main body portion matches an inner diameter of the hollow cylinder, and an outer circumferential surface of the main body portion forms a vertical covering surface for covering the vertical covering surface.
Preferably, an outer diameter of the extension portion is larger than an outer diameter of the outer ring portion, and a lower ring surface of the extension portion forms a horizontal covering surface for covering the horizontal shielding surface.
Preferably, the extension portion and the main body portion are integrally formed.
Preferably, the jig body is made of white steel.
Preferably, the height of the extension portion is smaller than the height of the body portion.
The beneficial effects of the utility model reside in that:
(1) the utility model discloses a design a shield tool of cavity cap shape structure, it corresponds the matching setting with outer protection casing size and shielding face shape to and use "put" as the design focus, only need place the tool in outer protection casing before the spraying operation and can realize effectively shielding, realize using fast and correctly, and effectively shelter from the aluminium raw materials and splash to the part that need not the coating, promote operation personnel's operation exactness and operating efficiency, improve the product spraying quality;
(2) the utility model discloses a shield tool adopts the white steel to be main material, has anti high temperature, stand wear and tear, non-deformable advantage, improves the spraying and shields the life of accuracy and tool.
Drawings
FIG. 1 is a schematic view showing the installation state of the jig and the outer protective cover of the present invention;
FIG. 2 is a schematic view of the overall structure of the jig of the present invention;
fig. 3 is the overall structure diagram of the outer protective cover of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
Example one
As shown in fig. 1-2, an aluminum-sprayed shielding jig for an outer layer protective cover comprises a jig body 1, wherein the jig body 1 is a hollow cap-shaped structure and comprises an outer extension portion 11 and a main body portion 12 which are coaxially connected in sequence from top to bottom, the jig body 1 can be placed in the outer layer protective cover 2 in a matching manner, and the outer extension portion 11 and the main body portion 12 respectively shield the top surface and the inner wall of the outer layer protective cover 2.
In this embodiment, by designing the shielding jig 1 with a hollow hat-shaped structure, which is correspondingly matched with the size and the shielding shape of the outer layer shield 2, it is able to effectively shield the portion of the aluminum material that is sprayed onto the portion that does not need to be coated, and the vertical shielding surface 240 and the horizontal shielding surface 220, which are described below, only expose the remaining portion that needs to be coated with the aluminum.
Except that this in addition to "putting" as the design key, before the spraying operation, the operation personnel only need with tool 1 down overlaps from last and to put and can accomplish the accuracy and shield in outer protection casing 2, and the location is accurate, and difficult not hard up realizes using fast and correctly, and then promotes operation personnel operation exactness and operating efficiency, improves the product spraying quality.
Preferably, the extension 11 has an annular structure, the main body 12 has a hollow cylindrical structure, and the extension 11 and the main body 12 have the same inner diameter.
Preferably, as shown in fig. 3, the outer shield 2 includes a hollow cylinder 21, an outer ring portion 22 extending radially outward from one axial end of the hollow cylinder 21, an inner ring portion 23 extending radially inward from the other axial end of the hollow cylinder 21, and an annular ring portion 24 extending axially upward from an extending end of the inner ring portion 23, wherein the annular ring portion 24 has a height smaller than that of the hollow cylinder 21.
Preferably, a portion of the inner wall of the hollow cylinder 21 higher than the circular ring portion 24 is a vertical shielding surface 240, and an upper surface of the outer ring portion 22 is a horizontal shielding surface 220.
Preferably, the outer diameter of the main body 12 matches the inner diameter of the hollow cylinder 21, and the outer circumferential surface of the main body 12 forms a vertical covering surface 210 for covering the vertical shielding surface 240.
Preferably, the outer diameter of the extension 11 is larger than the outer diameter of the outer ring 22, and the lower ring surface of the extension 11 forms a horizontal covering surface 110 for covering the horizontal shielding surface 220.
Preferably, the height of the extension portion 11 is smaller than the height of the body portion 12.
Example two
For simplicity, only the differences between the second embodiment and the first embodiment will be described below; the second embodiment is different from the first embodiment in that:
preferably, the extension portion 11 and the main body portion 12 are integrally formed.
Preferably, the jig body 1 is made of white steel.
In this embodiment, the shielding jig 1 is made of white steel, which has the advantages of high temperature resistance, wear resistance and non-deformation, and improves the accuracy of the spraying shielding and the service life of the jig.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (9)
1. The utility model provides a guard shield aluminium spraying shields tool, includes tool body (1), its characterized in that, tool body (1) is cavity cap shape structure, and it includes extension portion (11) and main part (12) of coaxial coupling from top to bottom in proper order, tool body (1) can match and place in outer protection casing (2), just extension portion (11) and main part (12) are right respectively the top surface and the inner wall of outer protection casing (2) shield.
2. The shield aluminum spraying shielding jig as claimed in claim 1, wherein the extension portion (11) is of an annular structure, the main body portion (12) is of a hollow cylindrical structure, and the inner diameters of the extension portion (11) and the main body portion (12) are the same.
3. The shield aluminum-spraying shielding jig of claim 2, characterized in that the outer shield (2) comprises a hollow cylinder (21), an outer ring part (22) extending radially outwards from one axial end of the hollow cylinder (21), an inner ring part (23) extending radially inwards from the other axial end of the hollow cylinder (21), and a circular ring part (24) extending axially upwards from the extending end of the inner ring part (23), wherein the height of the circular ring part (24) is less than the height of the hollow cylinder (21).
4. The shield aluminum-sprayed shielding jig of claim 3, wherein the part of the inner wall of the hollow cylinder (21) higher than the circular ring part (24) is a vertical shielding surface (240), and the upper surface of the outer ring part (22) is a horizontal shielding surface (220).
5. The shield aluminum-sprayed shielding jig of claim 4, characterized in that the outer diameter of the main body part (12) is matched with the inner diameter of the hollow cylinder (21), and the outer circumferential surface of the main body part (12) forms a vertical covering surface (210) for shielding the vertical shielding surface (240).
6. The shield aluminum-sprayed shielding jig of claim 4, characterized in that the outer diameter of the extension portion (11) is larger than the outer diameter of the outer ring portion (22), and the lower ring surface of the extension portion (11) forms a horizontal covering surface (110) for shielding the horizontal shielding surface (220).
7. The shielding jig for spraying aluminum onto a shield according to claim 1, wherein the extension portion (11) and the main body portion (12) are integrally formed.
8. The shielding aluminum-sprayed shielding jig of claim 1, wherein the jig body (1) is made of white steel.
9. The shield aluminum-sprayed shielding jig of claim 2, wherein the height of the extension portion (11) is smaller than the height of the main body portion (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022184054.1U CN213612129U (en) | 2020-09-29 | 2020-09-29 | Shield aluminum spraying shielding jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022184054.1U CN213612129U (en) | 2020-09-29 | 2020-09-29 | Shield aluminum spraying shielding jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213612129U true CN213612129U (en) | 2021-07-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022184054.1U Active CN213612129U (en) | 2020-09-29 | 2020-09-29 | Shield aluminum spraying shielding jig |
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| CN (1) | CN213612129U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114654390A (en) * | 2022-04-06 | 2022-06-24 | 广东江丰电子材料有限公司 | Two-end sand blasting protection jig for LCD tube target and use method thereof |
-
2020
- 2020-09-29 CN CN202022184054.1U patent/CN213612129U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114654390A (en) * | 2022-04-06 | 2022-06-24 | 广东江丰电子材料有限公司 | Two-end sand blasting protection jig for LCD tube target and use method thereof |
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