CN212947306U - Sand blasting protection jig of clamp ring for semiconductor manufacturing process - Google Patents
Sand blasting protection jig of clamp ring for semiconductor manufacturing process Download PDFInfo
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- CN212947306U CN212947306U CN202021737426.2U CN202021737426U CN212947306U CN 212947306 U CN212947306 U CN 212947306U CN 202021737426 U CN202021737426 U CN 202021737426U CN 212947306 U CN212947306 U CN 212947306U
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- annular
- clamp ring
- inner tube
- tool
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Abstract
The utility model relates to a sandblast protection tool of clamp ring for semiconductor processing procedure, including the tool main part, the tool main part includes annular plane overlay, and coaxial ann has annular inner tube on annular plane overlay, and the bracing piece has been ann on the upper portion of annular inner tube, and the bracing piece is parallel with the annular plane overlay, and the circumference ann has a plurality of spacing posts on being located the outside annular plane overlay of annular inner tube. The utility model discloses a set up the annular inner tube of ann having cross bracing piece, take place to warp after having avoided annular inner tube used many times, and conveniently get and take the tool, through setting up the annular plane overlay of ann having spacing post, spacing post is installed in the clamp ring recess, guarantee that the tool can not control and rock, and can not bump the product, annular inner tube is inseparable with clamp ring internal surface laminating, it is high to shield the precision, high durability and convenient use, be convenient for reuse, the protection edge that has avoided adopting the sticky tape and lead to is uneven, there is the problem of cull.
Description
Technical Field
The utility model relates to a sandblast protection tool technical field especially relates to a sandblast protection tool of clamp ring for semiconductor processing procedure.
Background
Clamp rings are commonly used in semiconductor metal deposition equipment and function to shield non-deposition areas during grit blasting operations. The compression ring only has upper surface and outside deposit metal, need do the sandblast and handle, and the internal surface need keep higher smooth finish, avoids influencing the fit when assembling with other parts. At present, all adopt the sticky tape to shield the clamp ring internal surface usually, it is unsatisfactory to have the precision of shielding, uses loaded down with trivial details, and the protection edge is uneven, has the problem of cull.
Disclosure of Invention
The utility model aims to solve the defects of the prior art and provide a sand blasting protection jig of a clamp ring for semiconductor processing.
The utility model discloses a realize above-mentioned purpose, adopt following technical scheme:
the sand blasting protection jig is characterized in that the jig main body comprises an annular plane covering plate, an annular inner cylinder is coaxially arranged on the annular plane covering plate, the bottom of the annular inner cylinder is fixedly connected with the annular plane covering plate, the annular inner cylinder and the annular plane covering plate are coaxially arranged, a supporting rod is arranged on the upper portion of the annular inner cylinder, the supporting rod is parallel to the annular plane covering plate, a plurality of limiting columns are arranged on the circumference of the annular plane covering plate located outside the annular inner cylinder, and a boss used for covering a chamfer on the upper portion of the pressing ring is arranged on the bottom surface of the annular plane covering plate.
The boss and the annular plane covering plate are arranged in an integrated structure.
The support rod is of a cross structure.
The outer wall of the annular inner cylinder is matched with the inner edge of the external compression ring.
The limiting column is fixedly connected with the annular plane covering plate through bolts and is matched with a groove of an external compression ring.
The number of the limiting columns is 4.
The limiting column is a polyethylene column.
The utility model has the advantages that: the utility model has the advantages of simple and reasonable design, through setting up the annular inner tube of ann cross bracing piece, the annular inner tube takes place to warp after the repetitious usage, and conveniently get and take the tool, through setting up the annular plane overlay that ann has spacing post, spacing post is installed in the clamp ring recess, guarantee that the tool can not control and rock, and can not touch the product, the laminating of annular inner tube and clamp ring internal surface is inseparable, it is high to shield the precision, high durability and convenient use, be convenient for use repeatedly, the protection edge that has avoided adopting the sticky tape and lead to is uneven, there is the problem of cull.
Drawings
Fig. 1 is a schematic structural view of the present invention;
in the figure: 1-a support bar; 2-an annular inner cylinder; 3-an annular planar cover plate; 4-boss; 5-a limiting column;
the following detailed description will be made in conjunction with embodiments of the present invention with reference to the accompanying drawings.
Detailed Description
The invention will be further explained with reference to the following figures and examples:
as shown in fig. 1, a sand blasting protection jig for a clamp ring for semiconductor process includes a jig main body, and is characterized in that the jig main body includes an annular plane cover plate 3, an annular inner cylinder 2 is coaxially installed on the annular plane cover plate 3, the bottom of the annular inner cylinder 2 is fixedly connected with the annular plane cover plate 3, the annular inner cylinder 2 and the annular plane cover plate 3 are coaxially arranged, a support rod 1 is installed on the upper portion of the annular inner cylinder 2, the support rod 1 is parallel to the annular plane cover plate 3, a plurality of limit posts 5 are installed on the circumference of the annular plane cover plate 3 located outside the annular inner cylinder 2, and a boss 4 for covering a chamfer on the upper portion of the clamp ring is arranged on the bottom surface of the annular plane.
The boss 4 and the annular plane covering plate 3 are arranged in an integral structure.
The support rod 1 is of a cross-shaped structure.
The outer wall of the annular inner cylinder 2 is matched with the inner edge of an external compression ring.
The limiting column 5 is fixedly connected with the annular plane covering plate 3 through bolts, and the limiting column 5 is matched with a groove of an external compression ring.
The number of the limiting columns 5 is 4.
The limiting column 5 is a polyethylene column.
The utility model discloses when the clamp ring carries out the sandblast operation, install in the clamp ring recess through spacing post 5, shield non-deposition face completely, guarantee that the tool can not control and rock, and can not touch the product, it is inseparable with clamp ring internal surface laminating to ann has cross bracing piece 1's annular inner tube 2, it is high to shield the precision, high durability and convenient use, be convenient for reuse, take place to warp after having avoided 2 repetitious usages of annular inner tube to conveniently get and take the tool, avoided adopting the sticky tape and the protection edge that leads to is uneven, has the problem of cull, the utility model discloses structural design is simple reasonable.
The present invention has been described above with reference to the accompanying drawings, and it is obvious that the present invention is not limited by the above embodiments, and various improvements made by the method concept and technical solution of the present invention or directly applied to other occasions without improvement are all within the protection scope of the present invention.
Claims (7)
1. The utility model provides a sand blasting protection tool of clamp ring for semiconductor processing procedure, including the tool main part, a serial communication port, the tool main part includes annular plane overlay (3), coaxial ann has annular inner tube (2) on annular plane overlay (3), the bottom and the annular plane overlay (3) rigid coupling of annular inner tube (2), annular inner tube (2) and the coaxial setting of annular plane overlay (3), bracing piece (1) have been ann to the upper portion of annular inner tube (2), bracing piece (1) are parallel with annular plane overlay (3), the circumference ann has a plurality of spacing posts (5) on the annular plane overlay (3) that lie in annular inner tube (2) outside, be equipped with boss (4) that are used for covering clamp ring upper portion chamfer in the bottom surface of annular plane overlay (3).
2. The tool for protecting sand blasting of clamp ring in semiconductor process according to claim 1, wherein the boss (4) and the annular planar cover plate (3) are integrally formed.
3. The tool for protecting a clamp ring in a semiconductor manufacturing process from sandblasting as claimed in claim 1, wherein the supporting rod (1) has a cross-shaped structure.
4. The sand blasting protection jig for the clamp ring used in the semiconductor manufacturing process according to claim 1, wherein the outer wall of the annular inner cylinder (2) is adapted to the inner edge of an external clamp ring.
5. The tool for protecting a clamp ring from sandblasting as claimed in claim 1, wherein said spacer posts (5) are fixedly connected to the annular flat cover plate (3) by bolts, and the spacer posts (5) are adapted to the grooves of the external clamp ring.
6. The sand blasting protection jig for the clamp ring used in the semiconductor manufacturing process according to claim 1, wherein the number of the limiting columns (5) is 4.
7. The sand blasting protection jig for the clamp ring used in the semiconductor manufacturing process according to claim 1, wherein the limiting columns (5) are polyethylene columns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021737426.2U CN212947306U (en) | 2020-08-19 | 2020-08-19 | Sand blasting protection jig of clamp ring for semiconductor manufacturing process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021737426.2U CN212947306U (en) | 2020-08-19 | 2020-08-19 | Sand blasting protection jig of clamp ring for semiconductor manufacturing process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212947306U true CN212947306U (en) | 2021-04-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021737426.2U Active CN212947306U (en) | 2020-08-19 | 2020-08-19 | Sand blasting protection jig of clamp ring for semiconductor manufacturing process |
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| Country | Link |
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| CN (1) | CN212947306U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113953981A (en) * | 2021-10-29 | 2022-01-21 | 山东工业陶瓷研究设计院有限公司 | Metal connecting ring pretreatment method and coarsening system |
-
2020
- 2020-08-19 CN CN202021737426.2U patent/CN212947306U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113953981A (en) * | 2021-10-29 | 2022-01-21 | 山东工业陶瓷研究设计院有限公司 | Metal connecting ring pretreatment method and coarsening system |
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