CN210704341U

CN210704341U - Sand blasting protection jig for semiconductor manufacturing process

Info

Publication number: CN210704341U
Application number: CN201920977169.0U
Authority: CN
Inventors: 周涛; 惠朝先
Original assignee: Sichan Ferrotec Technology Development Co ltd
Current assignee: Sichan Ferrotec Technology Development Co ltd
Priority date: 2019-06-26
Filing date: 2019-06-26
Publication date: 2020-06-09
Anticipated expiration: 2029-06-26

Abstract

The utility model discloses a semiconductor processing procedure sandblast protection tool, which comprises a base, the arrangement groove, first solid fixed ring, the solid fixed ring of second, first fixed threaded rod, second fixed threaded rod and stop nut, be provided with the arrangement groove on the base, it has the product body to settle in the arrangement groove, the upper portion of base is provided with first fixed threaded rod, install first solid fixed ring on the first fixed threaded rod, the intermediate position department of base is provided with inner circle arrangement seat, the upper portion of inner circle arrangement seat is provided with second fixed threaded rod, install the solid fixed ring of second on the second fixed threaded rod, all install stop nut on first fixed threaded rod and the second fixed threaded rod. The utility model discloses a set up base, resettlement groove, first solid fixed ring, the solid fixed ring of second, first fixed threaded rod, second fixed threaded rod and stop nut, solved the product and placed the sandblast use on the sandblast workstation, the position that need not the sandblast is also easily by the sandblast, still needs subsequent processing, the problem of the operation of being not convenient for.

Description

Sand blasting protection jig for semiconductor manufacturing process

Technical Field

The utility model relates to a semiconductor processing procedure depo ring sandblast technical field specifically is a semiconductor processing procedure sandblast protection tool.

Background

At present, Rapid Thermal Processing (Rapid Thermal Processing) has been applied to many semiconductor processes, such as Rapid Thermal Oxidation (Rapid Thermal Oxidation), Rapid Thermal chemical vapor deposition (Rapid Thermal cvd), Rapid Thermal Annealing (Rapid Thermal Annealing), etc., and thus it is known that Rapid Thermal Processing is very important for semiconductor processes. Wherein, the depo ring production process of the semiconductor process needs to be processed by a sand blasting process.

However, the prior art has the following disadvantages: the product is directly placed on a sand blasting workbench for sand blasting, the part without sand blasting is also easily blasted, the subsequent treatment is still needed, and the operation is inconvenient.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

Not enough to prior art, the utility model provides a semiconductor processing procedure sandblast protection tool has solved the product and has directly placed the sandblast on the sandblast workstation and use, and the position that need not the sandblast is also easily by the sandblast, still needs subsequent processing, the problem of the operation of not being convenient for.

(II) technical scheme

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a semiconductor processing procedure sandblast protection tool, includes base, arrangement groove, first solid fixed ring, the solid fixed ring of second, first fixed threaded rod, second fixed threaded rod and stop nut, be provided with the arrangement groove on the base, it has the product body to settle in the arrangement groove, the upper portion of base is provided with first fixed threaded rod, install first solid fixed ring on the first fixed threaded rod, the intermediate position department of base is provided with inner circle arrangement seat, the upper portion of inner circle arrangement seat is provided with second fixed threaded rod, install the solid fixed ring of second on the second fixed threaded rod, all install stop nut on first fixed threaded rod and the second fixed threaded rod.

Preferably, the first fixing ring is matched with the base, a first perforation is arranged at the position, corresponding to the first fixed threaded rod, of the first fixing ring, and the first perforation is matched with the first fixed threaded rod.

Preferably, first fixed threaded rod is provided with four, and first fixed threaded rod is distributed on the base in annular array, first fixed threaded rod and stop nut threaded connection.

Preferably, the second fixing ring is matched with the inner ring mounting seat, a second through hole is formed in the position, corresponding to the second fixing threaded rod, of the second fixing ring, and the second through hole is matched with the second fixing threaded rod.

Preferably, the number of the second fixed threaded rods is four, the second fixed threaded rods are distributed on the inner ring placing seat in an annular array, and the second fixed threaded rods are in threaded connection with the limiting nuts.

Preferably, the product body is matched with a placement groove arranged on the base, and the product body is directly placed in the placement groove.

(III) advantageous effects

The utility model provides a semiconductor processing procedure sandblast protection tool possesses following beneficial effect:

the utility model, through the base, the setting groove, the first fixing ring, the second fixing ring, the first fixed threaded rod, the second fixed threaded rod and the limit nut, directly lay the product body in the setting groove on the base when in use, then align the first perforation on the first fixing ring with the first fixed threaded rod, then lay the first fixing ring on the base, then fixedly connect the limit nut with the first fixed threaded rod, thereby fixing the first fixing ring, then align the second perforation on the second fixing ring with the second fixed threaded rod, then lay the second fixing ring on the inner ring setting seat, and then fixedly connect the limit nut with the second fixed threaded rod, thereby fixing the second fixing ring, and shield the part of the product body, which does not need sand blasting, by the first fixing ring and the second fixing ring, after that, the product is subjected to sand blasting, the product body can be taken down by repeating the above opposite assembly operation after the sand blasting treatment is finished, the sand blasting process can be directly and disposable, the protection jig is simple in structure, convenient to operate and use, high in practicability and convenient to popularize and use, the problem that the product is directly placed on a sand blasting workbench to be subjected to sand blasting, the part without sand blasting is also easily subjected to sand blasting, the follow-up treatment is still needed, and the operation is not convenient is solved.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the base of FIG. 1 according to the present invention;

FIG. 3 is a schematic view of the first retaining ring of FIG. 1 according to the present invention;

FIG. 4 is a schematic view of the second retaining ring of FIG. 1 according to the present invention;

FIG. 5 is a schematic view of the product protection of the present invention;

fig. 6 is a schematic diagram of the structure of the sand blasting end face of the product of the present invention.

The reference numbers in the figures are: 1. a base; 2. a placing groove; 3. a first retaining ring; 4. a second retaining ring; 5. a first fixed threaded rod; 6. a second fixed threaded rod; 7. a limit nut; 8. an inner ring placement seat; 9. a first perforation; 10. a second perforation; 11. and (4) a product body.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-6, an embodiment of the present invention is shown; a sand blasting protection jig for a semiconductor process comprises a base 1, a placement groove 2, a first fixing ring 3, a second fixing ring 4, a first fixed threaded rod 5, a second fixed threaded rod 6 and a limiting nut 7, wherein the placement groove 2 is arranged on the base 1, a product body 11 is arranged in the placement groove 2, the product body 11 is matched with the placement groove 2 arranged on the base 1, the product body 11 is directly arranged in the placement groove 2, the first fixed threaded rod 5 is arranged on the upper portion of the base 1, the first fixing ring 3 is arranged on the first fixed threaded rod 5, the first fixing ring 3 is matched with the base 1, a first through hole 9 is arranged at the position, corresponding to the first fixed threaded rod 5, of the first fixing ring 3, the first through hole 9 is matched with the first fixed threaded rod 5, the first fixed threaded rods 5 are four, and the first fixed threaded rods 5 are distributed on the base 1 in an annular array, first fixed threaded rod 5 and stop nut 7 threaded connection, the intermediate position department of base 1 is provided with inner circle seat 8, the upper portion of inner circle seat 8 is provided with second fixed threaded rod 6, install the solid fixed ring 4 of second on the second fixed threaded rod 6, all install stop nut 7 on first fixed threaded rod 5 and the second fixed threaded rod 6, the solid fixed ring 4 of second agrees with inner circle seat 8 mutually, the solid fixed ring 4 of second corresponds the position department of second fixed threaded rod 6 and is provided with second perforation 10, second perforation 10 agrees with mutually with second fixed threaded rod 6, second fixed threaded rod 6 is provided with four, and second fixed threaded rod 6 is annular array and distributes on inner circle seat 8, second fixed threaded rod 6 and stop nut 7 threaded connection.

The working principle is as follows: when in use, the product body 11 is directly placed into the placing groove 2 on the base 1, then the first through hole 9 on the first fixing ring 3 is aligned with the first fixing threaded rod 5, then the first fixing ring 3 is arranged on the base 1, and the limit nut 7 is fixedly connected to the first fixing threaded rod 5, so that the first fixing ring 3 is fixed, then, the second through hole 10 of the second fixing ring 4 is aligned with the second fixing threaded rod 6, then the second fixing ring 4 is arranged on the inner ring arranging seat 8, the limiting nut 7 is fixedly connected to the second fixing threaded rod 6, therefore, the second fixing ring 4 is fixed, the part, which does not need sand blasting, of the sand blasting surface of the product body 11 is shielded by the first fixing ring 3 and the second fixing ring 4, sand blasting is carried out on the product, and the product body 11 can be taken down by repeating the reverse assembling operation after the sand blasting treatment.

To sum up can, the utility model discloses a set up base 1, resettlement groove 2, first solid fixed ring 3, the solid fixed ring 4 of second, first fixed threaded rod 5, second fixed threaded rod 6 and stop nut 7, solved the product and directly placed the sandblast on the sandblast workstation and use, the position that need not the sandblast is also easily by the sandblast, still needs subsequent processing, the problem of the operation of being not convenient for.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a semiconductor processing procedure sandblast protection tool, includes base (1), resettlement groove (2), first solid fixed ring (3), the solid fixed ring of second (4), first fixed threaded rod (5), second fixed threaded rod (6) and stop nut (7), its characterized in that: be provided with arrangement groove (2) on base (1), it has product body (11) to settle in arrangement groove (2), the upper portion of base (1) is provided with first fixed threaded rod (5), install first solid fixed ring (3) on first fixed threaded rod (5), the intermediate position department of base (1) is provided with inner circle arrangement seat (8), the upper portion of inner circle arrangement seat (8) is provided with second fixed threaded rod (6), install solid fixed ring (4) of second on second fixed threaded rod (6), all install stop nut (7) on first fixed threaded rod (5) and the second fixed threaded rod (6).

2. The tool of claim 1, wherein the tool comprises: first solid fixed ring (3) agree with mutually with base (1), first solid fixed ring (3) correspond the position department of first fixed threaded rod (5) and are provided with first perforation (9), first perforation (9) agree with mutually with first fixed threaded rod (5).

3. The tool of claim 2, wherein the tool comprises: first fixed threaded rod (5) are provided with four, and first fixed threaded rod (5) are the annular array and distribute on base (1), first fixed threaded rod (5) and stop nut (7) threaded connection.

4. The tool of claim 1, wherein the tool comprises: the second fixing ring (4) is matched with the inner ring containing seat (8), a second through hole (10) is formed in the position, corresponding to the second fixed threaded rod (6), of the second fixing ring (4), and the second through hole (10) is matched with the second fixed threaded rod (6).

5. The tool of claim 4, wherein the tool comprises: the number of the second fixed threaded rods (6) is four, the second fixed threaded rods (6) are distributed on the inner ring containing seats (8) in an annular array mode, and the second fixed threaded rods (6) are in threaded connection with the limiting nuts (7).

6. The tool of claim 1, wherein the tool comprises: the product body (11) is matched with the placing groove (2) arranged on the base (1), and the product body (11) is directly placed in the placing groove (2).