CN213579856U - High-temperature-resistant optical fiber pressure sensor - Google Patents
High-temperature-resistant optical fiber pressure sensor Download PDFInfo
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- CN213579856U CN213579856U CN202022444831.1U CN202022444831U CN213579856U CN 213579856 U CN213579856 U CN 213579856U CN 202022444831 U CN202022444831 U CN 202022444831U CN 213579856 U CN213579856 U CN 213579856U
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Abstract
The utility model discloses a high temperature resistant optic fibre pressure sensor, including the encapsulation shell, its bottom is equipped with leads presses the oil tank. The opening at the bottom of the pressure guide oil cabin is sealed by a pressure transmission film. The top of the packaging shell is provided with a laser welding preformed groove. The top of the pressure guide oil tank is provided with a central opening, and the central opening is communicated with the laser welding preformed groove through a guide groove. And a sensor core body is arranged in the guide groove and comprises a pressure sensing chip and an optical fiber. The pressure sensing chip is parallel and level with the central opening of the pressure guiding oil tank, and the optical fiber of the sensor core body penetrates through the guide groove and then extends out of the laser welding reserved groove. The base covers the top of the sensor core. The optical fiber extending from the base is fixedly connected with the base through the glass solder filled in the glass solder groove. The base and the sensor core body are fixed and sealed in the guide groove through laser welding materials filled in the laser welding preformed groove. The utility model discloses optic fibre pressure sensor has high temperature resistant, anti-electromagnetic interference, can long-term work, easy encapsulation, advantage with low costs.
Description
Technical Field
The utility model relates to a high temperature resistant optic fibre pressure sensor that is used for hot dry rock, high temperature oil gas well's in pit reservoir normal position pressure measurement belongs to high temperature pressure measurement equipment technical field in the pit.
Background
The dry hot rock is a novel geothermal energy source, and has the characteristics of cleanness, reproducibility, high temperature, multiple purposes, wide distribution range and no restriction of seasons and climate on power generation. The key point of development of the dry hot rock is management of a dry hot rock reservoir, and the management needs to enable the reservoir to achieve the purpose of long-term heat extraction by monitoring parameters such as pressure, flow and the like on the basis of sufficient knowledge of the reservoir. From the above, it is important for a pressure sensor to be a core device for acquiring downhole pressure data.
The conventional pressure measurement is generally realized by adopting a conventional piezoelectric pressure sensor, the piezoelectric pressure sensor is an electronic sensor, but the electronic sensor has the defects of no high temperature resistance, no corrosion resistance, easy electromagnetic interference and the like, so that the problem that the piezoelectric pressure sensor is very poor in signal or even unavailable when being applied to the underground test of high-temperature oil and gas wells of petroleum and hot dry rocks is caused, and therefore, the piezoelectric pressure sensor cannot meet the requirement of monitoring the deep well with the temperature higher than 200 ℃ for a long time (the deep well can work for about 4 hours at most under the condition of using a vacuum bottle for packaging). Compared with a piezoelectric sensor, the optical fiber pressure sensor has the advantages of high temperature resistance, electromagnetic interference resistance, severe environment resistance, wide dynamic test range, small size and the like, and is very suitable for underground long-term pressure monitoring in the fields of high-temperature oil wells, dry hot rocks and the like. Meanwhile, with the continuous development of the MEMS technology, the optical fiber pressure sensor manufactured by the MEMS technology becomes a hot spot for current research and development due to its light weight, strong function, wide frequency band, high sensitivity, compatibility with the integrated circuit process, mass production, and the like. However, the existing optical fiber pressure sensor has problems that: for the optical fiber pressure sensor which can resist the temperature up to 250 ℃ and can work for a long time in the well, the manufacturing process is high in required precision and complex, so that the price is high, and the optical fiber pressure sensor cannot be popularized.
At present, China has found a lot of high-temperature dry-hot rock masses, the well temperature of the high-temperature dry-hot rock masses is usually about 200 ℃ or even higher, so that the problem that the optical fiber pressure sensor which has the advantages of high temperature resistance, electromagnetic interference resistance, long-term working, simple manufacturing process, easiness in manufacturing and low cost is urgently needed to be solved is designed in the extreme underground environment.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a high temperature resistant optic fibre pressure sensor, this high temperature resistant optic fibre pressure sensor have high temperature resistant, anti-electromagnetic interference, can work for a long time, easy encapsulation, advantage with low costs, applicable in hot dry rock, high temperature oil gas well reservoir normal position pressure measurement in the pit.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a high temperature resistant optical fiber pressure sensor is characterized in that: it includes cylindric encapsulation shell, wherein: the bottom of the packaging shell is provided with a pressure guide oil cabin filled with silicone oil; the bottom opening of the pressure guide oil tank is sealed by a pressure transfer film welded at the bottom of the packaging shell; the top of the packaging shell is provided with a laser welding preformed groove; the top of the pressure guide oil tank is provided with a central opening, and the central opening is communicated with the laser welding reserved groove through a guide groove; a sensor core body is arranged in the guide groove and comprises a pressure sensing chip and an optical fiber; the pressure sensing chip at the bottom of the sensor core body is flush with the central opening of the pressure guide oil tank, and the optical fiber of the sensor core body penetrates through the guide groove and then extends out of the laser welding reserved groove; the base arranged in the guide groove covers the top of the sensor core body; the optical fiber penetrating and extending out of the glass solder groove formed in the base is fixedly connected with the base through the glass solder filled in the glass solder groove, so that the base is fixed with the sensor core; the base and the sensor core body are fixed and sealed in the guide groove through laser welding materials filled in the laser welding preformed groove.
The utility model has the advantages that:
1. the utility model discloses high temperature resistant optical fiber pressure sensor makes it have high temperature resistant (250 ℃ and above, if 300 ℃ or higher) characteristics because of its packaging structure's special design, just the utility model discloses high temperature resistant optical fiber pressure sensor's seal structure has ensured measurement accuracy and stability, in addition, on the one hand, because of its pressure sensing chip that has adopted the MEMS technique, therefore has the advantage that pressure measurement accuracy is high, on the other hand, because of it has adopted optic fibre transmission signal, therefore still have anti-electromagnetic interference, can work in the pit for a long time under adverse circumstances in the pit advantage, and its easy encapsulation, with low costs.
2. The utility model discloses high temperature resistant optic fibre pressure sensor is applicable to the dry heat rock, high temperature oil gas well underground 250 ℃ and above, reservoir normal position pressure real-time measurement under the 60MPa environment, provides true and reliable pressure parameter for reservoir test, development under the high temperature deep well thermal environment, has important scientific meaning.
3. The utility model discloses high temperature resistant optical fiber pressure sensor's structural design has changed the predicament that can't break away from the laboratory, can be applied to open-air scene well, has the significance in open-air monitoring field.
Drawings
Fig. 1 is a schematic structural diagram of the high temperature resistant optical fiber pressure sensor of the present invention.
Detailed Description
As shown in fig. 1, the high temperature resistant optical fiber pressure sensor of the present invention includes a cylindrical package housing 20, wherein: the bottom of the packaging shell 20 is provided with a pressure-guiding oil tank 21 filled with silicone oil 100, the silicone oil 100 is automatically filled into the pressure-guiding oil tank 21 in a vacuum and high-temperature (such as 200 ℃ or even higher) environment, namely the silicone oil 100 is high-temperature-resistant silicone oil; the bottom opening 211 of the pressure guiding oil tank 21 is sealed by the pressure transmitting film 10 welded on the bottom of the packaging shell 20; the top of the packaging shell 20 is provided with a laser welding preformed groove 23; the top of the pressure guide oil tank 21 is provided with a central opening 212 which is coaxial with the central shaft of the packaging shell 20, and the central opening 212 is communicated with the laser welding preformed groove 23 through the guide groove 22; a sensor core body is arranged in the guide groove 22 and comprises a pressure sensing chip 30 and an optical fiber 40; the bottom surface of the pressure sensing chip 30 at the bottom of the sensor core is flush or approximately flush with the central opening 212 of the pressure guiding oil tank 21, and the optical fiber 40 of the sensor core penetrates through the guide groove 22 and then extends out of the packaging shell 20 from the laser welding preformed groove 23; the base 60 placed in the guide groove 22 covers the top of the sensor core from top to bottom; the optical fiber 40 which penetrates upwards from a glass solder groove 61 formed in the base 60 is fixedly connected with the base 60 through the glass solder 90 which is filled in the glass solder groove 61, so that the base 60 and the sensor core body are fixed; the base 60 and the sensor core together achieve the fixing and sealing in the guide groove 22 by the laser solder 80 filling the laser welding pre-groove 23.
In practical design, one end of the optical fiber 40 of the sensor core is connected to the pressure sensing chip 30 to realize the connection between the optical fiber 40 and the interference cavity 31 in the pressure sensing chip 30, and after the other end of the optical fiber 40 is sleeved with the cylindrical glass ferrule 50, the glass ferrule 50 is fixedly connected to the pressure sensing chip 30, wherein: the base 60 covers the top of the glass ferrule 50 from top to bottom, and the optical fiber 40 sequentially extends out of the package housing 20 from the through hole of the glass ferrule 50, the glass solder 90 in the glass solder groove 61 of the base 60, and the laser solder 80 in the laser welding preformed groove 23, that is, the tail of the optical fiber 40 is outside the package housing 20.
In practical design, the diameter of the through hole of the ferrule 50 is adapted to the outer diameter of the optical fiber 40, so that the ferrule 50 can serve the purpose of stably supporting the optical fiber 40, and the optical fiber 40 is always kept in an upright state.
As shown in fig. 1, the base 60 is composed of two cylindrical upper seats 601 and lower seats 602 with large top and small bottom, and the longitudinal section of the base 60 is in an inverted T shape, wherein: the bottom of the lower seat 602 is provided with an accommodating groove 62 for accommodating the upper portion of the glass ferrule 50, the longitudinal section of the glass solder groove 61 is in an inverted T shape, and the glass solder groove 61 is communicated with the accommodating groove 62.
As shown in fig. 1, the guide groove 22 is composed of an upper guide groove 221, a middle guide groove 222, and a lower guide groove 223 in a cylindrical shape, in which: the lower guide groove 223 is used for accommodating the lower part of the sensor core, and the upper guide groove 221 and the middle guide groove 222 are used for accommodating the rest part or the upper part of the sensor core and the base 60; the diameters of the upper guide groove 221, the middle guide groove 222, and the lower guide groove 223 become gradually smaller from top to bottom, i.e., in a direction from the top to the bottom of the package housing 20; the diameter of the lower guide groove 223 is adapted to the outer diameter of the glass ferrule 50, and the diameters of the upper guide groove 221 and the middle guide groove 222 are adapted to the outer diameters of the upper seat 601 and the lower seat 602 of the base 60, respectively.
In practical design, the laser welding preformed groove 23 is in an oblate cylindrical shape, and the cross-sectional area of the laser welding preformed groove 23 should be larger than that of the upper guide groove 221, so that the laser welding preformed groove 23 filled with the laser welding material 80 can seal the base 60 accommodated in the upper guide groove 221 and the middle guide groove 222.
As shown in fig. 1, the portion of the guide groove 22 connected to the laser welding preformed groove 23 is provided with an oblique chamfer 24 for guiding the sensor core and the base 60.
The pressure guiding oil tank 21 is generally designed into a flat cylinder shape, the top of the pressure guiding oil tank 21 is communicated with an oil filling port 213 on the side wall of the packaging shell 20 through a vertically upward conveying channel 210, and the oil filling port 213 is positioned higher than the pressure guiding oil tank 21, wherein: when the pressure-guiding oil tank 21 is filled with silicone oil from the oil filling port 213, the oil filling port 213 is blocked by the ball expansion plug 70.
As shown in fig. 1, the ball plunger 70 includes a hard stainless steel circular sleeve 71, and a steel ball 72 made of bearing steel is fitted into and exposed from the circular sleeve 71.
In practical implementation, the filling port 213 is preferably designed to have a contracted structure with a large outside and a small inside, i.e. a structure with a gradually reduced closing from the outside, as shown in fig. 1, so that the ball expansion plug 70 can be stably inserted into the filling port 213 for the purpose of effectively blocking the filling port 213.
In practical design, as shown in fig. 1, the outer circumference of the bottom of the package housing 20 is provided with a protection ring 110 for welding connection with protection equipment (e.g. a protection net for protecting against sharp objects or particle impact downhole).
The utility model discloses in, pass and press membrane 10 to adopt tantalum metal film piece, it is the diaphragm commonly used for leading to press, and common size has phi 18mm, phi 16mm, phi 12mm etc. is fit for high temperature environment in the pit.
The utility model discloses in, encapsulation shell 20 is the preparation of 316L material, has characteristics such as high temperature resistant, corrosion-resistant, and the 316L material is oil gas trade equipment common material of working in the pit.
The utility model discloses in, glass lock pin 50 is the glass materials preparation, and base 60 is the preparation of kovar alloy material, compares with 316L, and kovar alloy material more matches with glass materials's coefficient of thermal expansion.
In the present invention, the pressure sensing chip 30 is a pressure sensor structure based on a fabry-perot interference structure and a MEMS technology, and has an interference cavity 31 therein. When the pressure sensing chip 30 senses a pressure signal, the axial length of the interference cavity 31 becomes shorter, and interference fringes are generated, so that the purpose of pressure measurement is achieved by the demodulation instrument.
The optical fiber 40 is a polyimide coated, carbon coated or metal coated high temperature resistant optical fiber.
The utility model discloses in, glass solder 90 is used for under electromagnetic induction heating's effect, as an organic whole with sensor core and base 60 fixed connection. In practical implementation, the glass solder should be selected in combination with the temperature resistance requirement of the optical fiber pressure sensor of the present invention.
The utility model discloses in, laser welding material 80 is used for fixing and sealing base 60 and sensor core in guide slot 22 to and the afterbody of sealed and fixed optic fibre 40, realize the utility model discloses the whole bottom of optic fibre pressure sensor is sealed.
Above-mentioned the utility model discloses high temperature resistant optical fiber pressure sensor's packaging technology or manufacturing process includes the step:
1) manufacturing a sensor core body: grinding one end of the glass ferrule 50 by using an optical fiber grinder (such as RBTX-550S), penetrating the optical fiber 40 through a through hole of the glass ferrule 50, using the end of the optical fiber 40 extending from the ground end of the glass ferrule 50 as a connecting end, grinding the end by using the optical fiber grinder (such as RBTX-550S), connecting the connecting end of the optical fiber 40 with the interference cavity 31 of the pressure sensing chip 30 by using a stable carbon dioxide laser (such as Synrad J482W) or an ultraviolet glue (such as OptoCast 3410), connecting the optical fiber 40 and the pressure sensing chip 30 into a whole, welding the ground end of the glass ferrule 50 with the pressure sensing chip 30 into a whole, and using an electron microscope of 180 times or more to inspect the manufacturing quality of the core body in the actual manufacturing process;
2) fixing the sensor core with the base 60, forming a sensor module: inserting the glass ferrule 50 of the sensor core into the accommodating groove 62 of the base 60, then enabling the glass solder groove 61 to face upwards, and heating the glass solder 90 filled in the glass solder groove 61 by using an induction heating furnace (electromagnetic induction heating method) so as to fix the base 60 and the sensor core by using the glass solder 90;
3) sealing the sensor module: the sensor module is inserted into the guide groove 22 from the laser welding reserve groove 23 in the direction from the top to the bottom (as in fig. 1), wherein: the pressure sensing chip 30 is flush or approximately flush with the central opening 212 of the pressure guiding oil tank 21, the tail part of the optical fiber 40 extends out of the packaging shell 20 from the laser welding preformed groove 23 upwards, then the laser welding preformed groove 23 faces upwards, and the laser welding preformed groove 23 is filled with the laser welding flux 80 to realize the fixation and sealing of the sensor module in the guide groove 22, namely the sealing of the sensor module in the packaging shell 20;
4) installing a pressure transmission film 10 to form a sensor semi-finished product: as shown in fig. 1, the pressure transfer film 10 is welded to the bottom of the package housing 20 to seal the bottom opening 211 of the pressure-guiding oil tank 21;
5) filling oil and sealing pressure guide oil tank 21: putting the semi-finished sensor into silicone oil (dimethyl silicone oil or other silicone oil with high boiling point, the thermal expansion coefficient of the silicone oil should be consistent with 316L material as much as possible) at room temperature (preferably 20-25 ℃), putting the semi-finished sensor into a vacuum oven (such as DZF6020 type), namely, under the vacuum high-temperature environment, the silicon oil and the semi-finished product of the sensor are heated to a set high-temperature value (such as 250 ℃ or even higher, 133Pa) together to finish the automatic filling of the silicon oil, at the moment, the silicon oil becomes the high-temperature resistant silicon oil, specifically, because the external pressure of the semi-finished sensor is small, air escapes from the oil filling port 213, silicone oil is filled into the pressure guiding oil tank 21 to fill the air space, thereby completing the automatic filling of the silicone oil, then taking out the semi-finished sensor product filled with the silicone oil of 100, before the silicone oil and the sensor semi-finished product are cooled, the oil filling port 213 is filled with the ball expansion plug 70 to seal the pressure guide oil tank 21;
6) and finishing the packaging of the high-temperature-resistant optical fiber pressure sensor.
In the actual packaging process, the tail part of the optical fiber 40 can be connected with relevant equipment to test the performance of the sensor in real time, so that the packaging precision and reliability are ensured.
During the use, the afterbody that stretches out encapsulation shell 20 with optic fibre 40 is connected with the relevant monitoring facilities who is used for monitoring pressure data, will through relevant equipment the utility model discloses optic fibre pressure sensor is in order to pass the below of pressure membrane 10 downwards to put appointed monitoring position in the pit. In other words, the optical fiber pressure sensor of the present invention shown in fig. 1 is used conventionally.
The utility model discloses optical fiber pressure sensor's working process and principle do:
the external pressure acts on the pressure transmission film 10, the pressure transmission film 10 senses the pressure to deform, so that the volume of the silicone oil 100 in the pressure guide oil tank 21 changes, then, the extruded high-temperature resistant silicone oil 100 transmits a pressure signal to the pressure sensing chip 30, after the pressure sensing chip 30 senses the pressure signal, the axial length of an interference cavity 31 in the pressure sensing chip is shortened, interference fringes are generated, the interference fringes modulate an optical signal incident on the interference cavity via the optical fiber 40, and after the modulated optical signal is transmitted back to relevant monitoring equipment provided with a demodulation instrument, the demodulation instrument calculates a corresponding pressure value, so that the pressure measurement is completed.
The utility model has the advantages that:
1. the utility model discloses high temperature resistant optical fiber pressure sensor makes it have high temperature resistant (250 ℃ and above, if 300 ℃ or higher) characteristics because of its packaging structure's special design, just the utility model discloses high temperature resistant optical fiber pressure sensor's seal structure has ensured measurement accuracy and stability, in addition, on the one hand, because of its pressure sensing chip that has adopted the MEMS technique, therefore has the advantage that pressure measurement accuracy is high, on the other hand, because of it has adopted optic fibre transmission signal, therefore still have anti-electromagnetic interference, can work in the pit for a long time under adverse circumstances in the pit advantage, and its easy encapsulation, with low costs.
2. The utility model discloses high temperature resistant optic fibre pressure sensor is applicable to the dry heat rock, high temperature oil gas well underground 250 ℃ and above, reservoir normal position pressure real-time measurement under the 60MPa environment, provides true and reliable pressure parameter for reservoir test, development under the high temperature deep well thermal environment, has important scientific meaning.
3. The utility model discloses high temperature resistant optical fiber pressure sensor's structural design has changed the predicament that can't break away from the laboratory, can be applied to open-air scene well, has the significance in open-air monitoring field.
4. The utility model discloses the encapsulation technology that high temperature resistant optic fibre pressure sensor adopted is succinct, easy to carry out, and the encapsulation process does not receive the influence of the personnel's of making personal work experience, has greatly promoted the yield, is suitable for the popularization.
The above description is the preferred embodiment of the present invention and the technical principle applied by the preferred embodiment, and for those skilled in the art, without departing from the spirit and scope of the present invention, any obvious changes based on the equivalent transformation, simple replacement, etc. of the technical solution of the present invention all belong to the protection scope of the present invention.
Claims (10)
1. A high temperature resistant optical fiber pressure sensor is characterized in that: it includes cylindric encapsulation shell, wherein: the bottom of the packaging shell is provided with a pressure guide oil cabin filled with silicone oil; the bottom opening of the pressure guide oil tank is sealed by a pressure transfer film welded at the bottom of the packaging shell; the top of the packaging shell is provided with a laser welding preformed groove; the top of the pressure guide oil tank is provided with a central opening, and the central opening is communicated with the laser welding reserved groove through a guide groove; a sensor core body is arranged in the guide groove and comprises a pressure sensing chip and an optical fiber; the pressure sensing chip at the bottom of the sensor core body is flush with the central opening of the pressure guide oil tank, and the optical fiber of the sensor core body penetrates through the guide groove and then extends out of the laser welding reserved groove; the base arranged in the guide groove covers the top of the sensor core body; the optical fiber penetrating and extending out of the glass solder groove formed in the base is fixedly connected with the base through the glass solder filled in the glass solder groove, so that the base is fixed with the sensor core; the base and the sensor core body are fixed and sealed in the guide groove through laser welding materials filled in the laser welding preformed groove.
2. The high temperature resistant fiber optic pressure sensor of claim 1, wherein:
one end of the optical fiber of the sensor core body is connected with the pressure sensing chip to realize the connection of the optical fiber and an interference cavity in the pressure sensing chip, and after the other end of the optical fiber is sleeved with a cylindrical glass ferrule, the glass ferrule is fixedly connected with the pressure sensing chip, wherein: the base covers the top of the glass ferrule, and the optical fiber extends out of the packaging shell from the through hole of the glass ferrule, the glass solder in the glass solder groove of the base and the laser solder in the laser welding preformed groove in sequence.
3. The high temperature resistant fiber optic pressure sensor of claim 2, wherein:
the diameter of the through hole of the glass ferrule is matched with the outer diameter of the optical fiber.
4. The high temperature resistant fiber optic pressure sensor of claim 2, wherein:
the base comprises two cylindric seat of honour and lower seats big-end-up, the longitudinal section of base is the type of falling T, wherein: the bottom of the lower seat is provided with a containing groove for containing the glass insertion core, the longitudinal section of the glass solder groove is in an inverted T shape, and the glass solder groove is communicated with the containing groove.
5. The high temperature resistant fiber optic pressure sensor of claim 4, wherein:
the guide slot comprises cylindric upper channel, well guide slot and lower guide slot, wherein: the lower guide groove is used for accommodating the lower part of the sensor core body, and the upper guide groove and the middle guide groove are used for accommodating the rest part of the sensor core body and the base; the diameters of the upper guide groove, the middle guide groove and the lower guide groove are gradually reduced from top to bottom; the diameter of the lower guide groove is matched with the outer diameter of the glass insertion core, and the diameters of the upper guide groove and the middle guide groove are respectively matched with the outer diameters of the upper seat and the lower seat of the base.
6. The high temperature resistant fiber optic pressure sensor of claim 5, wherein:
the cross section area of the laser welding preformed groove is larger than that of the upper guide groove.
7. The high temperature resistant fiber optic pressure sensor of claim 6, wherein:
and the part of the guide groove connected with the laser welding reserved groove is provided with an oblique guide angle.
8. The high temperature resistant fiber optic pressure sensor of claim 1, wherein:
lead the top of pressing the oil tank through vertical ascending transfer passage with be located irritate the oil mouth intercommunication on the encapsulation shell lateral wall, irritate the oil mouth and be higher than lead and press the oil tank, wherein: and after the pressure guiding oil cabin is filled with the silicone oil from the oil filling port, the oil filling port is blocked by the ball expansion plug.
9. The high temperature resistant fiber optic pressure sensor of claim 8, wherein:
the ball expansion plug comprises a circular sleeve, and a steel ball is arranged in the circular sleeve and is exposed.
10. The high temperature resistant fiber optic pressure sensor of claim 1, wherein:
and a protective ring used for being connected with protective equipment in a welding manner is arranged on the outer circumference of the bottom of the packaging shell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022444831.1U CN213579856U (en) | 2020-10-29 | 2020-10-29 | High-temperature-resistant optical fiber pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022444831.1U CN213579856U (en) | 2020-10-29 | 2020-10-29 | High-temperature-resistant optical fiber pressure sensor |
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| Publication Number | Publication Date |
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| CN213579856U true CN213579856U (en) | 2021-06-29 |
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| CN202022444831.1U Expired - Fee Related CN213579856U (en) | 2020-10-29 | 2020-10-29 | High-temperature-resistant optical fiber pressure sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112345153A (en) * | 2020-10-29 | 2021-02-09 | 中国地质调查局水文地质环境地质调查中心 | High-temperature-resistant optical fiber pressure sensor and packaging process thereof |
| CN115077588A (en) * | 2022-07-23 | 2022-09-20 | 北京浦丹光电股份有限公司 | Sealing plug for optical fiber sensing, tube shell, integrated photoelectric device and assembling method |
-
2020
- 2020-10-29 CN CN202022444831.1U patent/CN213579856U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112345153A (en) * | 2020-10-29 | 2021-02-09 | 中国地质调查局水文地质环境地质调查中心 | High-temperature-resistant optical fiber pressure sensor and packaging process thereof |
| CN115077588A (en) * | 2022-07-23 | 2022-09-20 | 北京浦丹光电股份有限公司 | Sealing plug for optical fiber sensing, tube shell, integrated photoelectric device and assembling method |
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