CN207163613U - A kind of vertical diaphragm optical fiber pressure sensor device - Google Patents
A kind of vertical diaphragm optical fiber pressure sensor device Download PDFInfo
- Publication number
- CN207163613U CN207163613U CN201721088719.0U CN201721088719U CN207163613U CN 207163613 U CN207163613 U CN 207163613U CN 201721088719 U CN201721088719 U CN 201721088719U CN 207163613 U CN207163613 U CN 207163613U
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- optical fiber
- pressure
- diaphragm
- sensor device
- cavity
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Abstract
The utility model provides a kind of vertical diaphragm optical fiber pressure sensor device, a kind of vertical diaphragm optical fiber pressure sensor device, including sensing head, fibre optic compression sensor and pressure-sensitive diaphragm, the sensing head includes first connecting portion and cavity, the cavity has an opening, the fibre optic compression sensor is fixed on pressure-sensitive diaphragm, and the pressure-sensitive diaphragm sealing is fixed on the opening, so that the inside cavity forms closing space；The one side that fibre optic compression sensor is fixed with pressure-sensitive diaphragm is in the cavity.The beneficial effects of the utility model are：Vertical mounting structure is used as pressure-sensitive diaphragm, pressure-sensitive diaphragm using square vertical quartz piece, diaphragm is easy for installation, from bending optical fiber, while can improve the measurement accuracy of fibre optic compression sensor so that the advantages that life-span is lasting.
Description
Technical field
It the utility model is related to a kind of fiber pressure sensing device, more particularly to a kind of vertical diaphragm optical fiber pressure sensing dress
Put.
Background technology
The air pressure detection precision requirement of aerospace field improves all the more with high temperature resistant requirement in recent years, intelligent oil well
Construction be also increasingly taken seriously.The sensors such as optical fiber pressure, temperature, strain have for Aero-Space and oil well detection
Very big application prospect.Fibre optical sensor has high sensitivity, and small volume, electrical insulating property is good, high temperature resistant, and anti-electromagnetism is done
Disturb, bandwidth, the advantages that uncharged full photosensitiveness is popped one's head in can be achieved.In aerospace field, air-tightness requires high, and temperature
It is very high, in the measurement of oil well and need to bear the adverse circumstances such as high temperature, high pressure, corrosion.Traditional electronics foil gauge can not be grown
Time works in above-mentioned condition.Fibre optical sensor is increasingly becoming the selection of high-sensitivity measurement under adverse circumstances.
From in the 1970s, people have just done many researchs to fibre optical sensor.Optical fibre gyro is gradually formed, during light
The correlation techniques such as domain reflectometer, fiber grating, fibre optic hydrophone, all -fiber distributed system.In terms of temperature detection, optical fiber light
Grid most application potential.In the field such as strain and pressure, fiber F-P cavity shows huge application prospect.It is based on now
The manufacture craft of the pressure sensor of F-P strain gauges, have based on the MAMS methods made and in optical fiber direct etching micro-groove
The methods of welding diaphragm.But MAMS can not ensure good air-tightness and complicated；Optical fiber etching micro-groove welding diaphragm side
Formula operating difficulties, structural robustness have much room for improvement with sensitivity.
Utility model content
In view of the above-mentioned problems, the utility model aims to provide a kind of vertical diaphragm optical fiber pressure sensor device, using pros
Shape vertical quartz piece as pressure-sensitive diaphragm, the fiber pressure sensing device have it is easy for installation, from bend optical fiber so that the life-span
The advantages that lasting；Using optical fiber F-P sensor, pressure is changed into strain, measurement is more accurate and substantially reduces operation difficulty.
To achieve these goals, the utility model is realized by following measures：
A kind of vertical diaphragm optical fiber pressure sensor device, including sensing head, fibre optic compression sensor and pressure-sensitive diaphragm, it is special
Sign is that the sensing head includes first connecting portion and cavity, and the cavity has an opening, the fibre optic compression sensor
It is fixed on pressure-sensitive diaphragm, the pressure-sensitive diaphragm sealing is fixed on the opening, so that the inside cavity forms envelope
Close space；The one side that fibre optic compression sensor is fixed with pressure-sensitive diaphragm is in the cavity.
Further, the first connecting portion and the diameter parallel of cavity, the side wall for being opened in cavity, from
And make it that pressure-sensitive diaphragm is parallel with chamber axis.
Further, the fibre optic compression sensor is optical fiber F-P sensor, and the optical fiber F-P sensor includes
Relative the first optical fiber and the second optical fiber connect, and the enamel amber chamber formed in joint, first optical fiber and the second optical fiber lead to
Cross high temperature strain gage adhesive to be fixed on the pressure-sensitive diaphragm, the free end of second optical fiber passes through first through hole and signal transacting end
Connection, the first through hole is opened in first connecting portion, and axially penetrates through the inside cavity along first connecting portion.
Further, the pressure-sensitive diaphragm is quartz plate.
Further, the enamel amber chamber is arranged at the center of pressure-sensitive diaphragm.
Further, first optical fiber is identical with the second fiber optic materials；The length of first optical fiber is L1, the second light
Fine length is L2, the L1 ＜ L2.
Further, the high-temp strain glue is in distance of the affixed points of the first optical fiber and the second optical fiber away from enamel amber chamber
0.45-0.55mm。
Further, fiber pressure sensing device also includes the adapter being connected with the sensing head, and the adapter is set
There is the joint for being socketed the first connecting portion, the junction of the joint and the cavity forms closed containing cavity.
Further, the first connecting portion includes the first screw thread；First screw thread is used for being opened in the joint
The internal thread matching connection of inwall.
Further, the adapter is additionally provided with the second connecting portion being connected with the pressure output of unit under test and connection
Closed containing cavity and the second through hole of second connecting portion outer face.
Further, the sensing head is additionally provided with first projection in the first threaded exterior end face that is arranged on；The adapter is also
It is raised provided with second be arranged between second connecting portion and joint；For facilitating the dismounting of sensing head and adapter.
" first " described in above-mentioned the utility model, " second " do not represent specific quantity and order, are only used for name
The differentiation of title.In description of the present utility model, unless otherwise indicated, " multiple " are meant that two or more.
The beneficial effects of the utility model are：The utility model provides a kind of vertical diaphragm optical fiber pressure sensing dress
Put, using quartz plate as compression film, avoid directly utilizing enamel amber chamber to make miniature film chip pressure sensor, can be effective
Reduce temperature to directly affect enamel amber chamber, improve measurement accuracy；In addition, (i.e. quartz plate is parallel for the vertical installation of quartz plate
It is axially mounted in cavity) so that optical fiber when mounted can be against bending, so that sensor life-time is longer；Quartzy chip size
It can need be adjusted according to actual meter, quartz plate each size easy processing in practice.
Brief description of the drawings
Fig. 1 is the cross section structure diagram of the vertical diaphragm optical fiber pressure sensor device of the utility model embodiment；
Fig. 2 is the axle side structure signal of the sensing head of the vertical diaphragm optical fiber pressure sensor device of the utility model embodiment
Figure；
Fig. 3 is the axle side structure signal of the adapter of the vertical diaphragm optical fiber pressure sensor device of the utility model embodiment
Figure；
Fig. 4 is that the optical fiber F-P sensor of the vertical diaphragm optical fiber pressure sensor device of the utility model embodiment is fixed on
The structural representation of quartz plate；
Description of reference numerals：
1. sensing head, 11. cavitys, 111. first screw threads, 12. first through hole, 13. first is raised, 14. openings, and 15. first
Connecting portion, 2. quartz plates, 3. optical fiber F-P sensors, 31. first optical fiber, 32. enamel amber chambers, 33. second optical fiber, 4. adapters,
41. joint, 411. internal threads, 42. second connecting portions, 422. second screw threads, 43. second through holes, 44. second is raised, 45. cylindricalitys
Chamber, 5. high-temp strain glue, 7. (FBG) demodulators.
Embodiment
In description of the present utility model, it is to be understood that term " on ", " under ", "front", "rear", "left", "right",
" hard straight ", " level ", " orientation or position relationship of the instruction such as " center ", " top ", " bottom ", " top ", " root ", " interior ", " outer "
Based on orientation shown in the drawings or position relationship, to be for only for ease of the utility model and simplifying description, be not instruction or hint
Signified device or element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to this
The limitation of utility model.
, it is necessary to which explanation, unless otherwise clearly defined and limited, term " are pacified in description of the present utility model
Dress ", " connection ", " connected ", " assembling ", " fixation " should be interpreted broadly, for example, it may be being fixedly connected or dismantling
Connection；Can be mechanical connection or electrical connection；Can be joined directly together or by the indirect phase of intermediary
Even, can be the connection of two element internals.For the ordinary skill in the art, can be understood with concrete condition above-mentioned
Term is in concrete meaning of the present utility model.
For the purpose of this utility model, technical scheme and advantage is more clearly understood, below in conjunction with accompanying drawing 1-4 and specifically
Embodiment, the utility model is described in further detail.
As Figure 1-3, a kind of vertical diaphragm optical fiber pressure sensor device, including sensing head 1, fibre optic compression sensor and
Pressure-sensitive diaphragm, the sensing head 1 include first connecting portion 15 and cavity 11, and the first connecting portion 15 and cavity 11 can be independent
Link together and (if the first connecting portion 15 and cavity 11 are metal, can be welded together after processing.), also can also it make
For a part by one-step machine-shaping.The cavity 15 has an opening 14, and the fibre optic compression sensor is fixed on pressure
On power diaphragm, the pressure-sensitive diaphragm is fixed at the opening 14 by pressure seal glue, so that inside the cavity 11
Form closing space；The one side that fibre optic compression sensor is fixed with pressure-sensitive diaphragm is in the cavity 11, makes the optical fiber
Pressure sensor is arranged in the cavity 11 of sensing head 1；The diameter parallel of the first connecting portion and cavity, it is described to open
Located at a side wall of cavity, so that pressure-sensitive diaphragm is parallel with chamber axis, i.e., pressure-sensitive diaphragm is perpendicular to first connecting portion
End face；Selectable as another kind, the pressure-sensitive diaphragm is parallel to be installed with cavity end face, and is the shortcomings that the program, is
Ensure that the enamel amber chamber side wall of F-P sensor is parallel with pressure-sensitive diaphragm, be connected to the optical fiber of the F-P sensor tail end in cabling
When need to have very big bending, easily cause the damage of optical fiber, and the scheme of the vertical installation of pressure-sensitive diaphragm is due to shaft axis of optic fibre and pressure
Power diaphragm is parallel, service life and the sensitivity of pressure sensor can be improved, in addition, at cavity end in order to avoid bending optical fiber
In the scheme of face installation pressure-sensitive diaphragm, the size of pressure-sensitive diaphragm is limited by first connecting portion, and for the side of vertical installation
For case, limitation is then smaller.
As preferable, as shown in figure 4, the fibre optic compression sensor is optical fiber F-P sensor 3, the optical fiber F-P
Sensor 3 includes relative the first optical fiber 31 and the second optical fiber 33 connect, and the enamel amber chamber 32 formed in joint, and described the
One optical fiber 31 and the second optical fiber 33 are fixed on pressure-sensitive diaphragm by high-temp strain glue 5；Wear the free end of second optical fiber 33
Cross first through hole 12 to be connected with the (FBG) demodulator 7 at signal transacting end, the first through hole 12 is axially connected along first connecting portion by first
Socket part 15 is extended through inside the cavity 1.As shown in figure 4, when pressure-sensitive diaphragm is applied with pressure, causes pressure-sensitive diaphragm to produce and disturb
Degree, that is, produce stress, is pasted on to be pressurized and touches the generation strain of enamel amber chamber 32 of piece, causes the length of enamel amber chamber 32 to change, cause
The phase for measuring 32 demodulated instrument 7 of enamel amber chamber changes, and is become by the finally anti-pressure that pushes away of the phase place change of (FBG) demodulator 7
Change.
As preferable, the pressure-sensitive diaphragm is quartz plate；Using quartz plate 2 as pressure-sensitive diaphragm, temperature pair can be reduced
The influence of sensor；In the present embodiment, quartz plate 2 is the quartz plate 2 of square, and quartz plate 2 is square, corresponding chamber
The opening of body 11 14 is square, after putting quartz plate 2 cavity 14 of square openings 14 into, by pressure seal glue by quartz plate
It is completely fixed, and confined space is formed in container, is easy to protect optical fiber F-P sensor 3, prevents the tested gas of complex working condition
The influence of body or liquid to the sensitivity of optical fiber F-P sensor 3.
As preferable, as shown in Figure 4, it is generally the case that square quartz plate 2 strains maximum in center, is
More accurately the pressure of detection pressure-sensitive diaphragm, the enamel amber chamber 32 are arranged at the center of pressure-sensitive diaphragm.Further, institute
Stating the size of square quartz piece can be selected according to the pressure limit of practically necessary measurement.
As preferable, as shown in figure 4, first optical fiber 31 is identical with the material of the second optical fiber 33；First optical fiber
31 length is L1, and the length of the second optical fiber 33 is L2, and the L1 ＜ L2, first optical fiber 31 is completely disposed under quartz plate 2
Surface, second optical fiber 33 are signal transmssion line, and after second optical fiber 33 is fixed by high-temperature strain gage adhesive, free end passes through
(FBG) demodulator 7 is connected after first through hole 12.
As preferable, in order to prevent influence of the melting process of high-temp strain glue 5 to transducer sensitivity, the high temperature should
It is L, L=0.45-0.55mm, such as Fig. 4 to become glue 5 in distance of the affixed points of the first optical fiber 31 and the second optical fiber 33 away from enamel amber chamber
It is shown.
As preferable, as Figure 1-3, in order to protect the quartz plate 2 and optical fiber F-P sensor that are fixed on sensing head 1
3, and facilitate the measurement of pressure sensor to install, the pressure sensor also includes the adapter being connected with the sensing head 1
4, the adapter 4 is provided with the joint 41 of socket first connecting portion 15；Specifically, the joint 41 is configured to hollow connection
Set, the adapter sleeve inwall open up internal thread 411, and the internal thread rear portion is formed with cylinder chamber 45；The first connecting portion 15
Including the first screw thread 111, first screw thread 111 is external screw thread, for the internal thread 411 with being opened in the inwall of joint 41
Matching connection；After first screw thread 111 of the sensing head 1 is connected with the internal thread 411 of adapter 4, the cavity 11 is in institute
State in cylinder chamber 45, also cause the junction of joint 41 and the cavity to form closed containing cavity.
As preferable, as shown in Figure 1,3, the adapter 4 is additionally provided with the second connecting portion 42 being connected with unit under test,
And connection cylinder chamber 45 and the second through hole 43 of the outer face of second connecting portion 42, specifically, the unit under test is surveyed to be required
The pressure source of amount, the second connecting portion 42 are used for the pressure output for connecting unit under test, in the present embodiment, the first connection
Portion 42 is connected with unit under test by the second screw thread 422；Tested quantity of fluid or gas enter cylinder chamber 45 by the second through hole 43
In, to quartz plate 2 produce pressure, at the same time, be fixed on quartz plate lower surface optical fiber F-P sensor 3 enamel amber chamber 32 because
By pulling force, make chamber length elongated, the phase output of enamel amber chamber 32 is measured by adjuster 7 and actual pressure value is substantially proportional to
And the linearity is good.
As preferable, as shown in Figure 2,3, the sensing head 1, which is additionally provided with, is arranged on the first of the outer face of the first screw thread 111
Projection 13；The adapter 4 is additionally provided with the second projection 44 being arranged between second connecting portion 42 and joint 41；Passed for convenient
Sense first 1 and the dismounting of adapter 4, in the present embodiment, the profile of the first projection 14 and the second projection 44 is regular hexagon.
Finally it should be noted that：Embodiment described above only expresses several embodiments of the present utility model, and it is described
It is more specific and detailed, but therefore can not be interpreted as the limitation to utility model patent scope.It should be pointed out that for
For one of ordinary skill in the art, without departing from the concept of the premise utility, can also make it is some deformation and
Improve, these belong to the scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be with appended right
It is required that it is defined.
Claims (10)
1. a kind of vertical diaphragm optical fiber pressure sensor device, including sensing head, fibre optic compression sensor and pressure-sensitive diaphragm, its feature
It is, the sensing head includes first connecting portion and cavity, and the cavity has an opening, and the fibre optic compression sensor is consolidated
Due on pressure-sensitive diaphragm, the pressure-sensitive diaphragm sealing is fixed on the opening, so that the inside cavity forms closing
Space；The one side that fibre optic compression sensor is fixed with pressure-sensitive diaphragm is in the cavity.
2. vertical diaphragm optical fiber pressure sensor device according to claim 1, it is characterised in that the first connecting portion with
The diameter parallel of cavity, the side wall for being opened in cavity, so that pressure-sensitive diaphragm is parallel with chamber axis.
3. vertical diaphragm optical fiber pressure sensor device according to claim 2, it is characterised in that the fiber-optic pressure sensor
Device is optical fiber F-P sensor, and the optical fiber F-P sensor includes relative the first optical fiber and the second optical fiber connect, Yi Ji
The enamel amber chamber that joint is formed, first optical fiber and the second optical fiber are fixed on the pressure-sensitive diaphragm by high-temp strain glue,
The free end of second optical fiber is connected through first through hole with signal transacting end, and the first through hole is opened in first connecting portion
It is interior, and axially penetrate through the inside cavity along first connecting portion.
A kind of 4. vertical diaphragm optical fiber pressure sensor device according to claim 1, it is characterised in that the pressure-sensitive diaphragm
For quartz plate.
A kind of 5. vertical diaphragm optical fiber pressure sensor device according to claim 3, it is characterised in that first optical fiber
It is identical with the second fiber optic materials；The length of first optical fiber is L1, and the length of the second optical fiber is L2, the L1 ＜ L2.
A kind of 6. vertical diaphragm optical fiber pressure sensor device according to claim 5, it is characterised in that the high-temp strain
Glue is 0.45-0.55mm in distance of the affixed points of the first optical fiber and the second optical fiber away from enamel amber chamber.
A kind of 7. vertical diaphragm optical fiber pressure sensor device according to any one of claim 1-6, it is characterised in that light
Fine pressure sensor device also includes the adapter being connected with the sensing head, and the adapter, which is provided with, to be used to be socketed first company
The joint of socket part, the junction of the joint and the cavity form closed containing cavity.
A kind of 8. vertical diaphragm optical fiber pressure sensor device according to claim 7, it is characterised in that first connection
Portion includes the first screw thread；First screw thread is used to match connection with being opened in the internal thread of the inner nosepiece wall.
9. a kind of vertical diaphragm optical fiber pressure sensor device according to claim 8, it is characterised in that the adapter is also
The second connecting portion and connection closed containing cavity that are connected provided with the pressure output with unit under test and second connecting portion outer face
Second through hole.
A kind of 10. vertical diaphragm optical fiber pressure sensor device according to claim 8, it is characterised in that the sensing head
Be additionally provided with the first threaded exterior end face that is arranged on first is raised；The adapter be additionally provided be arranged on second connecting portion and joint it
Between it is second raised；For facilitating the dismounting of sensing head and adapter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721088719.0U CN207163613U (en) | 2017-08-29 | 2017-08-29 | A kind of vertical diaphragm optical fiber pressure sensor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721088719.0U CN207163613U (en) | 2017-08-29 | 2017-08-29 | A kind of vertical diaphragm optical fiber pressure sensor device |
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| Publication Number | Publication Date |
|---|---|
| CN207163613U true CN207163613U (en) | 2018-03-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721088719.0U Expired - Fee Related CN207163613U (en) | 2017-08-29 | 2017-08-29 | A kind of vertical diaphragm optical fiber pressure sensor device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110146203A (en) * | 2018-12-11 | 2019-08-20 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of encapsulating structure and packaging method of fibre optic compression sensor resistant to high temperature |
| CN112798289A (en) * | 2020-12-21 | 2021-05-14 | 中国船舶重工集团公司第七一一研究所 | Sensor for testing in-cylinder pressure of internal combustion engine and manufacturing method thereof |
| CN114152384A (en) * | 2021-12-13 | 2022-03-08 | 中国核动力研究设计院 | Nuclear power plant ambient pressure measurement sensor based on optical fiber Fabry-Perot |
| CN115183685A (en) * | 2022-07-23 | 2022-10-14 | 内江师范学院 | Optical fiber Fabry-Perot displacement sensor |
| CN115252964A (en) * | 2022-09-01 | 2022-11-01 | 中国科学院大学深圳医院(光明) | Dynamic monitoring sensor for infusion leakage |
-
2017
- 2017-08-29 CN CN201721088719.0U patent/CN207163613U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110146203A (en) * | 2018-12-11 | 2019-08-20 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of encapsulating structure and packaging method of fibre optic compression sensor resistant to high temperature |
| CN112798289A (en) * | 2020-12-21 | 2021-05-14 | 中国船舶重工集团公司第七一一研究所 | Sensor for testing in-cylinder pressure of internal combustion engine and manufacturing method thereof |
| CN112798289B (en) * | 2020-12-21 | 2024-02-09 | 中国船舶集团有限公司第七一一研究所 | Sensor for testing in-cylinder pressure of internal combustion engine and manufacturing method thereof |
| CN114152384A (en) * | 2021-12-13 | 2022-03-08 | 中国核动力研究设计院 | Nuclear power plant ambient pressure measurement sensor based on optical fiber Fabry-Perot |
| CN115183685A (en) * | 2022-07-23 | 2022-10-14 | 内江师范学院 | Optical fiber Fabry-Perot displacement sensor |
| CN115183685B (en) * | 2022-07-23 | 2023-09-19 | 内江师范学院 | Optical fiber Fabry-Perot displacement sensor |
| CN115252964A (en) * | 2022-09-01 | 2022-11-01 | 中国科学院大学深圳医院(光明) | Dynamic monitoring sensor for infusion leakage |
| CN115252964B (en) * | 2022-09-01 | 2023-06-16 | 中国科学院大学深圳医院(光明) | Infusion leakage dynamic monitoring sensor |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180330 Termination date: 20200829 |
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| CF01 | Termination of patent right due to non-payment of annual fee |