CN114152384A - Nuclear power plant ambient pressure measurement sensor based on optical fiber Fabry-Perot - Google Patents
Nuclear power plant ambient pressure measurement sensor based on optical fiber Fabry-Perot Download PDFInfo
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- CN114152384A CN114152384A CN202111518595.6A CN202111518595A CN114152384A CN 114152384 A CN114152384 A CN 114152384A CN 202111518595 A CN202111518595 A CN 202111518595A CN 114152384 A CN114152384 A CN 114152384A
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- optical fiber
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
- G01L11/025—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means using a pressure-sensitive optical fibre
Abstract
The invention discloses an optical fiber Fabry-Perot-based nuclear power device environment pressure measurement sensor, which comprises a diaphragm capsule, wherein the diaphragm capsule is divided by a pressure sensing diaphragm into a pressure sensing cavity and a vacuum cavity; an optical fiber with FP1 and FP2 is fixedly arranged in the vacuum cavity along the axial direction, FP1 is arranged in the first vacuum cavity, FP2 is arranged in the second vacuum cavity, the optical fiber in the first vacuum cavity is in a tensioned state, and the optical fiber in the second vacuum cavity is in a relaxed state; the first vacuum cavity and the second vacuum cavity are formed by dividing an optical fiber fixing plate arranged in the vacuum cavity, and the end face of the optical fiber fixing plate is connected with the end face of the pressure sensing film; the pressure sensing cavity is internally provided with a through hole communicated with the outside. The invention aims to provide a nuclear power device environmental pressure measuring sensor based on optical fiber Fabry-Perot, which is free from electromagnetic interference and strong in irradiation tolerance and can be directly placed in a reactor compartment of a nuclear power device for measuring environmental pressure.
Description
Technical Field
The invention relates to the technical field of pressure measurement sensors, in particular to an optical fiber Fabry-Perot-based nuclear power device environment pressure measurement sensor.
Background
The environmental pressure of the nuclear power plant is a safe operation parameter when the nuclear power plant normally operates, and simultaneously represents the state of an accident after the accident, so that the requirements on safety and reliability are high.
The current commonly used measurement mode is that a capacitive pressure transmitter is arranged in a reactor compartment to measure the environmental pressure, the pressure transmitter outputs a standard (4-20) mA signal and transmits the signal to an instrument control system through a cable penetrating the reactor compartment so as to obtain the environmental pressure information.
The capacitive pressure transmitter has the defects of radiation resistance, electromagnetic interference resistance and LOCA (local area array) accident resistance due to the fact that the signal processing circuit and the pressure sensing cavity are integrated, and the capacitive pressure transmitter needs to be installed in a better environment in a reactor compartment and has higher installation requirements. If a better installation environment cannot be found in a reactor compartment or the accident tolerance of instruments cannot meet the requirement, pressure is often led out of the compartment through a pressure leading pipe penetrating through the reactor compartment and then is measured by adopting a capacitive pressure transmitter, the pressure transmitter does not need to bear a harsh environment in the mode, but a mechanical penetrating piece needs to be added on a reactor partition wall, and the system is complex; meanwhile, because the pressure change in the compartment needs to be transmitted to the transmitter through the pressure guiding pipe, the response time of measurement is slower than that of the measurement directly installed in the reactor compartment.
Disclosure of Invention
The invention aims to provide a nuclear power device environmental pressure measuring sensor based on optical fiber Fabry-Perot, which is free from electromagnetic interference and strong in irradiation tolerance and can be directly placed in a reactor compartment of a nuclear power device for measuring environmental pressure.
The invention is realized by the following technical scheme:
in a first aspect of the application, the application provides a nuclear power plant environmental pressure measuring sensor based on optical fiber Fabry-Perot, which comprises a diaphragm capsule, wherein the diaphragm capsule is divided into a pressure sensing cavity and a vacuum cavity by a pressure sensing diaphragm;
an optical fiber with FP1 and FP2 is fixedly arranged in the vacuum cavity along the axial direction, the FP1 is arranged in a first vacuum cavity, the FP2 is arranged in a second vacuum cavity, the optical fiber in the first vacuum cavity is in a tensioned state, and the optical fiber in the second vacuum cavity is in a relaxed state;
the first vacuum cavity and the second vacuum cavity are formed by dividing an optical fiber fixing plate arranged in the vacuum cavity, and the end face of the optical fiber fixing plate is connected with the end face of the pressure sensing film;
and a through hole communicated with the outside is formed in the pressure sensing cavity.
Preferably, the optical fiber with FP1 and FP2 is provided as at least one.
Preferably, the through holes are provided in at least one.
Preferably, the through hole is provided at an end surface of the pressure sensing chamber.
Preferably, the axis of the through hole coincides with the axis of the optical fiber.
Preferably, the bellows is provided in a cylindrical structure.
Preferably, the optical fiber fixing plate is provided in a circular arc shape.
Preferably, an end face of the optical fiber fixing plate is connected with an end face of the pressure sensing diaphragm.
In a second aspect of the present application, the present application provides a method for manufacturing an optical fiber fabry-perot-based nuclear power plant ambient pressure measurement sensor, comprising the following steps:
respectively processing a pressure sensing cavity, a vacuum cavity, a pressure sensing film, a grooved optical fiber fixing plate and an optical fiber with FP1 and FP 2;
fixedly arranging the end face of the optical fiber close to the FP1 side on the pressure sensing film, and enabling the other end face of the optical fiber and the FP2 to pass through the groove;
after the optical fiber and the FP2 pass through the groove, fixedly arranging the optical fiber in the groove; fixedly connecting two end faces of the optical fiber fixing plate and two end faces of the pressure sensing film, and enabling the FP1 to be positioned in a first vacuum cavity formed by the optical fiber fixing plate and the pressure sensing film;
fixedly arranging the end face of the optical fiber close to the FP2 side on the end face of the vacuum chamber, and exposing the optical fiber out of the vacuum chamber;
and fixedly connecting the pressure sensing cavity, the pressure sensing film, the optical fiber fixing plate and the vacuum cavity together, and vacuumizing the vacuum cavity.
In a third aspect of the present application, the present application provides a nuclear power plant ambient pressure measurement system, including a fiber fabry-perot-based nuclear power plant ambient pressure measurement sensor as described above, the ambient pressure measurement sensor being disposed in a reactor compartment of a nuclear power plant, and the ambient pressure measurement sensor being connected with a demodulation module.
Compared with the prior art, the invention has the following advantages and beneficial effects:
this ambient pressure measurement sensor adopts the optical fiber sensing principle preparation to form, for traditional electricity measurement technique, it has natural insulation, does not fear electromagnetic interference and the strong advantage of irradiation tolerance, consequently when specifically using, and is not high to the installation environment requirement, directly places this ambient pressure measurement sensor in nuclear power device's reactor compartment alright carry out the measurement of ambient pressure, need not to convey the signal of telecommunication to the instrument control system with the cable that runs through the reactor compartment.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
FIG. 1 is a schematic diagram of an ambient pressure measurement sensor according to the present invention;
reference numbers and corresponding part names in the drawings:
1. a bellows; 2. a pressure sensing chamber; 3. a first vacuum chamber; 4. a second vacuum chamber; 5. FP 1; 6. FP 2; 7. an optical fiber; 8. an optical fiber fixing plate; 9 through holes; 10. a pressure-sensitive film.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
Example 1
The embodiment provides an optical fiber Fabry-Perot-based nuclear power device environmental pressure measuring sensor, which comprises a cylindrical diaphragm capsule 1, wherein a pressure sensing diaphragm 10 is fixedly arranged in the diaphragm capsule 1 so as to divide the diaphragm capsule into a pressure sensing cavity 2 and a vacuum cavity, as shown in FIG. 1; the optical fiber 7 with FP15 and FP26 is fixedly arranged in the vacuum cavity along the axial direction, FP15 is arranged in the first vacuum cavity 3, FP26 is arranged in the second vacuum cavity 4, the optical fiber 7 in the first vacuum cavity 3 is in a tensioned state, and the optical fiber 7 in the second vacuum cavity 4 is in a relaxed state, so that the optical fiber 7 in the first vacuum cavity 3 can sense slight pressure change, and the optical fiber 7 in the second vacuum cavity 4 is prevented from being influenced by pressure;
the first vacuum chamber 3 and the second vacuum chamber 4 in the present embodiment are divided by an arc-shaped optical fiber fixing plate 8 provided in the vacuum chamber, and the end surface of the optical fiber fixing plate 8 is connected to the end surface of the pressure sensing diaphragm 10;
a through hole communicated with the outside is arranged in the pressure sensing cavity 2.
The following description is made of the manufacturing process of the ambient pressure measurement sensor in this embodiment:
(1) respectively processing a pressure sensing cavity 2, a vacuum cavity, a pressure sensing film 10 and an optical fiber fixing plate 8, and manufacturing FP15 and FP26 at proper positions of an optical fiber 7;
(2) welding the end face of the optical fiber 7 close to the FP15 side on the pressure sensing diaphragm 10, and forming a groove on the optical fiber fixing plate 8 so that the other end face of the optical fiber 7 and the FP26 can pass through the groove;
(3) pre-tightening FP15 after the optical fibers 7 and FP26 pass through the grooves, and meanwhile, performing glue pouring and sealing welding on the optical fibers 7 in the grooves of the optical fiber fixing plate 8 in the grooves of the fixing plate;
(4) the optical fiber fixing plate 8 and the pressure sensing diaphragm 10 are welded into a whole at the edges, and FP26 is positioned in the second vacuum cavity 4;
(5) the end face of the optical fiber 7 close to the FP26 side penetrates out of the vacuum cavity, and the position where the optical fiber 7 penetrates is subjected to encapsulation welding;
(6) the pressure sensing cavity 2, the vacuum cavity, the optical fiber fixing plate 8 and the diaphragm are integrally welded together, and then the vacuum cavity is vacuumized.
It should be noted that during fabrication, the optical fiber 7 in the second vacuum chamber 4 should be in a relaxed state to ensure that no force is applied to FP26 when the pressure displaces the diaphragm.
The measurement principle of the ambient pressure measurement sensor in this embodiment is explained as follows:
when the ambient pressure enters the pressure sensing cavity 2 through the through hole and acts on the pressure sensing film 10, the pressure sensing film 10 deforms under the action of the ambient pressure, so that the cavity length of the FP15 connected to the pressure sensing film 10 is driven to change, the optical path difference of interference light in the FP15 cavity is further influenced, the change value delta L of the optical path difference is obtained through detection and calculation analysis of the interference spectrum of the interference light, and then pressure information is obtained. Similarly, the cavity length of the FP15 cavity is also affected by temperature, and further the optical path difference is affected, so that an FP26 which is not affected by pressure is further provided in the embodiment, and the influence of temperature on the cavity length or the pressure is obtained through the FP26, so that accurate environmental pressure is obtained. Specifically, let the effect of temperature on FP26 be Δ L2 and the effect of pressure and temperature on FP15 be Δ L1, by subtracting the two, namely: Δ L1- Δ L2, Δ L3 affected only by pressure is obtained, and pressure information free from temperature influence is obtained.
It should be noted that, it is prior art to obtain the change value Δ L of the optical path difference by detecting and calculating and analyzing the interference spectrum of the interference light, and obtain the pressure information according to the change value Δ L of the optical path difference, and the present application does not relate to the improvement thereof, and therefore the principle thereof is not explained.
The safe operation of the nuclear power plant is related to the magnitude of the environmental pressure, and therefore, the pressure of the operating environment needs to be measured when the nuclear power plant is operated. The current commonly used measurement mode is that a capacitive pressure transmitter is arranged in a reactor compartment to measure the environmental pressure, the pressure transmitter outputs a standard (4-20) mA signal and transmits the signal to an instrument control system through a cable penetrating the reactor compartment so as to obtain the environmental pressure information. The capacitive pressure transmitter has the defects of radiation resistance, electromagnetic interference resistance and LOCA (loss of Coolant Accident) accident resistance because the signal processing circuit of the capacitive pressure transmitter is integrated with the pressure sensing cavity 2, so that the capacitive pressure transmitter needs to be installed in a better environment in a reactor compartment during specific use and has higher installation requirements. If a better installation environment cannot be found in a reactor compartment or the accident tolerance of instruments cannot meet the requirement, pressure is often led out of the compartment through a pressure leading pipe penetrating through the reactor compartment and then is measured by adopting a capacitive pressure transmitter, the pressure transmitter does not need to bear a harsh environment in the mode, but a mechanical penetrating piece needs to be added on a reactor partition wall, and the system is complex; meanwhile, because the pressure change in the compartment needs to be transmitted to the transmitter through the pressure guiding pipe, the response time of measurement is slower than that of the measurement directly installed in the reactor compartment. Based on this, provide a nuclear power device ambient pressure measurement sensor based on optic fibre fabry-perot in the embodiment, this ambient pressure measurement sensor adopts the preparation of optic fibre sensing principle to form, for traditional electricity measurement technique, it has natural insulation, do not fear electromagnetic interference and the strong advantage of irradiation tolerance, consequently when specifically using, it is not high to the installation environment requirement, directly place this ambient pressure measurement sensor in nuclear power device's reactor compartment alright carry out the measurement of ambient pressure, need not to transmit electric signal to the instrument control system with the cable that runs through the reactor compartment.
Further, since the optical fiber 7 has a small size and occupies a small space in the capsule 1, in order to avoid the rejection of the entire ambient pressure measurement sensor due to the damage of the optical fiber 7, the optical fiber 7 having FP15 and FP26 in the present embodiment may be provided in plural, and when one of the optical fibers 7 is damaged, the remaining optical fibers 7 may be used for measuring the ambient pressure. Correspondingly, the through hole can also be provided in plurality. Wherein, in order to increase the sensitivity of the ambient pressure measuring sensor and increase the perception degree of the slight pressure change, preferably, the through hole is arranged on the end face of the pressure sensing cavity 2, and the axis of the through hole is coincident with the axis of the optical fiber 7. From this setting, when ambient pressure changes, but the optic fibre 7 department that corresponds on pressure sensing diaphragm 10 of the quick direct effect of pressure through the through-hole, set up in all the other positions in comparison with the through-hole, corresponding environment variation that can be more accurate fast.
Example 2
The embodiment provides a system for measuring the environmental pressure of a nuclear power device, which comprises a fiber fabry-perot-based nuclear power device environmental pressure measuring sensor provided in embodiment 1, wherein the environmental pressure measuring sensor is arranged in a reactor compartment of the nuclear power device, and is connected with a demodulation module.
During operation, when the ambient pressure enters the pressure sensing cavity 2 through the through hole and acts on the pressure sensing diaphragm 10, the pressure sensing diaphragm 10 deforms under the effect of the ambient pressure, so that the cavity length of the FP15 connected to the pressure sensing diaphragm 10 is driven to change, the optical path difference of interference light in the FP15 cavity is further influenced, the change value delta L of the optical path difference is obtained through detection and calculation analysis of the interference spectrum of the interference light, and then pressure information is obtained. Similarly, the cavity length of the FP15 cavity is also affected by temperature, and further the optical path difference is affected, so that an FP26 which is not affected by pressure is further provided in the embodiment, and the influence of temperature on the cavity length or the pressure is obtained through the FP26, so that accurate environmental pressure is obtained. Specifically, let the effect of temperature on FP26 be Δ L2 and the effect of pressure and temperature on FP15 be Δ L1, by subtracting the two, namely: Δ L1- Δ L2, Δ L3 affected only by pressure is obtained, and pressure information free from temperature influence is obtained.
The safe operation of the nuclear power plant is related to the magnitude of the environmental pressure, and therefore, the pressure of the operating environment needs to be measured when the nuclear power plant is operated. The current commonly used measurement mode is that a capacitive pressure transmitter is arranged in a reactor compartment to measure the environmental pressure, the pressure transmitter outputs a standard (4-20) mA signal and transmits the signal to an instrument control system through a cable penetrating the reactor compartment so as to obtain the environmental pressure information. The capacitive pressure transmitter has the defects of radiation resistance, electromagnetic interference resistance and LOCA (loss of Coolant Accident) accident resistance because the signal processing circuit of the capacitive pressure transmitter is integrated with the pressure sensing cavity 2, so that the capacitive pressure transmitter needs to be installed in a better environment in a reactor compartment during specific use and has higher installation requirements. If a better installation environment cannot be found in a reactor compartment or the accident tolerance of instruments cannot meet the requirement, pressure is often led out of the compartment through a pressure leading pipe penetrating through the reactor compartment and then is measured by adopting a capacitive pressure transmitter, the pressure transmitter does not need to bear a harsh environment in the mode, but a mechanical penetrating piece needs to be added on a reactor partition wall, and the system is complex; meanwhile, because the pressure change in the compartment needs to be transmitted to the transmitter through the pressure guiding pipe, the response time of measurement is slower than that of the measurement directly installed in the reactor compartment. Based on this, provide a nuclear power device ambient pressure measurement system based on optic fibre fabry-perot in the embodiment, ambient pressure sensor among this ambient pressure measurement system adopts the optical fiber sensing principle preparation to form, for traditional electricity measurement technique, it has natural insulation, do not fear electromagnetic interference and the strong advantage of irradiation tolerance, consequently when specifically using, it is not high to the installation environment requirement, directly place this ambient pressure measurement sensor in nuclear power device's reactor compartment alright carry out the measurement of ambient pressure, need not to transmit the signal of telecommunication to the instrument control system with the cable that runs through the reactor compartment.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or the orientations or positional relationships that the products of the present invention are conventionally placed in use, and are only used for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present invention, which are used for illustrating the technical solutions of the present invention and not for limiting the same, and the protection scope of the present invention is not limited thereto, although the present invention is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the present invention in its spirit and scope. Are intended to be covered by the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A nuclear power device environment pressure measurement sensor based on optical fiber Fabry-Perot is characterized by comprising a diaphragm capsule (1), wherein the diaphragm capsule (1) is divided by a pressure sensing diaphragm (10) to form a pressure sensing cavity (2) and a vacuum cavity;
an optical fiber (7) with FP1(5) and FP2(6) is fixedly arranged in the vacuum cavity along the axial direction, the FP1(5) is arranged in the first vacuum cavity (3), the FP2(6) is arranged in the second vacuum cavity (4), the optical fiber (7) in the first vacuum cavity (3) is in a tensioned state, and the optical fiber (7) in the second vacuum cavity (4) is in a relaxed state;
the first vacuum cavity (3) and the second vacuum cavity (4) are formed by dividing an optical fiber fixing plate (8) arranged in the vacuum cavities;
and a through hole communicated with the outside is arranged in the pressure sensing cavity (2).
2. The ambient pressure measurement sensor of a fiber Fabry-Perot-based nuclear power plant according to claim 1, characterized in that at least one optical fiber (7) with FP1(5) and FP2(6) is provided.
3. The optical fiber Fabry-Perot-based nuclear power plant environmental pressure measurement sensor according to claim 1, wherein at least one through hole is provided.
4. An F-P based nuclear power plant ambient pressure measurement sensor according to claim 3, characterized in that the through hole is arranged at the end face of the pressure sensing chamber (2).
5. An optical fiber Fabry-Perot based nuclear power plant ambient pressure measurement sensor according to claim 4, characterized in that the axis of the through hole coincides with the axis of the optical fiber (7).
6. An F-P based nuclear power plant ambient pressure measurement sensor according to claim 1, characterized in that the capsule (1) is provided as a cylindrical structure.
7. The sensor for measuring the environmental pressure of the optical fiber Fabry-Perot-based nuclear power plant according to claim 2, characterized in that the optical fiber fixing plate (8) is arranged in a circular arc shape.
8. The sensor for measuring the environmental pressure of the optical fiber Fabry-Perot-based nuclear power device according to claim 1, wherein the end surface of the optical fiber fixing plate (8) is connected with the end surface of the pressure sensing membrane (10).
9. A method for making an optical fiber fabry-perot based nuclear power plant ambient pressure measurement sensor as claimed in any one of claims 1-8, comprising the steps of:
respectively processing a pressure sensing cavity (2), a vacuum cavity, a pressure sensing film (10), a grooved optical fiber fixing plate (8) and an optical fiber (7) with FP1(5) and FP2 (6);
fixedly arranging the end face of the optical fiber (7) close to the FP1(5) side on the pressure-sensitive film (10), and enabling the other end face of the optical fiber (7) and the FP2(6) to pass through the groove;
fixedly disposing the optical fiber (7) in the groove after the optical fiber (7) and the FP2(6) pass through the groove;
fixedly connecting two end faces of the optical fiber fixing plate (8) and two end faces of the pressure sensing film (10), and enabling the FP1(5) to be positioned in a first vacuum cavity (3) formed by the optical fiber fixing plate (8) and the pressure sensing film (10);
fixedly arranging the end face of the optical fiber (7) close to the FP2(6) side on the end face of the vacuum chamber, and exposing the optical fiber (7) out of the vacuum chamber;
and fixedly connecting the pressure sensing cavity (2), the pressure sensing film (10), the optical fiber fixing plate (8) and the vacuum cavity together, and vacuumizing the vacuum cavity.
10. A nuclear power plant ambient pressure measurement system, comprising an optical fiber (7) fabry-perot based nuclear power plant ambient pressure measurement sensor according to any of claims 1 to 8, disposed in a reactor compartment of a nuclear power plant, and connected to a demodulation module.
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| EP1008840A1 (en) * | 1998-12-11 | 2000-06-14 | Glotzl Europe Sensors N.V. | Optical pressure sensor and measuring device provided with such a pressure sensor |
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| US20090003760A1 (en) * | 2007-01-16 | 2009-01-01 | Baker Hughes Incorporated | Distributed Optical Pressure and Temperature Sensors |
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| CN207163613U (en) * | 2017-08-29 | 2018-03-30 | 电子科技大学 | A kind of vertical diaphragm optical fiber pressure sensor device |
| CN111609962A (en) * | 2020-06-03 | 2020-09-01 | 华北电力大学 | Fiber grating pressure sensor with temperature self-compensation capability |
| CN112705843A (en) * | 2020-12-01 | 2021-04-27 | 山东省科学院海洋仪器仪表研究所 | Fiber bragg grating pressure sensor with diaphragm type cascade structure and manufacturing method thereof |
| CN112798289A (en) * | 2020-12-21 | 2021-05-14 | 中国船舶重工集团公司第七一一研究所 | Sensor for testing in-cylinder pressure of internal combustion engine and manufacturing method thereof |
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2021
- 2021-12-13 CN CN202111518595.6A patent/CN114152384A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6281976B1 (en) * | 1997-04-09 | 2001-08-28 | The Texas A&M University System | Fiber optic fiber Fabry-Perot interferometer diaphragm sensor and method of measurement |
| EP1008840A1 (en) * | 1998-12-11 | 2000-06-14 | Glotzl Europe Sensors N.V. | Optical pressure sensor and measuring device provided with such a pressure sensor |
| US20090003760A1 (en) * | 2007-01-16 | 2009-01-01 | Baker Hughes Incorporated | Distributed Optical Pressure and Temperature Sensors |
| CN204679181U (en) * | 2015-03-27 | 2015-09-30 | 武汉理工大学 | The fiber-optic grating sensor that tube fluid pressure and temperature is measured simultaneously |
| CN207163613U (en) * | 2017-08-29 | 2018-03-30 | 电子科技大学 | A kind of vertical diaphragm optical fiber pressure sensor device |
| CN111609962A (en) * | 2020-06-03 | 2020-09-01 | 华北电力大学 | Fiber grating pressure sensor with temperature self-compensation capability |
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