CN213558979U - Large-scale reduction furnace cleaning system - Google Patents
Large-scale reduction furnace cleaning system Download PDFInfo
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- CN213558979U CN213558979U CN202021345549.1U CN202021345549U CN213558979U CN 213558979 U CN213558979 U CN 213558979U CN 202021345549 U CN202021345549 U CN 202021345549U CN 213558979 U CN213558979 U CN 213558979U
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Abstract
The utility model discloses a large-scale reduction furnace cleaning system solves prior art and relies on artifical washing to lead to the cleaning performance poor, inefficiency and have the technical problem of potential safety hazard. The utility model comprises a cleaning workbench for placing a furnace cylinder of a reduction furnace, a three-dimensional tank washer arranged on the cleaning workbench, a power box connected with a pipeline of the three-dimensional tank washer, a pure water box and an alkaline liquid box connected with a pipeline of the power box, a drying fan connected with a pipeline of the cleaning workbench, a waste water box and an alkaline liquid box connected with a pipeline of the cleaning workbench; the power box is internally provided with a high-pressure water jet pump and a centrifugal water supply pump. The utility model discloses a three-dimensional tank washer is in order to realize 360 no dead angles to reducing furnace bell jar inner wall and wash, and the cleaning efficiency is high, and the cleaning performance is good, simultaneously, and the purger need not to get into and washs to the reducing furnace bell jar in the cleaning process, also need not the manual work and joins in marriage the alkali to effectively eliminate the potential safety hazard that the purger exists in getting into the reducing furnace bell jar and joining in marriage the alkali.
Description
Technical Field
The utility model belongs to the technical field of reducing furnace cleaning equipment, concretely relates to large-scale reducing furnace cleaning system.
Background
One of the main equipments in the production process of polysilicon is a reduction furnace. In the production process of the reduction furnace, materials and pollutants are inevitably adhered to the inner wall of the bell jar, and the main components of the reduction furnace are amorphous silicon, chlorosilane, hydrogen chloride, hydrogen and the like. If the materials and the pollutants are not cleaned, the product quality of the next furnace operation can be seriously influenced, and the reaction energy consumption can be increased, so that the cleaning of the materials and the pollutants adhered to the inner wall of the bell jar of the reduction furnace is very important work.
In the initial production stage of a domestic polycrystalline silicon factory, the reduction furnace bell jar is cleaned manually, after the reduction furnace bell jar is placed at a fixed position, cleaning liquid is prepared by cleaning personnel, a whole set of protective articles are worn, a high-pressure water gun is used for spraying the protective articles onto the inner wall to sequentially clean the attachments with pure water and the cleaning liquid, the parts which are not cleaned completely are wiped with alcohol, and finally, high-temperature compressed air is used for drying. The method is mainly suitable for small-sized reduction furnaces such as 12 pairs of rods and the like, and for large-sized reduction furnaces, the defects of unclean cleaning and manpower waste exist by adopting manual cleaning, in addition, manual alkali distribution and spray cleaning are unsafe, and the alkali liquor is easy to splash to the body and cause damage by carelessness.
Therefore the utility model discloses a large-scale reduction furnace cleaning system adopts three-dimensional tank washer to realize 360 no dead angles in order to reduce furnace bell jar inner wall and washs, and the cleaning efficiency is high, and the cleaning performance is good, simultaneously, and the purger need not to get into and washs in the reduction furnace bell jar in the cleaning process, also need not the manual work and joins in marriage the alkali to effectively eliminate the potential safety hazard that exists in the purger gets into the reduction furnace bell jar and joins in marriage the alkali.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is: the cleaning system for the large reduction furnace solves the technical problems that the cleaning effect is poor, the efficiency is low and potential safety hazards exist due to the fact that manual cleaning is relied on in the prior art.
In order to achieve the above object, the utility model adopts the following technical scheme:
a large-scale reduction furnace cleaning system comprises a cleaning workbench for placing a reduction furnace cylinder, a three-dimensional tank washer which is arranged on the cleaning workbench and extends into the reduction furnace cylinder to be cleaned, a power box which is connected with the three-dimensional tank washer through a pipeline, a pure water box and an alkaline liquid box which are respectively connected with the power box through pipelines, a drying fan which is connected with the cleaning workbench through a pipeline, and a waste water box and a waste alkaline liquid box which are respectively connected with the cleaning workbench through pipelines; the power box is internally provided with a high-pressure water jet pump and a centrifugal water supply pump which are connected with each other through pipelines, the centrifugal water supply pump is respectively connected with the pure water tank and the alkaline liquid tank through pipelines, and the three-dimensional tank washer is connected with the high-pressure water jet pump through a pipeline.
Further, still include the PLC switch board, the PLC switch board respectively with three-dimensional tank washer, drying fan, high-pressure water jet pump and centrifugal water supply pump electric connection.
Furthermore, a first electromagnetic valve electrically connected with the PLC control cabinet is arranged on a pipeline connecting the three-dimensional tank washer and the high-pressure water jet pump.
Furthermore, a second electromagnetic valve electrically connected with the PLC control cabinet is arranged on a pipeline connected with the pure water tank and the centrifugal water supply pump.
Furthermore, a third electromagnetic valve electrically connected with the PLC control cabinet is arranged on a pipeline connected with the alkaline liquid tank and the centrifugal water supply pump.
Furthermore, a fourth electromagnetic valve electrically connected with the PLC control cabinet is arranged on a pipeline connecting the cleaning workbench and the waste water tank; and a fifth electromagnetic valve electrically connected with the PLC control cabinet is arranged on a pipeline connecting the cleaning workbench and the waste alkali liquor tank.
Furthermore, a sixth electromagnetic valve electrically connected with the PLC control cabinet is arranged on a pipeline connecting the cleaning workbench and the drying fan.
Further, an exhaust pipe is connected to the cleaning workbench; and a seventh electromagnetic valve electrically connected with the PLC control cabinet is arranged on the exhaust pipe.
Furthermore, an alkaline liquid tank exhaust pipe is communicated with the alkaline liquid tank.
Furthermore, an arc-shaped groove is formed in the installation surface of the cleaning workbench, and the inlet of a pipeline, which is connected with the cleaning workbench, of the waste water tank and the waste alkali liquor tank is located at the lowest point of the arc-shaped groove.
Compared with the prior art, the utility model discloses following beneficial effect has:
the utility model has the advantages of simple structure and scientific and reasonable design, convenient to use adopts three-dimensional tank washer to realize 360 no dead angles in order to reduce furnace bell jar inner wall and washs, and the cleaning efficiency is high, and the cleaning performance is good, simultaneously, and the purger need not to get into and washs in the reduction furnace bell jar in the cleaning process, also need not the manual work and joins in marriage the alkali to effectively eliminate the potential safety hazard that exists in the purger gets into the reduction furnace bell jar and joins in marriage the alkali.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a connection block diagram of each electrical device of the present invention.
Wherein, the names corresponding to the reference numbers are:
1-power box, 2-cleaning workbench, 3-reduction furnace barrel, 4-three-dimensional tank washer, 5-exhaust pipe, 6-drying fan, 7-lye tank, 8-PLC control cabinet, 9-pure water tank, 10-wastewater tank, 11-lye tank, 12-high pressure water jet pump, 13-centrifugal water supply pump, 14-lye tank exhaust pipe, 15-first electromagnetic valve, 16-second electromagnetic valve, 17-third electromagnetic valve, 18-fourth electromagnetic valve, 19-fifth electromagnetic valve, 20-sixth electromagnetic valve, 21-seventh electromagnetic valve.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings. It is to be understood that the embodiments described are only some embodiments of the invention, and not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and thus, it should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; of course, mechanical connection and electrical connection are also possible; alternatively, they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
As shown in fig. 1 and 2, the utility model provides a pair of large-scale reducing furnace cleaning system, simple structure, design scientific and reasonable, convenient to use adopt three-dimensional tank washer to realize 360 no dead angles in order to reduce furnace bell jar inner wall and wash, the cleaning efficiency is high, and the cleaning performance is good, simultaneously, in the cleaning process the purger need not to get into and wash in the reducing furnace bell jar, also need not the manual work and join in marriage the alkali to effectively eliminate the potential safety hazard that the purger exists in getting into the reducing furnace bell jar and joining in marriage the alkali. The utility model comprises a cleaning workbench 2 for placing a furnace cylinder 3 of a reduction furnace, a three-dimensional tank washer 4 which is arranged on the cleaning workbench 2 and extends into the furnace cylinder of the reduction furnace to be cleaned, a power box 1 which is connected with the three-dimensional tank washer 4 by pipelines, a pure water box 9 and an alkaline liquid box 7 which are respectively connected with the power box 1 by pipelines, a drying fan 6 which is connected with the cleaning workbench 2 by pipelines, and a waste water box 10 and a waste alkaline liquid box 11 which are respectively connected with the cleaning workbench 2 by pipelines; the power box 1 is internally provided with a high-pressure water jet pump 12 and a centrifugal water supply pump 13 which are connected with each other through pipelines, the centrifugal water supply pump 13 is respectively connected with the pure water tank 9 and the alkaline liquid tank 7 through pipelines, and the three-dimensional tank washer 4 is connected with the high-pressure water jet pump 12 through a pipeline. The cleaning workbench 2 is connected with an exhaust pipe 5, and the lye tank 7 is communicated with an lye tank exhaust pipe 14. The installation face of cleaning work platform 2 is equipped with the arc recess to, the pipeline import that waste water case 10 and waste lye tank 11 are connected with cleaning work platform 2 is located the minimum of arc recess.
The utility model discloses still include PLC switch board 8, PLC switch board 8 respectively with three-dimensional tank washer 4, drying blower 6, high pressure water jet pump 12 and 13 electric connection of centrifugal feed pump.
The utility model discloses be equipped with the first solenoid valve 15 with 8 electric connection of PLC switch board on the pipeline that three-dimensional tank washer 4 and high pressure water jet pump 12 are connected. The pipeline connecting the pure water tank 9 and the centrifugal water supply pump 13 is provided with a second electromagnetic valve 16 electrically connected with the PLC control cabinet 8. And a third electromagnetic valve 17 electrically connected with the PLC control cabinet 8 is arranged on a pipeline connecting the alkaline liquid tank 7 and the centrifugal water supply pump 13. A fourth electromagnetic valve 18 electrically connected with the PLC control cabinet 8 is arranged on a pipeline connecting the cleaning workbench 2 and the wastewater tank 10; a fifth electromagnetic valve 19 electrically connected with the PLC control cabinet 8 is arranged on a pipeline connecting the cleaning workbench 2 and the waste lye tank 11. And a sixth electromagnetic valve 20 electrically connected with the PLC control cabinet 8 is arranged on a pipeline connecting the cleaning workbench 2 and the drying fan 6. And a seventh electromagnetic valve 21 electrically connected with the PLC control cabinet 8 is arranged on the exhaust pipe 5.
The utility model discloses used three-dimensional tank washer 4, drying fan 6, PLC switch board 8, the high pressure water jet pump is 12, centrifugal water supply pump 13, first solenoid valve 15, second solenoid valve 16, third solenoid valve 17, fourth solenoid valve 18, fifth solenoid valve 19, sixth solenoid valve 20 and seventh solenoid valve 21 are current electrical equipment, and all directly purchase the use on market, its structure, a circuit, control principle etc. are current known technique, therefore, structure about three-dimensional tank washer 4, drying fan 6, PLC switch board 8, the high pressure water jet pump is 12, centrifugal water supply pump 13, first solenoid valve 15, second solenoid valve 16, third solenoid valve 17, fourth solenoid valve 18, fifth solenoid valve 19, the structure of sixth solenoid valve 20 and seventh solenoid valve 21, a circuit, control principle etc. do not give unnecessary detail here.
The utility model discloses automated control is taken in the washing of reduction furnace bell jar to the large-traffic efflux water of high pressure is power, uses the three-dimensional jar washer of water conservancy self-driven to be the shower nozzle, and the water conservancy that forms 360 netted injection that 3D formed and accomplish a stove section of thick bamboo inner wall is swept and is penetrated. Firstly, pre-cleaning with high-purity water, then mainly cleaning with a heated cleaning machine, then cleaning the furnace barrel sight glass and the flange, finally rinsing with pure water to finish the whole cleaning process, and drying the water on the inner wall with heated and dried pure air after the cleaning is finished to achieve the dryness required by the process. The utility model discloses whole washing drying process in-process automation mechanized operation, it is safe convenient, alone can accomplish, need not the operating personnel get into bell jar internal operation, also need not dress complicated labour protection articles for use, only need operate on the PLC switch board, under high-pressure cleaning, bell jar inner wall washs the cleanliness factor and can reach more than 95%, can satisfy the abluent requirement of equipment completely.
The utility model discloses the leading principle lies in using the large-traffic efflux water of low pressure as power to three-dimensional tank washer of water conservancy self-driven is the shower nozzle, and the netted water conservancy that sprays and accomplish stove section of thick bamboo internal surface that forms 360 3D forms is strayed, washs in advance with high pure water at first, and the alkali lye (5% -10% sodium hydroxide solution) of reuse heating are washd, then carries out the washing of stove section of thick bamboo sight glass and flange again, rinses with high pure water at last, accomplishes the cleaning process. The whole cleaning process is carried out on a working platform by one-time hoisting and PLC control, and the automatic cleaning and drying functions are sequentially realized.
The core equipment of the utility model is a high-pressure cleaning device (a power box and the equipment therein) and a three-dimensional tank washer. The high-pressure cleaning device (the power box and the equipment in the power box) runs through the whole washing and alkaline washing processes, and whether the high-pressure plunger pump (the high-pressure water jet pump) is normal or not directly influences the whole washing process and the washing quality. The three-dimensional can washer has the working principle that cleaning fluid enters into a can to be washed and drives a turbine to rotate. The rotation of the turbine is converted into the rotation synthesis of the spray head in the horizontal direction and the vertical direction through the gearbox, and the whole cleaning process forms 360-degree 3D-shaped net-shaped spray to finish the hydraulic sweeping cleaning of the inner surface of the furnace barrel.
The utility model discloses used three-dimensional tank washer, the tank head can be acid and alkali-resistant corrodes, its preferred DRW200A type, former dress import product, work temperature resistant 90 ℃, SS316 stainless steel. Clean water, alkali liquor and the like are swept onto the inner wall of the furnace barrel through 360-degree rotation, and the inner wall of the furnace barrel is cleaned.
The utility model discloses used PLC switch board, preferred siemens PLC, 10 cun touch-sensitive screens contain automatic, semi-automatic control + manual control. The system mainly comprises a PLC (programmable logic controller) system, a touch screen, a programming data line, a complete set of instrument sensors, a boundary area cable, other element equipment of a control system and the like.
The utility model discloses lye tank blast pipe is used for preventing the lye incasement unusual, keeps the lye incasement for normal operational environment.
The utility model discloses blast pipe 5 all is equipped with the trap with connecting on the pipeline between cleaning work platform and drying fan, and the trap is connected with the waste water tank.
The utility model discloses a wash the flow as follows:
1. preparation before cleaning
1) Opening all manual stop valves of the cleaning room, opening a water supply electric valve of the pure water tank, supplying water to the pure water tank, observing the reading of a visible liquid level meter of the water tank, and automatically closing a ball float valve in the pure water tank when the liquid level reaches 1800 mm;
2) when the liquid level of the alkali liquor tank is observed to exceed 2/3, the cleaning can be carried out normally, and when the liquid level is lower than 2/3, alkali liquor supplement is carried out;
3) and hoisting the reduction furnace cylinder to a cleaning workbench, aligning and positioning the reduction furnace cylinder, and introducing nitrogen into the bell jar.
2 high purity water precleaning
1) Entering an automatic operation mode (or a semi-automatic operation mode-pre-cleaning starting) of the PLC control cabinet, confirming that all cleaning process time set values are correct, and enabling the pressure transmitter, the low-voltage switch and the temperature sensor to be in normal states;
2) opening the second solenoid valve, the first solenoid valve and the fourth solenoid valve;
3) starting a high-pressure water jet pump and a centrifugal water supply pump, observing the water supply and the high-pressure water pressure of the three-dimensional tank washer, and monitoring the liquid levels of the high-purity water tank and the waste water tank at any time;
4) and after the operation is carried out for 15min, stopping the high-pressure water jet pump and the centrifugal water supply pump.
3 washing with weak alkaline solution
1) Entering an automatic operation mode (or a semi-automatic operation mode-starting of alkali liquor cleaning) of the PLC control cabinet, confirming that all cleaning process time set values are correct, and enabling the pressure transmitter, the low-voltage switch and the temperature sensor to be in normal states;
2) closing the second electromagnetic valve, the first electromagnetic valve and the fourth electromagnetic valve, and opening the first electromagnetic valve, the third electromagnetic valve and the fifth electromagnetic valve;
3) starting a high-pressure water jet pump and a centrifugal water supply pump, observing the water supply and the high-pressure water pressure of the three-dimensional tank washer, and monitoring the liquid levels of an alkaline liquid tank and a waste alkaline liquid tank at any time;
4) and after the operation is carried out for 20min, stopping the high-pressure water jet pump and the centrifugal water supply pump.
4 high-purity water cleaning
1) Entering an automatic operation mode (or a semi-automatic operation mode-pure water cleaning starting) of the PLC control cabinet, confirming that all cleaning process time set values are correct, and enabling the pressure transmitter, the low-voltage switch and the temperature sensor to be in normal states;
2) closing the first electromagnetic valve, the third electromagnetic valve and the fifth electromagnetic valve, and opening the second electromagnetic valve, the first electromagnetic valve and the fourth electromagnetic valve;
3) starting a high-pressure water jet pump and a centrifugal water supply pump, observing the water supply and the high-pressure water pressure of the three-dimensional tank washer, and monitoring the liquid levels of the high-purity water tank and the waste water tank at any time;
4) and after the operation is carried out for 20min, stopping the high-pressure water jet pump and the centrifugal water supply pump.
5 drying with clean air
1) Entering an automatic operation mode (or a semi-automatic operation mode-drying starting) of the PLC control cabinet, confirming that all cleaning operations are stopped and the temperature sensor is in a normal state;
2) closing the first electromagnetic valve, the second electromagnetic valve, the third electromagnetic valve, the fourth electromagnetic valve and the fifth electromagnetic valve, and opening the sixth electromagnetic valve and the seventh electromagnetic valve;
3) after the sixth electromagnetic valve is opened and delayed for 30 seconds, the drying fan is started;
4) after 15min of operation, stopping the drying fan;
5) when the liquid level of the waste water tank exceeds 60%, a sewage pump (the waste water tank is provided with itself, is electrically connected with the PLC control cabinet and is used for discharging waste water out) is automatically started, and when the liquid level of the waste water tank is lower than 20%, the sewage pump is stopped;
6 automatic discharge of waste liquid
1) Entering a setting mode of a PLC control cabinet, confirming that an automatic sewage discharging button displays green, and indicating that the current mode is a waste liquid automatic discharging mode (when the button is red, the mode is a manual sewage discharging mode);
2) when the liquid level of the waste liquid tank exceeds 60%, the sewage pump is automatically started;
3) when the liquid level of the waste liquid tank is lower than 20%, the sewage pump stops;
4) in the cleaning process, when the liquid level of the waste liquid tank is observed to exceed 75 percent, the cleaning operation is stopped, and the waste liquid is waited to be completely discharged.
The utility model discloses waste liquid jar includes waste water tank and waste lye case, and waste water tank and waste lye case all communicate there is the outer calandria of waste water, is equipped with the dredge pump with PLC switch board electric connection on the outer calandria of waste water.
The utility model discloses can effectually avoid the problem that artifical washing appears. The principle of the whole set of automatic cleaning device is as follows: the method comprises the steps of using high-pressure large-flow jet water as power, using a water conservancy self-driven three-dimensional tank washer as a spray head, forming 360-degree 3D-formed net-shaped spray to complete water conservancy scanning of the inner wall of a furnace barrel, firstly pre-cleaning with high-purity water, then mainly cleaning with a heated cleaning machine, then cleaning a furnace barrel viewing mirror and a flange, finally rinsing with pure water to complete the whole cleaning process, and drying moisture on the inner wall with heated and dried pure air after cleaning is completed to achieve the dryness of the process requirement. The utility model discloses whole washing drying process in-process automation mechanized operation, it is safe convenient, alone can accomplish, need not the operating personnel get into bell jar internal operation, also need not dress complicated labour protection articles for use, only need according to the automatic procedure operation that earlier stage set for well can, under high-pressure washing, the bell jar inner wall washs the cleanliness factor and can reach more than 95%, can satisfy the abluent requirement of equipment completely.
Finally, it should be noted that: the above embodiments are only preferred embodiments of the present invention to illustrate the technical solution of the present invention, but not to limit the same, and certainly not to limit the scope of the present invention; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention; that is, the technical problems solved by the present invention are still consistent with the present invention, and all the modifications or colors made in the spirit and the idea of the main design of the present invention are included in the protection scope of the present invention; in addition, will the technical scheme of the utility model direct or indirect application is in other relevant technical field, all including on the same reason the utility model discloses an in the patent protection scope.
Claims (10)
1. A large-scale reduction furnace cleaning system is characterized in that: the device comprises a cleaning workbench (2) for placing a reduction furnace cylinder (3), a three-dimensional tank washer (4) which is arranged on the cleaning workbench (2) and extends into the reduction furnace cylinder to be cleaned, a power box (1) which is in pipeline connection with the three-dimensional tank washer (4), a pure water box (9) and an alkali liquid box (7) which are respectively in pipeline connection with the power box (1), a drying fan (6) which is in pipeline connection with the cleaning workbench (2), and a waste water box (10) and a waste alkali liquid box (11) which are respectively in pipeline connection with the cleaning workbench (2); the power box (1) is internally provided with a high-pressure water jet pump (12) and a centrifugal water supply pump (13) which are connected with each other through pipelines, the centrifugal water supply pump (13) is respectively connected with the pure water box (9) and the alkaline liquid box (7) through pipelines, and the three-dimensional tank washer (4) is connected with the high-pressure water jet pump (12) through a pipeline.
2. A large reduction furnace cleaning system according to claim 1, wherein: the three-dimensional tank washer is characterized by further comprising a PLC control cabinet (8), wherein the PLC control cabinet (8) is electrically connected with the three-dimensional tank washer (4), the drying fan (6), the high-pressure water jet pump (12) and the centrifugal water supply pump (13) respectively.
3. A large reduction furnace cleaning system according to claim 2, characterized in that: a first electromagnetic valve (15) electrically connected with the PLC control cabinet (8) is arranged on a pipeline connecting the three-dimensional tank washer (4) and the high-pressure water jet pump (12).
4. A large reduction furnace cleaning system according to claim 2, characterized in that: a second electromagnetic valve (16) electrically connected with the PLC control cabinet (8) is arranged on a pipeline connecting the pure water tank (9) and the centrifugal water supply pump (13).
5. A large reduction furnace cleaning system according to claim 2, characterized in that: and a third electromagnetic valve (17) electrically connected with the PLC control cabinet (8) is arranged on a pipeline connecting the alkaline solution tank (7) and the centrifugal water supply pump (13).
6. A large reduction furnace cleaning system according to claim 2, characterized in that: a fourth electromagnetic valve (18) electrically connected with the PLC control cabinet (8) is arranged on a pipeline connecting the cleaning workbench (2) and the waste water tank (10); a fifth electromagnetic valve (19) electrically connected with the PLC control cabinet (8) is arranged on a pipeline connecting the cleaning workbench (2) and the waste lye tank (11).
7. A large reduction furnace cleaning system according to claim 2, characterized in that: and a sixth electromagnetic valve (20) electrically connected with the PLC control cabinet (8) is arranged on a pipeline connecting the cleaning workbench (2) and the drying fan (6).
8. A large reduction furnace cleaning system according to claim 2, characterized in that: the cleaning workbench (2) is connected with an exhaust pipe (5); the exhaust pipe (5) is provided with a seventh electromagnetic valve (21) which is electrically connected with the PLC control cabinet (8).
9. A large reduction furnace cleaning system according to claim 1, wherein: an alkaline liquid tank exhaust pipe (14) is communicated with the alkaline liquid tank (7).
10. A large reduction furnace cleaning system according to claim 1, wherein: the installation surface of the cleaning workbench (2) is provided with an arc-shaped groove, and the inlets of the pipelines for connecting the waste water tank (10) and the waste alkali liquor tank (11) with the cleaning workbench (2) are positioned at the lowest point of the arc-shaped groove.
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| CN202021345549.1U CN213558979U (en) | 2020-07-09 | 2020-07-09 | Large-scale reduction furnace cleaning system |
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| CN202021345549.1U CN213558979U (en) | 2020-07-09 | 2020-07-09 | Large-scale reduction furnace cleaning system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114798554A (en) * | 2022-04-14 | 2022-07-29 | 北京华林嘉业科技有限公司 | Vertical semiconductor epitaxial quartz furnace bell jar and quartz piece cleaning machine |
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2020
- 2020-07-09 CN CN202021345549.1U patent/CN213558979U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114798554A (en) * | 2022-04-14 | 2022-07-29 | 北京华林嘉业科技有限公司 | Vertical semiconductor epitaxial quartz furnace bell jar and quartz piece cleaning machine |
| CN114798554B (en) * | 2022-04-14 | 2022-11-04 | 北京华林嘉业科技有限公司 | Vertical semiconductor epitaxial quartz furnace bell jar and quartz piece cleaning machine |
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